Plug-in Unit

(Serial transmission kit: EX126) 2-Rc 3/4 3(R) port 2-Rc 1/2 1(P) port 4-G 1/2 Conduit port VQC SMC SMC SMC SMC SMC SMC SMC SQ 95.5 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 77.5 90 72 VQ0 13 55.5 42.7 43.5 20.5 VQ4 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 33.5 11.5 15.7 12 2-Rc 1/8 (Pilot exhaust port) VQ5 (6.5) 21.5 2-Rc 1/8 (External pilot port) 27 2n-Rc 1/4, 3/8, C8, C10, C12 <4(A), 2(B) port> Rc 1/4:

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

SOL.b 15 2 SOL.a Station 3 2 SOL.a Station 3 SOL.a 2 SOL.a Station 2 14 SOL.a Station 2 14 Station 1 SOL.b 14 1 SOL.a Station 1 1 SOL.a Station 1 SOL.a 1 The common polarity should be the same as the common specifications of the valve to be used.

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

5 1 2 14.8 14.8 !

Secondary Batteries

1 1 1 1 Foot x 2, Mounting bolt x 8 Flange x 1, Mounting bolt x 4 Trunnion pin x 2, Trunnion bolt x 2, Flat washer x 2 Clevis x 1, Mounting bolt x 4, Clevis pin x 1, Retaining ring x 2 Pivot bracket x 1 13 Air Cylinder: Standard Type Double Acting, Single Rod 40, 50, 63, 80, 100 CDA2 Series 9091How to Order CDA2 L 50 100 M9BWL 90 With auto switch Series compatible with secondary batteries

5 Port Solenoid Valve, Series VQC

Connector wiring diagram (mixed wiring) Connector type manifold 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 The use of multi-pin connectors to replace wiring inside manifold blocks provides flexibility when adding stations or changing

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Applicable shaft type: K (mm) L3 max X L1 max W1 (mm) Shaft type Y W2 L2 max L4 max Size J K T J K T J K T J K T Size W1 = L3 = L1 = CRB2 50 50 1 to 6 Y 3 L2 2 L1 2 11.5 to 39.5 1 to 6 X 3 11.5 to 39.5 L4 = L2 = Y = 63 63 1 to 7.5 Y 3 L2 2 L1 2 12.5 to 45 1 to 7.5 X 3 12.5 to 45 CRBU2 80 80 1 to 8.5 Y 3 L2 2 L1 2 13.5 to 53.5 1 to 8.5 X 3 13.5 to 53.5 X = 100 100 1 to 12.5 Y

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Applicable shaft type: K (mm) L3 max X L1 max W1 (mm) Shaft type Y W2 L2 max L4 max Size J K T J K T J K T J K T Size W1 = L3 = L1 = CRB2 50 50 1 to 6 Y 3 L2 2 L1 2 11.5 to 39.5 1 to 6 X 3 11.5 to 39.5 L4 = L2 = Y = 63 63 1 to 7.5 Y 3 L2 2 L1 2 12.5 to 45 1 to 7.5 X 3 12.5 to 45 CRBU2 80 80 1 to 8.5 Y 3 L2 2 L1 2 13.5 to 53.5 1 to 8.5 X 3 13.5 to 53.5 X = 100 100 1 to 12.5 Y

CXWM/CXWL

25SM L CDPXW 32SM L 1 1 Aluminum alloy 1 Switch mounting block 1 1 2 2 2 Block mounting screw 2 2 Chrome steel/Nickel plated 2 2 2 Switch mounting screw 2 2 Chrome steel/Nickel plated 2 2 2 Hexagon nut 2 2 Carbon steel/Nickel plated 1 (2) (2) Magnet Rare earth magnet Socket Brass/Electroless nickel plated 2 2 Plug (M-5P) 2 Brass/Electroless nickel plated 2 Note 1) mark indicates strokes

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

(A) Rubber seal 2 4 FPG 3 5 1 (R2) (R1)(P) Available for 7-6 and 7-8 only A02 VS7 1 Sub-plate Size 1 2 3 Specifications Size 1 Size 2 Piping specifications Weight (kg) Model Size 3 Piping direction Port size for 3(R2), 5(R1) Port size for 1(P), 2(B), 4(A) Port size VS7-1-A02 VS7-1-A03 VS7-1-B02 VS7-1-B03 VS7-2-A03 VS7-2-A04 VS7-2-A06 VS7-2-B03 VS7-2-B04 VS7-2-B06 VS7-3-A04 VS7-3-A06 VS7

CRB2/CRBU2/CRB1

W1 = L3 = L1 = 10 10 4.5 to 14 0.5 to 2 Y-1 L2-1 6.5 to 14 X-3 L1-1 0.5 to 2 L4 = 15 15 Y = 5.5 to 18 Y-1.5 L2-1 0.5 to 2.5 X-4 L1-1 8 to 18 0.5 to 2.5 L2 = 20 20 Y-1.5 L2-1 6 to 20 0.5 to 3 9 to 20 X-4.5 L1-1 0.5 to 3 X = 30 30 0.5 to 4 Y-2 L2-2 8.5 to 22 0.5 to 4 X-5 L1-2 11.5 to 22 W2 = 40 40 0.5 to 5 Y-4.5 L2-2 13.5 to 30 0.5 to 5 15.5 to 30 X-5.5 L1-2 29 Series CRB2 Axial: Top (Long-shaft

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

B 2 B 2 B 2 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 PE R 3 R 3 R 3 R 3 P 1 P 1 P 1 P 1 X A 4 A 4 A 4 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 2-One-touch fitting (X, PE ports) Applicable tube O.D.: 6 2n-One-touch fitting (A, B ports) Applicable tube O.D.: 4 6 Applicable connector: 26 pin MIL type with strain relief (L4) L3 (conforms to MIL-C-83503) 7.6 Connector case attachment lever (both sides) (3.2) 101.2

EXxx-OMW0014CN

-SPN3A, . 3-113-12 MDI/MDI-X (FSU) . 3-11 2 MDI MDI-X RJ45 M12 RJ45 M12 TD++ 1 1 1 1 RD++ RD++ 3 2 3 2 TD++ TD-2 3 2 3 RD-+ RD-6 4 6 4 TD-MDI MDI RJ45 M12 RJ45 M12 TD++ 1 1 1 1 TD++ RD++ 3 2 3 2 RD++ TD-2 3 2 3 TD-RD-6 4 6 4 RD-+ MDI-X MDI-X RJ45 M12 RJ45 M12 RD++ 1 1 1 1 RD++ TD++ 3 2 3 2 TD++ RD-2 3 2 3 RD-TD6 4 6 4 TD. 3-11 20 No.EX-OMW0014CN-A 1 IO OFF EX245-SPN2A/SPN3A (FSU

Vacuum Unit

1/2 digit, 7-segment LED, 1-color display (Red) Display accuracy 2% F.S. 1 digit (Ambient temperature at 25 3C) Indicator light Lights up when output is turned ON.

VM

1 !2 NBR NBR !3 !

CEx-OMQ0011

( ) f. g.( ) h. i. j. k. l. 4. 4. 4. 4. 5. 5. 5. 5. 6. 6. 6. 6. 7. 7. 7. 7. 2. 2. 2. 2. 8. 8. 8. 8. ,, 1. 1. 1. 1. 9. 9. 9. 9. 2. 2. 2. 2. - 10. 11. ( )70% ( )35% 1. 1. 1. 1. 1. 1. 1. 1. 2. 2. 2. 2. 3 1. 1. 1. 1. 0.10.8MPa 0.30.5MPa :560 3. 3. 3. 3. ( ( ( ( ) ) ) ) 2. 2. 2. 2. 35% ) 1. 1. 1. 1. 5 2. 2. 2. 2. - 1. 1. 1. 1. 1. 1. 1. 1. ( ( ( ( 6 6 6 6 ) ) ) ) 2. 2. 2. 2. 3. 3. 3. 3. 2

Solid State Auto Switches

Grommet (Perpendicular) S99V1/2, T99V1/2 2-color indication Tie-rod mounting style Diagnostic output Water resistant With timer 1626 With Pre-wired Connector Connector Pin Arrangement Color distinction of lead wire Meaning of contact number Sensor type 1 pin 2 pin 3 pin 4 pin 1 pin 2 pin 3 pin 4 pin OUT () DC 2-wire type Brown OUT (+) Blue OUT () OUT ( ) DC 2-wire, Non-polar type Blue Brown

70pvpump

Port size on the side of main fluid Rc 3/8 G 3/8 NPT 3/8 NPTF 3/8 3/8" tubing 3/8" tubing 3/8" tubing 3/8" tubing 1/2" tubing 1/2" tubing 1/2" tubing 1/2" tubing Connection size in the side of air 03 F03 Rc 1/4 Threads G 1/4 Threads NPT 1/4 Threads PA331 (Assembled in normal environment) PAP331 (Assembled in clean room) For areas where it is not possible to manually operate the reset button

IDX-OM-W023

. 2-2 2-2-3 . 2-2 2-2-4 . 2-3 2-2-5 . 2-3 2-3 . 2-5 3 / 3-1 . 3-1 3-2 . 3-1 3-3 . 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 4-2-1 () . 4-1 1 4-2-2 . 4-1 4-2-3 . 4-2 5 5-1 . 5-1 6 6-1 . 6-1 6-2 GWP . 6-3 6-3 . 6-4 6-4 . 6-5 6-5 . 6-7 7 C 7-1 . 7-1 7-2 . 7-1 8 K 8-1 . 8-1 8-2 . 8-1 9 L 9-1 . 9-1 9-2 . 9-1 9-3 . 9-2 9-4 . 9-2 10 M 10-1

IDX-OM-W029

2-3 . 2-4 3 3-1 . 3-1 3-2 . 3-1 3-3 . 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 4-2-1 . 4-1 4-2-2 . 4-1 4-2-3 . 4-2 5 5-1 . 5-1 5-2 . 5-3 1 6 6-1 . 6-1 6-2 GWP . 6-2 6-3 . 6-2 6-4 . 6-3 6-5 . 6-5 7 C 7-1 . 7-1 7-2 . 7-1 8 L 8-1 . 8-1 8-2 . 8-1 8-3 . 8-2 8-4 . 8-2 9 M 9-1 . 9-1 9-2 . 9-1 9-3 . 9-2 9-4 . 9-2 10 R 10-1 . 10-1 10-

Stopper Cylinder

2 20 20 10 10 10 5 4 3 4 5 3 4 5 3 2 2 2 1 1 1 1 5 10 20 10 5 1 20 30 10 5 1 20 30 Transfer speed (m/min) Transfer speed (m/min) Transfer speed (m/min) Lever-type weight of transferred object and transfer speed graphs (graphs (2) and (3)) show the values at room temperature (20 to 25C).