3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

center/pressure center 3 4 5 0 1 01 02 Grommet(G): VQZ2 5 (R)lGl 300 122 24.5Mounting holes (Lead wire length) 54.5 9 9 R4 4 A 4 B 2 15 34 SMC SMC Cover diameter 1.6 Cross section 0.34mm2 R2 R1 5 1 P 3 Manual override 56 48 4 (54.5) 51 45 A, B port 22 16 16 SMC 9 9 9 18 18 5-Rc(PT)1/8,1/4 (P, A, B, R1, R2 port) 2-PE port M5 X 0.8 (Not applicable to standard.) 2.1 2.1 28 M5 X 0.8 External

IDG

inch IDG10, 20 IDG10H, 20H With fitting for purge air discharge (Option: P) (H) Purge air E A Port size L C 41 2.3 Purge air discharge tubing port for dehumidification 14 7 Applicable tubing O.D.: 8 5/16 inch 14 16 23 IN OUT Bracket (Accessory: B) (G) B D Purge air discharge tubing port for dehumidification Applicable tubing O.D.: J (NPT thread: K inch) Purge air for dehumidification Purge

Wedge Cam Operation Slide Guide Series MHK2 Air Gripper/2-Finger Type ø12, ø16, ø20, ø25

MHKL2-16 MHK2 -20 MHKL2-20 MHK2L-25 MHKL2-25 5 8 1.3 3.3 M5 x 0.8 M4 x 0.7 2.1 10 M5 x 0.8 4.3 M6 x 1 5.9 MHZ MHF MHL MHR MHK MHS MHC MHT MHY MHW -X MRHQ MA D537

ZR

vacuum pressure port) Filter block ZF Adapter F 79 70 Remove tha plug from PD port at external release. 24.2 (Mounting hole) ZP PV PD 30 16 11 ZCU 9 9 3 63 41 6.5 8 Bracket A Bracket A AMJ Misc.

Large Size Vacuum Module: Series ZR

Pilot pressure exhaust (PE) M5 Release pressure supply port (PD) ZP M5 Pilot pressure supply por (PS) Filter block Spacer A Valve unit SP 84 Release flow adjusting needle 2 x 4.2 (Mounting hole) A 2 2 Rc 1/8 Vacuum pressure supply port (PV) ZCUK 1.2 AMJ 41 Adapter G Bracket A Bracket A AMV Rc 1/8 Vacuum port (V) 7.2 1 AEP ZR100-K1 M -D HEP A B Related A B S Equipment A B Digital pressure

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

(M5) Type 41 NVVsZ3-41-(05 )1-M5 =r _T Stationsa aslze ot A, B port TtlZ statro^Ms-lto-3, fiomlMst i l : 20 I 20 stations TypE 42 Nvv5z3-42-60rrfrD -.T:tI g"tion"l lfiire ot a, B po* ofr | % NPTF _ B7T | one touch fitting lor /4" tube Type 43 NVV5Z3-4g-6S1-esr --l_T Ststionsa .Slze ot A, B port otTtstatrc.s -T, 20 | 20 stations 83il ffi hrclr fittl.g l"V t b" NVZ3000 Proper Combinatiott"s

Rotary Gripper Series MRHQ

A R I 18 6 21 9 5 5 34 23 Side A Side B 726 Rotary Gripper Series MRHQ Dimensions MRHQ16 A B 41 50 66.5 4 x M5 x 0.8 depth 8 30 0 -0.062 47h9 41 +2.2 0.2 0 -0.1 5 20.9 opened depth 6 +0.03 0 3 x 4H9 M5 x 0.8 4 x M3 x 0.5 0 -0.1 8 0 0.7 14.9 closed (attachment mounting screw ) Finger closing port (one each on three sides) 4 7 4 x M5 x 0.8 depth 8 15 Max. 7.3 18.8 (two on opposite side) 42

Compact Cylinder with Lock Series CLQ

A A1 E1 L1 MM RR1 U1 0.2 0.4 0.2 0.4 0.3 0.5 0.3 0.5 0.3 0.5 0.3 0.5 16 20 Y-G02 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 34 8.5 25 M8 x 1.25 10.3 11.5 16 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 20 I-G02 8 8 34 8.5 25 M8 x 1.25 10.3 11.5 8 20 25 Y-G03 41 10.5 30 M10 x 1.25 12.8 14 20 25 I-G03 10 10 41 10.5 30 M10 x 1.25 12.8 14 10 32, 40 Y-G04 42 16 22 30 M14 x

CE

50, 75, 100, 125, 150, 175, 200, 250, 300 71.5 177 27 16 52 57 M14 x 1.5 5 14 136 24 100, 125, 150, 175, 200, 250, 300, 400, 500 85.5 200, 300, 500 193 32 20 64 71 M18 x 1.5 7 18 144 22.5 98.5 200, 300, 500 194 32 20 77 84 M18 x 1.5 7 18 145 21 P M N O T X Z L Q Bore size (mm) 32 40 50 63 41 34 5.5 M6 x 1 Rc(PT) 1/8 57.5 30 14 56 41 40 5.5 M6 x 1 Rc(PT) 1/8 64.5 30 14 62 49 50 6.6 M8 x 1.25

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

R 32 DS5032 45 14 34 3.3 11.5 32.5 3 5 5.5 22 10 30 10.5 6.6 10 11 17 40 DS5040 55 16 40 4.3 12 38 4 5 5.5 25 10 35 11 6.6 12 13 20 50 DS5050 65 21 45 4.3 14 46.5 4 5 6.5 27 12 40 15 9 16 18 22 63 DS5063 75 21 51 4.3 14 56.5 4 5 6.5 32 12 45 15 9 16 18 25 80 DS5080 95 25 65 4.3 16 72 4 5 10 36 16 45 18 11 20 22 30 100 DS5100 115 25 75 6.3 16 89 4 5 10 41 16 55 18 11 20 22 32 125 DS5125 140

Environment

x 0.8 8 37 38 15.4 8.2 28 0.9 15.9 146 196 24.5 101 to 400 32 20 to 100 40 M6 x 1.0 10 37 38 15.4 8.2 28 1 15.9 151 201 27 101 to 500 [mm] Body Bottom Tapped Size Stroke range [mm] MA MC MD MH ML MO MR XA XB 15 to 39 24 32 50 M5 x 0.8 6.5 4 5 40 to 100 42 41 101 to 124 75 125 to 200 59 49.5 201 to 400 76 58 25 20 29 20 to 39 22 36 50 M6 x 1 8.5 5 6 40 to 100 36 43 101 to 124 80 125 to 200

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

9 4 15.5 0.5 29 22 8 14 1 5 9 24 3.5 M3 x 0.5 17 3 25 31 41 8.5 9.5 10.5 10.5 -0.004 -0.012 0 -0.043 12 5 15.5 0.5 M3 x 0.5 34 25 9 18 1.5 6 10 29 3.5 M3 x 0.5 21 3 29 36 48 11 10 11.5 11 -0.004 -0.012 0 -0.043 14 6 17 0.5 M4 x 0.7 42 34.5 10 20 1.5 7 10 36 4.5 M4 x 0.7 26 4 36 44 59 M5 x 0.8 14 13 D12 13 -0.005 -0.014 0 -0.043 16 8 1 4.5 17.5 M5 x 0.8 50 47.5 13 22 2 8 12 43 5.5 M5

MHK2

-12S 90 12 9 11 9 20 105 Normally open Normally closed MHKL2-16S 16 17 14 14.6 28.6 165 MHKL2-20S 20 32 18 16 34 314 MHKL2-25S 25 53 22 19 41 565 MHKL2-12C 12 11 11 9 20 105 L1 MHKL2-16C 16 22 14 14.6 28.6 166 L2 MHKL2-20C 20 40 18 16 34 314 MHKL2-25C 25 63 22 19 41 565 Note) At the pressure of 0.5 MPa, when gripping point L is 20 mm.

MHK2

-12S 90 12 9 11 9 20 105 Normally open Normally closed MHKL2-16S 16 17 14 14.6 28.6 165 MHKL2-20S 20 32 18 16 34 314 MHKL2-25S 25 53 22 19 41 565 MHKL2-12C 12 11 11 9 20 105 L1 MHKL2-16C 16 22 14 14.6 28.6 166 L2 MHKL2-20C 20 40 18 16 34 314 MHKL2-25C 25 63 22 19 41 565 Note) At the pressure of 0.5 MPa, when gripping point L is 20 mm.

Wedge Cam Operation Gripper Series MHK2

Normally closed MHKL2-16S 16 3.8 (17) 14 14.6 28.6 5.8 MHKL2-20S 20 7.2 (32) 18 16 34 11.1 MHKL2-25S Single acting 25 11.9 (53) 22 19 41 19.9 MHKL2-12C 12 2.5 (11) 11 9 20 3.7 MHKL2-16C 16 4.9 (22) 14 14.6 28.6 5.9 L1 MHKL2-20C 20 9.0 (40) 18 16 34 11.1 L2 MHKL2-25C 25 14.2 (63) 22 19 41 19.9 Note) At the pressure of 72.5 psi (0.5MPa), when holding point L is 20mm.

Compact Cylinder

M CU CZ CW RR (mm) Hexagon socket head cap screw Bore size (mm) -0.2 -0.6 CDH9 CL CU CW CX CZ M RR 20 25 32 40 50 63 8 3 12 20 16 35 22 9 M5 8 3 12 20 16 40 26 9 M5 10 5.5 12 22 26 45 32.5 9.5 M6 12 5.5 15 25 28 51 38 12 M6 12 6.5 15 27 32 64 46.5 12 M8 16 6.5 20 32 40 74 56.5 16 M8 8 Series C55 Proper Auto Switch Mounting Position (Detection at Stroke End) and Its Mounting Height Reed switch

Wedge Cam Operation Provides

-25S 565 41 19 22 25 53 L1 Single acting MHKL2-12C 105 20 9 11 12 11 L2 MHKL2-16C 166 28.6 14.6 14 16 22 MHKL2-20C 314 34 16 18 20 40 MHKL2-25C 565 41 19 22 25 63 Note) At the pressure of 0.5MPa , when holding point L is 20mm.

JXCx-OMT0023

(Note 14) Y010 NP 25 (Note 16) 10m max.

Compressed Air Cleaning Filter Series

36 41 1/4, 3/8 172 18 145 90 20 90 10 222 80 28 8 7 7 14 7 12 50 80 95 34 5 2.3 32 37 42 41 3/8, 1/2 204 20 166 106 20 106 10 246 90 31 10 9 9 18 9 15 55 88 111 50 9 3.2 37 37 43 41 1/2, 3/4 225 24 200 122 20 122 15 278 100 33 10 9 9 18 9 15 65 102 126 60 10 3.2 39 37 51 41 3/4, 1 259 41 Micro Mist Separator with Pre-filter Series AMH Dimensions AMH650 Auto drain D: With auto drain (N.O.

Compact Hydraulic Cylinder

(mm) H I J K L C D E F U A B Z M N O P S Bore size (mm) 32 M10 x 1.5 60 4.5 14 8.5 73.5 12 16 45 20 31.5 65 14 34 5.5 9 depth 7 Rc1/8 58.5 40 M10 x 1.5 69 5 14 8.5 75.5 12 16 52 22 35 67 14 40 5.5 9 depth 7 Rc1/8 66 50 M12 x 1.75 86 7 18 11 87 15 20 64 25 41 76 19 50 6.6 11 depth 8 Rc1/4 80 63 M12 x 1.75 103 7 18 11 91 15 20 77 27 47.5 80 19 60 9 14 depth 10.5 Rc1/4 93 80 M16 x 2 132 6 22