VFR

switch Electrical entry D side Rc 1/4 Po port 2-Rc 1/8 Pilot EXH port n: Stations Stations L L1 L2 L3 (MP) L3 (AP) Formula L1 = 28 x n + 47 L2 = 28 x n + 56 L3 = 28 x n + 194 L3 = 28 x n + 235.5 3 131 140 278 319.5 4 159 168 306 347.5 5 187 196 334 375.5 6 215 224 362 403.5 7 243 252 390 431.5 8 271 280 418 459.5 9 299 308 446 487.5 10 327 336 474 515.5 6-Rc 1/4 (P , EA, EB port) 3-5-26 27

Lubricator

P24-27 8. Air leakage from the sight dome. Replace the sight dome assembly. P28-30 Bubble exists in an oil droplet. 1. Seal of the siphon tube is damaged. Replace the damper retainer assembly. P24-27 2. Oil level in the bowl is low. Supply lubricant so that the oil surface appears above the "MIN. OIL LEVEL" display on the bowl. P17-18 Air or oil leaks from the sight dome. 1.

SQ1000/2000

Dimension L 21 273 22 285.5 23 298 24 310.5 25 323 26 335.5 27 348 28 360.5 29 373 30 385.5 No. Dimension L 31 398 32 410.5 33 423 34 435.5 35 448 36 460.5 37 473 38 485.5 39 498 40 510.5 50 Series SQ1000/2000 Manifold Options for SQ1000/SQ2000 Negative COM specifications The following valve part numbers are for negative COM specifications.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

L 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 VP4 Fitting blank plug KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 VQ L A Dimensions VQ4 Applicable fitting d Part No.

ZR

SMC PRESSURE SWITCH RESET SET Attachment D Digital pressure switch 71.3 (73.3 for D2, D3 types) 61 SMC PV PD Filter block D 3 100 Dimensions not indicated are identical to C1 type. 13-3-27 27 Series ZR Ejector System/Manifold Specifications Specifications 6 stations Max. number of units Port Port size Function Air supply for ejector Air supply for pilot valve Air supply for release Common

10

Use the RJ20 and 27 under the conditions mentioned below.

1.1

R S T E E E 24 25 28 29 30 31 37 38 Communication cable Communication cable outlet (also used as signal cable outlet) 27 Series HRG Optional Accessories Note) Please order separately. Necessary to be fitted by customer.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

Port size ASV Model M3 x 0.5 ASV120F-M3 0.3 0.3 AK M5 x 0.8 ASV220F-M5 1.3 1.3 R 1/8 ASV310F-01 8 7 ASS R 1/4 ASV310F-02 8 7 R 1/8 ASV410F-01 14 13.5 ASR R 1/4 ASV410F-02 14 13.5 R 3/8 ASV410F-03 14 13.5 ASF R 1/4 ASV510F-02 27 23 R 3/8 ASV510F-03 29 27 R 1/2 ASV510F-04 29 27 10-32 UNF ASV220F-U10/32 1.3 1.3 NPT 1/8 ASV310F-N01 8 7 NPT 1/4 ASV310F-N02 8 7 NPT 1/8 ASV410F-N01 14 13.5 NPT 1

VS7-6

(1472.25) 27 (1472.25) 25.5 (1374.10) 27 (1374.10) 20 (1079.65) 0.460 0.560 0.635 0.635 0.990 (3) Weight without sub-plate (Sub-plate: 0.37kg) (1) Min. operating frequency is based on JIS B8375.

High Vacuum Slit Valve

The lever fixed in lateral and vertical position leans when the plate 27 moves up and makes the guide pin of the lever unengaged from the guide groove of the plate 27.

155

27 14 14 17 17 22 22 26 26 D H2 H1 L2 L1 Nozzle with Male Thread / KN (mm) Model Nozzle diameter D Connection size L1 A With across flats H1 Connection thread KN-R02-600 KN-R03-400 KN-R03-600 KN-R04-400 KN-R04-600 KN-R06-600 KN-R06-800 KN-R10-800 6 4 6 4 6 6 8 8 21.1 25.4 23.7 33.6 31.8 40.1 38 52.3 27 32 30 42 40 50 48 63 14 17 17 22 22 27 27 36 R1/4 R3/8 R3/8 R1/2 R1/2 R3/4 R3/4 R1 D H1

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

73 90 50 11 (12.5) 2(B) port 11 (12.5) 4(A) port Indicator light Indicator light 167 181 59 73 50 90 108 2 4 24.6 38 48 11 (12.5) 11 (12.5) B A 4(A) port 2(B) port 14 12 1 5 3 4 2 30 45 24.6 A B 2-5.6 Mounting hole Manual override 38 48 B A 14 5 3 1 12 30 45 2-5.6 Mounting hole Manual override 14.5 27 30.5 32 41.5 91.5 129 G1/2 Electrical entry 79 PE X 41.5 32 30.5 X PE 27 R1 R2 P 15.5 14.5

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

PD ). 5 -26 5.4.1 Parameter list . 5 -26 5.4.2 List of details . 5 -27 6.

OMU0023

Frame Formats . 13 5.4 Details of Function Codes supported by LATCA . 17 (1) 01h Read the status of output signals . 17 (2) 02h Read the status of input signals . 19 (3) 03h Read data contents of holding register addresses . 21 (4) 05h Write (force) a single output signal . 23 (5) 06h Write data to a single holding register address . 25 (6) 08h Diagnostics of communication using echo back . 27

ISE70_75.eng

They are all important notes for safety and must be followed in addition to International standards (ISO/IEC) and other safety regulations. 1st digit Function Setting 2nd digit Setting Setting procedures : This picture applies to all output specifications except -27 and -67. (If the output specification shown in a part number is -27 or -67, the Indication LED OUT2 (Red) is added.)

Compact Hydraulic Cylinder Double Acting/Single Rod Series CH
QB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

132 6 22 11 17.5 depth 13.5 26 77 11 Rc 3/8 112.5 100 20 25 98 28 89 100 67.5 M20 x 2.5 156 6.5 26 12 17.5 depth 13.5 26 94 11 Rc 3/8 132.5 107 24 30 117 29 95 Rod end male threads (mm) H X D L K C Bore size (mm) 20 M8 x 1.25 18 15.5 10 23 8 32 M14 x 1.5 30 27 16 38.5 14 40 M14 x 1.5 30 27 16 38.5 14 50 M18 x 1.5 35 32 20 46 18 63 M18 x 1.5 35 32 20 46 18 80 M22 x 1.5 40 37 25 51 22 100

Series PF2W Digital Flow Switch For Water Refer to www. poweraire .com for details of products compatible with overseas standards.

How to Order Integrated Display Type PF2W7 20 T 03 27 Flow rate range Unit specification T Temperature range 0.5 to 4 l/min 2 to 16 l/min 5 to 40 l/min 04 20 40 0 to 90C Nil M With unit switching function Lead wire (Refer to page 35.)

Cylinder with Lock Series CLS

E1 NX 25 + 0.084 0 28 + 0.084 0 32 + 0.1 0 32 0.1 0.3 36 0.1 0.3 40 0.1 0.3 I-12 I-14 I-16 125 140 160 33 27 46 54 100 M30 x 1.5 L1 U1 39 30 48 54 105 M30 x 1.5 39 34 55 60 110 M36 x 1.5 RR1 Rod End Nut 30 d Material: Rolled steel (mm) Applicable bore size (mm) d H B C D No.

Series H, DL, L, LL Self-align Fittings

-02 25 106 17 62 12 19 DY12-03 17 28.5 26 112 DY12-04 27 17 Reference dimensions after R(PT) thread installation.

Air Fittings Fitting Series For Special Environment

(mm) Effective orifice(mm 2) A D1 D2 L1 L2 1 8 KRL06-02S KRL06-01S 12.8 10.8 33.8 13.9 21.9 35.9 26.3 27.3 37.3 10 27.5 23 27 29 24.5 28.5 30.5 27 30 32 36 31 33 37 1 4 10 22 6 31 29.5 19 5.0 14 17 12 14 17 16.8 3 8 1 8 KRL06-03S 30 14.9 KRL08-01S KRL08-02S KRL08-03S KRL10-01S KRL10-02S KRL10-03S 1 4 3 8 1 8 1 4 3 8 32 33.5 34.4 35.4 36.9 8 19.2 12 25 20.5 14.9 17 23.3 10 17 28.5 23 25.0