High Vacuum Angle Valve, XL Series

O After a few seconds at 10-6Torr 41

0.4

COM. 1 2 3 4 5 6 7 8 9 10 11 12 13 23 24 14 15 16 17 18 19 20 21 22 23 24 25 21 22 19 20 19 20 19 20 17 18 17 18 17 18 15 16 15 16 15 16 13 14 13 14 13 14 11 12 11 12 11 12 9 10 9 10 9 10 7 8 7 8 7 8 5 6 5 6 5 6 3 4 3 4 3 4 COM. 1 2 1 2 1 2 COM. COM.

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

4 6 5.1 63 Up to 1000 32 16 20 77 G 3/8 38.6 M16 x 1.5 121 5 8 16 56.5 M8 x 1.25 17 4 9 6.3 80 Up to 1000 40 17 25 99 G 3/8 38.4 M20 x 1.5 128 10 16 72 M10 x 1.5 22 4 11.5 6 100 Up to 1000 40 17 25 118 G 1/2 42.9 M20 x 1.5 138 10 18 89 M10 x 1.5 22 4 17 10 125 Up to 1000 54 20 32 144 G 1/2 58 M27 x 2 160 13 19 110 M12 x 1.75 27 6 17 15 *1 Minimum stroke for trunnion mounting: 1 mm

REC

150 to 700 20 FX 25 4 60 75 17 10 22 19.5 40 32 13 10 45 150 to 700 26 REC 32 4 60 75 17 12 22 19.5 40 32 13 11 45 150 to1000 26 20, 25, 32 40 36 5 66 82 22 14 24 21 52 41 16 12.5 50 200 to1000 32 RHC NA S Z ZZ NN P H1 H2 I K MM N Bore size Stroke range 1 8 30 20 M20 X 1.5 146 37 200 150 to700 M8 X 1.25 5 8 33.5 5 20 MTS 1 8 34.5 M26 X 1.5 25 146 41 204 150 to700 M10 X 1.25 6 8 37.5 5.5

JXCx-OMT0023

COM3 15 LA Encoder A-phase pulse (differential line driver) Y004 CR 5 16 LAR (Note 15) COM2 17 LB Encoder B-phase pulse (differential line driver) 18 LBR X INP 10 19 LZ Encoder Z -phase pulse (Note 17) (differential line driver) 20 LZR X X RD 11 21 14 LG SD Control common OP LG Plate (Note 17) 14 SD Plate (Note 7) (Note 3, 5) Forced stop CN1 EM1 8 Servo-on SON 4 Reset (Note 10, 11) RES 3

LEC-OM069xx

Transmission Bytes Transmission Cycle Applicable Communications Cycle 17-byte 32-byte Connectable Max.

Compact 5-Port Solenoid Valve

COM. 41 Red Red COM.

AC Servo Motor Driver (CC-Link Type ）

After confirming that the operation is in the stop status, click the "OK" button to display the setting screen for the DO forced output. a 7 17 7.

LEC-OM07605CN

CNP1CNP2CNP3 . 3-11 3.4 . 3-13 3.5 (). 3-15 3.5.1 . 3-15 3.5.2 . 3-16 3.5.3 . 3-17 3.5.4 . 3-17 3.6 . 3-18 3.6.1 (SS1) . 3-18 3.6.2 . 3-19 3.6.3 . 3-20 3.6.4 EM2 . 3-20 3.7 . 3-21 3.7.1 . 3-21 3.7.2 . 3-22 3.8 . 3-23 3.8.1 . 3-23 3.8.2 . 3-24 3.8.3 . 3-26 1- 3.9 SSCNET . 3-27 3.10 . 3-29 3.10.1 . 3-29 3.10.2 . 3-30 3.11 . 3-34 4 41 4-18 4.1 . 42 4.1.1 . 42 4.1.2 .

Modular/F.R.L. Units Series AC

17 J 41 50 T M4 X 0.7 M5 X 0.8 K 40 54 S 44 60 AF30 AF40 4 Series AF20~40 Filter Standard (Manual Drain) S F 4 T BRACKET MOUNTING THREAD W M R C G J Q P K N 2 A Bowl Detail U (AF20) H L E IN OUT D Bracket (Optional) Note: Sight glass not applicable to AF20.

Membrane Air Dryer

Mist C auto-drain Auto-drains listed on page 17 are attached.

Clean One-touch Fittings For Driving Air Piping KPQ/KPG Series

38 17 21 25 18.5 23.5 27.5 26 30 33 34.5 37 39.5 4 4 4 17 10.4 19.7 D1 10 A L2 8 D2 H Connection threads 6 10 10 18.5 12.8 21.8 (R) 10 (R) 8 26 2 x Applicable tubing 18 15.2 20.5 25.3 12 M L1 M L1 10 41 18.5 29 23 28.4 17 17 12 58 20.9 46 24 30.4 D1 22 D2 Reference dimension for R threads after installation Note 1) D1 indicates the maximum diameter.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators 14.5 13.3 13.5 54.1 43.3 35 5.8 19 19 2 x 3.2 M5 x 0.8 (External pilot port) 17 17 (For mounting) 3 A B 22 SMC A B B A PE X EB EA P Manual override 41 2.8 A side: Orange B side: Green (Light/surge voltage suppressor) M5 x 0.8 (Pilot EXH port) 89.3 (L = 300 to 5000) 83.7 M12 waterproof connector 53.5 48.5 24.5 16.5

Vacuum Pad

14 17 8 Buffer assembly part no.

Vacuum Pad

14 17 8 Buffer assembly part no.

Vacuum Pad

14 17 8 Buffer assembly part no.

Table of Contents

OUT1 output mode selection in Initial Setting on page 16-2-41. SET Press the SET button.

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

35 Up to 1000 24 244 37 10.5 6 4 106 16 37.5 17 M16 x 1.5 8 M8 x 1.25 15.5 G 1/4 5 20 24 40 Up to 1000 32 259 37 12 9 4 121 16 45 17 M16 x 1.5 8 M8 x 1.25 16.5 G 3/8 5 20 24 45 Up to 1000 32 300 46 14 11.5 4 128 17 45 22 M20 x 1.5 10 M10 x 1.5 19 G 3/8 25 30 45 Up to 1000 40 320 51 15 17 4 138 17 50 22 M20 x 1.5 10 M10 x 1.5 19 G 1/2 25 32 55 Up to 1000 40 398 65 15 17 6 160 20 58 27 M27

VZ3000

) (mm) 17 373 362.5 344 14.5 Stations L1 L2 L3 L4 11 273 262.5 248 12.5 12 298 287.5 264 17 13 310.5 300 280 15.5 14 323 312.5 296 13.5 15 335.5 325 312 12 16 360.5 350 328 16.5 18 385.5 375 360 13 19 398 387.5 376 11 20 423 412.5 392 15.5 8 210.5 200 184 13.5 Stations L1 L2 L3 L4 10 248 237.5 216 16 9 223 212.5 200 11.5 7 198 187.5 168 15 6 185.5 175 152 17 5 160.5 150 136 12.5 4 148 137.5

Rubber seal 5 Port Solenoid Valve Series SYJ7000

-1 Individual EXH spacer SJ7000-17-2 Applicable manifold base Type SS5YJ7-20 Type SS5YJ7-21 Applicable manifold base Type SS5YJ7-40 Type SS5YJ7-41 Type SS5YJ7-42 R R1 R R1 Manifold Gasket DXT199-21-10 Manifold Gasket DXT199-21-11 L Blanking Plate Assembly SYJ7000-21-1A Applicable manifold base Type SS5YJ7-20 Type SS5YJ7-21 Applicable manifold base Type SS5YJ7-40 Type SS5YJ7-41 Type SS5YJ7