Body Option: Internal Pilot, Port Size: NPT1/4, Style: 32 [Push Button (Extended)], Suffix: Push Button Selector Color Black, Accessory: -

Body Option: Internal Pilot, Port Size: NPT1/4, Style: 32 [Push Button (Extended)], Suffix: Push Button Selector Color Green, Accessory: -

Body Option: Internal Pilot, Port Size: NPT1/4, Style: Roller Plunger, Suffix: -, Accessory: -

Body Option: Internal Pilot, Port Size: NPT1/4, Style: 34 [Twist Selector (2 Position)], Suffix: Push Button Selector Color Green, Accessory: -

Body Option: Internal Pilot, Port Size: NPT1/4, Style: 34 [Twist Selector (2 Position)], Suffix: Push Button Selector Color Yellow, Accessory: -

ZSE30A(F)/ISE30A

(ZSE30AF (for compound pressure) 3.5% F .S.) Note) When the display calibration function is used, the set pressure value may change 1 digit. 41 ZSE30A(F)/ISE30A Series The F in ( ) shows the function code number. Refer to the Operation Manual for the details of operation procedures and function codes.

IDG

Note 2) They are not applicable in case the thread type is N or F.

MGC

(N) Allowable end load F (N) Allowable end load F (N) MGCM40Stroke -R (Slide bearing type) St: Stroke (mm) Allowable end load F (N) MGCM50Stroke -R (Slide bearing type) St: Stroke (mm) Allowable end load F (N) 8-22-8 9 Series MGC Guide Cylinder Compact Type Ball Bushing Bearing Allowable End Load and Deflection MGCL20Stroke -R MGCL25Stroke -R MGCL32Stroke -R (Ball busing bearing type) (Ball

High Vacuum Angle Valve

Bellows seal C Double acting Bellows seal F Single acting (N.C.)

Brake mechanism added

Black 0 V G Shield Connector pin arrangement A phase output pulse G A DB phase output pulse F B H E D C -X Counter value 0 1 2 3 4 3 2 1 699

XL

Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K

High Vacuum Angle Valve, XL Series

Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K

VCL

(mm) A B C D E F G H J L Port size Bracket part no.

100

G Pressure gauge*7 E Vacuum pressure switch (Vacuum 2 outputs) F Vacuum pressure switch (Compound pressure 2 outputs) !

CXWM/CXWL

A B C D E F A B C D E F G H Pressure port Pressure port Right Left Left Right Left Right Right Left Left Right Right Left Left Right Operating direction Operating direction There are 9 possible reciprocating piping methods. There are 16 possible reciprocating piping methods.

Coolant Valve

Water Hammer Characteristics VNC1 (N.C. 0.49 MPa) Conditions: Piping 30 m Steel tube, total pressure 0.49 MPa VNC4 (N.C. 0.97 MPa) Conditions: Piping 30 m Steel tube, total pressure 0.97 MPa 2.5 15A Peak pressure at valve closed (MPa) Peak pressure at valve closed (MPa) 8A 25A 2 1 20A 32 A F 15A 20A 40 A F 32 A F 1.6 0.8 25A 40 A F 50 A F 65F 50 A F 1.2 0.6 80F 65F 80F 0.8 0.4 0.4 0.2 0 1

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

Rubber seal 16.2 (0.9) VQZ332 33 or less 25 or less 92 VQZ300 Metal seal 13.5 (0.75) VQZ322 22 or less 17 or less N.O.

SV

MEWNET-F System ADDRESS NO. STASTION NO. DIP SW. Name of terminal block, LED Note Cable wiring TERM. POWER RUN ERR R.SET HOLD TERM. POWER COMM.

AC Servo Motor Driver (CC-Link Type)

selection RX(n 3)0 RY(n 2)B Absolute value/incremental value to Reserved RY(n 2)C RX(n 3)9 to Reserved RX(n 3)A Problem ALM 15 RY(n 2)F RX(n 3)B Remote station communication ready CRD RY(n 3)0 to Reserved RX(n 3)C RY(n 3)9 to Reserved RY(n 3)A Reset RES RX(n 3)F Note.

PFM7.eng

Press this button to change to the peak display mode. button (UP) [F 4] [F 5] [F 6] [F 7] [F 8] [F 9] [Anr.] Standard condition [1.00] 1 second Selects the mode or decreases the ON/OFF set value. Press this button to change to the bottom display mode. CAUTION indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury.