Digital Flow Switch (Integrated display type) ( compatible)

39 30 18 13.6 2.7 depth 12 PF3W740 1/2, 3/4 98 71 38 68 48.6 19.2 32 28 49 35 28 16.8 2.7 depth 12 PF3W711 3/4, 1 124 92 46 77 57.6 23 41 42 63 48 28 18 3.5 depth 14 Symbol Bracket dimensions Model S T U V W WX Y Z PF3W704 24 22 32 40 50 4.5 5 1.5 PF3W720 28 22 32 40 50 4.5 5 1.5 PF3W740 34 30 42 48 58 4.5 5 1.5 PF3W711 44 36 48 58 70 5.5 7 2 -103No.PF-OMV0006-B PF3W721 Basic type Symbol

2/3 Port Valve

(Energized closed) Voltage 1 2 3 4 5 6 7 8 9 100V AC 50/60Hz 200V AC 50/60Hz 110V AC 50/60Hz 220V AC 50/60Hz 24V DC 12V DC 240V AC 50/60Hz 48V AC 50/60Hz Other (Contact SMC seprately) Options Standard F, G, L, T are available option. Refer to p.4.0-11 "Applicable Fluid Check List".

Cylinder with Turntable Series MGT

1 MGQ 1 2 3 4 5 10 20 30 40 50 100 200 300 400 10 20 30 40 50 100 200 300 400 Eccentric distance l (mm) Eccentric distance l (mm) MGG MGC MGTL100 300 300 MGTM100 200 200 P = 0.5 MPa MGF 100 P = 0.5 MPa Larger than 75st Larger than 50st Load mass m (kg) Load mass m (kg) MGZ 40 50 100 25st 50st 30 25, 50st MGT 20 50 40 10 30 5 4 3 20 2 1 10 20 30 40 50 100 200 300 1 2 3 4 5 10 20 30 40 50

VCL

99 50 66 83 VCB21 18 36 67.5 1/4 31 8.5 12.5 M4 27 18 12.8 6 22 62 44 53 99 53 66 86 22 40 81.5 1/4, 3/8 11 15 36.5 32 20 19 M5 8 24 76 46 66.5 101 66.5 68 99 VCB31 86 30 50 1/2 15 13.5 36.5 32 25 23 M5 8 24 80 46 71 101 71 68 104 22 45 90 1/4, 3/8 17 41 11 M5 36 22.5 23 8 26 84 48 74.5 103 74.5 70 107 VCB41 30 50 94 1/2 41 13.5 17 M5 36 25 23 8 26 88 48 78.5 103 78.5 70 111.5 35 60 102

Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 9 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21.5 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8

Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8 4.5

PFxx-OMY0005

FSC_PrES (Fine adjustment of the pressure span) S16 0 N -50 to 50 0.1% increments (-5 to 5) 1810 0x0712 0 R/W Refer to the Fig.

KQ2

22.5 24 28.5 30 1 4 33 9 3 8 1 2 22.23 22 9.6 30 1 2 17 25 28 Reference dimensions after Uni thread installation.

LA-OMP0023

10 20 30 40 50 0 10 20 30 40 50 Pushing Position [mm] Pushing Position [mm] Operating conditions: Operating conditions: Mounting orientation: Mounting orientation: Horizontal table mounting.

Lightweight and Compact

fluid temperature [C] Pump Capacity HRS090-A-20/40 HRS090-W-20/40 0.5 50 Usable range (50 Hz) Circulating fluid pressure [MPa] Circulating fluid outlet (60 Hz) 0.4 40 Pump head [m] 0.3 30 Circulating fluid outlet (50 Hz) 0.2 20 Usable range (60 Hz) 0.1 10 Circulating fluid return port 0 0 0 10 20 30 40 50 60 70 Circulating fluid flow rate [L/min] 78 Thermo-chiller Standard Type HRS090 Series

48

Series Variations Model Bearing Bore size Stroke [mm] Cushion Piston speed Port size Mounting direction JMGP 12 (10 x 2) 10, 20, 30, 50, 100 M3 x 0.5 16 (12 x 2) 20 (16 x 2) 20, 30, 50, 100, 150 M5 x 0.8 25 (20 x 2) 50 to 300 mm/s Top 32 (25 x 2) Rubber bumper on both ends Slide bearing Bottom 40 (32 x 2) 1/8 (Rc, NPT, G) 50 (40 x 2) Rear 25, 50, 100, 150, 200 63 (45 x 2) 80 (56 x 2) 50 to

53

Facility water temperature 32C 12 Cooling capacity [kW] 10 8 Facility water temperature 40C 6 4 2 0 5 10 15 20 25 30 35 40 Circulating fluid temperature [C] Pump Capacity HRSH090--20/400.6 60 Circulating fluid pressure [MPa] 0.5 50 Outlet Pump head [m] 0.4 40 0.3 Usable flow rate range 30 0.2 20 Return port 0.1 10 0 0 20 10 40 30 50 60 70 Circulating fluid flow rate [L/min] 0 140 Thermo-chiller

HRX-OM-R039

to 70% Circulating fluid2 Tap water, Ethylene glycol aqueous solution 15% Operating temperature range1 oC 10 to 30 Circulating fluid system Cooling capacity (50/60Hz) W 1000/1200 1400/1600 Temperature stability4 oC 2 Pump capacity5(50/60Hz) MPa 0.08(at 7L/min) / 0.11(at 7L/min) For option T0.13(at 7L/min) / 0.18(at 7L/min) Rated fiow6 (50/60Hz) L/min 7/7 Tank capacity L Approx. 5 Port size

Digital Flow Switch ( compatible)

Name Lead wire colour Function 1 L+ Brown 18 to 30 VDC 2 N.C.

CL

CLG-020-24 CLG-025-24 CLG-032-24 CLG-040-24 20 25 32 40 13 15 17 21 3.2 3.2 4.5 4.5 21.2 21.3 25.6 26.3 47.8 54.8 57.4 65.4 42 42 48 56 26 28 28 36 28 28 28 30 50 57 61.4 71.4 CG-020-24A CG-025-24A CG-032-24A CG-040-24A 20 25 32 40 13 15 17 21 3.2 3.2 4.5 4.5 18.1 20.7 23.6 27.3 35.8 39.8 49.4 58.4 42 42 48 56 16 20 22 30 28 28 28 30 38.3 42.1 53.8 64.6 Rod End Nut Clevis Pin Knuckle Pin

180° Angular Style Air Gripper Series MHY2/MHW2

Pressure 0.6 MPa 0.5 40 8 0.5 Gripping force (N) Gripping force (N) 0.4 30 6 0.4 0.3 0.3 20 4 0.2 0.2 10 2 0.1 0.1 0 20 30 50 60 Gripping point L (mm) 40 0 30 40 60 70 Gripping point L (mm) 50 80 MHY2-16D MHY2-25D F F F F 35 100 Pressure 0.6 MPa Pressure 0.6 MPa 30 0.5 0.5 80 25 Gripping force (N) External grip Gripping force (N) 0.4 0.4 60 20 0.3 0.3 15 40 0.2 0.2 10 20 0.1 0.1 5 L L 0 20

Guide Table Series MGF ø40, ø63, ø100 Low-profile compact cylinder utilizes a large concentric guiding sleeve to provide excellent eccentric load resistance.  Mounting height greatly reduced  Built-in non-rotating mechanism Internal guide pin prevents

gravity) l = 50 mm l = 100 mm Graph Graph Graph v = 100 mm/s or less Graph v = 50 mm/s or less 300 300 MGF100 MGF100 50 200 200 MGF100 MGF100 30 40 MGF100 MGF100 100 100 MGF63 30 MGF63 MGF63 20 50 40 50 40 MGF63 30 30 Load mass: m0 (kg) Load mass: m0 (kg) Load mass: m (kg) Load mass: m (kg) 20 20 20 MGF40 MGF40 MGF40 MGF40 10 10 10 MGF40 MGF40 MGJ 10 5 4 3 5 4 3 MGP 2 2 MGQ 5 5 1 10 20 30

HRX-OM-Y098

fluid outlet 0.6 60 Pressure [MPa] 0.5 50 Lifting head [m] Usable flow rate range 0.4 40 0.3 30 Circulating fluid return 0.2 20 0.1 10 0 0 0 20 40 60 80 100 120 140 160 180 Circulating fluid flow[L/min] Fig. 8-11 Pump capacity(HRL300-A-20 CH1) 8.5.4 HRL-A-20CH2 0.6 60 0.5 50 Lifting head [m] Pressure [MPa] 0.4 40 Usable flow rate range Circulating fluid outlet 0.3 30 0.2 20 Chiller display

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

63 80 100 Bore size (mm) JIS Symbol Minimum operating pressure 0.01 0.02 Standard Stroke Bore size (mm) 32, 40 50, 63, 80, 100 Standard stroke (mm) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Replacement Parts: Seal Kit Theoretical Output OUT IN Unit: N Bore size (mm) Contents Kit n no.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

63 80 100 Bore size (mm) JIS Symbol Minimum operating pressure 0.01 0.02 Standard Stroke Bore size (mm) 32, 40 50, 63, 80, 100 Standard stroke (mm) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Replacement Parts: Seal Kit Theoretical Output OUT IN Unit: N Bore size (mm) Contents Kit n no.