CLK1 1.5 40 Z + Stroke 97 2 57 T ZZ + Stroke (mm) Symbol BX BY D F GA GB L M N S T W Wc Ws Z ZZ IA K Bore size 40 56 54 16 44 77 10 55 M12 x 1.5 86 112.5 57 5 39 27.5 114 228 47 14 50 64 64 20 55 78.5 10 58 M16 x 1.5 87.5 117 60 7 41 33 118.5 232.5 58 17 63 74 74 20 69 82 12 58 M16 x 1.5 91 120.5 67 5.5 48 39 122 236 72 17 Note) Refer to pages 13 and 14 for accessories. 6 Clamp Cylinder with Lock
M1 1/4 3 4 3 8 6 6 4 10 8 12 10 19 12 4 LQ3U11-R1 LQ3U21-R1 LQ3U21-R2 LQ3U31-R1 LQ3U31-R2 LQ3U32-R1 LQ3U32-R2 LQ3U41-R1 LQ3U41-R2 LQ3U51-R1 LQ3U51-R2 LQ3U61-R1 LQ3U61-R2 10 9 10 9 46.5 44.5 11 14 11 14 10 M (E2,E2) (E1,E1) L,L 6 17 16 10 9 51 48.5 16 20 11 14 14 H 22.5 19.5 79 73 21 16 16 11 25 20 20 14 10 22.5 19.5 21 25 18 17 16 66.5 62 KK 17 16 66.5 62 (E1,E1,E2,E2): Reference dimension
Applicable pin Part No. 32, 40 50, 63 10 14 18 22 IY-G04 IY-G05 Part No.
22 30 Opening/closing stroke 4 6 8 12 Opening/closing stroke 16 (32) 24 (48) 32 (64) 40 (80) Size Size Size Size 10 20 32 40 10 20 32 40 10 16 20 25 10 16 20 25 32 40 4 6 10 14 CAT.NAS100-77 Controller Step data input type for servo motor Programless type Step data input type for step motor Series LECP1 Series LECP6 Series LECA6 Control motor Control motor Control motor Step motor (Servo
Applicable bore size (mm) 32, 40 UA C d1 d2 H K L UT Weight (g) 25 9 YB-03 32, 40 6.5 10 18 50 80 YU-03 15.8 14 M8 x 1.25 8 7 17 6 11 11 YB-05 50, 63 6.5 12 22 60 120 YU-05 50, 63 19.8 18 M10 x 1.5 10 40 7 17 6 13 YU-08 M16 x 2 80 24.8 23 13 90 9 22 8 20 14 YB-08 80 8.5 16 28 75 230 YU-10 M20 x 2.5 100 29.8 28 14 160 11 26 10 26 18 YB-10 100 10.5 18 36 90 455 9-10-25 25 Series CLQ Proper
30 0.4MPa 0.4MPa 30 0.3MPa 20 0.3MPa 20 10 10 0.2MPa 0.2MPa 0 0 20 40 60 80 20 40 60 80 Holding point L mm Holding point L mm MHK2-25D MHK2-25D 100 120 Pressure 0.6MPa 80 100 Pressure 0.6MPa Holding force N Holding force N 0.5MPa 80 60 0.5MPa 0.4MPa 60 0.4MPa 40 0.3MPa 0.3MPa 40 20 20 0.2MPa 0.2MPa 0 0 20 40 60 80 100 20 40 60 80 100 Holding point L mm Holding point L mm 14 14 14 14 14 14
mA 40 mA or less Load current 4 V or less 0.8 V or less at 10 mA (2 V or less at 40 mA) Internal voltage drop 100 A or less at 24 VDC 0.8 mA or less Leakage current Operating range .
Auto switch: Heater: Indicator: 14 High Vacuum Angle Valve Series XLF, XLFV Dimensions (mm) 1in=25.4mm (b) XLF/Air operated type E C E Fn (KF flange) Fd (K flange) (a) C E (c) Heater (optional) G A B H A (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 B 103 113 158 170 196 235 A 40 50 65 70 88 90 E Note 1) Model XLF-16 XLF-25 XLF-40 XLF-50 XLF-63
M2 3.0 5.2 9.0 15 24 38 60 3.0 5.0 8.5 14 23 35 50 M3 1.0 1.7 2.4 5.0 8.0 15 19 2.0 3.0 5.0 10 20 35 50 m2 7 10.4 15 23 33 48 72 7 10 14 21 30 42 60 m3 2.1 3 4.5 6.6 10 14 21 2.1 3 4.2 6 8.2 11.5 16 16 20 25 32 40 50 63 16 20 25 32 40 50 63 MY1MW MX MTS MY MY1CW CY MG The above values are the maximum allowable values for moment and load.
A A1 E1 L1 MM RR1 U1 ND NX Part No. cylinder bore cylinder bore A A1 E1 L1 MM RR1 U1 ND size (mm) size (mm) CNA +0.058 0 +0.070 0 0.3 0.5 0.3 0.5 32, 40 +0.058 0 +0.070 0 Y-G04 42 14 22 30 M14 x 1.5 12 10 18 32, 40 I-G04 10 16 14 42 16 22 30 M14 x 1.5 12 14 50, 63 Y-G05 56 18 28 40 M18 x 1.5 14 22 50, 63 I-G05 14 20 56 20 28 40 M18 x 1.5 16 20 CNS Applicable pin part no.
10 11 50 15 12 9 50 65 12 33 11 30 32 45 45 12 12 63 15 16 9 52 67 14 37 11 35 40 50 50 12 15 80 18 16 11 66 86 18 47 12.5 40 50 60 63 14 15 100 18 20 11 76 96 20 55 13.5 50 60 70 71 15 19 Mounting type CR Rear clevis with ball joint A B C D EN ER F G E L M N P H R (mm) 0.2 maxi JS15H7 -0.1 maxi H11 H13 H13 0.5 0.5 0.5 32 32.5 10.5 22 10 14 15 30 10 6.6 45 10.5 5.5 5 40 38 12 25 12 16
ME3 w/Head Square Mount 13 8 14 ME4 w/Cap Square Mount 14 8 14 MP1 w/Double Rear Clevis 14 8 14 MP2 w/Double Detachable Rear Clevis 15 8 14 MP3 w/Cap Fixed Eye 15 8 14 MP4 w/Single Detachable Rear Clevis 15 8 14 MS1 w/Foot Mount 16 8 14 MS2 w/Side Lug 16 8 14 MS3 w/Center line Lug 16 8 14 MS4 w/Side Tapped 17 8 14 MS7 w/Front Lug Mount 17 8 14 MT1 w/Head Trunnion 17 8 14 MT2 w/Rear Trunnion
ME3 w/Head Square Mount 13 8 14 ME4 w/Cap Square Mount 14 8 14 MP1 w/Double Rear Clevis 14 8 14 MP2 w/Double Detachable Rear Clevis 15 8 14 MP3 w/Cap Fixed Eye 15 8 14 MP4 w/Single Detachable Rear Clevis 15 8 14 MS1 w/Foot Mount 16 8 14 MS2 w/Side Lug 16 8 14 MS3 w/Center line Lug 16 8 14 MS4 w/Side Tapped 17 8 14 MS7 w/Front Lug Mount 17 8 14 MT1 w/Head Trunnion 17 8 14 MT2 w/Rear Trunnion
Auto switch: Heater: Indicator: 14 High Vacuum Angle Valve Series XLF, XLFV Dimensions (mm) 1in=25.4mm (b) XLF/Air operated type E C E Fn (KF flange) Fd (K flange) (a) C E (c) Heater (optional) G A B H A (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 B 103 113 158 170 196 235 A 40 50 65 70 88 90 E Note 1) Model XLF-16 XLF-25 XLF-40 XLF-50 XLF-63
l h + l DZZ1 + l + Stroke -X 20Data Bore size (mm) Stroke range (mm) A AL B BF BN BP BQ C CL D E EA F FA FD FT FX FY FZ G GA 125 140 160 16 50 47 145 145 205 1/2 3/8 115 120 36 90 63 35 14 19 14 190 100 230 155 Up to 1000 16 50 47 161 160 245 1/2 3/8 128 136 36 90 63 35 14 19 20 212 112 255 180 Up to 1000 18.5 56 53 182 180 290 1/2 3/8 144 144 40 90 63 43 14 19 20 236 118 275 215 Up to 1200
136 153,5 173 184,5 215 231 287 340 36 40,5 45 48,5 52 57 65 80 6 6 10 10 16 20 15 15 7 10 11 11 11 12 20 25 10 10 10 10 14 14 26 31 32 40 50 63 80 100 125 160 C92S B-Stroke W Bore (mm) AM D EE G H J KK K KW M N S SW VD WH ZZ B 22 24 32 32 40 40 54 72 30 32 40 40 52 52 60 65 12 16 20 20 25 30 32 40 G1/8 G1/4 G1/4 G3/8 G3/8 G1/2 G1/2 G3/4 13,5 15,5 17 17 22 19,5 25 30 58 64,5 77 80,5 92 97
16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 15 17 17 21 21 51 58 58 71 72 8 11 11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 10 10 14 18 18 22 26 11 11 14 17 17 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 1/4 3/8 3/8 1/2 1/2 84 90 98 116 126 146 159 170 204 215 RZQ MI W S CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-4-17
500 Up to 600 Up to 600 Up to 700 Up to 700 RS H A B C A AL B1 D E F G H H1 J K KA M MM N P S ZZ 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 15 17 17 21 21 51 58 58 71 72 8 11 11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 10 10 14 18 18 22 26 11 11 14 17 17 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22
M2 3.0 5.2 9.0 15 24 38 60 3.0 5.0 8.5 14 23 35 50 M3 1.0 1.7 2.4 5.0 8.0 15 19 2.0 3.0 5.0 10 20 35 50 m2 7 10.4 15 23 33 48 72 7 10 14 21 30 42 60 m3 2.1 3 4.5 6.6 10 14 21 2.1 3 4.2 6 8.2 11.5 16 16 20 25 32 40 50 63 16 20 25 32 40 50 63 MY1MW MX MTS MY MY1CW CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside
Double acting single rod only 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30 12, 16 5, 10, 15, 20, 25, 30 75, 100, 125, 150, 175, 200 75, 100, 125, 150, 175, 200, 250, 300 20 5, 10 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 25 Applicable Auto Switches Mounting Bracket Part No.