Cylinder

I ' . 0.040 6 7 11 17 8 M3 x O.5 I. 16.5 10.5 6 B M10 X1.0 9 3 7 3 , 065 '10 . , jj:!'

XL

Port S (10) remains pressurized and valve S (18) remains open.

High Vacuum Angle Valve, XL Series

Port S (10) remains pressurized and valve S (18) remains open.

Safety Speed Control Valve (SSC Valve) Series ASS

Calle 18 69-05 Apart.

Guide Cylinder Series MGG

Note Rod cover 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 Stopper ring Zinc chromated 26 27 28 29 30 31 32 For lock type White hard anodized Aluminum alloy Carbon steel MGZ Tube cover Piston holder White hard anodized Aluminum alloy Used for 40 and larger Urethane Piston Seal retainer Chromated Aluminum alloy Used for 80 and 100 Rolled steel Piston rod Rod seal Hard chrome

Brake mechanism added

18 15 0.1 0.3 +0.3 +0.1 0.032 0.059 16 +0.070 0 15 86 105 59 130 11.5 101 107 40 16 23 23 352 49 110 148 263 25 25 18 0.1 0.3 +0.3 +0.1 0.032 0.059 20 +0.084 0 18 102 130 76 160 13.5 119 126 48 20 28 28 403 61 140 192 297 31.5 31.5 25 0.1 0.3 +0.3 +0.1 0.040 0.073 +0.084 0 25 18 116 150 92 180 13.5 133 140 58 25 23.5 36 430 64 162 214 309 0.1 0.3 +0.3 +0.1 0.040 0.073 35.5 35.5 25 Mounting

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

Refer to pages 15-18-3 to 15-18-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 15-8-6 to 15-8-8 for Precautions on every series.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

for further information on rod end nuts and accessories. 58 13 17 up to 600 20 17 52 12 11 27 47.3 61 M8 X 1.25 M18 X 1.5 159 40 90 17 11 30 25 70 7 19 0 32 35 18 58 17 up to 600 20 17 64 10 11 27 54.8 M18 X 1.5 170 40 15.5 68.5 M10 X 1.25 98 17 14 31 25 7 19 0 85 32 35 18 71 21 up to 750 21 25 78 14 13 32 65.8 M22 X 1.5 204 102 52 116 18.5 80.5 M12 X 1.75 21 17 37 40 11 23 0 37 40 22 72

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

for further information on rod end nuts and accessories. 14 up to 600 11 52 20 13 40 12 17 17 58 27 47.3 61 M8 M18 X 1.5 159 35 32 70 7 11 19 30 17 90 0 25 18 up to 600 11 64 20 15.5 40 10 17 17 58 27 54.8 68.5 M10 X 1.25 M18 X 1.5 170 32 85 35 7 14 19 31 17 98 0 25 18 up to 750 102 13 78 25 18.5 52 14 21 21 71 32 65.8 80.5 M12 X 1.75 M22 X 1.5 116 204 40 37 11 17 23 37 21 0 40 22 up to

Free Mount Cylinder for Vacuum Series ZCUK

(mm) DQ HQ HP Model Applicable pad model Note) ZPU-X11 ZC(D)UKD10 ZC(D)UKR10 SP 4 6 8 10 13 16 20 25 32 40 50 10 16 25 40 6 8 10 13 16 20 25 32 40 50 12 18 32 13 7 32 13 9 12 15 18 31 12 2. 6 26 10 2. 6 31 12 4. 8 26 10 4. 8 31 12 7 26 10 7 31 12 9 26 10 9 12 15 18 ZCUK DQ HQ HP AMJ ZP ZC(D)UKD16 ZC(D)UKR16 AMV DQ HQ HP ZC(D)UKD20 ZC(D)UKR20 ZP 53 15 36 16 37 28 20 44 43 29 16 37 53 38

ZQ-OM01401

(23) 54 2) 46 (37) 49 (44) 41 (36) 68 0.5 63 (57) 57 (51) 46 (43) 82 0.1 0.2 6 0.3 43 (34) 39 (30) 35 (28) 54 2) 49 (41) 53 (50) 47 (43) 68 0.5 67 (64) 61 (59) 54 (51) 81 1) ( ) 2) ZQ05A0.35MPaZQ07AZQ10A0.43MPaZQ000A0.4MPa 3) (PD) V PD [MPa] ZQ05A ZQ07A ZQ10A ZQ000A 0.05 11 10 8 16 0.15 22 20 17 32 3.2 0.25 31 29 24 46 0.35 44 39 31 60 0.45 54 48 38 74 0.05 11 11 9 16 0.15 24 22 18

ML1

Cylinder EA Absorber model EB EC ED EF EY S T EH EI h i TT REA ML1-A25H ML1-A32H ML1-A40H ML1C25 ML1C32 ML1C40 101 90 25 20 11 72 67.3 12 31 39.5 4.5 3 MAX. 16.5 RB1412 120 107 30 25 16 93 73.2 15 38 49 5.5 6 MAX. 20 REC RB2015 147 129 30 31 16 105.5 73.2 15 40.5 54.5 5.5 6 MAX. 25 RHC Side Support MTS CC Side support A Side support B (mm) H G F J E Cylinder D Part No.

Power Valve Precision Regulator

Description 0 3 0 3 0 3 0 3 0 3 0 3 VEX1A33 VEX1B33 VEX113 VEX123 VEX133 VEX153 VEX173 VEX193 B Bracket (With bolt and washer) VEX1-18-1A VEX1-18-1A VEX3-32A VEX5-32A VEX7-32A VEX9-32A F VEX1-18-2A VEX1-18-2A Foot (With bolt and washer) G G27-10-R1-X207 G27-10-01 G36-10-01 G46-10-01 Pressure gauge (3) N AN120-M5 Silencer for bleed port (PE) Note 1) Not conforming to ISO1179-1.

EX500

1 End plate 66 2 x M4 (mounting hole) EX9 EA03 12.5 10 60 13.2 75 6 18 1694

Fieldbus system PROFIBUS DP compatible SI unit

No.EX-OMN0028-B PRODUCT NAME Fieldbus system PROFIBUS DP compatible SI unit MODEL / Series / Product Number EX600-SPR#A EX600-ED# Table of Contents Safety Instructions 3 System Outline 9 Definition and terminology 10 Assembly 12 Mounting and Installation 15 Installation 15 Wiring 17 SI Unit Model Indication and How to Order 18 Summary of Product parts 18 Mounting and Installation 19 Wiring

Intrinsically Safe Valve

(For details, refer to page 18.) The solenoid must be connected to a safety barrier located in a non-hazardous area.

Vacuum Manifold for fieldbus system

Construction/Replacement Parts 18 6.1. Construction 18 6.2. Component Parts 18 6.3. Replacement Parts 19 7. Exploded View of Manifold/Replacement Parts 20 7.1. Exploded View of Manifold 20 7.2. Component Parts for Manifold 20 7.3. Replacement Parts 21 7.4. Manifold Option 22 7.5. How to Increase Manifold Stations 23 8. Maintenance 24 8.1. Maintenance 24 8.2. Replacement Procedure 25 9.

Series MLGP

D (mm) Bore size B C Hexagon socket A 2d or more (mm) (mm) MLGPM MLGPL (mm) (mm) Head cap screw 20 72 24 54 14 12 M5 x 0.8 25 82 30 64 18 15 M61.0 32 98 34 78 22 18 M81.25 40 106 40 86 22 18 M81.25 50 130 46 110 27 22 M101.5 63 142 58 124 27 22 M101.5 Bypass port dia. 80 180 54 156 33 28 M121.75 100 210 62 188 39 33 M142.0 10 - 8) Depending on the operating condition, change the position

Modular F.R.L. Units

Note 2) When the compressor oil mist discharge concentration is 30 mg/m3 (ANR).

180° Angular Style Air Gripper Series MHY2/MHW2

. : MH-G04 (30g) 664 Series MHY2 180 Angular Style Air Gripper Cam Style Dimensions MHY2-10D Pin hole positioning 30 9 9 2 x M3 x 0.5 thread depth 4 4 (Thread for mounting attachment) 4 x M3 x 0.5 through (Mounting thread) 3H9+ 0.025 0 depth 3 6 0.005 0.025 4 4 x M3 x 0.5 thread depth 6 3 6 (Mounting thread) 2 x 3.4 through 2 x M3 x 0.5 depth 6 12 (Mounting hole) (Mounting thread) (Limted