Compact Cylinder

Mass Unit: g D-M9N(V) D-M9P(V) D-M9B(V) Auto switch model Caution 0.5 8 8 7 Precautions 1 14 14 13 Lead wire length (m) Fix the auto switch with the set screw attached to the auto switch body.

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

46 52 65 75 95 114 32.5 38 46.5 56.5 72 89 12 16 20 20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 27 27 31.5 31.5 38 38 13 14 15.5 16.5 19 19 1/8 1/4 1/4 3/8 3/8 1/2 16 16 16 16 16 16 84 84 94 94 114 114 4 4 5 5 5 5 4 4 5 9 11.5 17 M6 X 1.0 M6 X 1.0 M8 X 1.25 M8 X 1.25 M10 X 1.5 M10 X 1.5 6.5 9 10.5 12 14 15 6 6 7 7 10 10 47 51 58 58 72 72 M10 X 1.25 M14 X 1.5 M18 X 1.5 M18 X 1.5 M22 X 1.5

Water-cooledThermo-chiller

24 VDC output 14 24 COM output 24 COM Custom function Note) Setting at the time of shipment from factory 3 Run/Stop signal Run/Stop signal 1 4.7 k 16 Input signal Output signal Run/Stop signal 2 4.7 k 4 DIO REMOTE signal 1 4.7 k 17 DIO REMOTE signal 2 4.7 k 6 Operation condition signal Output signal 1 19 Warning signal Output signal 2 Circuit diagram Digital 7 circuit Fault signal Output

Compact Electric Actuator Series LG1

CN1 CN2 Shuts off 3 12 13 9 10 7 8 20 17 PF SG CR PP PG NP NG SD V24 SON LSN LSP ALM SG P5 19 OP 4 11 LG V+ 1 P5 LG MR MRR MD MDR SD 20 12 7 6 SG P5 LG MR MRR MD MDR SHD P5 LG MR MRR MD MDR SHD 7 8 1 2 4 5 9 7 8 1 2 4 9 Detector 17 16 Plate 5 (Note 2) 11 15 14 2 12 (Note 6) Connect the shielding wire securely to the ground plate inside the connector.

VQ7-6/7-8

ISO Standard Solenoid Valve: Size 1, 2 Metal Seal/Rubber Seal Series VQ7-6/7-8 (Size 1) (Size 2) VK VZ VF VFR VP4 Conforms to ISO standard 5599/I Interface conforms to ISO standard Size 1 (VQ7-6) and Size 2 (VQ7-8).

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

The load current applied to the switch output has exceeded the maximum value. 1 indicates the channel with an error. Over current error 1 1 During zero-clear operation, pressure over 7% F.S. is present. Note that the mode is returned to measurement mode automatically 1 second later. The zeroclear range varies by 1% F.S. due to variation between individual products.

LFE-OMY0008

NPN PNP 80 mA DC28 V NPN1 V (80 mA ) PNP1.5 V (80 mA ) 5 7 0.25 s/0.5 s/1 s/2 s/5 s 6 7 0.25 s/0.5 s/1 s/2 s/5 s 15 V 1 k 420 mA 600 2 (4 7 2 /6 11 ) 5 / 12 DC24 V10 45 mA () 64 No.LFE*-OMY0008 LFE1 LFE2 LFE3 9 IP65 050 () 3585R.H.() CE RoHS PPSFKM 3/8(10 A) 1/2(15 A) 3/4(20 A) 1(25 A) () 8 340 g 400 g 520 g 680 g 166 [] 20L/min 3(69 []) 4OFF (2 5 ) 5 100 (24 5 100

Transfer

7 !1 r #5 @3 @8 #6 y u t !5 #7 #8 @6 w !6 e &0 q &0 #4 #3 $8 $0 %9 ^0 #9 $6 $7 %9 !2 #1 !3 $9 %0 %1 !0 @2 @1 #2 ^2 ^5 $5 %2 @5 ^8 $4 ^1 @4 %4 %5 ^7 $3 #0 $2 %6 @7 ^4 o %7 ^9 ^6 @9 %8 ML2BS $1 %3 ^3 !

FILTER REGULATOR

81/4 1/8 30 1/43/8 M38X1.5 AW30-B 53 115.1 85.6 29.4 55 29.4 3.5 28 37.5 66.9 37.5 1/8 M42X1.5 M42X1.5 38.4 38.4 AW40-B 70 147.1 91.7 37.3 80 37.3 1.5 28 42.5 75.7 42.5 1/43/81/2 1/8 AW40-06-B 75 149.1 93.2 37.3 80 37.3 1.2 28 42.5 75.7 42.5 3/4 1/8 44.3 AW60-B 95 234.1 175.5 47.5 30 47.5 3.2 28 42.5 80.8 42.5 1 1/8 Optional Bracket mount dimensions Panel mount dimensions Model Q S T

Rotary One-touch Fittings Series KS/KX

17 14 12.8 1 8 1 4 1 8 17 23 23 29 37 55 63 81 75 92 14 4 13.4 10.4 8 1 4 17 17 18.5 15.2 6 26.1 18.0 3 8 1 4 10 3 8 1 2 3 8 1 2 22 18.5 21 7 22 36.3 29.5 24 12 24 20.9 8 22 46.1 46.1 Reference dimensions after R(PT) thread installation.

LG1H

7 !6 o !5 !1 i !4 Section A-A u Parts list Material Note No. Description No.

Electromagnetic Digital Flow Switch

1*2 gal/min 6*1*2 V V gal/min 7*1*2 V gal/min Port size Symbol Port size Applicable model LFE1 LFE2 LFE3 3 3/8 V 4 1/2 V 6 3/4 V 8 1 V *1 Options 4, 5, 6, and 7, which are not in SI units, are not for use in Japan due to the New Measurement Law. *2 Options 4, 5, 6, and 7 cannot be selected when the output specification is J or K.

Digital Flow Switch Series PFA For Air Series PFW For Water

Brown PFA703H PFA706H PFA712H 55 160 40 92 67 55 Rc 1, NPT 1, G 1 36 M5 x 0.8 8 OUT1 80mA Load Black 65 180 45 104 79 65 Rc 1 1/2, NPT 1 1/2, G 1 1/2 46 M6 x 1 9 ON OFF 75 220 55 114 89 75 Rc 2, NPT 2, G 2 56 M6 x 1 9 50msec PFA7H-(-M) 68 69 Analog output 1 to 5VDC 4 to 20mADC 5 20 Analog output [mA] Analog output [V] 1 4 Min. measured flow rate value Max. measured flow rate value Real-time

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

1 !2 !3 !4 !7 !

FILTER REGULATOR

81/4 1/8 M38X1.5 M42X1.5 M42X1.5 75.7 67.9 AW30K-B 53 115.1 85.6 29.4 55 29.4 3.5 28 37.5 66.9 37.5 1/43/8 1/8 38.4 AW40K-B 70 147.1 91.7 37.3 80 37.3 1.5 28 42.5 75.7 42.5 1/43/81/2 1/8 1/8 44.3 38.4 80.8 75.7 AW40K-06-B 75 149.1 93.2 37.3 80 37.3 1.2 28 42.5 75.7 42.5 3/4 AW60K-B 95 234.1 175.5 47.5 30 47.5 3.2 28 42.5 80.8 42.5 1 1/8 Optional Bracket mount dimensions Panel mount dimensions

NARM Series

) NARM2500 Individual IN 1 4 1 4 1 8 Common IN 1.04 (0.47) .24 (0.11) 3 8 1 2 1 8 NARM3000 Individual IN 3 8 3 8 1 8 Weight by number of stations lb (kg) Stations Model 2 3 4 5 6 7 8 9 10 1.50 (0.68) 2.12 (0.96) 2.71 (1.23) 3.33 (1.51) 3.92 (1.78) 4.54 (2.06) 5.14 (2.33) 5.75 (2.61) 6.37 (2.89) NARM2500 2.67 (1.25) 3.86 (1.75) 4.96 (2.25) 6.06 (2.75) 7.19 (3.26) 8.29 (3.76) 9.39 (4.26) 10.49

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Prevents Micro-Bubbles

8, 1/4, NPT 1/8, 1/4 Stainless steel 36 47 81 13 19 110.5 112.5 37 26 37 Rc 1/4, 3/8, NPT 1/4, 3/8 M6 x 1 (SUS) 46 60 99 16 20.5 138 142 47.5 33.5 50 Rc 3/8, 1/2, NPT 3/8, 1/2 M8 x 1.25 30 36 55 44 11 10 75.5 77 4 20 37 3.5 27 Rc 1/4, NPT 1/4 36 47 80 56 15 19 109.5 111.5 7.5 34 46 5.5 37 Rc 3/8, NPT 3/8 PPS 46 60 99.5 68 22 20.5 138.5 142.5 8 42 57 5.5 50 Rc 1/2, NPT 1/2 30 36 58.5

CKZ2N

1 12.5 8.5 M8 x 1.25 1 12.5 22 R7 R28 22 1 20 22 8.5 R7 22 20 NAAMS code K NAAMS code K Part no.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

1 and 2 L ranges.