Valve Mounting Direction: Single Solenoid Coil on the Same Side as A,B Ports, Piping: 5 Port/Base Mounted Common SUP Common EXH, Stations: 10 Stations, A B Port Size: 5/32" One-touch Fitting NPTF, P R Port Thread: -

Valve Mounting Direction: Single Solenoid Coil on the Same Side as A,B Ports, Piping: 5 Port/Base Mounted Common SUP Common EXH, Stations: 12 Stations, A B Port Size: Base Mounted M5X0.8, P R Port Thread: NPTF

Valve Mounting Direction: Single Solenoid Coil on the Same Side as A,B Ports, Piping: 5 Port/Base Mounted Common SUP Common EXH, Stations: 14 Stations, A B Port Size: 5/32" One-touch Fitting NPTF, P R Port Thread: -

Valve Mounting Direction: Single Solenoid Coil on the Same Side as A,B Ports, Piping: 5 Port/Base Mounted Common SUP Common EXH, Stations: 20 Stations, A B Port Size: Base Mounted M5X0.8, P R Port Thread: NPTF

Valve Mounting Direction: Single Solenoid Coil on the Same Side as A,B Ports, Piping: 5 Port/Base Mounted Common SUP Common EXH, Stations: 20 Stations, A B Port Size: 5/32" One-touch Fitting NPTF, P R Port Thread: -

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

M5 x 0.8 1(P) port M5 x 0.8 3(R) port R 3 P 1 10.7 9 M5 X 0.8 external pilot port 32 (Only external pilot type (R)) For the One-touch fittings for P/R port and silencer model no., refer to page 4-14-3.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

10 16 4.3 2-3.2 Mounting holes Manual override 24.5 7.8(C3, C4, C6) (M5: 5.7) Cover dia 1.6 Cross section 0.34mm2 (Lead wire) 34 35 300 (53) 27.5 16.3 18 1.2 13.8 13.6 7 (7.8) (24.5) 2-3.4 Mounting holes 41 Foot bracket M5 X 0.8 P port M5 X 0.8 R port R 3 P 1 10.7 9 M5 X 0.8 External pilot port 32 (Only external pilot style (R)) L plug connector (L): VQZ115-lLl-C3, C4, C6, M5-PR M plug connector

Compact Vacuum Ejector Series ZA

KJS04-M5 KJS06-M5 KJL04-M5 KJL06-M5 M-5P Without fitting (M5 x 0.8) 4 (Straight) 6 (Straight) 4 (Elbow) 6 (Elbow) With plug Manifold model Ejector nozzle diameter ZH 0.5 0.7 -2P (KJ04-M5 one side) -5P (KJL04-M5 one side) Stations ZZA1 4 stations 2 stations ZU -22 (KJ04-M5 both sides) -55 (KJL04-M5 both sides) Stations ZZA1 8 stations 4 stations ZL -3P (KJS06-M5 one side) -6P (KJL06-M5 one

3 Port Solenoid Valve Metal Seal Series VZ200 1

x 0.8, Rc 1/8 C4, C6 C4, C6 Rc 1/8 VZ215VZ225Base mounted (Without sub-plate) VVZ200-31A-2 VVZ200-32A-2 M5 x 0.8 Rc 1/8 VZ212--M5 VZ222--M5 Body ported VP Port size Applicable valve model VG VV3Z2-20-061 VP Blanking plate VVZ200-32A-1 VVZ200-31A-1 S070 Screws and Gasket Assembly Part No.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

Lightweight: Max. 21 g lighter (When an M5 female thread is used.) ZSE20(F)/ ISE20 ZSE30A(F)/ ISE30A 17.5 mm (20/20A) ZSE20(F)/ISE20 M5 female thread ZSE30A(F)/ISE30A M5 female thread Improved Installability Enclosure Grommet type Connector type Wiring is possible after piping has been connected.

VQC

C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread (7.5) 20.5 2-C8 1(P) port 34 P = 10.5 Formulas: L1 = 10.5n + 45, L2 = 10.5n + 167.5 (for 1 input block.

0.55

X 1/8 VV3P(A)3 Manifold base 1P, 2A, 3R 1/4 X M5 VV3P(A)5 Manifold base 1P, 2A, 3R 3/8 X M5 VV3P(A)7 Manifold base 1P, 2A, 3R 1/2 2) Body ported X 1/8 N.C. N.O. P Remove the end plate from the body and rotate the end plate by 180 to correspond the N.O. mark on the end plate to the top of the valve. Piping should be arranged as follows. Port Type of actuation N.C. N.O.

Compact Vacuum Unit

(Refer to Manifold on page 17.) 12 12 stations Common Release Pressure (PD) Port Size Note) Common Supply (PV) Port Size 01 01N 01F M5 Without PD port (PV = PD) M5 x 0.8 (PV PD) Rc1/8 NPT1/8 G1/8 M5 x 0.8 Nil M5 Note) Refer to on page 1 for the combinations of supply valve and release valve selectable.

5 Port Air Operated Valve

A, B port size Port size M5 x 0.8 1/8 1/4 3/8 Symbol M5 01 02 03 VFA1000 VFA3000 VFA5000 VFA1000 Double type only Thread type (Including pilot port) Nil F N T Rc G NPT NPTF M5 is available with Nil only.

5 Port Solenoid Valve, Series VQC

C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread (7.5) 20.5 2-C8 1(P) port 34 P = 10.5 (mm) Formulas: L1 = 10.5n + 45, L2 = 10.5n + 167.5 (for 1 input block.

VEX1

cap screw (with spring washer) M5 x 0.8 x 10 (2 pcs.)

CL

x 0.8 pressurized locking port Pneumatic locking and spring and pneumatic locking Piping port M5 x 0.8 Manual unlocking cam M5 x 0.8 unlocking port Unlocked when pressurized 71 46 6 Head cover port in axial direction (R) M5 x 0.8 Rod side cylinder port 31 Lock nut M14 x 1.0 M5 x 0.8 Head side cylinder port 5 5 32 34 48.5 6.5 M6 x 1.0 6 20 18 Width across flats 10 18 9.5 11.5 65 39 20 14

CL

Double Acting, Single Rod Rod Side Flange Style (F) E D P CLJ2F1619 16 2 8 Silencer 12 25.5 Spring lock CL Piping port M5 x 0.8 CL1 Head cover port in axial direction (R) MLGC Manual unlocking cam M5 x 0.8 pressurized locking port Pneumatic locking and spring and pneumatic locking 71 46 6 M5 x 0.8 unlocking port Unlocked when pressurized CNG 31 M5 x 0.8 Rod side cylinder port Lock nut MNB

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

) P=10.5 13.5 (L3) 3 L2 6 .5 L1 2 1 16 .5 Station 5.5 D side 2.3 2-M5 X 0.8 External pilot port (Only external pilot style(R)) 7.8(C3, C4, C6) 21.6 (M5: 5.7) 35 5.5 53 300 (Lead wire) Cover dia 1.6 Cross section 0.34mm2 (Top piping) 39.5 7.8 42.5 P R 1 3 15 8 2-M5 X 0.8 PE port 13.4 2-Rc(PT)1/8 R(EXH) port 16.3 The broken line indicates DIN rail mounted style [-D]. 41.2 2-Rc(PT)1/8 P(SUP)

VDW

01 02 M5 1/8 (6A) 1/4 (8A) Electrical entry G-Grommet Orifice size N.O.