MG

MGPM, MGPL Common Dimensions Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL P PA PB PW Q CV 16 20 25 25, 50, 75, 100, 125, 150, 175, 200, 250 71 58 8 8 5 30 11 8 64 M4 15 15 22 M5 x 0.8 12 M5 x 0.8 4.3 8 4.5 M5 x 0.8 40 10 19 16 78 1.5 62 10 10 6 36 10.5 8.5 83 M5 18 18 24 M5 x 0.8 13 M5 x 0.8 5.6 9.5 5.5 1/8 37.5 10.5 25 18 25, 50, 75, 100, 125, 150

VZ100/300/500

VQ 2 VKF Port size M5 M5 x 0.8 VQZ Regarding VZ120, R port is a supply port.

Electric Actuator/Slider Type

Note 11) Only when motor option With lock is selected. Note 12) For an actuator with lock, add the power consumption for the lock.

MGP

MGPM, MGPL Common dimensions (mm) Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL CV P PA PB PW Q 25, 50, 75, 100 71 58 1.5 1.5 11 8 8.5 9 M5 x 0.8 12 13 15 M5 x 0.8 4.3 5.6 5.6 M5 x 0.8 Rc 1/8 Rc 1/8 40 10 16 18 26 64 83 93 8 9.5 9.5 19 8 10 12 M4 M5 M5 4.5 5.5 5.5 8 10 10 15 18 21 5 6 6 15 18 21 30 36 42 22 24 30 16 20 25 78 62 10.5 M5 x 0.8 M5 x 0.8

Compact Rotary Actuator Series CRQ2

(Example) For M5: L2 = 10 Applicable shaft types: K, T, X Q1 = M K axis T, X shaft Q1 = M L1 = L2 + (3 x P) L2 + (3 x P) L1 + (3 x P) L1 + (3 x P) L2 = L2 = L1 = Q2 = M Q2 = M (mm) (mm) Q2 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Q1 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Size 10 15 20 30 40 Size 10 15 20 30 40 (mm) Q1 M3, M4 M3, M4, M5, M6 M4, M5,

CXS

x 0.8 2-6.9 through 2-11 counterbore with depth 6.3 2-M5 x 0.8 with depth 7.5 80 30 78 28 14 60 35 6 12 12 30 12 M6 x 1.0 x 18.5 64 CXS25 2-M6 x 1.0 2-6.9 through 2-11 counterbore with depth 6.3 2-M5 x 0.8 with depth 8 98 38 96 36 18 75 44 8 16 14 30 16 M8 x 1.25 x 23 76 2-M6 x 1.0 CXS32 PP Q QQ R T TT U W X Y Model UU V 2-M6 x 1.0 with depth 10 2-M8 x 1.25 with depth 12 2-M8 x 1.25 with

Rotary Table/Rack & Pinion Style Series MSQ

x 0.8 Rc 1/8, M5 x 0.8 Port size 11-: Fluorine grease 22-: Lithium soap based grease 11-: Grade 1 22-: Grade 1 Grease Particle generation grade (Refer to front matter pages 13 to 22 for details.)

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

Bore size 6 to 20 Type M5 x 0.8 Rc NPT G Symbol 21 22 Relief type Vacuum suction type CXSL CXSL Nil TN TF 25, 32 Cylinder stroke (mm) Model Lubrication Action Cushion Rubber Air Bore size (mm) Standard stroke (mm) Auto switch mounting Port size Model 11-/22-CXS6 6 11-/22-CXS10 11-/22-CXS15 11-/22-CXS20 11-/22-CXS25 11-/22-CXS32 10 15 20 25 32 10, 20, 30, 40, 50 Vacuum suction type Relief

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

Applicable Auto Switch/Refer to page 11-11-1 for further information on auto swiches.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

for 1/4" M5: M5 thread 53 13.8 A 2 10 Manual override 24.5 7.8 (N1, N3, N7) (M5: 5.7) Cover diameter 1.4 Cross sectional area 0.2mm2 (Lead wire length) 300 SMC 27.5 16.3 18 13.6 7 23.4 Mounting holes 41 M5 x 0.8 P port M5 x 0.8 R port R 3 P 1 10.7 9 M5 x 0.8 External pilot port 32 (Only external pilot port type(R)) L type plug connector (L): VQZ115L -N1, N3, N7, M5 M type plug connector

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

11 11 A B D-Y59/Y69/Y7P/Y7PV D-Y7W/Y7WV 7 6 6 7 6 Some switches cannot be mounted.

7.5

M5 x 0.8 3 position 4 position 65 Note) Please contact SMC for the weight of elbow fittings.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

MRQ DBasic type 11-MSQBA 11-MSQBR M5 x 0.8 depth 5 (Vacuum port) 20DC DB DA (mm) DA(h9) DB(h9) DC(H9) DD(h9) HB HC HD Size 10 20 30 50 46 45 20 35 20 5 59 HB 61 60 28 40 22 6 65 (HD) 11.5 67 65 32 48 22 6 68 5.5 HC 77 75 35 54 24 7 77 Dimensions other than above are identical to the basic type.

KG

(mm) <M5> Note) L P D Nylon Urethane 2-applicable tubing KGU04-01 KGU04-M5 4 11 20 12 11 21 34 M5 x 0.8 10.4 36 38 40 39.5 42 46 42.5 45.5 49 51 52.5 55.5 56.5 2.2 2.2 11 16 1 8 4 10.4 4.2 4.2 1 4 KGU04-02 14 KGU06-M5 KGU06-01 KGU06-02 KGU06-03 KGU08-01 2.2 2.2 39 41.5 43 44.5 48.5 49.5 50 55 55.5 57 58.5 59 60.5 M5 x 0.8 13 1 8 1 4 3 8 1 8 17 12.8 12.8 6 13.4 10.6 14 17 25.6 17.7 15 23 35

Pressure Gauge Guide

AL 43.5(45.5) 43.5(45.5) 5 GA46 M5 x 0.8 x 5 M5 x 0.8 x 5 M48 x 2 M48 x 2 For setting method, Refer to page 14-11-15 . 14-11-7 7 Pressure Gauge Guide Pressure Gauge for General Purpose O.D.: 30 G33, GA33 Standard Specifications G33 GA33 Back side thread Vertical side thread R Air 3% F.S.

CXWM/CXWL

x 0.8 thread through From opposite side 4-7.5 counterbore depth 4.5 2 x 2-M6 x 1.0 Thread depth 12 2-M10 x 1.0 Adjusting bolt 11 depth 21 (An adjusting bolt M10 x 1.0 x 14l to the plate port) 2 positions for set screws for fixing adjusting bolts (M5) MX MTS MY 2 x 2-6H7 depth 8 +0.012 0 2-M5 x 0.8 4-5.5 through 4-9.5 counterbore depth 5.5 Cylinder port CY 2-M5 x 0.8 hexagon socket head cap

VQC

With 4 (5/32") One-touch fitting C4 (N3) Cylinder port sizes Note 3) Side port C6 (N7) With 6 (1/4") One-touch fitting Side port Side port M5 M5 thread Dual flow fitting VVQ1000-52A-C8 Single wiring Special wiring Note 4) specifications Double wiring Description/Model Stations 2 1 3 4 12 13 14 15 16 17 18 19 20 21 22 23 24 11 10 9 8 7 6 5 Note 1) Indicate the shutoff position.

AC Servo Motor Driver

44 140 70 M5 M4 12 33 12.

0.

41.2 46.5 A 2 A 2 A 2 A 2 A 2 1 P R 3 59.3 43.9 35 1 P R 3 (5.5) (66) (35) + + + + + (4.5) Manual override (DIN rail) Approx. 300 44.9 5.5 5.5 (Lead wire length) (Pitch) P = 10.5 M5 x 0.8 (PE: Pilot EXH port) 16.5 (DIN rail clamp thread) 2 x M5 x 0.8 (X: External pilot port) L2 (5) (Rail mounting hole pitch: 12.5) L1 (Station 1) (Station n) M5 45.2 20 (11) (7.5) The

KJ

(inch) Connection thread M R Model H (Width across flats) L A M Min. port size KQ2H01-M5 KQ2H07-M5 KQ2H01-M5 M5> Weight (g) D Note) Applicable tubing KQ2H01-M5 2 9 16 6 11 12 3.3 10 15 M5 x 0.8 13.6 18 7 16.7 22 12.7 KQ2H01-01S 1 8 1 8 10 15.5 2.5 1 4 KQ2H01-02S 19.5 13.5 14 2.5 M5 x 0.8 KQ2H05-M5 10.3 20.5 18 15 15.3 18.5 17 10.7 11 14 11 24 22 21 18.4 22.5 23 16.5 1 8 3 16