(Mounting hole) (Mounting thread) 4-M6 x 1 x 6 Rc 1 1/4 2-Rc1, 1 1/4 VEX1930 3-14, 20 Bracket (Option) Pressure gauge (Option) Air operated type Rc 1/8 2-M5 x 0.8 Rc 2 2-Rc 1 1/2, 2 4-M6 x 1 x12 (Mounting thread) (Mounting hole) 14-6-10 11 Precision Regulator Series VEX130 3 Base Mounted M5, Rc 1/8 VEX1B33-M5, 01 F.R.L.

SZ3000

14 185.5 175 155.5 15 198 187.5 166 16 210.5 200 176.5 17 210.5 200 187 12 223 212.5 197.5 13 235.5 225 208 14 L n 12 13 14 15 16 11 10 L n 12 13 14 15 16 11 10 L1 L2 L3 L4 L1 L2 L3 L4 235.5 225 208 14 248 237.5 218.5 15 260.5 250 229 16 273 262.5 239.5 17 285.5 275 250 18 285.5 275 260.5 12.5 298 287.5 271 13.5 248 237.5 218.5 15 260.5 250 229 16 273 262.5 239.5 17 285.5 275 250 18 285.5

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

) SOL.a (14) SOL.a (14) SOL.a (14) SOL.a 22.5 90.5 22.9 56.2 Note) Reduces supply pressure from the D side of manifold.

VZ100/300/500

VQ 2 VKF Port size M5 M5 x 0.8 VQZ Regarding VZ120, R port is a supply port.

Compact Cylinder with Lock Series CLQ

1.5 12 14 32, 40 I-G04 10 18 42 14 22 30 M14 x 1.5 12 14 10 50, 63 Y-G05 56 20 28 40 M18 x 1.5 16 20 50, 63 I-G05 14 22 56 18 28 40 M18 x 1.5 16 20 14 80 Y-G08 71 23 38 50 M22 x 1.5 21 27 80 I-G08 18 28 71 21 38 50 M22 x 1.5 21 27 18 100 Y-G10 79 24 44 55 M26 x 1.5 24 31 100 I-G10 22 32 79 21 44 55 M26 x 1.5 24 31 22 Applicable bore size (mm) Applicable pin part no.

5 Port Solenoid Valve

Port size Nil Rc N NPT T NPTF F G 04 1/2 Note) For bottom ported, port size is 1/2 only. 649 VQC5000 Series Plug-in Type Conduit terminal 2-position single: VQC510 0 1 194.8 2 195 2 73 121.8 73 59.5 105.8 59.5 4(A) port 17.5 13.5 2(B) port 27.5 27.5 3/8" 5(R1), 3(R2) port 10.0 M5 x 0.8 Ground screw Indicator light 4 2 SMC 5 1 3 16 13 16 A 53 40 66 53 66 B A VQ5000 4 2 14 5 1 3 12 17.5 13.5

CNG

TE TF TH TZ TT TV TW TX TY XA XB P J 5 6 M8 x 1.25 24 1/8 21.5 2 65 141 8 29 14 11 10 5.5 25 3.2 35.8 42 16 28 43.4 3 12 M4 x 0.7 39.8 5.5 8 M10 x 1.25 29 1/8 26.5 2.5 73 151 10 33 16 13 10 5.5 30 3.2 42 20 28 48 3 12 M5 x 0.8 5.5 10 M10 x 1.25 35.5 1/8 26.5 2.5 73 154 12 40 20 15 10 6.6 35 4.5 49.4 48 22 28 59.4 3 12 M5 x 0.8 6 14 M14 x 1.5 44 1/8 28 2.5 81 169 (178) 14 49 22 18 10 6.6

Electric Actuator

22 30 Basic Compact 4 6 10 14 Basic Compact 4 6 8 12 10 16 20 25 32 40 10 16 20 25 10 20 32 40 10 20 32 40 5.5 22 90 130 6 8 6 8 7 28 120 180 16 (32) 24 (48) 32 (64) 40 (80) 3.5 17 14 14 28 28 40 40 130 210 Note) ( ): Long stroke Features 17 Controller/Driver Controller Driver Step data input type For step motor Programless type Pulse input type Step data input type For servo motor Series

Tamper Proof and Flat Head Screw

across flats) D3 D4 A1 L5 A2 L6 T Metric sizes A1 A2 T M1 L1 L2 D4 D2 D3 d Model H D1 L3 L5 L6 L4 ASD230F-M5-04T 12.9 29.4 4 9.3 17.5 M5 x 0.8 28.4 7.8 11.7 4.5 9.6 10 8 31 0.7 30.7 ASD230F-M5-06T 13.7 32.5 11.6 6 20.6 ASD330F-01-06ST 14 13.7 38.5 11.6 6 22.9 38.9 R 1/8 32 10.6 7 11.8 14.2 12 1.5 35.6 ASD330F-01-08ST 15.8 18.5 44.8 15.2 8 28.2 38.2 ASD430F-02-06ST 17 43.5 12.8 6 25.2 18

MHZ

depth 10 (Mounting hole) M5 x 0.8 (Finger closing port) 4-M4 x 0.7 (Thread for mounting attachment) M5 x 0.8 (Finger opening port) Auto Switch Mounting Groove Dimensions 15 5 9 Auto switch mounting groove (Both sides) 10 8.5 4 23 14 For single action, the port on one side is a breathing hole. 2.1 12-2-49 49 Series MHZJ2 Dimensions MHZJ2-25 Double acting/Single acting Basic type 0.05 36.5

MHZ

When closed 26 When open 48 0.1 D113 (122) 2-M6 x 1 thread depth 13 (Mounting thread) 204-M6 x 1 (Thread for mounting attachment) M5 x 0.8 (Finger closing port) M5 x 0.8 (Finger opening port) 24 Auto Switch Mounting Groove Dimensions 15 0 0.05 7 6.2 11 Auto switch mounting groove 14 5 31 (37) (For D-Y) For single action, the port on one side is a breathing hole. 4 11.5 24 Auto switch mounting

51

14 18 18 22 26 12 14 18 25 30 32 40 50 2 2 2 2 2 2 3 3 28 32 38 46 58 70 82 100 5.5 5.5 6.6 6.6 9 11 11 14 6 7 7 8 9 9 11 14 6 7 7.5 7.5 12 12 16 16 26 31 38 47 58 72 89 110 M4 x 0.7 M8 x 1.25 24 29 35.5 44 55 69 80 100 M5 x 0.8 57 60 62 62 84 84 104 105 Width across flats 6 length 3.5 Up to 300 M5 x 0.8 M10 x 1.25 M5 x 0.8 Width across flats 8 length 3.5 Up to 300 M5 x 0.8 M10 x 1.25 Rc1

CNG

TE TF TH TZ TT TV TW TX TY XA XB P J 5 6 M8 x 1.25 24 1/8 21.5 2 65 141 8 29 14 11 10 5.5 25 3.2 35.8 42 16 28 43.4 3 12 M4 x 0.7 39.8 5.5 8 M10 x 1.25 29 1/8 26.5 2.5 73 151 10 33 16 13 10 5.5 30 3.2 42 20 28 48 3 12 M5 x 0.8 5.5 10 M10 x 1.25 35.5 1/8 26.5 2.5 73 154 12 40 20 15 10 6.6 35 4.5 49.4 48 22 28 59.4 3 12 M5 x 0.8 6 14 M14 x 1.5 44 1/8 28 2.5 81 169 (178) 14 49 22 18 10 6.6

KA

Soft nylon Polyurethane KAH23-M5 17 8.5 14 13 2.1 M5 X 0.8 M6 X 1.0 7 17.5 12.5 8.5 3.4 2.9 4 3.2 1 8 KAH23-M6 KAH23-U01 8 10 17 KAH04-M5 M5 X 0.8 M6 X 1.0 9.5 14 13 2 4 4 8 KAH04-M6 17.5 4 1 8 18.5 13.5 KAH04-U01 5 14 10 10 16 5.6 5.6 1 4 KAH04-U02 16.5 10.5 10 18.5 KAH06-M5 M5 X 0.8 M6 X 1.0 15 14 4 4 11.5 3 10 KAH06-M6 19 1 8 14.5 KAH06-U01 5 12 6 19.5 17 1 4 13 17 14 12 KAH06

Cylinder with Lock Series CNG

PH PL S CD CZ L RR TE TF TH TZ TT TV TW TX TY XA XB J 2 10 3.2 28 M4 x 0.7 35.8 5 6 24 65 29 14 11 5.5 25 16 43.4 M8 x 1.25 1/8 141 8 42 3 12 21.5 2.5 10 3.2 28 M5 x 0.8 39.8 5.5 8 29 73 33 16 13 5.5 30 20 48 M10 x 1.25 1/8 151 10 42 3 12 26.5 2.5 10 4.5 28 M5 x 0.8 49.4 5.5 10 35.5 73 40 20 15 6.6 35 22 59.4 M10 x 1.25 1/8 154 12 48 3 12 26.5 2.5 10 4.5 30 M6 x 1 58.4 6 14 44 81 49 22 18

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

Internal pilot manifold L: Dimensions n: Stations L n 2 110.5 100 86 12 3 123 112.5 96.5 13 4 135.5 125 107 14 5 148 137.5 117.5 15 6 160.5 150 128 16 7 173 162.5 138.5 17 8 173 162.5 149 12 9 185.5 175 159.5 13 10 198 187.5 170 14 11 210.5 200 180.5 15 12 223 212.5 191 16 13 235.5 225 201.5 17 14 235.5 225 212 12 15 248 237.5 222.5 13 16 260.5 250 233 14 17 273 262.5 243.5 15 18 285.5 275

VQ7-6/7-8

Mounting bolt M5 X 115 with SW M5 X 35 with SW M5 X 15 with SW M5 X 45 with SW M5 X 60 with SW M5 X 65 with SW M5 X 70 with SW M5 X 75 with SW M5 X 90 with SW M5 X 95 with SW M5 X 100 with SW M5 X 105 with SW Size SMC SMC SMC SMC SMC Option mounting diagram SMC SMC SMC SMC Spacer 2 SMC Spacer 2 Interface regulator Spacer 1 Throttle valve spacer SMC Release valve spacer Spacer 2 Spacer 1 Spacer

CXWM/CXWL

For dimensions of 25 stroke, refer to page 8-26-16. 8-26-15 14 Series CXWM 10 With End Lock: CXWM1025 Stroke R 2 x 2-M4 x 0.7 thread depth 8 2 x 2-4H7 depth 5 +0.012 0 2-M8 x 1.0 Adjusting bolt Socket 4-3.2 through 2-M5 x 0.8 hexagon socket head cap plug 2-M5 x 0.8 4-6.5 counterbore depth 3.3 (Cylinder port) Cylinder port 2-M5 x 0.8 plug (M-5P) (Cylinder port) 2-RB0805-X552 shock absorber

Antistatic One-touch Fittings Series KA

M5, M6 Soft nylon Polyurethane KAH23-M5 17 8.5 14 13 2.1 M5 0.8 M6 1.0 7 17.5 12.5 8.5 3.4 2.9 4 3.2 1 8 KAH23-M6 KAH23-U01 8 10 KAH04-M5 M5 0.8 M6 1.0 17 9.5 14 13 2 4 4 8 KAH04-M6 17.5 4 1 8 KAH04-U01 18.5 13.5 5 14 10 16 10 5.6 5.6 1 4 KAH04-U02 16.5 10.5 10 Uni thread KAH06-M5 M5 0.8 M6 1.0 18.5 15 14 3 11.5 4 4 10 KAH06-M6 19 1 8 KAH06-U01 14.5 5 12 6 19.5 17 1 4 KAH06-U02 13 17 14 12

CNG

PH PL S CD CZ L RR TE TF TH TZ TT TV TW TX TY XA XB J 2 10 3.2 28 M4 x 0.7 35.8 5 6 24 65 29 14 11 5.5 25 16 43.4 M8 x 1.25 1/8 141 8 42 3 12 21.5 2.5 10 3.2 28 M5 x 0.8 39.8 5.5 8 29 73 33 16 13 5.5 30 20 48 M10 x 1.25 1/8 151 10 42 3 12 26.5 2.5 10 4.5 28 M5 x 0.8 49.4 5.5 10 35.5 73 40 20 15 6.6 35 22 59.4 M10 x 1.25 1/8 154 12 48 3 12 26.5 2.5 10 4.5 30 M6 x 1 58.4 6 14 44 81 49 22 18