Fieldbus system EtherNet/IP compatible SI Unit

X4 X2 X4 X2 X4 Y4 Y4 Y4 Y4 Byte 0 Port 4 Port 3 Port 2 Port 1 Port 4 Port 3 Port 2 Port 1 Byte 1 Reserved (fixed value: 0) Reserved (fixed value: 0) Input process data Output process data 2 to 129 2 to 39 2 to 65 Process data is assigned to each port based on the process data mapping size setting Process data is assigned to each port based on the process data mapping size setting 40 66 130

PFxx-OMY0005

(Displays 0 when the value is below 90 L/min) 200 to 2100 L/min 100 to 1050 L/min (Displays 0 when the value is below 200 L/min) 10.0 0 to 10%F.S. (Displays 0 when the value is below 100 L/min) : The zero-cut range of the accumulated value and accumulated pulse value should be 1%F.S. or more.

Multistage Ejector Series ZL112/212 1

Display LCD LED LCD with backlight 101 to 0 kPa 101 to 10 kPa Pressure setting range 200 kPa Maximum operating pressure Operation indicator light (Lights up when ON) OUT1: Green OUT2: Red Green Response frequency 200 Hz (5 ms) Hysteresis mode Variable (3 digits or more) Variable (can be set from 0) Hysteresis Fixed (3 digits) Window comparator mode Fluid Air, Non-corrosive gas Temperature

Compact

If the adjusting screw of the speed controller is loosened, the operating speed will increase, so the screw should be tightened completely. m Impact force MXZ12 MXZ16 1.4 2.5 V = mm/s V = mm/s 1.2 2.0 Load weight m [kg] Load weight m [kg] 1.0 1.5 0.8 0.6 1.0 V = 50 V = 50 0.4 V = 100 V = 100 V = 200 V = 200 0.5 V = 500 V = 500 0.2 0.0 0.0 60 50 40 30 20 10 0 0 5 20 15 10 25 30 35 40 45 50

ZP

50 0 to 100 X X X X Conductive NBR 50 10 to 200 X X X X X Conductive silicon rubber The above table covers only general characteristics of subject rubber materials.

Rotary Cylinder Series MRQ

Symbol -X10 4 Long Stroke (101 to 200 mm) Refer to the table of number of the auto switches mounted below.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Double acting, Single rod 25, 50, 75, 100, 125, 150 1/8 25, 50, 75, 100, 125, 150, 200 1/4 25, 50, 75, 100, 125, 150, 200, 250, 300 Suction Flow Rate of Vacuum Suction Type (Reference values) Specifications Bore size (mm) Item 20/25/32/40 2 Bore size Suction flow rate L/min (ANR) 20/25/32/40 1.5 MPa 1.0 MPa 0.05 MPa Without auto switch: 10C to 70C With auto switch: 10C to 60C (No freezing

JXCx-OMT0062

Controller CN3 Actuator cable Electric Actuator Motor CN2 5.3 CN4: Serial I/O connector (1) Connection with the teaching box Controller CN4 Teaching box (The 3m cable is provided.) 26 - (2) Connection with a PC Controller setting kit Controller Conversion unit 120.3 120.3 mm mm 200 200 mm/s mm/s USB cable (A-miniB type connector) 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

320 0.7 MPa 500 CEP1 0.7 MPa 280 0.2 MPa 0.3 MPa 0.4 MPa 0.5 MPa 0.6 MPa 0.7 MPa 0.6 MPa 0.6 MPa 160 CE1 0.5 MPa 240 0.5 MPa 400 0.4 MPa 0.4 MPa CE2 0.3 MPa Lateral load F (N) Lateral load F (N) Lateral load F (N) 200 0.3 MPa 120 0.2 MPa ML2B 300 0.2 MPa 160 C J G5-S 80 120 200 CV 80 40 MVGQ 100 40 CC 40 120 100 80 60 180 140 100 60 240 200 160 120 80 RB Point of application L (mm) Point

CY1F

Standard Stroke Maximum stroke available (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit.

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Rod boot Intermediate strokes are available.

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

, 250, 300, 350, 400, 450, 500 C95 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 CA1 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 CS1 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300

Escapements Series MIW/MIS

320 0.7 MPa 500 0.7 MPa 280 0.2 MPa 0.3 MPa 0.4 MPa 0.5 MPa 0.6 MPa 0.7 MPa 0.6 MPa 0.6 MPa 160 0.5 MPa 240 0.5 MPa 400 0.4 MPa 0.4 MPa 0.3 MPa Lateral load F (N) Lateral load F (N) Lateral load F (N) 200 0.3 MPa 120 0.2 MPa 300 0.2 MPa 160 80 120 200 80 40 100 40 40 120 100 80 60 180 140 100 60 240 200 160 120 80 Point of application L (mm) Point of application L (mm) Point of application

Digital Flow Switch

) Air N2 1 L/min 10 100 2 L/min 20 200 5 L/min 50 500 PF3A7 H Thermal type (Platinum sensor) 2 L/min 30 3000 p. 9 Air N2 PFG300 5 L/min 60 6000 p. 14 12000 Bypass flow type 10 L/min 120 0.2 PFM 0.01 L/min 10 Dry air N2 Ar CO2 0.5 25 Thermal type (MEMS) 0.1 L/min 1 50 2 100 PFMB 2 200 Thermal type (MEMS) 5 500 Dry air N2 1 L/min Bypass flow type 10 1000 PFG300 20 2000 PFMC 5 500 Thermal

Step Motor Controller (Servo / 24 VDC)

CN4 20 - (2) Connection with a PC Controller setting kit Controller 120.3 120.3 mm mm 200 200 mm/s mm/s USB cable (A-miniB type connector) 100 500 100 500 1 1 200 1000 200 1000 2 2 Communication 50 200 50 200 3 3 CN4 cable PC (The PC should be obtained separately.) Caution (1) Do not connect to equipment other than specified (LEC-W1, LEC-W2, LEC-T1, LEC-G).

LEC-OM02704CN

(FR-BSF01FR-BLF()) 13 21 13 (2) (a) () TDKZCAT3035-1330NECESD-SR-25 ZCAT3035-1330(TDK) [] [mm] 10100MHz 100500MHz 391 131 341 80 150 301 TDK (ZCAT3035-1330) (b) () ACACAC MC 20cm ()972A-2003 50411 (AC200V) AC[V] C[F] R[] [mm] AC[V] 200 0.5 50(1W) T-C 181.5 1000(15s) 6 10 10 103 103 4 151 31.51 200 200 481.5 DCDC 4 2 RA 13 22 13 (c) AERSBAN-SET SD ( A B ) 40 2-5 17.5

Micro-Mist Separator with Prefilter Series AMH

PT/PF thread model I.D.4mm or more, O.o.l0mm or more, length 5m or less NPT thread model 1.0.3/16" or more, 0 .D.3/8" or more, OFluSh piping on the secondary side of AMH . length 200" or less Normally Open: ~ Open and close pipe line before operation to ensure proper connection sealing.

Compact and Lightweight

ZH2-TB206-A 6 M4 x 130 2 pcs. Hexagon nut (M4) 2 pcs. ZH2-TB208-A 8 M4 x 170 2 pcs. (ZH2-TB201-A)3 1 M4 x 30 2 pcs. Flat washer (for M4) 2 pcs. ZH2-TB302-A 2 M4 x 55 2 pcs. ZH2-TB303-A 3 M4 x 80 2 pcs. ZH18DA ZH20DA ZH2-TB304-A 4 M4 x 100 2 pcs. ZH2-TB306-A 6 M4 x 145 2 pcs. ZH2-TB308-A 8 M4 x 185 2 pcs. 1 Select only One-touch fitting if ZH ejectors are to be clamped.

Rotary Cylinder Series MRQ Size: 32, 40 1

F(N) F(N) Stroke 105 15 9 110 115 14 120 8 125 130 13 140 150 7 12 175 5 200 11 0 1 2 Rotation angle Linear motion Number of Auto Switches Mounted 02 0S 0 S2 SS S0 1 Nil 2S 20 2 n2 nS n0 n Combinations of made-to-order products No. 1 to 4 are available. Please contact SMC for further information. 11-10-19

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

320 0.7 MPa 500 CEP1 0.7 MPa 280 0.2 MPa 0.3 MPa 0.4 MPa 0.5 MPa 0.6 MPa 0.7 MPa 0.6 MPa 0.6 MPa 160 CE1 0.5 MPa 240 0.5 MPa 400 0.4 MPa 0.4 MPa CE2 0.3 MPa Lateral load F (N) Lateral load F (N) Lateral load F (N) 200 0.3 MPa 120 0.2 MPa ML2B 300 0.2 MPa 160 C J G5-S 80 120 200 CV 80 40 MVGQ 100 40 CC 40 120 100 80 60 180 140 100 60 240 200 160 120 80 RB Point of application L (mm) Point