SMC Corporation of America
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1 q t i Series PF2D For Deionized Water and Chemicals Digital Flow Switch Dimensions: Separate Type Sensor Unit PF2D504-11/520-13 Internal circuits and wiring examples 60 70 176 z to , are terminal numbers.

Caution 13 No.JSY1000V-OMW0004-A JSY1000/3000/5000 series Specific Product Precautions 5 Be sure to read this before handling.

SI () SI SI SI () ()SI SI SI IP67 M12/M8 SI ( ) SI SI ()SI CE -6No.EX-OMP0004CN-I SI SI PLC PLC SI IP -7No.EX-OMP0004CN-I EX260-SMJ 1 1 M12 32 /PNP() 2 M12 32 /NPN() 3 M12 16 /PNP() 4 M12 16 /NPN() MJ CC-Link -8No.EX-OMP0004CN-I 1 (BUS OUT) CC-Link () 1 (M12 5 A code) 2 (BUS IN) CC-Link (IN ) 1 (M12 4 A code) 3 SI 1 (M12 5 B code) 4 (M3

Terminal cover Round head combination screw M3 Tightening torque 0.5 to 0.6Nm A G1/2 Tightening torque 0.5 to 0.6Nm + mark mark 2 1 + A Round head combination screw M3 Tightening torque 0.5 to 0.6Nm Electrical Connections Conduit terminal Caution View A-A (Internal connection diagram) Grommet There is polarity only when equipped with light.

Switch mounting screws (M3 x 0.5 x 10l) Switch spacer 32, 40 50, 63 RS H A Manufacture of Intermediate Stroke BQ-2 Method Spacers installed in standard stroke body. Switch mounting nut RZQ Ordering Refer to standard part number and ordering on page 10-10-2.

Note 3) 52-SY series are not available with resin type manifold (45 type). 4 B ATEX Compliant Body Ported Type Series 52-SY5000 Dimensions 2-position single L plug connector (L) 52-SY5120-L-01 (-F2) In case with foot bracket 52-SY5120-L-01-F1 22.6 21 47 16.7 4.5 38 16.6 1.2 22 29 2 x M3 x 0.5 Threads depth 3.5 (For bracket mounting) 65 2 x 3.2 (Mounting holes) 14.7 Insulation: Black () 11.6

0.5 ~0.6 Nm + G 1/2 M3 0.5 ~0.6 Nm M3 0.5 ~0.6 Nm A-A () 1) 2) 3) 30 1) 2) 1 0.1MPa 5 VN-OMP0002 Series Series Series Series 1 DC AC VT307 VNA ( ) (JIS B2301)(JIS B 2302) VNA (JIS B 6349) VNA 1 ISO VG32 VNA ( JIS K 6439) VNA VNA VNA VNA AS AS AS AS VNA AS 10A 111 420-03 3/8 B(9.5) 12 12 12 12(P1) (P1) (P1) (P1) 10(P2) 10(P2) 10(P2) 10(P2) 12(P1)10(P2) 15A 211 420-04 1/2 B

switch mounting band, attention should be taken so that the switch bracket, auto switch mounting screw and auto switch mounting band do not come off. 13 - 14 - Table 3 Minimum Stroke for Auto Switch Mounting 15 - Solid state Reed 16 - Auto Switch Connection and Example 17 - 3.

SFD-EL101 SFD SFD Element set Element set 1 1 With O-ring With O-ring Bracket Bracket 2 2 Material: Stainless steel 304 Material: Stainless steel 304 SFD-BR101 SFD-BR101 LLB Dimensions AD SFD101-02 SFD102-02 GD 25 66 66 25 19 19 24 24 50 40 50 40 13 2 x 4.5 Bracket Bracket 13 2 x 4.5 325 SFD Series Made to Order Specifications 2 Please contact SMC for detailed specifications, delivery and

Bodysize Metricsize Inchsize 100 200 205 300 400 M3,M5standard 1/8standard 1/4standard 3/8standard 1/2standard Grease-free(Sealant:Fluorocoated)+ Restrictor(WithoutCheckValve) -X21 02 23 04 06 08 10 12 01 03 07 09 11 13 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" 2 3.2 Ex.)AS2002F-04-X21 Note)Notparticle-free 4 6 8 10 12 Withone-touchfittings Restrictor(WithoutCheckValve) -X214 Use1/8"tube.

A Mounting screws (M3 x 8L) (accessory) Waterproof seal (accessory) Panel mount adapter Power supply/Output connection cable ZS-26-A Panel Front protective cover + Panel mount B Mounting screws (M3 x 8L) Front protective cover (accessory) Waterproof seal (accessory) Panel mount adapter Panel Options When only optional parts are required, order with the part numbers listed below.

24 24 23 13 23 126 127 137 8 25 72 73 83 13 24 24 23 13 23 130 131 141 8 32 72 75 83 13 24 24 21 13 21 130 133 141 8 40 93 96 101 16 24 24 21 16 21 159 162 167 11 Axial foot: CBM2L Bore size Stroke A * -H -R -W N L ZZ + Stroke LS + Stroke N L CBM2G Bore size Stroke A Head flange: * -H -R -W Rod flange: CBM2F Bore size Stroke A * -H -R -W N L Z + Stroke Single clevis: CBM2C Bore size

PD Mounting 20 12 12 13 24.2 6 25 12 10 (12) 13 26.7 6 32 12 10 (12) 13 30.2 6 40 12 10 (12) 16 34.6 8 50 13 13 20 40.6 10 63 13 13 20 47.1 10 HH Applicable Tubing O.D./I.D. Note) ( ): Long stroke Bore size (mm) 20 25 32 40 50 63 Applicable tubing O.D. (mm) 6/4 6/4 6/4 8/6 10/7.5 10/7.5 Applicable tubing material Can be used for either nylon, soft nylon or polyurethane tubing.

45 41 1/4 1/8 1/8 14 12 10 16 13 13 10 8 M14 x 1.5 M32 x 2 134 3.2 23 The bracket is shipped together.

60 13 13 14 14 20 20 27 47 51 58 58 72 72 97 16 16 16 16 16 16 20 4 4 5 5 5 5 6 M6 x 1.0 6 6 7 7 10 10 13 M10 x 1.25 27 27 31.5 31.5 38 38 38 1/8 1/4 1/4 3/8 3/8 1/2 1/2 84 84 94 94 114 114 120 4 4 5 9 11.5 17 17 6.5 9 10.5 12 14 15 15 178 186 210 210 258 258 314 90 90 102 102 124 124 132 184 192 218 218 268 268 326 22 30 35 35 40 40 54 13 14 15.5 16.5 19 19 19 to 500 to 500 to 600 to 600

D-A5l/A6l 9 9 10 11 11 11 10 D-A59W 13 13 13 14 14 15 17 D-A3l/A44 9 9 10 11 11 11 10 * The switch mounting bolt is supplied with the switch.

8.4.1 Replacing Particle Filters .8-13 8.4.2 Replacing the DI filter (Option DM) .8-13 8.5 Electrical schematic diagram . 8-16 8.5.1 HRR010-A/W-10.8-16 8.5.2 HRR010-A/W-20.8-18 Chapter 9 Documents . 9-1 9.1 Specifications . 9-1 9.1.1 HRR010-A-10/20. 9-1 9.1.2 HRR010-W-10/20. 9-3 9.1.3 Refrigerant with GWP reference . 9-5 9.1.4 Communication specification . 9-5 9.2 Outline dimensions . 9-

9.5.1 HRR012-A/W-10-,HRR018-A/W-10-. 9-13 9.5.2 HRR012-A/W-20,HRR018-A/W-20 . 9-13 9.5.3 HRR024-A/W-20,HRR030-A/W-20 . 9-13 9.6 Pump capacity. 9-14 9.6.1 HRR012/018/024/030-A/W. 9-14 9.6.2 HRR012/018-A/W-10-T/MT . 9-14 9.6.3 HRR012/018/024/030-A/W-20-T . 9-15 9.6.4 HRR012/018/024/030-A/W-20-MT . 9-15 9.6.5 HRR012/018/024/030-A/W-20-T1 . 9-16 9.7 Required facility water flow (for water-cooled

Setting range and default settings are shown in Table 5.4-13 Pump operation mode setting. (1) (2) (3) (4) (5) Pump operation mode setting Table 5.4-13 Pump operation mode setting No.