HRX-OM-S004

10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [oC] Circulating fluid temperature [oC] 50Hz 60Hz Fig. 8-5 Cooling capacity(HRS100-A-20/40/46-) 8.4.2 HRS150-A-20/40/46: Ambient temperature: 32 oC : Ambient temperature: 40oC : Ambient temperature: 45 oC 18 18 16 16 14 14 Cooling capacity [kW] Cooling capacity [kW] 12 12 10 10 8 8 6 6 4 4 2 2 0 0 5 10 15 20 25 30 35 5 10

4/5 Port Air Operated Valve Series SYJA3000

Prefix it to the part nos. of the solenoid valve, etc. 3 position pressure center (A) 4 (B) 2 1 (P) 3 (R2) 5 (R1) Caution For Safety Instructions and Solenoid Valve Precautions, refer to pages 5-11-2 to 5-11-6. 5-2-25 Series SYJA7000 Specifications Air 0.15 to 0.7 0.1 to 0.7 0.15 to 0.7 (0.4 x P+0.1) to 0.7 P: Operating pressure 0.1 to 0.7 0.15 to 0.7 Fluid 2 position single Operating pressure

HRX-OM-T002

10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [oC] Circulating fluid temperature [oC] 50Hz 60Hz Fig. 9-5 Cooling capacity(HRS090-A-20/40/46) 9.4.2 HRS090-W-20/40/46: Facility water temperature 32 oC : Facility water temperature 40 oC 12 14 12 10 10 Cooling capacity [kW] Cooling capacity [kW] 8 8 6 6 4 4 2 2 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid

REC

20 100V CE1 PLC D-C73C 5 to 40 24V DC AC DC CE2 D-C80C IC circuit, Relay, PLC 50 24Vor less D-B53,A33 5 to 50 24V DC PLC ML2B 5 to 50 24V DC D-B54 D-A34 D-A44 5 to 25 100V AC ML1C 5 to 12.5 200V AC AC DC 50 Relay, PLC 24Vor less REA D-B64 25 100V AC 12.5 200V AC REC 5 to 40 2 color** D-B59W 24V DC RHC * Use contact protection box when using "D-C7" or "D-C8" type in the following conditions

IZx-OMX0087

Flow rate : 180L/min 75 50 25 0 25 50 75 Installation distance from ionizer to workpiece [mm] 75 50 25 0 25 50 75 -75 -50 -25 0 25 50 75 -75 -50 -25 0 25 50 75 0 0 mm ionizer to workpiece [mm] Installation distance from mm 200 200 20m/s 400 400 2m/s 20m/s 2m/s 600 600 10m/s 800 800 10m/s 5m/s 1000 1000 1200 5m/s 1400 5-4.

48

Refer to the standard model numbers. 12 (10 x 2) 5 to 95 16 (12 x 2) 20 (16 x 2) 5 to 145 25 (20 x 2) 32 (25 x 2) Applicable stroke [mm] 40 (32 x 2) 50 (40 x 2) 63 (45 x 2) 80 (56 x 2) 100 (71 x 2) Refer to pages 10 and 11 for cylinders with auto switches. 5 to 195 Auto Switch Proper Mounting Position (Detection at stroke end) and Mounting Height Minimum Stroke for Auto Switch Mounting

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

(mm) A B C D G E (g6) F (h9) H K L M N R S1 S2 T U V W X Y Model CRBU2WU10-S 0 0.036 4 0.004 0.012 M5 x 0.8 3.5 M3 x 0.5 17 3 25 31 41 9 14 1 19.5 29 22 15.5 9 0.5 10.5 10.5 3 CRBU2WU15-S 0 0.043 0.004 0.012 M5 x 0.8 3.5 M3 x 0.5 21 3 29 36 48 5 12 21.2 18 1.5 25 34 15.5 10 0.5 10.5 10.5 3.2 CRBU2WU20-S 0 0.043 0.004 0.012 M5 x 0.8 4.5 M4 x 0.7 26 4 36 44 59 6 14 1.5 34.5 25 20 42 17 10 0.5

Compact Cylinder with Lock Series CLQ

9.5 10 6.5 7 19 21.5 5 to 50 5 to 50 20 25 For retraction locking For rod end male threads (mm) (mm) Bore size (mm) Bore size (mm) VH1 W1 X H1 H2 L1 C1 20.5 23 12 14.5 14 17.5 12 15 M8 x 1.25 M10 x 1.25 5 6 18.5 22.5 20 25 20 25 7 Compact Cylinder with Lock Series CLQ Dimensions/20, 25 Foot type: CLQL/CDLQL Special cap bolt L G B + Stroke Foot type (mm) LY LH S Stroke range Without auto

HRX-OM-R005

-2050Hz HRS060-A-2050Hz HRS060-A-2060Hz HRS060-A-2060Hz HRS060-A-2060Hz 9.5.1 HRS060-A-20-(BJM) 2000 2000 Ambient Ambient temperatur temperatur Heating capacityW Heating capacityW 1500 1500 e e 40 40 32 32 1000 1000 25 25 20 20 5 500 5 500 0 0 5 10 15 20 25 30 35 40 5 10 15 20 25 30 35 40 Circulating fluid temperature Circulating fluid temperature 60Hz 50Hz Fig. 9-5 Heating capacity(HRS060

HRX-OM-R016

Fig. 9-4 Cooling capacity(HRS030--20-(BJMT)) 9.5 Heating capacity 9.5.1 HRS030-A-20-(BJMT) 1000 1000 Ambient Ambient temperatur temperatur 800 e e Heating capacityW 800 Heating capacityW 40 32 25 20 5 40 32 25 20 5 600 600 400 400 200 200 0 0 5 10 15 20 25 30 35 40 5 10 15 20 25 30 35 40 Circulating fluid temperature Circulating fluid temperature 50Hz 60Hz Fig. 9-5 Heating capacity(HRS030

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

12 16 20 25 Relief type Vacuum suction type 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 M5 x 0.8 M5 x 0.8 Double acting Single rod 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 Suction Flow Rate of Vacuum Suction Type (Reference values) Specifications Suction flow rate L/min (ANR) Bore size (mm) 12/16/20/25 Size 5 12/16/20/25 Item Proof pressure 1.5 MPa Maximum

Rubber seal 5 Port Solenoid Valve Series SYJ7000

[131.6] 2-3.2 2-3.2 (For mounting) (For mounting) 107.6 [112] (For mounting) 125.4 145.4 147.2 110.6 97.6 65.6 35 35 35 35 21 21 25 21 25 21 Pg7 28 25 28 25 28 Applicable cable O.D. 3.5 to 7 28 Refer to the page 91 for dimentions with connector cable. 53 Series SYJ7000 3 Position Closed Center/Exhaust Center/Pressure Center [ ]: AC 3 4 5 G H 3 4 5 G H C6, N7 C8, N9 Grommet (G), (H): SYJ7

HRX-OM-W038

Fig. 9-4 Cooling capacity(HRS050--20-(BJMTW)) 9.5 Heating capacity 9.5.1 HRS040-A-20-(BJMTWZ) 1500 1500 Ambient Ambient temperature temperature 1200 1200 Heating capacity[W] Heating capacity[W] 40 40 900 900 32 32 25 25 600 600 20 20 5 5 300 300 0 0 5 10 15 20 25 30 35 40 5 10 15 20 25 30 35 40 Circulating fluid temperature[] Circulating fluid temperature[] 60Hz 50Hz Fig. 9-5 Heating capacity

Rotary Table/Rack & Pinion Style Series MSQ

Size: 10 to 50 Size: 70 to 200 Carbon steel 26 Anodized Anodized Chromated NBR Brass NBR Stainless steel 27 28 29 30 31 Size: 70 to 200 only Size: 70 to 200 only Replacement parts Description Size 10 P523010-5 20 P523020-5 30 P523030-5 50 P523040-5 70 P391050-5 100 P391060-5 200 P391070-5 Seal kit No.

HRX-OM-O021

500 0 0 5 10 15 20 25 30 35 40 5 10 15 20 25 30 35 40 Circulating fluid temperature[] Circulating fluid temperature[] 60Hz 50Hz Fig. 9-5 Heating capacity(HRS050-A-20-(BJM)) 9.5.2 HRS050-W-20-(BJM) 2000 2000 Ambient Ambient temperature temperature 5 20 25 32 40 1500 1500 5 20 25 32 40 Heating capacity [W] Heating capacity [W] 1000 1000 500 500 0 0 5 10 15 20 25 30 35 40 5 10 15 20 25 30 35

Rotary Actuator

M3 7.6 21 18.5 5 12 0.043 0.004 0.016 0 42 29 30 20 4.5 10 0.5 20 13 36 M4 x 0.7 depth 7 M5 10.5 22 25 6 14 0.043 0.005 0.020 0 50 40 31 22 5 12 1.0 26 14 43 M5 x 0.8 depth 10 M5 14 24 25 8 16 0.043 0.005 0.020 0 63 45 31 30 6.5 20 1.5 31 20 56 M5 x 0.8 depth 10 M5 17 30 31 10 25 0.052 12 Series CDRB2 Rotary Actuator With Auto Switch Dimensions: 10 Double vane # Following figures show the

High Power Cylinder Series RHC

Applicable bore size (mm) M22 x 1.5 M8 x 1.25 SOR-20 NT-02 20 20 5 13 8 30 26 15 12.5 26 M24 x 1.5 M10 x 1.25 SOR-25 NT-03 25 25/32 6 17 8 36.9 32 19.6 16.5 32 M30 x 1.5 M14 x 1.5 SOR-32 NT-04 32 40 8 22 9 43.9 38 25.4 21.0 38 M33 x 2.0 M18 x 1.5 SOR-40 NT-05 40 50/63 11 27 11 47.3 41 31 26 41 M22 x 1.5 NT-08 80 13 32 37 31 M26 x 1.5 NT-10 100 16 41 47.3 39 1210 High Power Cylinder Series

Wedge Cam Operation Slide Guide Series MHK2 Air Gripper/2-Finger Type ø12, ø16, ø20, ø25

MHKL2-16 MHK2 -20 MHKL2-20 MHK2L-25 MHKL2-25 5 8 1.3 3.3 M5 x 0.8 M4 x 0.7 2.1 10 M5 x 0.8 4.3 M6 x 1 5.9 MHZ MHF MHL MHR MHK MHS MHC MHT MHY MHW -X MRHQ MA D537

Compact Manifold Regulator

IN/OUT Piping Position IRV Metric size Inch size Position IN side OUT side VEX IN side Straight 4 6 OUT side IN side Straight OUT side Mounting position Mounting position Bottom Top Bottom Top Symbol Elbow Straight Elbow 4 6 Elbow Straight Elbow Fitting type Symbol Fitting type Symbol 1 2 3 4 4 6 4 6 5/32 1/4 5/32 1/4 5/32 1/4 5/32 1/4 SRH 06 07 08 18 19 20 25 26 27 32 33 34 56 57 58 68 69

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

12 B A B 1.5(0) 1.5(0) B 0(0) 0(0) 1(0) 6 B 5(3) 5(3) 6(4) 11 A 7(5) 7(5) 8(6) 13 A B 6(4) 6(4) 7(5) 12 A 4(2) 4(2) 5(3) 10 B 3(1) 3(1) 4(2) 9 A 0.5(0) 0.5(0) 1.5(0) 6.5 Hs 22.5 25 28.5 32.5 Hs 25 27.5 31 35 Hs 60 62.5 66 70 Hs 69.5 72 75.5 79.5 Bore (mm) 20 25 32 40 4.5(2.5) 3.5(1.5) 2.5(0.5) 4.5(2.5) 3.5(1.5) 2.5(0.5) MGF 2.5(0.5) 7.5 5.5(3.5) 10.5 4.5(2.5) 9.5 3.5(1.5) 8.5 CY1 Factors