MHF2

36 36 4H9 +0.030 0 depth 3 4-M5 x 0.8 thread depth 12 Mounting thread 6 127.5 5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Finger closing port M5 x 0.8 50 142 2-M5 x 0.8 thread depth 5.5 122 26 10.6 Mounting thread E 20 20 24 33 E 0 -0.1 1.2 4-4.3 through (Mounting

AN

Model (Screw-in connection) Model Port size Effective area (mm2) Weight (g) ANA1-01 10 4 37 16 A B C Dimensions (mm) 1 8 ANA1-02 15 14 64 22 18 1 4 ANA1-03 35 3 8 22 84 25 21 36 98 30 24 110 111 46 36 180 132 50 41 544 200 74 60 612 230 74 60 873 271 86 70 ANA1-04 60 1 2 ANA1-06 90 3 4 JIS symbol ANA1-10 160 1 1 1 ANA1-12 280 1 4 ANA1-14 450 1 2 ANA1-20 610 2 Construction/Parts/Dimensions

MLGP

MLGPM, MLGPL common dimensions (mm) IC Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA IA IB Extension locking Retraction locking ID IE IF IG IH J K L 79.5 10 10 12 32.5 8.5 9 9 83 M5 M5 M6 26.5 36 40 49 M5 x 0.8 6.5 7 8 21.2 18 21 24 10 12 16 36 42 48 10.5 37 9.5 10 9 24 30 34 6 7.5 9 18 21 24 32 3 20 25 32 20, 30, 40, 50, 75, 100, 125 150, 175, 200, 250, 300, 350 84 36.5

MLGP

MLGPM, MLGPL common dimensions (mm) IC Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA IA IB Extension locking Retraction locking ID IE IF IG IH J K L 79.5 10 10 12 32.5 8.5 9 9 83 M5 M5 M6 26.5 36 40 49 M5 x 0.8 6.5 7 8 21.2 18 21 24 10 12 16 36 42 48 10.5 37 9.5 10 9 24 30 34 6 7.5 9 18 21 24 32 3 20 25 32 20, 30, 40, 50, 75, 100, 125 150, 175, 200, 250, 300, 350 84 36.5

3 Port Air Operated Valve Series SYJA300 1

71 80 8.5 3 4 VPA3165 82.6 1 4 1 1 110 17 68 75 118 45 113 36 71 95 8.5 1 4 1 1 1 1 4 VPA3185 118 1 2 132 14 80 95 140 52 140 41 81 105 13 2 2 5-5-26

5 Port Air Operated Valve Series SYA3000/5000/7000 1

: SYJA3240-M5 VHS 10 9 36 7.1 2-M3 x 0.5 (Pilot port) 10 1.8 4 A B (For mounting) 2-3.2 1.5 1.5 22 7 8.2 2.5 (For manifold mounting) 2-1.8 2-M3 x 0.5 (Pilot port) A B 11 1.5 17.5 (For mounting) 2-3.2 equivalent (18.5) A B Manual override 14 36 (18.5) (21) Manual override 41.6 13.5 15 41.6 28.5 21 R2 P R1 13 R P R (11) (0.5) 10 5 5 2-1 (Bleed port) 10 10 7 7 2-1 (Bleed port) M3 x 0.5 (Piping

VFR

0 3-5-80 81 5 Port Pilot Operated Solenoid Valve Rubber Seal, Plug-in/Non Plug-in Series VFR5000 Plug-in 2 position single/double, 3 position closed center/exhaust center/pressure center 0 1 2 position single: VFR510 -F(Z) 21 [25] 32 [39] 40 [40.5] 31 [36] 25 [24] 31 [36] 1 2 31 [41] 16 [19.5] 16 [19.5] EA P EB VK A B 32 [39] 40 [40.5] VZ 5-Rc 3/8, 1/2, 3/4 EA, EB port = Rc 1/2 in case of

Profile Design ISO/VDMA Air Cylinder Series CP95

5 20 10 45 16 16 11 11 95 90 50 100 113 60 89 41 5 25 10 55 20 20 11 12 115 110 60 Mounting type E Bore d2 CK S5 K1 K2 l3 G1 l1 G2 EM G3 CA H6 R1 32 11 10 6.6 38 51 10 21 7 18 26 31 32 8 10 40 11 12 6.6 41 54 10 24 9 22 28 35 36 10 11 50 15 12 9 50 65 12 33 11 30 32 45 45 12 12 63 15 16 9 52 67 14 37 11 35 40 50 50 12 15 80 18 16 11 66 86 18 47 12.5 40 50 60 63 14 15 100 18 20 11 76 96

Plate Cylinder with Lock Series MLU

I-MU02 I-MU03 I-MU04 I-MU05 Size 25 32 40 50 Size 25 32 40 50 E1 16 18 20 28 A1 10.5 12 14 18 MM M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 L1 27 31 36 46 A1 10.5 12 14 18 E1 14 18 20 28 L1 27 31 36 46 MM M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 NDH10 8 10 10 14 +0.058 0 +0.058 0 +0.058 0 +0.070 0 Applicable pin no. CD-MU02 CD-MU03 CD-MU04 CD-MU05 Part no.

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

Series LJ1H10 Dimensions/LJ1H101PB(X10) Scale: 15% 10 6 Work piece mounting reference plane 80 5H10 depth 8 8-M5 x 0.8 thread depth 8 45 20 Cable entry side Body mounting reference plane 5H10 depth 6 Z section detail 100 201 60 50 Z section 43 Stroke + 125 (table movement range) 192 3.3 30 A section 90 83 5.8 1.7 4.8 80 Stroke + 360 A section detail (Switch groove) 11.5 40 (T-slot pitch) 36

Digital Flow Switches, Series PF2A, Series PF2W

OUT2 41.8 40.3 NC 8 Load 4 Sensor 40 4.3 OUT1 Black Main circuit Main circuit 7 3 Load Brown 6 2 Blue + SMC FLOW SWITCH 5 1 12 to 24VDC 35.8 40 A Series PF2A5 UNIT PF2A30-A RESET SET OUT2 NC 8 Load 4 Sensor OUT1 Panel fitting dimensions Black 3 x 7.2(=21.6) 7 3 Load 8-M3 36 +0.5 0 6.4 Brown 6 2 + Blue 5 1 12 to 24VDC 1 2 3 4 Series PF2A5 PF2A31-A 36 +0.5 0 19.4 Do not connect the white

Compact Cylinder with Air Cushion and Lock Series RLQ

Compact overall length 36 to 50 mm increase in length compared to compact cylinders Series CDQ2. (mm) Bore size (mm) Extension 32 40 50 63 +36 +38.5 +47 +50 Series RLQ 32, 40, 50, 63 W Drop prevention is possible at any point of an entire stroke. By-pass piping is standardized. Extension locking Retraction locking With air cushion Overall length Absorbs impact at stroke ends.

Thermo-chiller

breaker K Note) With uid ll port W Water-cooled refrigeration Pipe thread type Nil Rc F G (with Rc-G conversion tting) N NPT (with Rc-NPT conversion tting) Power supply 20 3-phase 200 VAC (50 Hz) 3-phase 200 to 230 VAC (60 Hz) Specications Model HRS100-W -20HRS150-W -20Cooling method Water-cooled refrigeration Refrigerant R410A (HFC) Control method PID control Ambient temperature Note 1) 36

4/5 Port Air Operated Valve Series SYJA3000

SA Manual override B P R R (35) 7 7 36 (2) VA 7 (13.5) 28.5 15 A 1 (Bleed port) 21 R2 P R1 13 VM 4 8.2 15 10 10 10 M5 x 0.8 (Piping port) 11 14 14 15 (Bracket) VR VH 2 position double: SYJA3220-M3(-F) 2 position double: SYJA3240-M5 VHS 10 9 36 7.1 2-M3 x 0.5 (Pilot port) 10 1.8 4 A B (For mounting) 2-3.2 1.5 1.5 22 7 8.2 2.5 (For manifold mounting) 2-1.8 2-M3 x 0.5 (Pilot port) A B 11 1.5

70pvpump

TI/ TIL PA Maintenance Parts List PAX PA3000/Automatically Operated Type PA5000/Automatically Operated Type PAX1000 PB KT-PA3-31 Diaphragm kit (PTFE) KT-PA5-31 KT-PAX1-31 Diaphragm kit (PTFE) Diaphragm kit (PTFE) KT-PA3-32 Diaphragm kit (NBR) KT-PA5-32 KT-PAX1-36 Diaphragm kit (NBR) Check valve kit KT-PA3-36 Check valve kit KT-PA5-36 KT-PAX1-37 Check valve kit Switching valve parts kit KT-PA3

C95Series

1l'" Immj 32 -700 50 7 5 10 64 72 32 36 79 90 25 31 ", 40 -800 55 9 7 10 Cushi()(\ vl\lve Port 4 50 -1000 70 9 12 12 90 45 50 110 120 36,S 39.5 63 1000 80 9 12 12 100 80 1000 100 12 14 16 126 63 153 45.5 J()a, -1000 120 14 1 6 I. 150 75 176 54 FE FT Head Iionge/ (G) Head flange 101m) ' ~," BoreSiW .

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

13 15 25 24 HA 17 24 30 36 41 52 62 80 92 G 3 4 5 6 6 7 7 8.5 8.5 HT 10.5 14 17 24 23.5 29 36 45 51 J x E M4 x 0.7 x 6 M4 x 0.7 x 6 M5 x 0.8 x 7 M6 x 1 x 8 M6 x 1 x 8 M8 x 1.25 x 10 M8 x 1.25 x 10 M10 x 1.5 x 15 M10 x 1.5 x 15 B 6.5 8 9.5 9.5 11 11 14 14 GP 20 27 33 39 44 55 65 83 95 HB 10.5 14 17 21 23.5 29 36 45 51 C 3.2 4.2 5.2 5.2 6.5 6.5 8.2 8.2 GW 18.5 25.5 31.5 37.5 42.5 53.5 63.5

Series MHR2 11- 2 Finger Rotary Actuated Air Gripper 22- Size: 10, 15, 20, 30

port 2 2 3-0.02 0 3-0.02 0 8-0.05 0 +0.02 3 x 3 0 depth 6 (A, B, C common view) Open: 16, Closed: 10 12 12 2 x M3 x 0.5 thread depth 6 (Thread for mounting attachment) 4 4 4 4 With Auto Switch: MDHR2-10R 11223 x M3 x 0.5 thread depth 6 P.C.D.24 (Mounting thread) MDHR2-10E port location 112233.4 B 32 36 120 120 D A 32 +0.02 2 x 3 0 depth 6 9.5 Finger closing port Finger opening port M3 x

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

36 38 G 15 15 15 17 15 25 35 NA 2 2 2 2 2 4 4 N 4 4 4 4 6 6 6 GA 15 15 15 42 51 61 111 KA 125.5 179.5 HA 40 40 40 25 36 72 76 13-/22-MXS12L-10 13-/22-MXS12L-20 13-/22-MXS12L-30 13-/22-MXS12L-40 13-/22-MXS12L-50 13-/22-MXS12L-75 13-/22-MXS12L-100 788 MXS 1322Air Slide Table Dimensions: MXS16 1322Basic 2 x M5 x 0.8 thread depth 5.5 11 3 Vacuum suction port M5 x 0.8 Operating port 2 x M5 x

SMC

36 38 G 15 15 15 17 15 25 35 N 4 4 4 4 6 6 6 NA 2 2 2 2 2 4 4 GA 15 15 15 42 51 61 111 KA 125.5 179.5 HA 40 40 40 25 36 72 76 13-/22-MXS12L-10 13-/22-MXS12L-20 13-/22-MXS12L-30 13-/22-MXS12L-40 13-/22-MXS12L-50 13-/22-MXS12L-75 13-/22-MXS12L-100 142 MXS Air Slide Table 1322Dimensions / MXS16 1322Basic style Air cylinder Rotary actuator Air gripper Directional control valve Fittings & Tubing