ZX

20 1 11.5 7 7 8 8 Manual override (Push and turn the locking type override.)

70pvpump

Panel mounting possible Selectable pressure unit Panel mounting possible Selectable pressure unit Auto shift function Compound pressure Selectable pressure unit R thread Panel mounting possible Selectable pressure unit Auto shift function URJ TSJ Panel mounting possible Selectable pressure unit Auto shift function Note Page 16-6-1 16-6-7 16-5-1 16-7-1 16-8-1 16-4-5 16-2-1 16-2-15 16-2-41

LECA6_C

A 10m GND A-1 13 A B-2 7 B 15m A A-2 6 C 20m B B-3 9 B A-3 8 Z B-4 11 Z A-4 10 3 4 B-1 5 A-1 1 B-3 2 A-3 5.6 23.7 10.5 A1 2 (7.0) 14.2 1 3 2 1 B1 12.7 3 4 A4 B4 B1 (6.7) A1 10.2 2 1 18 A3 B3 (5.7) 15 16 11 30.7 45 - 11.3 I/O No.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

mm/s 10 10 ISO Class 8 10 10 0 L/min (ANR) ISO Class 7 ISO Class 7 10 10 Particle concentration [particles/m3] Particle concentration [particles/m3] ISO Class 6 ISO Class 6 10 10 0 L/min (ANR) 50 L/min (ANR) ISO Class 5 ISO Class 5 10 10 1000 1000 20 L/min (ANR) ISO Class 4 ISO Class 4 100 100 70 L/min (ANR) 30 L/min (ANR) 10 10 1 1 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0.1 0.2 0.3 0.4 0.5 0.6 Particle

Sine Rodless Cylinder Series REBR Direct Mount Type

27.8 8.5 10 44 42.5 44 41 23.5 43 14.5 41 6.5 23.5 REBR32 19.5 11 6.5 3 1.5 35 10.5 16 55 53.5 55 52 29 54 20 51 7 29 K L LD M N P PW QW T TC W WP J x E Q MM Model REBR15 14 53 4.3 5 6 M5 x 0.8 32 18 21 17 25 M5 x 0.8 x 7 84 M4 x 0.7 REBR25 15 70 5.6 6 6.5 Rc 1/8 43 20 25.5 22.5 40 21.5 M6 x 1 x 8 105 M5 x 0.8 REBR32 13 76 7 7 8.5 Rc 1/8 54 26 33 28 50 27 M8 x 1.25 x 10 116 M6 x 1 X Y Z

Title not found

jlable 1 7 Not availaHe wih monitor oubut 4 18 Not avaihde wilh pressure range 19'--4O' inM ousril combination noi a\,'aihble {:-_J4"-':

CEx-OMQ0011

( ) f. g.( ) h. i. j. k. l. 4. 4. 4. 4. 5. 5. 5. 5. 6. 6. 6. 6. 7. 7. 7. 7. 2. 2. 2. 2. 8. 8. 8. 8. ,, 1. 1. 1. 1. 9. 9. 9. 9. 2. 2. 2. 2. - 10. 11. ( )70% ( )35% 1. 1. 1. 1. 1. 1. 1. 1. 2. 2. 2. 2. 3 1. 1. 1. 1. 0.10.8MPa 0.30.5MPa :560 3. 3. 3. 3. ( ( ( ( ) ) ) ) 2. 2. 2. 2. 35% ) 1. 1. 1. 1. 5 2. 2. 2. 2. - 1. 1. 1. 1. 1. 1. 1. 1. ( ( ( ( 6 6 6 6 ) ) ) ) 2. 2. 2. 2. 3. 3. 3. 3. 2

Solid State Auto Switches

Weight (g) D-Z73 D-Z76 D-Z80 Auto switch model 0.5 m (Nil) 3 m (L) 5 m (Z) 7 31 50 10 55 7 31 Lead wire length D-Z73, Z80 D-Z76 Dimensions (mm) M2.5 x 4L Slotted set screw M2.5 x 4L 27.6 1.5 Slotted set screw 30.5 2.3 2.5 6.2 6.2 Indicator light D-Z80 without indicator light Indicator light DD5.7 5.5 2.7 Most sensitive position Most sensitive position 3.4 12.5 12.5 1641 Reed Auto Switch

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

7 w !8 !4 !3 !7 w !8 !4 !3 AS-F TMH ASD AS AS-FE KE r i o e y !6 !5 r o e y !6 !5 q AS-FG AS-FP AS-FM AS-FM AS-D AS-T ASP !9 !1 q !2 t !0 !1 u !2 t !0 i ASN AQ Component Parts Component Parts Material Description Note Description No. Note Material No.

Series AS-FM/AS-M/ASD-FM

Symbol JIS symbol 1 Series AS-FM How to Order AS 2 2 1 1 F M 01 06 Body size Option 1 2 M5 standard 1/8, 1/4 standard Nil S None With sealant M5 and U10/32 are not available with sealant.

IDX-OM-W029

2-3 . 2-4 3 3-1 . 3-1 3-2 . 3-1 3-3 . 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 4-2-1 . 4-1 4-2-2 . 4-1 4-2-3 . 4-2 5 5-1 . 5-1 5-2 . 5-3 1 6 6-1 . 6-1 6-2 GWP . 6-2 6-3 . 6-2 6-4 . 6-3 6-5 . 6-5 7 C 7-1 . 7-1 7-2 . 7-1 8 L 8-1 . 8-1 8-2 . 8-1 8-3 . 8-2 8-4 . 8-2 9 M 9-1 . 9-1 9-2 . 9-1 9-3 . 9-2 9-4 . 9-2 10 R 10-1 . 10-1 10-

energy saving effect

(English 1 pc./Japanese 1 pc.), Operation Manual (for installation/operation) 2 pcs. (English 1 pc./Japanese 1 pc.), Y-strainer (40 meshes) 25A, Barrel nipple 25A, Anchor bolt fixing brackets 2 pcs.

EXxx-OMV0017-D

Diagnostics map Error code Description Item Bit no. 1 Detection of a short circuit of US1 or US2 6 or 7 2 Detection of the range upper limit 3 3 Detection of the range lower limit 2 6 Detection of unconnected load 5 System diagnostic 1 7 Detection of the user setting upper limit 1 8 Detection of the user setting lower limit 0 9 Detection of the upper limit of the ON/OFF cycles 4 16 Detection

15

1 @4 !2 !3 @1 !8 !7 !6 $4 !9 @0 @7 @2 #1 r q w e y t i u !5 !1 !4 #2 #0 !0 @8 @6 #5 #3 @5 $2 #7 #6 With bumper bolt CY1SG/Centralized piping type For 6 For 6 $0 #9 23b 29b $0 #9 #4 $1 $3 With bumper bolt With shock absorber 1502 Magnetically Coupled Rodless Cylinder Slider Type: Slide Bearing CY1S Series Component Parts No. No.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

7 !0 q !1 t o AQ !0 u !1 t o !7 ASV AK Component Parts Description Material Note Description No. Note Material No. ASS NBR U seal Body A PBT q !1 NBR U seal Elbow body PBT w !2 ASR POM, Stainless steel (3) Cassette Handle Black PBT (1) e !3 NBR Seal Body B Electroless nickel plated Brass r !4 ASF NBR O-ring Body B Electroless nickel plated Brass t !

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

0 A B 1 0 A B 1 0 A B 1 0 9 61.5 A A A A R4.5 26 62.5 97 = 4.5 (5.5) (35) (L3) (5.2) 52 (L4) Stations D side U side 1 2 3 4 5 6 7 8 n 2-C6 P(SUP) port P A P A A A A A A A 24.5 (11) 13.5 R B R B B B B B B B (7.5) 7 2-C6 R(EXH) port 19.2 P = 11 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 threads Broken lines indicate DIN rail

OMR0031

(The motor is energized.) (1) IN0 Input (4) Turn the "DRIVE" input ON. (1) IN1 (1) PLC IN2 The Card Motor starts the Return to Origin operation in the retracted direction. (1) IN3 (5) The "BUSY" output turns ON. (2) ALARM (6) The "BUSY" output turns OFF. OUT0 (7) Output INP (7) The "OUT0" (INP) output turns ON. (6)(5) BUSY (8) The RESET signal for the Multi-counter is turned on.

AS-FG/ASD-FG

1710 1.5 2.7 3.5 4 6 7 10 12 14 12 26 Effective area mm Note) The flow rate values are at a pressure of 0.5MPa and temperature of 20C. 1 Series AS-FG How to Order AS 2 1 1 3 F G 01 06 Body size Option 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Nil S None With sealant M5 and U10/32 are not available with sealant.

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Note 7) Note 7) Note 8) Note 8) Note 8) Note 1) Options B, G, H are shipped together, (but not assembled).

High Vacuum L Type Valve

AS568-025-XN1 7 XL-OMS0001-B Bellows assembly, Nut assembly 16 25 40 50 Valve size Description Part indication No. Bellows assembly (7) XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 Nut assembly (9) XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 63 80 Valve size Description Part indication No.