Table of Contents

(inch) Model N L1 L2 Port B min. bore Weight (g) L3 L4 L5 L6 P Q1 Q2 MA MB FA FB KM11-03-09-6 KM11-03-09-10 KM11-07-11-6 KM11-07-11-10 KM11-09-13-6 KM11-09-13-10 6 65 10 19 40 5 32 5 16 18 29.5 19.5 27 10.6 12 16 18.5 6 10 86 6 77.8 10 104 6 85 10 115 26 61.5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area

KJ

(inch) Model N L1 L2 Port B min. bore Weight (g) L3 L4 L5 L6 P Q1 Q2 MA MB FA FB KM11-03-09-6 KM11-03-09-10 KM11-07-11-6 KM11-07-11-10 KM11-09-13-6 KM11-09-13-10 6 65 10 19 40 5 32 5 16 18 29.5 19.5 27 10.6 12 16 18.5 6 10 86 6 77.8 10 104 6 85 10 115 26 61.5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area

Vacuum Unit

Symbol Type Note Nil Without option Symbol Vacuum (V) port 06 6 08 8 07 1/4" 09 5/16" When R is selected for q, P needs to be selected.

1

F: D-sub connector (25 pins) PG: Flat ribbon cable (20 pins) P: Flat ribbon cable (26 pins) Symbol 02 Symbol Stations Note Symbol Stations Note Stations Note 02 02 2 stations 2 stations 2 stations All double wiring All double wiring All double wiring 12 02 09 02 12 02 12 stations 9 stations 12 stations 2 stations 2 stations 2 stations All single wiring All single wiring All single wiring

Air Fittings & Tubing

KDM10S-01 Plug Socket 1 8 5 32 KDM10P-01 KDM10P-03 KDM10P-07 KDM10S-03 KDM10S-07 10 1 4 Red KDM10P-09 KDM10S-09 KDM20S-01 KDM20S-03 KDM20S-07 5 16 1 8 KDM20P-01 5 32 1 4 5 16 KDM20P-07 20 KDM20P-03 KDM20P-09 KDM20S-09 Panel mounting qLoosen (4) screws for bracket on the socket side using a Phillips screwdriver (JIS nominal No.2) until the bracket touches the stop ring.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Port size N M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 Needle Valve/Flow Characteristics AS121FG AS131FG AS221FG-01 AS231FG-01 AS221FG-02 AS231FG-02 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 07, 08, 09, 10, 11 05, 06, 07, 08, 09, 10 Flow rate (/min (ANR)) Flow rate (/min (ANR)) Flow rate (/min (ANR)) Effective area (mm2) Effective area (mm2) Effective

Piping: Base Mounted, Stations: 6 Stations, A, B Port: NPTF1/8

Piping: Base Mounted, Stations: 7 Stations, A, B Port: NPTF1/8

Piping: Base Mounted, Stations: 18 Stations, A, B Port: NPTF1/8

Piping: Base Mounted, Stations: 3 Stations, A, B Port: NPTF1/8

Piping: Base Mounted, Stations: 5 Stations, A, B Port: NPTF1/8

Piping: Base Mounted, Stations: 7 Stations, A, B Port: NPTF1/8

Piping: Base Mounted, Stations: 11 Stations, A, B Port: NPTF1/8

Piping: Base Mounted, Stations: 13 Stations, A, B Port: NPTF1/8

Piping: Base Mounted, Stations: 15 Stations, A, B Port: NPTF1/8

Piping: Base Mounted, Stations: 17 Stations, A, B Port: NPTF1/8

Piping: Base Mounted, Stations: 18 Stations, A, B Port: NPTF1/8

Piping: Base Mounted, Stations: 19 Stations, A, B Port: NPTF1/8

Piping: Base Mounted, Stations: 4 Stations, A, B Port: NPTF1/8

Piping: Base Mounted, Stations: 16 Stations, A, B Port: NPTF1/8