HRX-OM-W002

Note1) Applicable model HRR012/018-A/W-10-T/MT HRR012/018/024/030-A/W-20-T HRR012/018/024/030-A/W-20-MT Rated flow50/60Hz Note23 L/min 7(0.36MPa)/10(0.42MPa) 10(0.42MPa)/14(0.40MPa) 10(0.32MPa/)/14(0.32MPa) Maximum pumphead 50/60Hz m 50 50 50 Pump Output W 320 550 Circuit protector A 15 15A10A for standard Recommended earth leakage breaker capacity A 15 Cooling capacity Note 4 W The cooling

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

C4, C6, M5 C3: One-touch fitting ass'y for 3.2 C4: One-touch fitting ass'y for 4 C6: One-touch fitting ass'y for 6 C6: One-touch fitting ass'y for 6 45.5 2.5 M5: M5 thread M5: M5 thread 10.5 (5) 21.5 Dimensions Equation L1 = 11n + 20 n: Station (Max. 24 stations) 7.5 L n 1 2 3 4 5 6 7 8 11 9 10 12 29 18 31 42 53 64 75 86 97 108 141 L1 L2 L3 119 130 152 50 62.5 75 87.5 100 112.5 125 125 162.5

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

51 VQZ1000 2 to 20 stations l l Rc(PT) 1/8 lll In-line SY C4(4) C6(6) C8(8) Rc(PT)1/8 2 stations: 193 Addition per/ station: 54 VV5QZ25 VQZ2 50 VQZ2 51 VQZ2000 lll l l Rc(PT) 1/4 2 to 20 stations SYJ In-line SX 2 stations: 398 Addition per/ station: 102 1(P)port Rc(PT)3/8 35(R)port Rc(PT)1/4 C6(6) C8(8) C10(10) Rc(PT)1/4 l l VV5QZ35 VQZ3 50 VQZ3 51 VQZ3000 2 to 20 stations VK In-line lll

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

Coil voltage 100V AC (50/60Hz) 200V AC (50/60Hz) 110V AC (50/60Hz) 220V AC (50/60Hz) 24V DC 12V DC Others 1 2 3 4 5 6 9 When requiring AC specification of grommet or special voltage, consult SMC. 2.10-4 VQZ100/200/300 Body Ported How to Order Valve VQZ200/300 VQZ 2 1 2 5 M C6 Series 2 3 VQZ200 Body width15mm VQZ300 Body width18mm Bracket F None With bracket SY SYJ Configuration VK Port

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

Coil voltage 1 2 3 4 5 6 9 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other Note) For the special voltages, please consult with SMC.

Low Profile Guide Type

Note 2) There are four YA and YB dimensions with a 50 mm stroke.

Magnetically Coupled Rodless Cylinder

Models suitable to satisfy the requirement of 100 (N) are CY332 or CY340. 300 100 200 50 100 20 30 40 50 10 Useable range 10 5 5 Useable range 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 7 8 9 10111213 7 8 9 1 01 11 21 3 1 41 5 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3B25 500 300 200 100 20 30 40 50 10 Useable range 5 1 0 1 2 3 4 5 6 7 8 9 10111213 Distance

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

Models suitable to satisfy the requirement of 100 (N) are CY332 or CY340. 300 100 200 50 100 20 30 40 50 10 Useable range 10 5 5 Useable range 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 7 8 9 10111213 7 8 9 1 01 11 21 3 1 41 5 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3B25 500 300 200 100 20 30 40 50 10 Useable range 5 1 0 1 2 3 4 5 6 7 8 9 10111213 Distance

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

mm/s Piston speed mm/s Piston speed mm/s (4) CY1F/m1 (5) CY1F/m2 (6) CY1F/m3 (7) CY1F/m4 30 30 30 30 20 20 20 20 CY1F25 CY1F25 CY1F25 CY1F25 10 10 10 10 CY1F15 CY1F15 CY1F15 5 5 5 5 Load mass kg Load mass kg Load mass kg Load mass kg 4 4 4 4 3 3 3 3 CY1F15 CY1F10 CY1F10 CY1F10 2 2 2 2 CY1F10 1 1 1 1 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 Piston speed mm

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

300 100 50 0.5 500 300 100 50 Piston speed mm/s Piston speed mm/s Piston speed mm/s Piston speed mm/s 8-16-7 7 Series CY1F Vertical Actuation 1.

CY1F

speed mm/s Piston speed mm/s 4 CY1F/m1 5 CY1F/m2 6 CY1F/m3 7 CY1F/m4 30 30 30 30 20 20 20 20 CY1F25 CY1F25 CY1F25 CY1F25 10 10 10 10 CY1F15 CY1F15 CY1F15 5 5 5 5 Load mass kg Load mass kg Load mass kg Load mass kg 4 4 4 4 3 3 3 3 CY1F15 CY1F10 CY1F10 CY1F10 2 2 2 2 CY1F10 1 1 1 1 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 Piston speed mm/s Piston speed mm

VZS

100 VAC, 50/60 Hz 200 VAC, 50/60 Hz Nil N T F Standard Rc Nil Z None With light/surge voltage suppressor NPT 1 110 VAC, 50/60 Hz Option NPTF S With surge voltage suppressor 220 VAC, 50/60 Hz G 2 position double 5 6 9 24 VDC 12 VDC Note) Indicator light is not available for grommet type.

IDX-OM-W011

2A ( 20V / 5m A) 143 O N 3 ( ) 5 /1 ( ) I D F Seri es 141 14 1 I D XO M W 011 14 T 144 PE 1 2 3 LN PE PE: L N: LN PE M 3 6. 5m m 1. 25m m 2 ( ) ( ) I D F Seri es 144 14 2 I D XO M W 011 14 T 145 I D F4E8E10T I D F4E8E20T I D F11E20T AC100/100,110V (50/60Hz) PE N L 1 2 AC200/200,220V (50/60Hz) PE N L 1 2 TB 3 TB 3 TDR MC TDR MC TDR ILS TDR ILS MC MC OLR OLR MC MC CM MC

IDX-OM-W014

/60Hz) CM 1 2 ILS FM PTC OLR PC 1 PTC PTC ILS CM AC200/200 (50/60Hz) AC230V (50Hz) PRS AC200/200,220 (50/60Hz) OLR C01 2 2 1 L C11 N TB PRS PE PC TB P FM C11 200V C11200V IDU6E-10 IDU6E-20/23 ILS ILS PTC AC200/200 (50/60Hz) AC230V (50Hz) PTC AC200/200,220 (50/60Hz) AC100/100,110 (50/60Hz) C01 L CM CM PC N OLR OLR PE TB PRS PRS FM P P FM C11 6-5 6 2 IDU Series 6-4 6 4 IDX-OM-W014

E-P HYREG ® Series VY1 1

G Description 04 06 10 02 03 04 02 03 04 VY110 0 1VY120 0 1VY130 0 1VY140 0 1VY170 0 11 1 0 2 VY190 0 11 2 4 0 VY1D00-M5 VY1A0 0 1-M5 VY150 0 1VY1B0 0 1M 0 5 1 01 02 01 02 PPA B VEX9-32A VEX5-32A VEX7-32A VEX3-32A VEXA-18-2A VEX1-18-1A Bracket (With bolt, washer) AL F VEX1-18-2A VEXA-18-3A G27-10-R1-X207 G G46-10-01 G36-10-01 G27-10-01 Pressure gauge AN120-M5 AN120-M5 Pilot EXH port silencer

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

. *2 Excludes the PF2M725 *3 Made to order (Produced upon receipt of order) Flow ratio*2 100: 1 25 50 100 200 Flow range [L/min] Port size Smallest settable increment 0.1 0.01 0.05 0.02 0.3 0.5 1 2 3 5 10 0.01 1 0.001 PF2M701 0.02 2 C43, C6, 1/8 PF2M702 0.05 5 PF2M705 0.01 0.1 10 PF2M710 0.3 25 PF2M725 C6, N7, 1/8 0.5 50 PF2M750 0.1 1 100 PF2M711 C8, N7, 1/4 2 200 1 PF2M721 New New Compatible

IDX-OM-W023

R T 600mm 1 10% () ( 60cm 1 ) 10% 3 IDU Series 5-1 5 1 IDX-OM-W023 5 () 60cm 1 2 INOUT INOUT () IDU Series 5-1 5 2 IDX-OM-W023 6 6-1 IDU8E-10/20 IDU11E-10/20 IDU15E1-10/20 50Hz 1.1 1.5 2.6 3/min (ANR)1 m 60Hz 1.2 1.7 2.8 0.7MPa 55 32 10 580 0.151.0MPa 240 (85%) AC100V 50/60Hz AC100/100110V10%(4) AC200V 50/60Hz AC200/200220V 10%(4) AC100V 50/60Hz 3.4/3.5 5.7/6.0 4.6

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

Coil voltage 1 2 3 4 5 6 9 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other Valve model Pilot valve model Note) VQZ115-L VQ110-M Note) For the special voltages, please consult with SMC. VQZ115-M VQ110-L 4-14-41

VZ100/300/500

Hz, 4.2/60 Hz 100 VAC: 45/50 Hz, 42/60 Hz 200 VAC: 22.5/50 Hz, 21/60 Hz Made to Order Specifications (For details, refer to page 4-6-46.)

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

Coil voltage 1 100V AC (50/60Hz) 200V AC (50/60Hz) 110V AC (50/60Hz) 220V AC (50/60Hz) 24V DC 12V DC Others Valve style Pilot valve style 2 3 VQZ115l-lLl VQ110l-lMl 4 VQZ115l-lMl VQ110l-lLl 5 6 9 Consult SMC when requiring grommet, AC specification and others. 2.10-39