ZX

Filter unit (F) ZX100-K6-F 1 41 51 2-R1.8 (Mounting hole) 3.6 (Mounting hole) 1 10 19 8.8 4.8 Filter unit (Mounting hole) 13-2-51 51 Series ZX Air supply for release valve pilot Air supply for supply valve pilot Vacuum pad connection V port Valve Unit: Type K8 Vacuum switch (ZSE2) Pilot exhaust PE port Configuration and combination Valve unit (K8) + Adsorption confirmation switch (ZSP1) Filter

Vacuum Module Series ZX

Philips screw M2.5 x 51 How to order (2) Adsorption confirmation switch unit (For replacement) Single How to order (4) Digital vacuum switch unit (For replacement) Philips screw M2.5 x 51 How to order (3) Vacuum switch unit (For replacement) Philips screw (M2.5 x 39) Filter unit (For replacement) How to order (1) Valve unit (Supply valve: N.O.)

C85

to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 Bore 20 20 8 36 20 6 M8 x 1.25 71 84 96 109 134 159 25 22 10 36 20 8 M10 x 1.25 74 87 99 112 137 162 187 Item Wh I Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 Bore 12.5 25 37.5 50 75 100 51 64 76 89 114 139 20 12.5 25

C85

to 100 Bore 20 M8 x 1.25 71 20 8 36 20 6 96 159 84 134 109 25 M10 x 1.25 74 22 10 36 20 8 187 162 99 87 137 112 Item Wh I Stroke 1 to 50 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 Bore 12.5 51 25 37.5 50 75 100 64 76 89 114 139 20 12.5 52 25 37.5 50 75 100 125 65 77 90 115 140 165 25 6-11-16

1

Double rod type Bore size (mm) 49 stroke or less 51 to 99 stroke 49 stroke or less 51 to 99 stroke A B Applicable stroke Single rod type (Single acting/Return) Bore size (mm) Applicable stroke 12 16 20 25 32 40 50 63 80 100 40.5 (40.5) 50 (50) 50.5 (50.5) 52 (52) 61 (61) 70.5 (70.5) 25.2 (32.4) 26 (36) 26 (38) 29 (39) 30.5 (40.5) 40 (50) 40.5 (50.5) 42 (52) 51 (61) 60.5 (70.5) 32.2 (39.4)

C76

to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 32 40 96 146 171 196 120 170 195 220 97 147 172 197 97 147 172 197 129 179 204 229 254 154 204 229 254 279 122 172 197 222 247 122 172 197 222 247 6-10-25 26 Series C76 Dimensions [First angle

C76

to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 32 40 96 146 171 196 120 170 195 220 97 147 172 197 97 147 172 197 129 179 204 229 254 154 204 229 254 279 122 172 197 222 247 122 172 197 222 247 6-10-25 26 Series C76 Dimensions [First angle

Cylinder with Lock

356.5 With Rod Boot [mm] Bore size d e f h 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 800 801 to 900 901 to 1000 32 54 36 23 75 88 100 113 138 163 188 213 238 263 288 313 40 56 41 23 75 88 100 113 138 163 188 213 238 263 288 313 50 64 51 25 87 100 112 125 150 175 200 225 250 275 300 325 63 64 51 25 87 100 112 125 150 175 200 225

MGP

100 200 10 10 20 30 40 50 51 100 200 Stroke (mm) Stroke (mm) 7 l = 50mm V = 400mm/s 8 l = 100mm V = 400mm/s 50 50 80 80 80 80 40 40 30 30 20 20 50 50 50 50 10 10 50 20 30 40 51 100 200 10 10 50 20 30 40 51 100 200 47 Series MGP Compact Guide Cylinder: Heavy Duty Guide Rod Type Operating Range when Used as Stopper 2000 l: Approx. 50mm l: Approx. 50mm MGPS80 1000 m m Weight of transfered

Battery-less

3 2 1 3000 51 3 EMG 6 LK RLS It can be connected to the controller directly.

Air Slide Table

[N] Bore size [mm] 8 12 Bore size [mm] Rod size [mm] Operating direction Piston area [mm2] Operating pressure [MPa] Piping port size M5 x 0.8 0.2 0.3 0.4 0.5 0.6 0.7 Fluid Air 8 4 OUT 101 20 30 40 51 61 71 Action Double acting IN 75 15 23 30 38 45 53 12 6 OUT 226 45 68 90 113 136 158 Operating pressure 0.15 to 0.7 MPa*1 (End lock: 0.35 to 0.7 MPa) IN 170 34 51 68 85 102 119 Proof pressure

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

233 Bore size [mm] H d e f l h 1 to 50 901 to 1000 32 48 54 36 23 12.5 25 37.5 50 75 100 125 150 175 200 225 250 75 88 100 113 138 163 188 213 238 263 288 313 40 54 54 36 23 12.5 25 37.5 50 75 100 125 150 175 200 225 250 75 88 100 113 138 163 188 213 238 263 288 313 50 69 64 51 25 12.5 25 37.5 50 75 100 125 150 175 200 225 250 87 100 112 125 150 175 200 225 250 275 300 325 63 69 64 51 25

24

50 100 101 300 200 5 10 30 51 50 100 101 300 200 Stroke [mm] Stroke [mm] MGPL80/100, MGPA80/100 MGPL80/100, MGPA80/100 50 50 100 100 100 80 100 100 Load mass m [kg] Load mass m [kg] 80 80 80 100 80 10 10 80 5 10 29 30 51 50 300 200 100 5 10 29 30 51 50 300 200 100 Stroke [mm] Stroke [mm] 444 Model Selection MGP Series L L m m Horizontal Mounting Ball Bushing (19) L = 50 mm, V = 400 mm/s

Compact Guide Cylinder

100 200 0.1 10 30 50 51 100 200 Stroke [mm] Stroke [mm] L = 50 mm, V = 400 mm/s L = 100 mm, V = 400 mm/s 100 100 50 50 50 50 10 10 40 40 40 40 Load mass m [kg] Load mass m [kg] 32 32 32 32 25 25 25 25 20 20 20 20 1 1 16 16 16 16 12 12 12 12 0.1 10 30 50 51 100 200 0.1 10 30 50 51 100 200 Stroke [mm] Stroke [mm] 12 MGPK Series L L m m Plate Material Aluminum Alloy /MGPKM Vertical Mounting

Table of Contents

51 Series MHSL3 Dimensions MHSL3-100D, 125D CB CA P (Finger opening port) P (Finger closing port) 3-SA, counterbore dia.

MG

100 300 200 0.1 10 20 30 40 50 51 100 300 200 Stroke (mm) Stroke (mm) (15) l = 50 mm, V = 400 mm/s (16) l = 100 mm, V = 400 mm/s 50 50 100 100 100 100 80 80 80 80 63 63 50, 63 50, 63 50 50 10 10 40 40 40 40 5 5 Load weight m (kg) Load weight m (kg) 32 32 32 32 25 25 25 25 20 20 20 20 1 1 16 16 16 16 12 12 12 12 0.1 10 20 30 40 50 51 100 300 200 0.110 20 30 40 50 51 100 300 200 Stroke (mm

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

G P (51) (6) 3 3 t = 1 mm x 2 t = 0.5 mm x 2 (21) (6) 3 3 G P MK t = 1 mm x 2 t = 0.5 mm x 2 CKQ CLKQ (66) 330.05 330.05 CK1 38 With shims (Clamping height: HIGH type) With shims (Clamping height: LOW type) CLK2 33 33 (66) 72 120 38 C W W K 120 SR SR 65 (Guide tube O.D.) 10 (Clamp stroke) 0 d0.05 0 d0.05 Z D E E G 6 51 77 67.5 10.5 Diamond type Round type (Guide pin dia.: 17.5 or more) H

MLGP

100 101 200 200 300 300 4 10 50 51 100 101 Data Stroke (mm) Stroke (mm) MLGPL80/100 MLGPL80/100 40 40 100 100 100 80 Load weight m (kg) Load weight m (kg) 100 80 80 80 100 100 80 10 10 80 6 10 100 200 200 300 300 25 26 50 51 6 10 100 25 26 50 51 Stroke (mm) Stroke (mm) 9-11-17 17 Series MLGP Operating Range when Used as Stopper Warning 1.

MLGP

100 101 5 10 50 51 100 101 200 200 300 300 Stroke (mm) Stroke (mm) MLGPL80, 100 MLGPL80, 100 40 40 100 100 100 80 80 80 Load weight m (kg) Load weight m (kg) 100 100 80 100 80 10 10 80 6 10 25 26 51 50 100 6 10 25 26 51 50 100 200 200 300 300 Stroke (mm) Stroke (mm) Features 12 Series MLGP Horizontal Mounting Ball Bushing 31 l2 = 50mm, V = 400m/s 32 l2 = 100mm, V = 400m/s MLGPL20, 25 MLGPL20

MLGP

100 101 5 10 50 51 100 101 200 200 300 300 Stroke (mm) Stroke (mm) MLGPL80, 100 MLGPL80, 100 40 40 100 100 100 80 80 80 Load weight m (kg) Load weight m (kg) 100 100 80 100 80 10 10 80 6 10 25 26 51 50 100 6 10 25 26 51 50 100 200 200 300 300 Stroke (mm) Stroke (mm) Features 12 Series MLGP Horizontal Mounting Ball Bushing 31 l2 = 50mm, V = 400m/s 32 l2 = 100mm, V = 400m/s MLGPL20, 25 MLGPL20