Cylinder (Tube) Inner Diameter(φ): 80, Stroke(mm): 150, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard / Heat Resistant, Operating Pressure(MPa): -, Cushion: Air cushion, Operating Pressure(MPa): 0.05 to 1.0, Specification: Without magnet, Port thread

Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

Effective thread length T (R) D X Mounting nut Width across flats C F N ZZ + Stroke S + Stroke W K N F I NA TT 6 T Model MM L K J I H G F E D C B A S NN NA 34 N R 12-REA25 12-REA32 12-REA40 8 46 32 26.4 2 13 7.5 20.5 8 10 70 15 M5 x 0.8 18.5 30 M26 x 1.5 111 10 8 60 32 33.6 2 16 8 22 8 15 80 18 M6 x 1 20 40 36 M26 x 1.5 124 13 10 70 41 41.6 3 16 11 29 10 16 92 23 M6 x 1 26 50 46 M32 x 2 150

3 Port Air Operated Valve VPA3145/3165/3185 Series

Specifications Fluid Air Type of actuation N.C. only (N.O. only for vacuum) For ordinary pressure 0.2 to 0.8 MPa For vacuum and low pressure 101.2 kPa to 0.2 MPa Operating pressure range Pilot pressure range Ambient and fluid temperature (C) Refer to the graph of pilot pressure. 0 (No freezing) to 60 Lubrication Required (Turbine oil, Class 1 lSO VG32 equivalent) Mounting orientation Free 150

Plug-in Unit

or less Double 1 (P) 5 (R1) 3 (R2) 2.2 VQC2201 3.2 0.28 0.55 0.30 0.80 Rubber seal 20 or less 26 or less 2 position double (rubber) 2.0 VQC2300 2.0 0.15 0.46 0.18 0.46 Metal seal 29 or less 38 or less Closed center (A) 4 (B) 2 VQC2000 2.0 VQC2301 2.2 0.28 0.49 0.31 0.60 Rubber seal 34 or less 44 or less 2.0 VQC2400 2.6 0.15 0.46 0.15 0.60 Metal seal 29 or less 38 or less Exhaust center 110

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

Operating angle Hysteresis angle Model MDSU1, 3 110 10 MDSU7, 20 90 Auto switch Table B port A port Positioning pin hole 11-5-30

Table of Contents

(mm) Proper tightening torque (Nm) Cylinder stroke (mm) Model 5 10 15 20 25 30 40 50 6, 10 16 20, 25 32 M3 M4 M5 M6 1.08 10% 2.45 10% 5.10 10% 8.04 10% 22 (27) 25 (35) 28 (38) 31 (41) 34 (44) 37 (47) C(D)U6-D 36 (41) 40 (50) 44 (54) 48 (58) 52 (62) 56 (66) C(D)U10-D 50 (75) 56 (86) 62 (92) 68 (98) 74 (104) 80 (110) C(D)U16-D 95 (128) 106 (143) 117 (154) 128 (165) 139 (176) 150 (187)

20.0

Normal Bottom Peak BATTERY 1.5V x 2 LR6 G kV MADE IN JAPAN IZD IZE POWER LIGHT 110 Do not apply a strong impact on the sensing part.

Pulse Valve

A A ( 52) ( 52) (20) (20) Silencer (Option) Silencer (Option) Pilot port 1/8, 1/4 (Rc, NPT, G) Pilot port 1/8, 1/4 (Rc, NPT, G) Exhaust port 3/8 Exhaust port 3/8 2 x P Port size 2 x P Port size F E F E G G D C B D C B 20 20 Dimensions [mm] Model Port size P A B C D E F G JSXFAF-06 3/4 74 55.5 92.5 36 19.3 48.8 JSXFAF-10 1 94 63.5 110.5 44 22.2 60.2 JSXFAF-14 1 1/2 126 75.1 136.6 65 32 110

Series 12-REA Sine rodless cylinder

124 111 182 156 137 92 80 70 M5 x 0.8 x 8 M6 x 1.0 x8 M6 x 1.0 x10 12REA 50/63 0 -0.2 L NA 33 2-Rc, NPT, G 1/4 14 14 E(h8) E(h8) X D I 4-TC 14 14 Effective thread depth R 23 22 K W 23 25 2 4-M8 x 1.25 25 8-Q 14.5 C 0.1 + Effective thread depth 12 Effective thread depth R B S + Stroke 2 ZZ + Stroke Q x R S TC x R Model L 122 110 K 38 32 C 70 60 X ZZ NA E D B 72.2 58.2 I 70 60 W 12-REA63 12

, 200, 220VAC , Response time (0.5MPa) w/o indicator light & surge voltage suppressor: 32ms or less , Ambient & fluid temperature: 50°C, Valve, 5 Port Solenoid, 4/5 PORT SOLENOID VALVE, 150 lb

, 200, 220VAC , Response time (0.5MPa) w/o indicator light & surge voltage suppressor: 32ms or less , Ambient & fluid temperature: 50°C, Valve, 5 Port Solenoid, 4/5 PORT SOLENOID VALVE, 150 lb

PFxx-OMO0007CN

(OUT2) [2nL] (20 ) [2PL] 3 (OUT2) [2nH] (20 ) [2PH] () -28No.PF-OMO0007CN [F_3] [-] 9L,3 3 9 -29No.PF-OMO0007CN <> 3[F_][d_][unL] [unL] [Loc] 3 <> 3[Loc] [unL] 3 -30No.PF-OMO0007CN -31No.PF-OMO0007CN () IN IN -32No.PF-OMO0007CN IN (30 ) -33No.PF-OMO0007CN (OUT1) 80 mA OUT1 OFF (OUT2) 80 mA OUT2 2 2 () -34No.PF-OMO0007CN PF2A710 PF2A750 PF2A711 PF2A721 PF2A751 N2 050 () 110

, 200, 220VAC , Response time (0.5MPa) w/o indicator light & surge voltage suppressor: 32ms or less , Ambient & fluid temperature: 50°C, Valve, 5 Port Solenoid, 4/5 PORT SOLENOID VALVE, 150 lb

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

Blank flange : Test piece posture: lateral 110 Pa Vacuum pump Durability test conditions Valve side Chamber Bellows side Vacuum pump Recommended direction of pumping 9 XL-OMO0001-A 6 Parts Replacement Procedure 6-1. Precautions Be sure to follow [1. Precautions 1] when disassembling the product for maintenance.

MHS

N 16 28 47 82 130 204 359 525 780 1320 () mm 4 4 6 8 8 12 16 20 24 32 g 60 100 140 237 351 541 992 1,850 3,340 6,460 1) 1625 =20mm 3263 =30mm 80125 =50mm 0.5MPa MHS4 MHS4 -16D MHS4 -20D MHS4 -25D MHS4 -32D MHS4 -40D MHS4 -50D MHS4 -63D mm 16 20 25 32 40 50 63 MPa 0.20.6 0.10.6 -1060 mm 0.01 c.p.m. 120 60 10 19 31 55 88 140 251 1 N 12 21 35 61 97 153 268 mm 4 4 6 8 8 12 16 g 66 110

Flow Control Equipment

Male thread Suitable screw torque (Nm) Hexagonal width (mm) Adjustable spanner nominal (mm) 1/4 4.5 M3 M5 10/32-UNF 100 1/6 8 150 7 to 9 14 1/8 200 12 to 14 17 1/4 200 22 to 24 21 3/8 200 28 to 30 24 1/2 1Nm=10.2kgf/cm Tightening torque for lock nuts Caution qSuitable screw torque for a hexagon lock nut is shown in the table below.

MK

(mm) Operating direction Piston area (cm2) RHC 1.0 0.7 0.5 0.3 80 56 40 24 0.8 R 12 6 MTS 110 77 55 33 1.1 H 150 105 75 45 1.5 R 16 8 CC 200 140 100 60 2 H 200 139 100 60.8 2 R 20 12 298 208 149 90.2 3 H 370 258 185 112 3.7 R 25 12 490 341 245 149 4.9 H Order Made 600 418 300 182 6 R Made to Order 32 16 800 557 400 243 8 H 1050 731 525 319 10.5 R Refer to the p.5.4-1 regarding made to order

PA3145/3165/3185

Pilot pressure range Ambient and fluid temperature (C) 0 to 60 (No freezing) Lubrication Required (Turbine oil, Class 1 lSO VG32 equivalent) VPA3165-06 VPA3145-03 Free Mounting orientation Impact resistance/Vibration resistance (m/s2) Note) 150/50 Note) Impact resistance: No malfunction from test using drop impact tester, to axis and right angle directions of main valve, each one time when

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 150/50 (5) Grommet, DlN terminal VT Standard 100, 200 VAC, 50/60 Hz; 24 VDC 220, 110, 48, and 24 VAC (50/60 Hz) 100, 48, and 12 VDC Coil rated voltage VP Option 15 to 10% of rated voltage Allowable voltage fluctuation Coil insulation type VG Class B or

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Coil rated voltage Terminal type VT Coil insulation type Class B or equivalent (130C) (3) Shock/Vibration resistance (m/s2) 150/50 (4) VP Note 1) If it is low temperature, dry air should be used.