Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

8 Rc(PT)1/4 Rc(PT)1/4 Rc(PT)3/8 Rc(PT)3/8 Rc(PT)1/2 Port size C85 Basic, Foot, Front flange, Rear flange, Single clevis, Double clevis, Center trunnion Mounting CG1 * 0.05MPa except locking parts.

SX

S 5 VDC R 3 VDC 1-6-55 56 Manifold Specifications SS5X3-41 SS5X3-42 SS5X5-41 SS5X5-42 SS5X7-42 SX340 SX340(R) SX540 SX540(R) SX740(R) Single base/B mount Common SUP/Common EXH 2 to 20 stations Base Side Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Model Applicable valve Manifold type P(SUP)/R(EXH) Valve stations Note) Location Direction A, B Porting specifications P, EA, EB port Rc 1 4 Rc 1 4 M5 x

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C10: 10 N11: 3/8" C12: 12 (Double sided type) ( ) 7 6 5 4 3 2 1 n D side Station U side VFR VQ7 M12 57.2 R R OUT 76.7 76.5 X 3 3 67.2 72 IN X B B B B B B B 49.5 46.2 P 12 P 12 25.6 30 25 A 1 A 1 A A A A A 10 13.5 M12 21.5 13 (7.5) 25 55 18 One-touch fitting [4(A), 2(B) port] Applicable tube O.D.: 4, 5/32" 6, 1/4" 8, 5/16" n: Stations L: Dimensions n L 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 L1

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

(With screws) 30, 40 1/4, 3/8, 1/2 VXZ30S-14A-1 50, 60 3/4, 1 VXZ50S-14A-1 Brass, Stainless steel 1/8, 1/4, 3/8 JSX20-12A-4 30 1/4, 3/8 20 Aluminum 1/8, 1/4, 3/8 VX021N-12A 30 1/4, 3/8 VX022N-12A Stainless steel Piping 2.

V

T Y P E W I T H O N E T O U C H F I T T I N G S P O R T S I Z E Symbol Cylinder Side Pilot Port 01 R(PT)1/8 M5x0.8 02 R(PT)1/4 Rc(PT)1/8 03 R(PT)3/8 Rc(PT)1/8 04 R(PT)1/2 Rc(PT)1/4 F02 R(PT)1/4 G(PF)1/8 F03 R(PT)3/8 G(PF)1/8 F04 R(PT)1/2 G(PF)1/4 N01 NPT1/8 10-32UNF N02 NPT1/4 NPT1/8 N03 NPT3/8 NPT1/8 N04 NPT1/2 NPT1/4 Courtesy of Steven Engineering, Inc. !

Vacuum Pad

x 1.5 Width across flat 22 (Hexagon) 1/8 (Rc, NPT, NPTF) M16 x 1.5 M14 x 1 Width across flat 22 (Hexagon) 1/8 (Rc, NPT, NPTF) Width across flat 24 (Hexagon) 70 Width across flat 19 (Hexagon) 1/8 (Rc, NPT, NPTF) 6 6 25 4 x M5 x 10 Width across flat 24 (Hexagon) 6 6 25 Width across flat 19 (Hexagon) 45 5 5 25 4 x M4 x 8 E F G 28 3 x M3 x 8 E F G E F G Y Y Y 3 8 8 34 40 18 C C C A A A B B B

Vacuum Pad

x 1.5 Width across flat 22 (Hexagon) 1/8 (Rc, NPT, NPTF) M16 x 1.5 M14 x 1 Width across flat 22 (Hexagon) 1/8 (Rc, NPT, NPTF) Width across flat 24 (Hexagon) 70 Width across flat 19 (Hexagon) 1/8 (Rc, NPT, NPTF) 6 6 25 4 x M5 x 10 Width across flat 24 (Hexagon) 6 6 25 Width across flat 19 (Hexagon) 45 5 5 25 4 x M4 x 8 E F G 28 3 x M3 x 8 E F G E F G Y Y Y 3 8 8 34 40 18 C C C A A A B B B

Vacuum Pad

x 1.5 Width across flat 22 (Hexagon) 1/8 (Rc, NPT, NPTF) M16 x 1.5 M14 x 1 Width across flat 22 (Hexagon) 1/8 (Rc, NPT, NPTF) Width across flat 24 (Hexagon) 70 Width across flat 19 (Hexagon) 1/8 (Rc, NPT, NPTF) 6 6 25 4 x M5 x 10 Width across flat 24 (Hexagon) 6 6 25 Width across flat 19 (Hexagon) 45 5 5 25 4 x M4 x 8 E F G 28 3 x M3 x 8 E F G E F G Y Y Y 3 8 8 34 40 18 C C C A A A B B B

Vacuum Pad

x 1.5 Width across flat 22 (Hexagon) 1/8 (Rc, NPT, NPTF) M16 x 1.5 M14 x 1 Width across flat 22 (Hexagon) 1/8 (Rc, NPT, NPTF) Width across flat 24 (Hexagon) 70 Width across flat 19 (Hexagon) 1/8 (Rc, NPT, NPTF) 6 6 25 4 x M5 x 10 Width across flat 24 (Hexagon) 6 6 25 Width across flat 19 (Hexagon) 45 5 5 25 4 x M4 x 8 E F G 28 3 x M3 x 8 E F G E F G Y Y Y 3 8 8 34 40 18 C C C A A A B B B

HRX-OM-X010

of Model Label . 1-7 1.5 Safety Measures . 1-8 1.5.1 Safety Precautions . 1-8 1.5.2 Safety Interlock system . 1-9 1.5.3 Lockout/Tagout . 1-10 1.5.4 Protective equipment . 1-12 1.6 Emergency Measures. 1-13 1.6.1 Emergency off [EMO] switch . 1-13 1.7 Waste Disposal . 1-15 1.7.1 Disposal of refrigerant and compressor oil. 1-15 1.7.2 Circulating fluid disposal. 1-16 1.7.3 System disposal . 1

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to 8) L1 kit : Stations (1 to 8) L2 kit : Stations (1 to 8) !

VQ7-6/7-8

How to Order Sub Plates VS7 1 A02 Port size Specifications Side port Rc1/4 Piping specifications A02 A03 B02 B03 Type Weight kg Piping location 1 (P), 2 (B), 4 (A) port size 3 (R2), 5 (R1) port size Side port Rc3/8 Bottom port Rc1/4 VS7-1-A02 VS7-1-A03 VS7-1-B02 VS7-1-B03 Rc1/4 Rc3/8 Bottom port Rc3/8 Side Rc3/8 Rc3/8 Ports 3 (R2) and 5 (R1) are Rc3/8 0.37 Rc1/4 Bottom Rc3/8 1 Series VQ7

VQ7-6/7-8

VFR PA A B VP4 L1 L2 B A A PA VZS A B SMC VFS PA A VS4 B VQ7 PA A L side R side (2n-1/8) EVS 38 D side VFN 3 68.5 (A, B port) 4n-1/4, 3/8 16 120.5 (Single) 44 155 (3 position) 145 (Double) 55 77.5 121 PA 14 PB 12 1 R 3 5 65 54 P 39 (Pilot pressure EXH port) 4-1/8 SMC 21 R2 R1 17 17 (P , R port) 6-3/8 26.5 26.5 L Dimension n: Stations 10 9 8 7 6 5 4 3 2 1 Formula L1 L1 = 43n + 64 494 451

VQ7-6/7-8

2 (Cable 8 to 10) G1/2 (Cable 8 to 10) 153(166) 153(166) 141(154) 108.5(121.5) 141(154) 108.5(121.5) 50(63) 50(63) 5 3 38(53) 5 3 38(53) 32(42) 23(30) 32(42) 23(30) 1 1 2-3/8, 1/2, 3/4 2-3/8, 1/2, 3/4 3/8, 1/2, 3/4 R1, R2 port X(PE) port 1/8 3/8, 1/2, 3/4 R1, R2 port X(PE) port 1/8 30(42) 30(42) 30(42) 30(42) P port P port ( ): 3/4 Dimensions inside are for rubber seals. ( ): 3/4 3-10-24

Prevents Micro-Bubbles

8, 1/4, NPT 1/8, 1/4 Stainless steel 36 47 81 13 19 110.5 112.5 37 26 37 Rc 1/4, 3/8, NPT 1/4, 3/8 M6 x 1 (SUS) 46 60 99 16 20.5 138 142 47.5 33.5 50 Rc 3/8, 1/2, NPT 3/8, 1/2 M8 x 1.25 30 36 55 44 11 10 75.5 77 4 20 37 3.5 27 Rc 1/4, NPT 1/4 36 47 80 56 15 19 109.5 111.5 7.5 34 46 5.5 37 Rc 3/8, NPT 3/8 PPS 46 60 99.5 68 22 20.5 138.5 142.5 8 42 57 5.5 50 Rc 1/2, NPT 1/2 30 36 58.5

High Purity Chemical Valve

19 110.5 112.5 37 26 37 Rc 1/4, 3/8, NPT 1/4, 3/8 M6 x 1 46 60 99 16 20.5 138 142 47.5 33.5 50 Rc 3/8, 1/2, NPT 3/8, 1/2 M8 x 1.25 30 36 55 44 11 10 75.5 77 4 20 37 3.5 27 Rc 1/4, NPT 1/4 36 47 80 56 15 19 109.5 111.5 7.5 34 46 5.5 37 Rc 3/8, NPT 3/8 PPS 46 60 99.5 68 22 20.5 138.5 142.5 8 42 57 5.5 50 Rc 1/2, NPT 1/2 30 36 58.5 44 14.5 10 79 80.5 4 20 37 3.5 27 Rc 1/4, NPT 1/4

Fieldbus system EtherNet/IP compatible SI Unit

: direct 1: swap 16 bit 2: swap 32 bit 3: swap all 01h to 74h IO-Link master 0Ah Get/Set Byte swap USINT 1 0: 2/2/2/2 1: 4/4/4/4 2: 8/8/8/8 3: 16/16/2/2 4: 32/2/2/2 5: 16/16/8/8 6: 16/16/16/16 7: 24/24/8/8 8: 24/24/24/24 9: 32/32/8/8 10: 32/32/32/32 75h IO-Link master Process data mapping USINT : Port1/Port2/Port3/Port4 process data size (I/O byte) 1: The instance number 01h to 0Ah is allocated

HRX-OM-Q026

(-)*8 Mod bus Communication speed 19.2 (-)*8 Slave address ---(1)*8 Simple communication Serial communication Communication speed ---(9.6)*8 BCC ---(ON)*8 Data length ---(8BIT)*8 Parity check ---(NON)*8 protocols Stop bit length ---(2BIT)*8 Response delay time ---(0)*8 Communication range ---(RW)*8 Contact input signal 1 RUN Contact input signal 1 type ALT 5.23 Communication Contact input

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

20 24 36 44 56 V 18 22 20 28 28 Y 38 47 Z Bore size (mm) 16 20 32 40 50 14 14 19 1 8 1 8 1 8 1 8 Note 1) M thread (M5 x 0.8) is applicable for 12 and 16 piping ports.

Dual Rod Cylinder Series CXSJ/CXS

8 @1 @2 w !4 !2 !5 t @0 @3 @4 @5 !9 !8 @1 @2 @6 !4 !2 !3 y !0 !1 e q @8!6 u !7 o i !3 y !0 !1 @7 r q @8 !6 u !7 o i CXSJM10 CXSJL10 r !9 !8 @2 !6 @9 !7 o i @4 @5 !8 r !9 @2 !6 @9 !7 o i Piston rod B-side piston Rod cover Piston rod B-side piston Rod cover Component Parts: Standard Piping No. Description No.