Air Cylinder Series CS1

16 15 31 35 Up to 1000 160 161 128 212 112 255 M14 x 1.5 M30 x 1.5 56 53 40 90 59 43 14 19 20 17 36 39 Up to 1200 180 182 144 236 118 275 18.5 M16 x 1.5 M36 x 1.5 63 60 45 70 48 17 24 25 20 41 39 Up to 1200 200 204 162 265 132 320 18.5 M18 x 1.5 M40 x 1.5 115 63 60 50 74 48 17 24 25 20 46 39 Up to 1200 225 226 182 115 280 150 335 18.5 M20 x 1.5 M45 x 1.5 Lube Non-lube 71 67 60 86 60 20 29

High Purity Fluoropolymer

1/4" W H M 21.5 1/4" (Y) 23 17 19 20 42.5 1/4 25 3/8" Class 2 to 5 (E) 25 3/8" 47.5 28 H 21 23 24 29.5 1/2" 50 29.5 1/2" 58.5 39 26 32 29 36 3/4" 60 36 3/4" 75 M 25 1 49 36 46 39.5 44.5 1" 78.5 Class 6 Inch sizes Connection threads Rc/NPT Model Applicable tubing O.D.

Escapements Series MIW/MIS

g) Bore size Stroke 8 12 20 25 32 8 mm 3 110 6 8 MIW8-8D 12 mm 20 mm 5 240 10 12 MIW12-12D 25 mm 10 650 30 20 MIW20-20D MIW 32 mm 20 1550 30 25 MIW25-25D For MIW, same stroke as bore size 2650 100 35 32 MIW32-32D Single finger type/MIS (mm) 62 10 MIS8-10D Bore size Stroke 3 2 80 20 MIS8-20D 8 12 20 25 32 10, 20 mm 10, 20, 30 mm 130 10 MIS12-10D 10, 20, 30 mm 5 3 160 20 MIS12-20D 30, 50 mm

Smooth Cylinder

25 0.03 0.02 Standard Stroke Table Bore size (mm) 12, 16 20, 25 Standard stroke (mm) 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 Replacement Parts: Seal Kits Theoretical Output Table OUT IN Unit: N Bore size (mm) Contents Kit No.

Compact Type

CAT.ES20-174 A Compact Type Dual-Rod Cylinder 15, 20, 25, 32 additionally released. Series CXSJ/6, 10, 15, 20, 25, 32 Series CXSJ/6, 10, 15, 20, 25, 32 Auto switches can be installed from 3 directions.

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

Up to 1000 3/4 180 182 236 118 275 18.5 M16 x 1.5 M36 x 1.5 56 144 17 53 40 36 90 39 59 43 14 19 20 Up to 1200 203/4 200 204 265 132 320 18.5 M18 x 1.5 M40 x 1.5 63 60 162 45 20 41 115 70 39 48 17 24 25 Up to 1200 3/4 1 225 226 280 150 335 18.5 M20 x 1.5 M45 x 1.5 63 182 20 60 50 46 115 39 74 48 17 24 25 Lube Non-lube Up to 1200 Data 275 277 355 180 420 23 M24 x 1.5 M56 x 2 71 225 25 67

Stopper Cylinder

1 i o w Mounting e Bore size r Port thread type t Cylinder stroke [mm] q With auto switch 12 12 mm 16 16 mm 20 20 mm 32 32 mm 40 40 mm 50 50 mm B Through-hole A Both ends tapped Nil M thread 12, 16 Rc 20 to 50 TN NPT TF G F Built-in One-touch fittings*2 Nil Without magnet for switch*1 12 10 16 10, 15 20 10, 15, 20 32 10, 15, 20 40 20, 25, 30 50 20, 25, 30 D With auto switch (Built-in magnet

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Note MXP6-5 MXP-AD6-5 MXP6-10 MXP10-10 MXP-AD10-10 With magnet and MXP10-20 MXP-AD10-20 mounting screw MXP12-15 MXP-AD12-15 MXP12-25 MXP-AD12-25 MXP16-20 MXP-AD10-20 MXP16-30 MXP-AD12-25 Note) MXP16-20 and MXP10-20 are common. MXP16-30 and MXP12-25 are common. 8-8-11 11 Series MXP Construction MXP6 @1 @0 @2 !2 !1 t e y !9 !8 !7 r !4 !6 u !5 !0 !

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

(mm) 10 10 A8 M8 x 1 10 to 16 13 13 A10 M10 x 1 20 to 32 16 16 A14 M14 x 1 40, 50 20 20 25 25 Vacuum entry 32 32 40 B5 40 M5 x 0.8 50 50 Pad material N NBR Pad type S Silicon rubber F Ball joint U Urethane rubber F Fluoro rubber GN Conductive NBR GS Conductive silicon rubber 20 and larger are manufactured upon receipt of order.

240

type LEPY Series Page 374 25 to 50 6.0 1.5 200 5 24 to 40 4.0 1.5 200 10 12.5 to 25 3.0 1.0 350 10 12 to 20 2.0 1.0 350 14 to 20 1.0 0.5 150 4 6 Slide table type LEPS Series 7 to 10 0.75 0.25 300 8 25 50 Page 383 25 to 50 2.0 1.5 200 5 24 to 40 2.0 1.5 200 10 12.5 to 25 1.5 1.0 350 10 12 to 20 1.5 1.0 350 370 LEPY/LEPS Series Mounting Variations Mounting from various directions Side mounting

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

For Air (Orifice diameter: 10 mm, 15 mm, 20 mm, 25 mm) How to read the graph The sonic range pressure to generate a flow rate of 6000 L/min (ANR) is as follows.

Modular F.R.L. Unit

Spacer with Bracket: (Z) G F.R.L. body center C BB (Y100T, Y200T only) E 1 X-X EE (Y100T, Y200T only) RELEASE X B 2 E X A G Seal Y200T Y400T F J H K D Applicable models F 6.8 12 14 18 18 20 G 4.5 5.5 7 9 9 11 H 14 19 21 26 27 31 J 2.8 3.2 4 4 4.6 6.4 K 25 30 41 50 50 70 A 6 3 4 5 5 6 B 82 96 96 120 BB 56 67 C 24.5 29 41 48 48 60 D 40.5 53 68 81.5 86 112 E 20 24 35 40 40 50 EE 27 33 G 4.5

Compact Type Dual-Rod Cylinder Series CXSJ

Compact Type Dual-Rod Cylinder 15, 20, 25, 32 additionally released. Series CXSJ/6, 10, 15, 20, 25, 32 Series CXSJ/6, 10, 15, 20, 25, 32 Auto switches can be installed from 3 directions.

LEY-OM007

INP 1 INP ON 0.50 2 INP ON a bINP ON < / [mm/sec] [mm/sec] 1 4 30% 1 4 40% 5 20 35% 5 20 60% LEY*16** 21 50 60% 85% LEY*16*A* 21 50 80% 95% 1 4 20% 1 4 40% 5 20 35% 5 20 60% LEY*25** 21 35 50% 65% LEY*25*A* 21 35 80% 95% 1 4 20% 5 20 35% LEY*32** 21 30 60% 85% -41- LEY*16** LEY*25** LEY*32** LEY*16*A* LEY*25*A* A B C A B C A B C A B C A B C [kg] 1 1.5

CV/MVGQ

to 150 151 to 200 201 to 250 Bore size (mm) Z Y X NN Bore (mm) Symbol CC S LS ZZ S LS ZZ ZZ LS S ZZ LS S ZZ LS S 20 25 32 40 20 25 32 40 21 8 20 M20 x 1.5 206 177 137 181 152 112 156 127 87 RB 25 8 20 M26 x 1.5 210 177 137 185 152 112 160 127 87 25 8 20 M26 x 1.5 212 164 204 237 179 139 187 154 114 162 129 89 J 27 10 23 M32 x 2 246 188 234 271 213 259 296 209 163 221 184 138 196 159

Auto Switch Guide

(Red Green Red) D-B59W D-A79W D-A59W D-H7NW/H7PW/H7BW D-G59W/G5PW/K59W D-F79W/F7PW/J79W D-F7NWV/F7BWV D-F59W/F5PW/J59W D-F9NW/F9PW/F9BW D-F9NWV/F9PWV/F9BWV D-Y7NW/Y7PW/Y7BW Band Grommet 10-20-23 Solid state switch Reed switch Rail Grommet 10-20-24 Tie-rod Grommet 10-20-25 2-color indication 10-20-42 Band Grommet RE A B 10-20-43 10-20-44 Rail Grommet REC 10-20-45 Tie-rod Grommet 10-20-46

1.1

Pump Capacity Cooling Capacity HRGC001--T HRGC002--T 0.5 50 Outlet/60 [Hz] 3.0 1.0 0.4 40 Cooling capacity [kW] Cooling capacity [kW] 2.5 0.8 0.3 30 60 [Hz] 50/60 [Hz] 2.0 0.6 Outlet/50 [Hz] 1.5 0.2 20 50 [Hz] 0.4 1.0 0.1 10 0.2 0.5 0 0.0 0 10 20 30 40 0.0 0 5 10 15 20 25 30 35 40 0.0 0 5 10 15 20 25 30 35 40 Lifting height [m] Circulating fluid flow [l/min] Pressure [MPa] Circulating fluid

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

B1 AWG 20 B2 Note.

Air Slide Table Series MXP

MXP6-5 MXP-AD6-5 MXP6-10 MXP8-10 MXP-AD8-10 MXP8-20 MXP-AD8-20 With magnet and mounting screw MXP10-10 MXP-AD10-10 MXP10-20 MXP-AD10-20 MXP12-15 MXP-AD12-15 MXP12-25 MXP-AD12-25 MXP16-20 MXP-AD10-20 DMXP16-30 MXP-AD12-25 Note) MXP16-20 and MXP10-20 are common. MXP16-30 and MXP12-25 are common. -X Individual -X 197 Series MXP Construction MXP6 @0 !9 !8 !2 !1 t e y !7 !6 !5 i q w !0 !

VQZ1000/2000/3000

13 or less 13 or less VQZ3220 0.54 0.19 2.4 0.56 0.23 2.4 Metal seal Double 15 or less 20 or less 20 or less VQZ3221 0.81 0.38 3.2 0.79 0.34 3.1 Rubber seal 25 or less 33 or less 53 or less VQZ3320 0.54 0.21 2.1 0.54 0.19 2.3 Metal seal Closed center VQZ3000 30 or less 39 or less 59 or less VQZ3321 0.62 0.33 2.4 0.66 0.30 2.7 Rubber seal 134 25 or less 33 or less 53 or less VQZ3420 0.54