KR

Note) D1: Max. diameter 18.5 26.5 31 28.5 31.5 36.5 35.5 36.5 38.5 41.5 9.8 13.4 23.5 24 12 15 14.5 22.5 18.5 25 8 1 8 12.8 15.3 23.5 17 6 Applicable tubing 7.5 5.9 1 4 10 M3 x 0.5 1 8 1 4 3 8 1 4 3 8 3 8 1 2 15.5 18.5 24.5 25.5 20.5 30 11.2 16 12 15.2 17.6 28.5 8 18.5 20.5 14.3 14 20.6 27.5 19.5 20.5 29.5 30 10 27 20.3 14 18.5 20.6 31 21 22 25 32 33.5 12 20.9 25.2 34 22 17 30.8 39 Applicable

Air Cylinder Series MB

, 16) 75 + 40 (n 4) 2 (n = 4, 8, 12, 16) 80 + 40 (n 4) 2 (n = 4, 8, 12, 16) 85 + 40 (n 4) 2 (n = 4, 8, 12, 16) 95 + 40 (n 4) 2 (n = 4, 8, 12, 16) 100 + 40 (n 4) 2 (n = 4, 8, 12, 16) n 2 (Different surfaces, same surface) 1 45 55 60 70 75 50 D-A9V 45 + 30 (n 4) 2 (n = 4, 8, 12, 16) 50 + 30 (n 4) 2 (n = 4, 8, 12, 16) 55 + 30 (n 4) 2 (n = 4, 8, 12, 16) 60 + 30 (n 4) 2 (n = 4, 8, 12,

Air Cylinder

10 (12) 1/8 12 10 (12) M5 x 0.8 18 15.5 13 14 8 29 8 12 2 35 5 26 M4 x 0.7 5 6 14 M8 x 1.25 24 25 Up to 300 301 to 1500 12 10 (12) 1/8 12.5 10 (12.5) M5 x 0.8 22 19.5 17 16.5 10 33 10 14 2 40 6 31 M5 x 0.8 5.5 8 16 M10 x 1.25 29 32 Up to 300 301 to 1500 12 10 (12) 1/8 10.5 10 (10.5) 1/8 22 19.5 17 20 12 40 12 18 2 40 6 38 M5 x 0.8 5.5 10 20 M10 x 1.25 35.5 40 Up to 300 301 to 1500 13 10

DOC1023125

225 401 to 500 20 to 1100 12 to 750 6 to 400 3 to 225 24 to 1100 16 to 750 8 to 450 4 to 125 30 to 1200 20 to 1000 10 to 500 5 to 225 501 to 600 20 to 900 12 to 540 6 to 270 3 to 135 24 to 1100 16 to 750 8 to 400 4 to 125 30 to 1200 20 to 1000 10 to 500 5 to 225 601 to 700 20 to 630 12 to 420 6 to 230 3 to 115 24 to 930 16 to 620 8 to 310 4 to 125 30 to 1200 20 to 900 10 to 440 5 to 220

ML1

Cylinder EA Absorber model EB EC ED EF EY S T EH EI h i TT REA ML1-A25H ML1-A32H ML1-A40H ML1C25 ML1C32 ML1C40 101 90 25 20 11 72 67.3 12 31 39.5 4.5 3 MAX. 16.5 RB1412 120 107 30 25 16 93 73.2 15 38 49 5.5 6 MAX. 20 REC RB2015 147 129 30 31 16 105.5 73.2 15 40.5 54.5 5.5 6 MAX. 25 RHC Side Support MTS CC Side support A Side support B (mm) H G F J E Cylinder D Part No.

VKF300

10.5 8 39 23 49.5 1.5 10.5 49.5 4-M3 x 0.5 depth 6 (bracket mounting screws) 4-4.5 (bracket mounting holes) 7 7 5 L3 P = 19 16 nRc(PT) 1/8 (port A) 23 8 19.5 L: Dimension table n: Stations n L L1 L2 L3 1 37 27 13 2 56 46 32 3 75 65 51 4 94 84 70 5 113 103 89 6 132 122 108 7 151 141 127 8 170 160 146 9 189 179 165 10 208 198 184 11 227 217 203 12 246 236 222 13 265 255 241 14 284 274 260

LC-OM089xx

Ground effect is not adequate by soldering the shield wire with wire rod to install the cable (Fig.2-3). 12.European Contact List (44) 1908-56 38 88 Hungary (36) 1-371 1343 Turkey (90) 212 221 15 12 Finland (358) 9-859 580 Portugal (351) 22 610 89 22 No.LC-OM08901 A (3/3) Denmark (45) 70 25 29 00 Poland (48) 22-548 50 85 Greece (30) 1-342 60 76 Switzerland (41) 52-396 31 31 France (33) 1-

Fieldbus system PROFIBUS DP compatible SI unit

Round head screw (M3 x 8), 4 pcs. EX600-ZMV2 (Specified for SY series) Enclosed parts: Round head screw (M4 x 6), 2 pcs. Round head screw (M3 x 8), 2 pcs. (2)End plate bracket EX600-ZMA2 Enclosed parts: Round head screw (M4 x 20), 1 pc. P tithe screw (4x14), 2 pcs. EX600-ZMA3 (Specified for SY series) Enclosed parts: Round head screw (M4 x 20) with washer, 1 pc.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

PF2D5--1 (With voltage output type) PF2D540-19 Display unit (PF2D30/31) 186 Sensor unit 78 86 Brown 6 2 Analog output Switch output or Pulse output Main circuit Main circuit 56 8 4 Load + 12 to 24 VDC 15 White 7 3 Black 5 1 Blue Load is an analog input equipment such as a voltmeter.

Power Valve Precision Regulator

Without thread: Internal pilot VVEXB-1 With M5 thread: Common external pilot VVEXB-2 (79) 61.5 P1 A A R 31 26 19 P 10 9 8 P=31 35 Port 1(P): 1 8 25.5 n x port 2(A): 1 8 For 6 manifold stations or more, exhaust from the both sides. 37 29 L Dimension L1 = 31n + 25, L2 = 31n + 12 n: Station 2 87 74 L1 L2 3 118 105 4 149 136 5 180 167 6 211 198 7 242 229 8 273 260 9 304 291 10 335 322 Symbol

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

(mm) B1 H LH LX 22 22 GA GB GC KA LD 138 109 107 103 1/8 AL MM X Y B 52.3 42.3 36.3 30.3 ND 20-0.033 0 7 5.5 5.5 5 K Bore size ZZ S P N L D A H1 I 17 17 13 34 31 31 27 6 6 5 18 15 25 21 8 8 6 6 8 6 5.5, 9.5 counterbore depth 6.5 M14 x 1.5 M10 x 1.25 M10 x 1.25 M8 x 1.25 49 43 43 39 15 12 12 12 104 78 76 76 42.5 34.5 30 24 14 12 10 8 58.5 47 39 33.5 21 19.5 19.5 15.5 40 32 25 20 24 22 22 18

PF2D

3 x 7.2 (= 21.6) 8-M3 OUT2 NC Sensor 36 +0.5 0 8 Load 6.4 4 OUT1 Black 7 3 Load 1 2 3 4 Brown + 6 2 +0.5 0 Blue 19.4 5 1 12 to 24 VDC Series PF2D5 5 6 7 8 PF2D301-A(-M) Do not connect the white wire of the sensor to c of the display unit.

SI Unit

A functional earth cable must be connected to the M3 terminal. If this product is connected using power cables that are more than 30m long or go outside of a building then external protection devices should be added to protect against electrical surge damage.

Voltage Monitor for PFMV5

Part number Description Remarks ZS-28-A Power and output lead wire and connector Length: 2 m ZS-28-B Bracket Mounting screw (M3 x 5 L) 2 pcs. ZS-28-C Sensor connector 1 pc. ZS-27-C Panel mount adapter Mounting screw (M3 x 8 L) 2 pcs. ZS-27-D Panel mount adapter + Front protective cover Mounting screw (M3 x 8 L) 2 pcs.

VM

30.5 20.8 16.1 22 12 10 12 46 62 63 31.5 30.5 21.5 4 21.8 20.8 14 17 3.2 31 32 VHK-B2A 49 17 1 30 25 21.5 31 1(P): Male Thread, 2 (A): One-touch Fitting Effective area (mm2) Bracket assembly no.

10

2 (n = 4, 8, 12, 16) Note 2) 75 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 80 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 85 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 95 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 100 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 2 (Different surfaces, same surface) 1 45 50 55 60 70 75 D-A9lV n 45 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 50 + 30 (n 4) 2 (n = 4, 8, 12,

Mist Separator

Exploded Drawing 30 12. Dimensions 31 -1- Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

Micro Mist Separator

Exploded Drawing 30 12. Dimensions 31 -1- Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

10.5 8 39 23 49.5 1.5 10.5 49.5 4-M3 x 0.5 depth 6 (bracket mounting screws) 4-4.5 (bracket mounting holes) 7 7 5 L3 P = 19 16 nRc(PT) 1/8 (port A) 23 8 19.5 L: Dimension table n: Stations n L L1 L2 L3 1 37 27 13 2 56 46 32 3 75 65 51 4 94 84 70 5 113 103 89 6 132 122 108 7 151 141 127 8 170 160 146 9 189 179 165 10 208 198 184 11 227 217 203 12 246 236 222 13 265 255 241 14 284 274 260

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

2 12.