PSxx-OMU0002CN

-100.0~100.0 kPa T 2 X NPN2 Y PNP2 R NPN2+1 T PNP2+1 A1 A S NPN2+1 V PNP2+1 1: A2 B M SI3 P psi2 2 3 kPaMpa B D + M5 M5 1 01 R1/8 N01 NPT1/8 C4H 4mm J (2m) C6H 6mm N7H 1/4 inch C4L 4mm C6L 6mm N7L 1/4 inch -8No.PS-OMU0002CN-D / A ZS-46-A1 38L(2 ) B ZS-46-A2 38L(2 ) ZS-46-B + ZS-46-D ZS-46-5L 5 2m ZS-27-01 R1/8 ZS-46-N1 NPT1/8 ZS-46-N2 4mm ZS-46-C4H 6mm ZS-46-C6H 1/4 inch

PSxx-OMU0008CN

ZSE20C(F)/ISE20C(H) () No.1 ON ON OFF Yes No.2 No OFF ON No.1 OFF No.3 No.4 No.5 () No.6 No.7 -68No.PS-OMU0008CN-D No.8 No.9 No.9 No.10 No.11 No.12 No.13 No.14 No.15 No.16 No.17 [Er13] No.18 No.19 -69No.PS-OMU0008CN-D No.

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

Type Metric size Inch size Elbow Universal 2 3 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 01 23 3.2 4 6 8 10 12 03 05 07 09 11 13 04 06 08 10 12 Control type Meter-out Meter-in 0 1 Use 1/8" tube.

Pressure switch for energy-saving control ejector with N.O. type valve

When 1 digit = 1 kPa, the pressure is given with an increment of Digit (Min. setting unit) 1 kPa, e.g., 1, 2, 3,, 99, 100. E Energy saving automatic control Indicate that the vacuum pressure during adsorption is monitored and ON and OFF of the ejector is automatically controlled.

Manifold Regulator Modular Type ARM2500/3000 Series

5 to 60C (No freezing) Ambient and fluid temperature Fluid Air Construction Relieving type Symbol Port Size/Weight Common IN Individual IN Port size Weight (kg) IN Pressure gauge port size 1 Model Piping IN side OUT side Body Regulator End plate End plate OUT IN 2 1 2 OUT Common IN 1 4 3 8 1 8 ARM2500 0.26 0.06 Individual IN 1 4 1 4 1 8 Common IN 3 8 1 2 1 8 IN 1 OUT 2 2 OUT ARM3000 0.47

Dual Speed Controller with One-touch Fitting Series ASD 1

Port size 10 8 6 12 1/8" 1/4" 3/8" 5/32" 3/16" 5/16" 4 ASD230F-M5 ASD330F-01 ASD430F-02 ASD530F-02 ASD530F-03 ASD630F-04 M5 x 0.8 R 1/8 R 1/4 R 1/4 R 3/8 R 1/2 ASD230F-U10/32 ASD330F-N01 ASD430F-N02 ASD530F-N02 ASD530F-N03 ASD630F-N04 10-32 UNF NPT 1/8 NPT 1/4 NPT 1/4 NPT 3/8 NPT 1/2 Specifications Fluid Air Proof pressure 1.5 MPa Max. operating pressure 1 MPa Min. operating pressure

ASD

. area (mm2) 5.3 Note 1) Max. operating pressure: 0.5MPa, Temperature: 20C 4.1-13 Dual Speed Controller with One-touch Fittings Series ASD How to Order ASD 3 30F 01 06 S K Options Body size _ K None Hexagon lock nut M5 standard 1/8 standard 1/4 standard 3/8 standard 1/2 standard 2 3 4 5 6 With sealant Style 3 Universal Applicable tubing O.D.

AMG

150 H 166 187 187 218 218 241 241 277 334 1/8, 1/4, 3/8 1/4, 3/8 1/2 3/8, 1/2 3/4 1/2, 3/4 1 3/4, 1 1, 11/2 5.5 6 6 7 7 9 9 9 11 10 10 10 10 10 10 10 10 10 63 76 76 90 90 106 106 122 160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 100 113 119 145 151 166 173 200 253 13 13 16 16 19 19 22 22 32 159 172 178 204 210 225 232 259 311 AMG150 AMG250 AMG350 AMG450 AMG550 AMG650 AMG150

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

47 64 148 M8 35 64 19 50 11 7 14 115 49 20 16 50 78 162 M10 38 77 19 63 16.5 16.5 13.5 6.5 16.5 Bore size (mm) J K L MM ML NN OA OB OL P PA PB PW Q R S T U VA 18 M8 x 1.25 7.5 M8 x 1.25 27 27 40 20 6.6 11 1/8 38 30 104 44 118 86 106 40 13 21.5 9 M10 x 1.5 9 32 32 46 22 8.6 14 1/4 47 40 130 60 146 110 130 50 M10 x 1.5 14 28 39 39 58 22 8.6 14 1/4 55 50 130 70 158 124 142 63 M10 x 1.5 9 M10

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

13 15 Rc 1/8 ZCU 10.5 13 27.5 75 89 90 2 ZPT16F10-0-A10 16 18 M14 x 1 Additional Dimensions by Stroke (mm) AMJ 6.2 Hexagon width across flats 19 Misc.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

Qty. 1 1 2 2 2 2 4 2 !4 !

Vacuum Equipment

Selection Procedure Max. adsorption flow from selection graph (4) Response time on (P . 13-1-13) Leakage volume /min (ANR) (P . 13-1-13) (2) B if there is leakage when adsorbing up a workpiece Ejector Select an ejector having a greater maximum suction flow rate than that of Qmax. given above.

VS 8-2/VS 8-4

, NPTF 1/8" Pilot port 2 x Rc, G (According to ISO1179-1), NPTF 1/2" 3(R) port M4 x 7 earth thread Rc, G (According to ISO1179-1), NPTF 1/8" Pilot exhaust port C1 (M12) I E 95 65.4 41.2 0 0 3/5 3/5 2 2 2 2 14 12 60 1 1 39 4 4 4 4 30 21 1 1 33.5 24.5 34.5 17 13 C2 (M12) 27 (n-1) x 27 64.5 2 x Rc, G (According to ISO1179-1), NPTF 1/2" 1(P) port 2n x Rc, G (According to ISO1179-1), NPTF 3/8"

Title not found

/8 FB1 x 4 1/8 FB2 1/8 FB1 55 1/8 FB2 x 2 1/8 FB2 x 3 1/8 FB2 x 5 1/8 FB2 x 7 1/8 FB2 x 6 1/8 FB2 x 4 7/8 1/8 FB3 1/2 x 3 not shown 23/32 1/2 11/32 27/32 1 13/16 1/2 13/16 1/2 13/16 1/2 56 1/8 FB3 1/8 FB3 x 2 1/8 FB2 1/2 1/8 FB4 1/8 FB3 x 3 1/8 FB5 1/8 FB6 1/8 FB8 1/8 FB3 1/2 Elbows: 1/8 NPT Female to Tube 45 9/16 Hex Typ. 9/16 Hex 1/2 1/2 19/32 21/32 29/32 1/2 1/2 1/2 Typ. 5/8 25/32 1/2

Micro Mechanical Valve Series VM1000

(R) 1 (P) Poppet VM200 2 port 3 port (A) 2 (A) 2 Side ported 1/4 Page 13 12 12 10 10 1 (P) 3 (R) 1 (P) VM400 3 port (OUT) 2 3 10 12 1 (N.C.)

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

Pad diameter (mm) 10 10 Vacuum entry (Refer to Table 1 for applications.) 13 13 16 16 20 20 25 25 Table 1 Vacuum entry/Mounting thread diameter 32 32 Mounting thread diameter (male thread) 40 40 10 to 16 20 to 50 Pad diameter (mm) 50 50 M10 x 1 M14 x 1 Thread diameter, Piping diameter Connection A10 A14 Symbol M5 x 0.8 B5 Pad type Female thread Vacuum entry Rc(PT)1/8 B01 F Ball joint

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Parallel I/O Connector I/O 2 Wiring example NPN JXC73 PNP JXC83 24 VDC BUSY1 24 VDC +COM3 Load Load 10 BUSY1 10 +COM3 1 1 Load Load BUSY2 30 BUSY2 30 +COM4 +COM4 21 21 Load Load BUSY3 11 BUSY3 11 N.C. 1 N.C. 1 2 2 Load Load BUSY4 31 BUSY4 31 N.C. 1 N.C. 1 22 22 Load Load AREA1 12 AREA1 12 N.C. 1 N.C. 1 Load Load AREA2 32 AREA2 32 3 3 Load Load AREA3 13 AREA3 13 N.C. 1 N.C. 1 23 23 Load Load

Vacuum Pad: Ball Joint Type

: 20 to 50 mm Stroke: 20 to 50 mm ZPT ZPR ZPT ZPR Dimensions: 10 mm Strokes Dimensions: 10 mm Strokes (mm) (mm) Q: 6 Q: 8 Q: 6 Q: 8 A B C D F H I J K P A B C D F H I J K P K P Y XT661 Model Model K P ZPT20F10-0-A14 ZPT40F10-0-A14 18.5 39 51.5 1 18 136.5 13 1 40 5 1 2.5 20 22 40 43 13 15.5 36 48.5 50 1 15 13 1 33.5 13 1 37 12.5 52.5 50 ZPT25F10-0-A14 ZPT50F10-0-A14 19.5 40 1 19 137.5 141 6

HRX-OM-X084

water (Water-cooled type) . 8-11 8.4 Replacement of consumables . 8-13 8.4.1 Replacing Particle Filters .8-13 8.4.2 Replacing the DI filter (Option DM) .8-13 8.5 Electrical schematic diagram . 8-16 8.5.1 HRR010-A/W-10.8-16 8.5.2 HRR010-A/W-20.8-18 Chapter 9 Documents . 9-1 9.1 Specifications . 9-1 9.1.1 HRR010-A-10/20. 9-1 9.1.2 HRR010-W-10/20. 9-3 9.1.3 Refrigerant with GWP reference .

HRX-OM-W002

1 1 3 2 3 2 1 1 4 1 2 3 1 4 Model /A /B A E E B 3 2 1 1 BK BL BR BR BR BR BR BR BL BL BL BL BL BL BL BL BL RS232C DIO RS485 FG 13 15 16 12 10 11 14 6 8 9 3 5 7 2 4 1 13 15 16 12 10 11 14 1 1 11 6 8 9 3 8 3 9 6 9 3 6 7 2 5 2 5 7 5 7 2 10 12 13 15 1 4 4 4 14 Thermister T3 t BR BR BR BR BR BR BL BL BL BL BL BL BL BL BL BL BR BR BR BR BR BL BL BL BL BL BL BL BL BL BL BL BL BL BL BL BL BL BL WH