3 Port Air Operated Valve

18.5 1/8, 1/4 3(R) port 1/8 12(PA) port 2A NO 35 43 NC 12 12 3R 1P NC (1/8) 12(PA) port 12 6.7 58.2 18.5 65.2 60 59 24 X 12 M5 x 0.8 (Breathing hole) 19.5 39 1/8, 1/4 1(P) port For vacuum/VPA344V-101 02 A B 1/8, 1/4 2(A) port 19.5 12 40.5 2 x 4.2 (For mounting) 1/8, 1/4 3(R) port 18.5 11.2 30 2A NO 35 43 NC 12 3R 1P NC 1/8 12(PA) port 12 6.7 18.5 65.2 60 59 24 X 12 M5 x 0.8 (Breathing hole

Air Cylinder CP Series Cylinder Positioner Assembly

I e zz 1.38 (35) 2.76 (70) 2.05 (52) o.79 (20) 1.57 (40) 0.39 00) 0.67 (17) MBxl 25 a.2a (;) 0.43 ( 1 1 ) M18x1.5 t . l 8 (30) 3 5 4 (s0) 2 2 8 t58) 6.26 (1s9) 205 (52) ( 1 1 2 ) 2 6 0 (66) 6.57 t167) 1.34 (35) 3 3 5 (85) 2.52 (64) {20) 1 5 7 (40) 0 3 9 o0) 0 6 7 o7) Ml0x1 25 o 2 a (7) 0.55 M 1 A x 1 5 't.22 ( 3 1 ) 3 8 6 (93) 2 2 8 153) s T o 6 6 9 (r 70) 2 0 5 (52) 1112) 264 (66) 1173)

Air Cylinder

30 M8 x 1.25 24 M20 x 1.5 1/8 9 62 14 133 142 25 22 19.5 17 9 30 25 10 19 10 26 0 0.033 13 10.5 8 45 6 33.5 5.5 8 30 M10 x 1.25 30 M26 x 1.5 1/8 9 62 14 137 146 32 22 19.5 17 9 30 25 10 19 12 26 0 0.033 13 10.5 8 45 6 37.5 5.5 10 30 M10 x 1.25 34.5 M26 x 1.5 1/8 9 64 14 139 148 40 24 21 22 10 38 41.2 15 30 14 32 0 0.039 16 13.5 11 50 8 46.5 7 12 39 M14 x 1.5 42.5 M32 x 2 1/4 11 88 18 177

SY3000/5000/7000/9000 Series (Pilot Valve:V100)

cable) SX3000-64-2A-10 2NA SX5000-64-2A-10 2NA Connector block assembly (for2to8stations(T,T1)terminal block) SX3000-64-3A SX5000-64-3A 5-5 In common between +COM and -COM Connector block assembly (for9to17stations(T1)terminal block) SX3000-64-8A SX5000-64-8A 5-6 6 Round head Combination screw SY3000-23-4 M3x26, Matt nickel plated 7 Gasket SX3000-57-4 SX5000-57-6 8 DIN rail VZ1000-11-1Refer

CY1

0 i @6 q r 2a 3a With switch rail !6@3 !2 @8 t o u y !8 !9 @2 @7 CY1R10H @0 !5 @4 !4 !1 !0 i @6 q @9 r 2a 3a With switch rail !9 !8 @0 @2 @7 t @3 !6 !2 y u o @5 @8 CY1R15H to 63H @0 !6 @4 !4 !1 @9 @6 !0 i q r 2a For CY1R15 For CY1R15, 20 3a !9 !8 @2 @0 @3 !5 @7 !7 o u y @5 t @8 !2 !3 With switch rail Parts list No. Description No.

HRX-OM-X084

Option . 6-1 6.1 Option DMElectric conductivity control function , DI water (pure water) piping . 6-1 6.1.1 Option DMElectric conductivity control function , DI water (pure water) piping . 6-1 HRR Series HRX-OM-X084 Contents 6.2 Option MDI water (Pure water) piping . 6-2 6.2.1 Option MDI water (Pure water) piping . 6-2 6.3 Option T1Inverter pump . 6-2 6.3.1 Option T1Inverter pump . 6-2 6.4

Basic Type/Direct Mount Type

6@4 @6!0i q !4 !2 r CY3R6 @3 @7 o u y t @8 !9 @2 18a CY3R10 2a 3a @0 !5 !6 @4 @9 @6 !0 i q !1 !4 !2 r @3 @7 @8 @5 o u y t !9 @2 18a CY3R15 to 63 !3 !0 !1 !4 !2 y r i q 2a 3a @0 @4 @9 @6 !5 !6 !9 @2 @3 @5 @8 @7 o u !7 t 18a CY3R15, 20 CY3R15 Component Parts No. Description Body End cover A End cover C End cover B End cover D Cylinder tube No.

Series VQ Metal Seal/Rubber Seal Body Ported

AXT661-12A AXT661-14A AXT661-14A-6 AXT661-14A-10 AXT661-14A-20 AXT661-14A-30 Lead wire length Single/3 position No. AXT661-12A AXT661-14AN AXT661-14AN-6 AXT661-14AN-10 AXT661-14AN-20 AXT661-14AN-30 Double No.

SZ3000

) One-touch fitting assembly for 8 (Elbow type) One-touch fitting assembly for 6 (Long elbow type) One-touch fitting assembly for 8 (Long elbow type) VVQ1000-50A-C4 VVQ1000-50A-C6 SZ3000-73-1A-L4 SZ3000-73-1A-L6 SZ3000-73-2A-L4 SZ3000-73-2A-L6 SZ3000-56-1A VVQ1000-51A-C6 VVQ1000-51A-C8 SZ3000-74-1A-L6 SZ3000-74-1A-L8 SZ3000-74-2A-L6 SZ3000-74-2A-L8 4(A), 2(B) port 1(P), 3(R) port Other Tube

VQ5000

Coil voltage 1.Type of actuation 2 position single 2 position double 3 position closed center 3 position exhaust center 3 position pressure center 3 position double check 100VAC (50/60Hz) 200VAC (50/60Hz) 110VAC (50/60Hz) 220VAC (50/60Hz) 24VDC 12VDC 1 2 3 4 5 6 1 2 3 4 5 6 2. Seal type 5. Light/Surge voltage suppressor Nil E With Without Metal seal Rubber seal 0 1 3. Function 6.

VEX1

6 1 2 3 6 6 Pilot valve Construction Manual button Port P3 Port P1 Port P2 Feed back flow passage Component Parts Port 3 (R) No.

SZ3000

) One-touch fitting assembly for 8 (Elbow type) One-touch fitting assembly for 6 (Long elbow type) One-touch fitting assembly for 8 (Long elbow type) VVQ1000-50A-C4 VVQ1000-50A-C6 SZ3000-73-1A-L4 SZ3000-73-1A-L6 SZ3000-73-2A-L4 SZ3000-73-2A-L6 SZ3000-56-1A VVQ1000-51A-C6 VVQ1000-51A-C8 SZ3000-74-1A-L6 SZ3000-74-1A-L8 SZ3000-74-2A-L6 SZ3000-74-2A-L8 4(A), 2(B) port 1(P), 3(R) port Other Tube

XL

30-1 XLF25-30-1 XLF25-30-1H XLFV25-30-1 XLG25-30-1 XLG25-30-1H XLGV25-30-1 XLD25-30-1 XLD25-30-1H XLDV25-30-1 XLH25-30-1 XL -40 XLA40-30-1 XLA40-30-1H XLAV40-30-1 XLC40-30-1 XLC40-30-1H XLCV40-30-1 XLF40-30-1 XLF40-30-1H XLFV40-30-1 XLG40-30-1 XLG40-30-1H XLGV40-30-1 XLD40-30-1 XLD40-30-1H XLDV40-30-1 XLH40-30-1 XL -16 XLA16-30-1 XLA16-30-1H XLAV16-30-1 XLC16-30-1 XLC16-30-1H XLCV16-30-1

MRHQ

40 50 60 0 10 20 30 40 50 F F Gripping point L mm Gripping point L mm MRHQ16D MRHQ16D Pressure 0.7MPa External gripping 60 50 0.6MPa 50 Pressure 0.7MPa Gripping force N Gripping force N 0.5MPa 40 0.4MPa 0.5MPa 0.6MPa 40 0.4MPa 30 30 0.3MPa 0.3MPa 20 20 0.2MPa 0.2MPa 10 10 L L 0 10 20 30 40 50 60 0 10 20 30 40 50 60 Gripping point L mm Gripping point L mm MRHQ20D MRHQ20D Internal gripping

Rotary Gripper Series MRHQ

10 0.4MPa 0.35MPa 0.4MPa 0.35MPa 4 5 2 0 10 20 30 40 50 0 10 20 30 40 50 60 Gripping point L mm Gripping point L mm MRHQ16S MRHQ16C 60 Pressure 0.7MPa 40 Pressure 0.7MPa 50 0.6MPa 0.6MPa 40 30 Gripping force N Gripping force N 0.5MPa 0.5MPa 30 0.4MPa 20 0.4MPa 20 0.3MPa 0.3MPa 10 10 MHZ 0.25MPa 0.25MPa 0 10 20 30 40 50 60 0 10 20 30 40 50 60 MHF Gripping point L mm Gripping point L mm MHL

Plug-in Unit

PW 0 0 0 1 1 1 9 9 9 PW LRUN 2 2 2 8 8 8 3 3 3 7 7 7 4 4 4 6 6 6 SD RD LERR. 5 5 5 L RUN SD RD x10 x1 24V 0V +24V 24G DA DB FG DG L ERR.

Title not found

I e zz 1.38 (35) 2.76 (70) 2.05 (52) o.79 (20) 1.57 (40) 0.39 00) 0.67 (17) MBxl 25 a.2a (;) 0.43 ( 1 1 ) M18x1.5 t . l 8 (30) 3 5 4 (s0) 2 2 8 t58) 6.26 (1s9) 205 (52) ( 1 1 2 ) 2 6 0 (66) 6.57 t167) 1.34 (35) 3 3 5 (85) 2.52 (64) {20) 1 5 7 (40) 0 3 9 o0) 0 6 7 o7) Ml0x1 25 o 2 a (7) 0.55 M 1 A x 1 5 't.22 ( 3 1 ) 3 8 6 (93) 2 2 8 153) s T o 6 6 9 (r 70) 2 0 5 (52) 1112) 264 (66) 1173)

o

(H) < In Caee ot B:lT) 0 18 (4.5) Oia 6 6 i=o.ar (ro.5i0a5(115) TUpe 532,r Side Ported L Type Plug Connector (L) M Type Plug Connector(M) NVVsJ3-532staiions -M5, B3T \ | s l ATTI T \i.1 J_ 19 1 e : 9 6 t ' ' i 5 _ 3 ^i :n l ' g r018 (4 5) oLa 11.81 {300) Stationsn) 2 3 5 6 7 a 9 1 0 l1 12 13 a4 '15 16 17 1a 't9 20 L1 1.63 2.05 (41.5) (b2) 2.45 (62.5) 2.47 (731 3.29 3.70 (835) (s4) (104 5)

o

(H) < In Caee ot B:lT) 0 18 (4.5) Oia 6 6 i=o.ar (ro.5i0a5(115) TUpe 532,r Side Ported L Type Plug Connector (L) M Type Plug Connector(M) NVVsJ3-532staiions -M5, B3T \ | s l ATTI T \i.1 J_ 19 1 e : 9 6 t ' ' i 5 _ 3 ^i :n l ' g r018 (4 5) oLa 11.81 {300) Stationsn) 2 3 5 6 7 a 9 1 0 l1 12 13 a4 '15 16 17 1a 't9 20 L1 1.63 2.05 (41.5) (b2) 2.45 (62.5) 2.47 (731 3.29 3.70 (835) (s4) (104 5)

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

(H) < In Caee ot B:lT) 0 18 (4.5) Oia 6 6 i=o.ar (ro.5i0a5(115) TUpe 532,r Side Ported L Type Plug Connector (L) M Type Plug Connector(M) NVVsJ3-532staiions -M5, B3T \ | s l ATTI T \i.1 J_ 19 1 e : 9 6 t ' ' i 5 _ 3 ^i :n l ' g r018 (4 5) oLa 11.81 {300) Stationsn) 2 3 5 6 7 a 9 1 0 l1 12 13 a4 '15 16 17 1a 't9 20 L1 1.63 2.05 (41.5) (b2) 2.45 (62.5) 2.47 (731 3.29 3.70 (835) (s4) (104 5)