1 High Purity Chemical Valve Compact Type Series LVD VC Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio VX3 Threaded M5 x 0.8 VXA Fluid temperature (C) 0 to 100 Ambient temperature (C) 0 to 60 VN Weight (kg) 0.09 0.15 0.36 0.17 LVC Construction LVA Standard type N.C. type N.O. type Double acting type LVH LVD LVQ PB PB PB q q q LQ PA PA PA e e e LVN TI/ TIL A B A B A B A B A B PA r w PAX PB With flow rate adjustment t PB PA Description Material Parts list No.
In this way fine pressure variations are detected by the nozzle/flapper type pilot mechanism, and precise pressure adjustment is performed. q i o !4 !5 o SUP side passage OUT side passage SUP side passage !5 OUT side passage IN q IN q w y Bleed Bleed !1 !3 !2 e w r Exhaust SUP(1) OUT(2) SUP(1) OUT(2) u !0 !2 !
q e r q e r q e r q e r w w w w 125 Process Gas Equipment / Diaphragm Valve Specific Product Precautions Be sure to read before handling.
Grease pack part no.: GR-S-010 (10 g), GR-S-020 (20 g) Individual -X 763 Series CNS Dimensions Basic style (B): CNSB 2 x MA Thread effective depth R Rc BQ plug with breathing hole BC element CL M GA T G G FA GB BP (Rc, NPT, G) Unlocking port 2 x P (Rc, NPT, G) Cylinder port GL GR Width across flats KA MM Q D EA E C B V C B AL A K F VA BN N N 4 x J M H S + Stroke ZZ + Stroke With rod boot
Seal kits are sets consisting of items 46, 48, 49, 53, 54 and 57, which can be ordered using the seal kit for each cylinder bore size. 4 Series CNS Dimensions Basic type/CNSB 2-MA Effective thread depth R Rc(PT) BQ Plug with breathing hole CL M GA BC element T G G FA GB Rc(PT) BP Unlocking port 2-Rc(PT) P GL GR Width across flats KA Cylinder port MM Q D EA E V AL A K F VA BN C B N N 4-J
If it is forcefully disassembled, it could lead to damage. 10-19-12 13 Floating Joint: Stainless Steel Type Series JS Construction 10, 16 20 to 63 q u t y r e w y q t e w r RE A B REC CX Component Parts Component Parts CY No. Description Material Note No.
If it is forcefully disassembled, it could lead to damage. 10-19-12 13 Floating Joint: Stainless Steel Type Series JS Construction 10, 16 20 to 63 q u t y r e w y q t e w r RE A B REC CX Component Parts Component Parts CY No. Description Material Note No.
Through-hole: CQ2YB/CDQ2YB Both ends tapped style: CQ2YA/CDQ2YA CDQ2YA RE A B Both Ends Tapped (mm) Bore size (mm) O1 R O1 thread REC R R 32 M6 x 1.0 10 40 M6 x 1.0 10 CX 50 M8 x 1.25 14 CY MQQ M RHC H thread effective depth C U 4-N through 8-O counterbore Q F 2-P (Port size) (Rc, NPT, G) MK(2) I RS Q G RS H A 22 D M E Z 11 Lead wire min. bending radius 10 RZQ Auto switch D-A7, A8 MI W S
.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 20 25 32 40 0.02 RHC 50 63 80 100 0.01 MK(2) 0 0 10 20 30 40 60 50 70 80 90 100 RS Q G Bore size mm RS H A (Measurement based on JIS B8377) RZQ MI W S CEP1 Stable operation possible even at a low speed of 5 mm/s (Measurement based on JIS B 8377) Sliding
Dimensions (mm) Grommet: G Conduit: C DIN terminal: D Conduit terminal: T P Port size B D E F H K L M N A C Model Note) Q V R Q R Q R S Q R S U 22 23 45 44 43 58 40.5 46.5 99 43 66 83 13.5 28 31 56.5 12.5 28 14 12.8 M4 4.5 64 1/8 VCL21 22 23 46 44 44 58 41.5 46.5 99 44 66 86 18 36 31 58.5 12.5 28 18 12.8 M4 6 67.5 1/4 24 25 56.5 46 54.5 60 52 48.5 101 54.5 68 99 22 40 36.5 11 15 32 20 19
Description Material Notes q Description Material Notes No.
x PA+w x PC F=q x PA+(e-q) x PC F=-q x PA+r x PB+(w-e) x PC F=q x PA q, w and e are piston areas.
o q Plug y Purge air for dehumidification u Plug u Purge r Purge Purge air for dehumidification Component Parts Material Description No.
(NA) (NA) Q+Stroke MXU MXS MXQ MXF MXW MXP MG MGP MGQ (mm) MGG d Bore (mm) Standard stroke (mm) Slide Ball bushing (N) (NA) PA* PB PW Q A E F G GP H HG HN HP HT L MGC 32 25, 50, 75, 100 10.5 28 20 45 27 9.5 110 66 26.5 67.6 64 33.5 100 14 53 70 120 160 121 40 25, 50, 75, 00 11.5 36 25 52 31 10.5 130 78 30.5 77.6 74 40.5 136 12 51 90 140 190 159 MGF * PA dimension is the center sorted factor
terminal: T P Port size Rc A B C D E F H K L M N Model Note) U Q V R Q R Q R S Q R S 83 22 23 45 44 43 58 40.5 46.5 99 43 66 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 1/8 VCL21 86 22 23 46 44 44 58 41.5 46.5 99 44 66 18 36 67 31 8.5 12.5 28 18 12.8 M4 6 1/4 99 24 25 56.5 46 54.5 60 52 48.5 101 54.5 68 22 40 81.5 36.5 11 15 32 20 19 M5 8 1/4, 3/8 VCL31 104 24 25 59 46 57 60 54.5 48.5 101 57
Approx. 300 F D Approx. 280 D Q F C G (PF) 1/2 C R R E E B A H 2-P Port size 2-P A B H 2-M Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G (PF) 1/2 E B A H D 2-P Port size (S) 2-M L K N.C.
Construction Component Parts Description No. q w e r t y u i o !0 !1 !
fT.",d""d_l I nuonerseat IIE t i r ; \ 1 . 1 r q t l 6. r': 6) G) ( : . : 6 ? Series VQC1 000 : Base-Mou nted Type/Pl u g-in Un it Q How to order manifolds refl e I I Kit Kit Bequires ror S kit SDO,'. Fill out for UO serial kit only.
Approx. 300 F D Approx. 280 D Q F C G (PF) 1/2 C R R E E B A H 2-P Port size 2-P A B H 2-M Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G (PF) 1/2 E B A H D 2-P Port size (S) 2-M L K N.C.