CJ2X/CUX/CQSX/CQ2X/CM2X

, 300 20 25 32 40 Bore size (mm) MK(2) 32 Piston speed (mm/s) 0.5 to 300 40 0.27 0.4 0.65 1.2 Allowable kinetic energy (J) RS Q G Note) Other intermediate strokes can be manufactured upon receipt of order.

ncq8mp

NCQ8WB200-PS NCQ8WB200-PS 200 (2") NCQ8WB250-PS NCQ8WB250-PS 250 (2 1/2") NCQ8WB300-PS NCQ8WB300-PS 300 (3") NCQ8WB400-PS NCQ8WB400-PS 400 (4") SeriesNCQ8 Air Cylinder: Standard Type Single Acting Maintenance Parts Construction Single Acting, Spring Return 056 to 250 9 Seal Kit Parts List No. 9 Description Piston Seal Material NBR *BLUE links will lead to purchase pages.

Series NCQ8 Air Cylinder: Standard Type Double Acting, Single Rod

NCQ8WB200-PS NCQ8WB200-PS 200 (2") NCQ8WB250-PS NCQ8WB250-PS 250 (2 1/2") NCQ8WB300-PS NCQ8WB300-PS 300 (3") NCQ8WB400-PS NCQ8WB400-PS 400 (4") SeriesNCQ8 Air Cylinder: Standard Type Single Acting Maintenance Parts Construction Single Acting, Spring Return 056 to 250 9 Seal Kit Parts List No. 9 Description Piston Seal Material NBR *BLUE links will lead to purchase pages.

Tie-rod Type Hydraulic Cylinder

Nominal pressure 3.5 MPa CHM Proof pressure 5.0 MPa CHS Maximum allowable pressure 3.5 MPa Minimum operating pressure 0.25 MPa CH2 Without auto switch: 10 to 80C Ambient and fluid temperature With auto switch: 10 to 60C CHA CHA Piston speed 8 to 300 mm/s Cushion Cushion seal Related Products +0.8 0 +1.0 0 +1.25 0 +1.4 0 +1.8 0 to 100st , 100 to 250st , 250 to 630st Stroke length tolerance

HRX-OM-X084

Ambient temp. 500 Heating capacity [W] Heating capacity [W] 400 40 40 400 32 32 300 300 25 25 5 5 200 200 100 100 0 0 10 15 20 25 30 35 40 10 15 20 25 30 35 40 Circulating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig 9-11 Heating capacity (HRR010-A-20-) 9.5.4 HRR010-W-20400 400 Facility water temp.

Electric Actuator Miniature Rod Type Miniature Slide table Type

) Actuator specification Horizontal Compact 10 to 200 20 to 350 Note4) Speed [mm/s] Note3) Note6) Vertical Basic 10 to 150 20 to 300 Note4) 10 to 150 20 to 300 Note4) Compact 10 to 150 20 to 300 Note4) Pushing speed [mm/s] Note5) 10 20 10 20 Acceleration / Deceleration [mm/ s2] 3000 Backlash [mm] 0.2 or less Positioning repeatability [mm] +/0.05 Lost motion [mm] Note7) 0.2 or less Impact

3-Position Rotary Table

Arm Load A CRB2 Displacement CRB1 MSU MSZ10A MSZ20A CRJ CRA1 300 CRQ2 MSQ MSZB10A (Basic type) 400 MSZ MSZ MSZA20A (Basic type) Displacement m Displacement m 250 CRQ2X MSQX MRQ 350 200 40 190 40 30 30 MSZA10A (High precision type) MSZA20A (High precision type) 20 20 10 10 50 40 30 20 10 0 30 25 20 15 10 5 0 Load N Load N MSZ50A MSZ30A 350 300 300 250 250 MSZB30A (Basic type) MSZB50A (Basic

MLGP

, 300, 350 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 RLQ Manufacture of Intermediate Stroke MLU Spacer installation type Spacers are installed in the standard stroke cylinders. 20 to 32: Stroke can be modified by the 1 mm interval. 40 to 100: Stroke can be modified by the 5 mm interval.

Air Cylinder Standard: Double Acting, Single Rod ø 40 , ø 50 , ø 63 , ø 80 , ø 100 Series CA2

, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80: 1400 100: 1500 Refer to pages 19 to 23 for cylinders with auto switches. 80, 100 Intermediate strokes not listed above are produced upon receipt of order.

ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Series HYB Hygienic Design Cylinder Round Type

Standard Stroke Bore size (mm) Standard stroke (mm) 20 25, 50, 75, 100, 125, 150, 200 25 to 100 25, 50, 75, 100, 125, 150, 200, 250, 300 Intermediate strokes of 1 mm each can be produced. (The spacer is not used.)

Digital Pressure Switch

X576 Item Default setting Item Default setting [P_1] Set value of OUT1 250 Pa [P_2] Set value of OUT2 250 Pa [H_1] Hysteresis of OUT1 25 Pa [H_2] Hysteresis of OUT2 25 Pa X577 Item Default setting Item Default setting [P_1] Set value of OUT1 0.500 kPa [P_2] Set value of OUT2 0.500 kPa [H_1] Hysteresis of OUT1 0.050 kPa [H_2] Hysteresis of OUT2 0.050 kPa X578 Item Default setting Item Default

Compact Cylinder Double Acting, Single Rod Bore size: 056(9/16”), 075(3/4”), 106(1 1/16”), 150(1 1/2”), 200(2”), 250(2 1/2”), 300(3”), 400(4”) Series NCQ8

Compact Cylinder Double Acting, Single Rod Bore size: 056(9/16), 075(3/4), 106(1 1/16), 150(1 1/2), 200(2), 250(2 1/2), 300(3), 400(4) Series NCQ8 How to Order Without auto switch B 056 025 NCQ8 B 056 025 Z M9BW S NCDQ8 With auto switch Built-in magnet X-Option Nil XB6 XC4 Standard High temp.

Smooth Cylinder Series CA2Y ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CA2 .

, 300, 350, 400, 450, 500 Replacement Parts: Seal Kits 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit No. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40-PS Rod seal 1 pc.

90

Annual cost reduction effect [Calculation conditions] Electric power cost: 1.55 yen/m3 [Work model] Working hours: 6000 h (250 days/year) Supply pressure: 1.0 MPa Set pressure: 0.2 MPa Comparison between IR3000-A and the current IR3000 Comparison between IR1000-A/IR2000-A and the current IR1000/IR2000 300 300 Annual cost of power consumed by compressor [1000 yen/year] 250 250 When 20 units

48

mm/s 50 to 250 mm/s Cushion Rubber bumper on both ends Lubrication Not required (Non-lube) Stroke length tolerance +1.5 0 mm 1 Max. speed with no load 2 Depending on the system configuration selected, the specified speed may not be satisfied.

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

View port G1/2 5 10 30 50 100 300 Flow rate (L/min) Conditions Fluid: Turbine oil Class 2 VG56 Measured pressure: 14 MPa Viscosity: 45 mm2/s Filter material: Paper Nominal filtration: 10 m FH64 Series Refer to page 529 for Microswitch for differential pressure indication switch. 16 0.1 10/12 0.05 0.04 0.03 06/08 Pressure drop (MPa) 0.02 03/04 0.01 0.005 0.003 5 10 30 50 100 300 Flow rate

Stability of suction position,

Qmax 55.5 C = Qmax: Max. suction flow rate [L/min (ANR)] C: Conductance [dm3/(sbar)] 397 Model Selection Vacuum Equipment Selection Example 7 P Transfer of Semiconductor Chips Selection conditions: (1) Workpiece: Semiconductor chips Dimensions: 8 mm x 8 mm x 1 mm, Mass: 1 g (2) Vacuum piping length: 1 m (3) Adsorption response time: 300 msec or less 1.

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

Maintenance check Model Connect(Flange) 2B/3B 8B C 2B/3B/4B 500 A 300 B 300 D 1300 E 1430 F 1520 G 20 H 720 M16 X l 400 Anchor bolt Caution M20 X l 500 AMD800 AMD900 400 550 560 745 300 300 1320 1380 1480 1610 1585 1740 24 24 q The replacement interval for the element for models AMD150 to AMD850 is when the pressure drop reaches 0.1MPa or after 2 years of operation, whichever comes first.

VQ7-6/7-8

Bore size Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm 50 63 80 100 125 140 160 180 200 250 300 Average speed (mm/s) Series 1000 1100 Perpendicular, upward actuation 900 Horizontal actuation 800 700 600 500 400 300 200 100 VK VQ7-8-FG-S-A03 VQ7-8-FG-S-RA03 VZ VF 0 1000 1100 VFR 900 800 700 600 500 400 300 200

VQ7-6/7-8

Bore size Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm 50 63 80 100 125 140 160 180 200 250 300 Average speed (mm/s) Series 1000 1100 Perpendicular, upward actuation 900 Horizontal actuation 800 700 600 500 400 300 200 100 VK VQ7-8-FG-S-A03 VQ7-8-FG-S-RA03 VZ VF 0 1000 1100 VFR 900 800 700 600 500 400 300 200