Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

depth 8 6 2 (With stroke adjuster at extension end) 5 (With stroke adjuster at retraction end) 30 30 76 46 73 58 FF 22.5 5H9 ( ) depth 5 +0.030 0 F 25 +0.030 0 5H9 ( ) depth 5 N 1 x F 2 51 2 x M6 x 1 thread depth 13 37 M 0.5 46.5 50 Z ZZ H G (NN 1) x H 11.5 29 11.5 29 B A 9.5 5.1 11 11 5H9 ( ) depth 5 +0.030 0 30 1.5 NN x M6 x 1 thread depth 12 B A 6 Section AA Section BB HA GA 5H9 ( )

RHC

Contents @1 Piston gasket NBR 20 RHC20-PS @2 Cylinder tube gasket NBR 25 RHC25-PS @3 Rod seal Set of nos. above !8, !9, @0, @2, @3, @4, @5 NBR 32 RHC32-PS @4 O-ring NBR 40 RHC40-PS @5 O-ring Stainless steel for 20, 25 Carbon steel for 32, 40 10-6-10 10 High Power Cylinder Series RHC Construction: 50 to 100 u q !2 i e !0 o w !6 !5 !4 !3 y r t !

CE

150 -X 20 20 equivalent 25 to 300 32 25 to 400 2040 25 to 600 50 25 to 600 Data 63 25 to 600 CEU1 CEU5 RS-232C RS-232C+BCD Extension Cable Count data output Output transistor mode Power supply voltage NPN PNP NPN PNP NPN PNP Cable length (m) Output transistor mode Power supply voltage 5 10 15 20 100 VAC 24 VDC 100 to 240 VAC 24 VDC 10-12-3 Application Example Confirmation of press-in Parts

VFR

0 3-5-80 81 5 Port Pilot Operated Solenoid Valve Rubber Seal, Plug-in/Non Plug-in Series VFR5000 Plug-in 2 position single/double, 3 position closed center/exhaust center/pressure center 0 1 2 position single: VFR510 -F(Z) 21 [25] 32 [39] 40 [40.5] 31 [36] 25 [24] 31 [36] 1 2 31 [41] 16 [19.5] 16 [19.5] EA P EB VK A B 32 [39] 40 [40.5] VZ 5-Rc 3/8, 1/2, 3/4 EA, EB port = Rc 1/2 in case of

CG5-S

GA GB 2-P Bore size A AL B1 H H1 MM ZZ W 10 M BM H1 20 14 12.7 11.0 25.4 4.0 1/4-28 108.4 25 14 12.7 12.6 28.4 4.8 5/16-24 111.4 Max.

HRX-OM-Y098

of the usage time of dustproof filter .5-23 5.4.6 Software version screen .5-24 5.4.7 CH1 setting screen .5-24 Temperature rise/drop alarm (AL10/AL11).5-25 TEMP READY alarm (AL12) of TEMP READY function .5-27 Offset (TEMP OFFSET) function .5-30 Pump operation mode .5-32 Discharge pressure alarm (AL18/AL19/AL20) .5-34 Electric conductivity and alarm setting (AL28) .5-36 5.4.8 CH2 setting

HRX-OM-W032

25 Cooling capacity [kW] Cooling capacity [kW] 20 20 15 15 10 10 5 5 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [] Circulating fluid temperature [] 60Hz 50Hz Fig. 8-3: Cooling Capacity 8.5 Pump Capacity 0.6 60 Usable flow rate range 0.5 50 Circulating fluid outlet (60Hz) Lifting head [m] Pressure [MPa] 0.4 40 0.3 30 0.2 20 Circulating fluid outlet (50Hz) 0.1

SZ3000

Co., Ltd. 65 or less 1.5 m 3 m 5 m AXT100-DS25-015 Cable 25 cores x 24AWG AXT100-DS25-030 Voltage limit VAC, 1 min. 1000 AXT100-DS25-050 For other commercial connectors, use a 25 pins type with female connector conforming to MIL-C24308. Insulation resistance Mkm, 20C 5 or less Note) The minimum bending radius for D-sub connector cables is 20 mm.

CJ2

D-H7LF 1 25 Precautions 2 10 D-A7/A8 D-A73C/A80C 1 5 2 5 D-F7V D-J79C Refer to p.1.3-3 before handling. 1 5 Rail mounting 2 15 D-A79W D-F7WV 1 10 D-F7, J79, D-F79F, D-A7H, A80H D-F7W, J79W D-F7BAL 2 15 1 15 2 25 D-F7LF 1 25 Accessory/Refer to p.1.3-12 for details.

Magnetically Coupled

10, 15, 20, 25, 30, 40 5, 10, 15, 20, 25, 30, 40 5, 10, 15, 20, 25, 30, 40 5, 10, 15, 20, 25, 30, 40 1/4" 6 12 3/8" 10 20 5/8" 15 40 3/4" 20 60 1" 25 80 32 1-1/4" 80 1-1/2" 40 80 2" 50 80 2-1/2" 63 80 Note) The longer the stroke, the larger the amount of deflection in a cylinder tube.

Air Cylinder Series CS1

Material: Carbon steel l CJ2 d (Drill through) Applicable cotter pin Applicable bore size (mm) +0.084 0 0.1 0.3 L Dd9 m 125 140 160 180 200 250 300 I-12 I-14 I-16 I-18 I-20 I-25 I-30 25 32 8 54 46 27 33 M30 x 1.5 Part no. 100 +0.084 0 0.1 0.3 0.065 0.117 28 36 125 140 160 IY-12 IY-14 IY-16 IY-18 IY-25 IY-30 25 8 54 48 30 39 4 5 M30 x 1.5 4 x 40 105 79.5 69.5 CM2 +0.1 0 0.1 0.3 0.065 0.117

mlu

5 0 1 Hs 39 46 54 63 A 5 5 5.5 7 Hs 33 40 48 57 A 10 10 10.5 12 Size A 4.5 4.5 5 6.5 Hs 32 39 47 56 Hs 25 32 40 50 0.5 2 56.5 66 Operating range Minimum strokes for auto switch mounting (mm) (mm) D-A7H, D-A80H D-A79W D-F7, D-J79 D-F7W, D-J79W D-F7BAL, D-F7NTL D-F7F Bore size 25 Auto switch model D-A7 D-A80 D-A73C D-A80C 32 40 50 Number of auto switches D-P5DWL D-F7V D-J79C D-F7WV D-F7BAVL

17

Shock absorber Lock plate 1191 MY1B Series Construction 25, 32, 40 MY1B25 to 40 r @3 @9 y u t !5 w @7 !1 !7 !8 !9 @0 e #7 i !6 @5 #5 q #9 #4 !3 #2 !2 @1 !0 @2 @6 #6 #3 @8 #1 @4 o #8 !

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

5 !6 !3 !2 !1 !0 q t r i S u y o !4 !8 !

Vacuum Pad: Ball Joint Type

50 +40 +25 +52 722 Lateral Vacuum Entry: With Buffer ZPR Series ZPR FJ K10-0-A14 (With buffer) 40 50 S Width across flats 10 Width across flats 10 S M14 x 1 Hexagon width across flats 19 M14 x 1 Hexagon width across flats 19 I 5 5 I 5 5 J J Hexagon width across flats 12 Hexagon width across flats 12 Applicable tubing O.D.Q Applicable tubing O.D.Q H R R H F F E E D C D C Y Y 2.5 2.5 A B A

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

-APm-S M12, 5 pins, A-coded, Socket, Straight 1 m, 5 m PROFINET @7 EX500-APm-A M12, 5 pins, A-coded, Socket, Angle EtherCAT K @8 PCA-140180m M12, 5 pins, A-coded, Socket, Straight, SPEEDCON 1.5 m, 3 m, 5 m DeviceNet EX260 PROFIBUS DP CC-Link @9 EX9-ACm-1 M12, 5 pins, B-coded, Socket, Straight 1 m, 3 m, 5 m K #0 PCA-140180m M12, 5 pins, B-coded, Socket, Straight, SPEEDCON 1.5 m, 3 m, 5 m DeviceNet

7.5

Note AXT100-DS25-015 AXT100-DS25-030 AXT100-DS25-050 1.5 m 3 m 5 m Conductor resistance /km, 20C 65 or less Cable 25 cores x 24AWG Withstand pressure V, 1 min, AC 1000 For other commercial connectors, use a 25 pins type with female connector conforming to MIL-C-24308. Insulation resistance Mkm, 20C 5 or less Note) The minimum bending radius for D-sub connector cables is 20 mm.

21

A1 E1 L L1 MM ND NX NZ R1 U1 A Part no. size Applicable bore size Type C9 for axis Y-020B Y-032B Y-040B 20 25, 32 40 +0.2 +0.1 +0.2 +0.1 +0.3 +0.1 46 16 20 25 36 M8 x 1.25 9 9 18 5 14 CDP-1 48 18 20 25 38 M10 x 1.25 9 9 18 5 14 CDP-1 Type C9 for axis 68 22 24 49.7 55 M14 x 1.5 12 16 38 13 25 CDP-3 3 x 18 l A knuckle pin and retaining rings (split pins for 40) are included.

Compact Hydraulic Cylinder

Standard Strokes Bore size (mm) Standard strokes (mm) 20 32 40 50 63 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Hydraulic Fluid Compatibility 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 80 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Hydraulic fluid Compatibility

Slider Type Ball Screw Drive/11-LEFS Series

0 15 10 5 0 15 10 5 20 25 30 0 15 10 5 20 Vertical L7 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1500 1500 1500 1500 1000 1000 1000 1000 L8 [mm] L8 [mm] L8 [mm] L8 [mm] Z 500 500 500 500 Mep m 0 0 0 0 0 2 1 3 4 5 0 15 10 5 0 15 10 5 20 0 15 10 5 20 25 30 L8 Work load [kg] Work load [kg] Work load [kg] Work load [kg] Calculation of Guide Load Factor Mounting orientation 1.