Profile Design ISO/VDMA Air Cylinder Series CP95

D C d H B 32 40 50, 63 80 100 16.5 21 26 31 39 19.6 25.4 31.2 37.0 47.3 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 6 8 11 13 16 17 22 27 32 41 NT-03 NT-04 NT-05 NT-08 NT-10 Piston rod ball joint KJ (DIN 648) Zinc chromate plated steel Bore d3 Order No. d1 h d6 b3 b1 l d7 l3 sw 32 M10x1.25 KJ10D 10 43 28 10.5 14 20 19 13 14 17 40 M12x1.25 KJ12D 12 50 32 12 16 22 22 13 16 19 50/63

VFM300

lever One way roller lever Straight plunger Roller plunger Toggle lever SA 00 01 02 05 06 08 30 32 33 34 36 Japan, Asia, Australia, England Europe North America 02 1 4 Black Colour of push button E N VA Green Thread Y Yellow G(PF) Rc(PT) F T N NPTF NPT Push button (Mushroom) Push button (Extended) Push button (Flash) Twist selector (2 position) Key selector (2 position) SA Body option VA

VFM300

Toggle lever VFM350-02-08 T.T.

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

LVN Material TL/TIL Body Diaphragm Note Actuator section End plate Symbol Applicable tubing size PFA PPS PTFE Nil Body class LQ3 Connecting tubing outside diameter Symbol Ammonium hydroxide compatible 2 1 3 4 5 PFA PPS PTFE N Metric sizes 03 04 06 08 10 12 19 3 4 6 8 10 12 19 Pilot port thread type Symbol Body class 1 2, 3, 4, 5 1, 2, 3, 4, 5 Thread type 4 One-touch fitting 6 One-touch fitting

Membrane Air Dryer

Port size 3 5 10 20 Port size Symbol Nil H Nil H H Nil H Nil 01 02 $ $ $ $ $ $ $ $ $ $ $ $ $ $ $ $ 1/8 1/4 Thread type Symbol Type Nil Rc N F NPT G Component equipment 3 10 20 5 Component equipment Nil H Nil H Nil H Nil H Mist separator AFM20 AFD20 AFM30 AFD30 Micro mist separator Differential pressure gauge GD40-2-01 Regulator AR20 AR25 Replacement Parts (Element for mist separator, micro

KN Series Nozzles for Blowing

Copper extension nozzle/KNL (mm) Model Nozzle size D Outside diameter L1 Weight (g) KNL3-06-150 KNL3-06-200 KNL3-08-200 KNL3-08-250 KNL3-10-250 KNL3-10-300 KNL6-06-150 KNL6-06-200 KNL6-08-200 KNL6-08-250 KNL6-10-250 KNL6-10-300 1.5 2 2 2.5 2.5 3 1.5 2 2 2.5 2.5 3 6 6 8 8 10 10 6 6 8 8 10 10 300 300 300 300 300 300 600 600 600 600 600 600 43 43 61 61 94 94 84 84 117 117 183 183 O.D.

Cylinder with Lock Series MNB

Note 1) l (Drill through) Cotter pin d D m Dd9 L H B C 3 x 18l 4 x 25l 4 x 35l M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 16.5 21 26 31 39 10 14 22 32 40 50, 63 80 100 32, 40 50, 63 80, 100 36 51 72 4 4.5 5 3 4 4 44 60 82 6 8 11 13 16 17 22 27 32 41 19.6 25.4 31.2 37.0 47.3 NT-03 NT-04 NT-05 NT-08 NT-10 CD-M03 CD-M05 CD-M08 -0.040 -0.076 -0.050 -0.093 -0.065 -0.117 Note 1) A cotter

CG5-S

26 16 23 3 19 13 50 8 47 M6 x 1.0 depth 12 6 14 4 50 55 to 1200 M18 x 1.5 35 32 27 13 M8 x 1.25 15.5 32 20 28 3 21 14 58 11 58 M8 x 1.25 depth 16 7 18 5.5 63 69 to 1200 M18 x 1.5 35 32 27 17 M10 x 1.5 19 38 20 28 3 21 14 58 11 72 M10 x 1.5 depth 16 7 18 7 80 80 to 1400 M22 x 1.5 40 37 32 17 M10 x 1.5 19 50 25 33 3 28 20 71 13 89 M10 x 1.5 depth 22 10 22 7 100 100 to 1500 M26 x 1.5 40 37 41

VQC

Dept. code 24 Manifold Specification Sheet Series VQC2000: Base-Mounted Type/Plug-in Unit q How to order manifolds VV5QC 2 1 08 FD1 B C8 F P T Kit / / 1 2 3 8 VV5QC 2 1 08 SDQ B C8 S Kit Fill out for I/O serial kit only.

5 Port Solenoid Valve, Series VQC

Note) Available for the rubber seal type only. 23 Manifold Specification Sheet Series VQC2000: Base-Mounted Type/Plug-in Unit How to order manifolds VV5QC 2 1 08 FD1 B C8 F P T Kit / / 1 2 3 8 VV5QC 2 1 08 SDQ B C8 S Kit Fill out for I/O serial kit only.

AS-FPQ/AS-FPG

A Note 1) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

AS-FPQ/AS-FPG

A (2) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 8 10.4 22.2 17 27 7 7 12.2 28.8 26 M5 x 0.8 9.6 25.2 22.4 6 12.8 23.2 18.5 8 8 28 (12.2) (28.8) (26) 4 10.4 24.3 17 17 17 31.4 13.4 35.5 30.5 6 R 1/8 12 14.2 32.4 27.4 12.8

AS-FPQ/AS-FPG

A (2) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 8 10.4 22.2 17 27 7 7 12.2 28.8 26 M5 x 0.8 9.6 25.2 22.4 6 12.8 23.2 18.5 8 8 28 (12.2) (28.8) (26) 4 10.4 24.3 17 17 17 31.4 13.4 35.5 30.5 6 R 1/8 12 14.2 32.4 27.4 12.8

AN

Model Port size Effective area (mm2) Weight (g) ANB1-01 22 81 25 18 35 93 30 21 94 107 46 24 175 133 50 41 462 190 74 41 612 230 74 60 871 271 86 70 A B C Dimensions (mm) 1 8 ANB1-02 15 10 51 22 1 4 ANB1-03 35 3 8 ANB1-04 60 1 2 ANB1-06 90 3 4 ANB1-10 160 1 1 1 ANB1-12 280 1 4 ANB1-14 450 1 2 610 Construction/Parts/Dimensions ANB1-01 to 04 JIS symbol ANB1-04: PP ANB1-06 to 14 How to Order

90

Ejector: Single unit Manifold parts ZZK202-A1L-A 1 set (Manifold part number) ZK2C10K5BL3-081 set (Single unit part number) ZK2C10K5PL1-081 set (Single unit part number) Do not add Manifold Type and Options How to Order Valve Manifold Assembly y t r e w q B D L P LFPN Example 12 2 01 Nil A PN ZZK2 ZK2C10R5NL2-08 A 10 ZK2C10R5NC1-08 AN ZZK204-A1P-B 1 2 3 Stations D side U side ZZK204

VCC

Model K VCKL0604-02F H KFN-06-X2 K VCKL0806-02F H KFN-08-X2 K VCKL1075-02F H L Union nut C3604BD + Ni plated 1 1 set unit KFN-10-X2 K VCKL1008-02F H K VCKL1209-02F H KFN-12-X2 K VCKL-02F H K VCKL0604-02F H KFS-06 K VCKL0806-02F H KFS-08 K VCKL1075-02F H M Sleeve Nylon 1 1 set unit KFS-10 K VCKL1008-02F H VNA VNB K VCKL1209-02F H KFS-12 SGC SGH N Gasket VCKK-4-1 Nylon 1 10 set unit VNC VNH

VCL

11 17 36 22.5 23 M5 8 26 84 48 74.5 103 74.5 70 107 1/4, 3/8 VCS41 30 50 94 41 13.5 17 36 25 23 M5 8 26 88 48 78.5 103 78.5 70 111.5 1/2 35 60 102 41 17.5 17 36 30 28.2 M5 8 26 96 48 86.5 103 86.5 70 119 3/4 342 Series VCS Direct Operated 2 Port Solenoid Valve For Steam How to Order Manifold How to Order Manifold Assembly VV2C S D 2 02 01 Enter the mounting valve and option part numbers

Soft Start-up Valve

Caution Without light SY100-61-1 SY100-61-1-C With light Rated voltage Voltage symbol Part number Part number (For AV) (For AVL) DC24V 24V SY100-61-3-05 SY100-61-3-05-C DC12V 12V SY100-61-3-06 SY100-61-3-06-C AC100V 100V SY100-61-2-01 SY100-61-2-01-C AC200V 200V SY100-61-2-02 SY100-61-2-02-C AC110V 110V SY100-61-2-03 SY100-61-2-03-C AC220V 220V SY100-61-2-04 SY100-61-2-04-C