17

Load Mass Allowable Moment MY1B/M1 MY1B/M3 MY1B/M2 MY1B/m1 200 200 200 300 400 500 20 30 40 50 100 100 50 20 30 40 100 50 10 40 30 20 30 40 50 5 4 3 2 10 Load mass kg Moment Nm Moment Nm Moment Nm 20 5 4 3 2 10 1 10 MY1B40 5 4 3 2 MY1B40 MY1B40 MY1B32 MY1B25 MY1B40 0.2 0.3 0.4 0.5 MY1B32 5 4 3 1 MY1B32 MY1B32 MY1B25 0.5 0.4 1 MY1B25 MY1B25 D0.1 0.3 0.2 2 0.5 0.4 0.3 0.05 0.04 0.03 0.2 -X

CP95

16 128 8 4 11.5 14 46 218 300 95 72 30 5 M20 x 1.5 100 40 55 30 G 1/2 19 M10 x 1.5 10 21 38 16 138 8 4 17 15 51 233 320 114 89 32 5 6-13-9 9 Series CP95 Dimensions: Cylinder Mounting Accessory L, F, G, C and D [First angle projection] Mounting style (L) XA + Stroke SA + Stroke Mounting style (F, G) Head side mounting (G) ZF + Stroke Rod side mounting (F) Mounting style (C) Mounting style

CP95

8 30 5 4 11.5 14 46 218 300 95 72 M20 x 1.5 100 10 16 138 40 55 21 38 30 G 1/2 19 M10 x 1.5 8 32 5 4 17 15 51 233 320 114 89 6-13-9 9 Series CP95 Dimensions: Cylinder Mounting Accessory L, F, G, C and D [First angle projection] Mounting style (L) XA + Stroke SA + Stroke Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

30 30 30 30 30 45 55 68 58 67 73 21 26 32 23.5 28 34.5 46 55 66 59 71 82 34.5 40 46.5 Stroke range Bore size (mm) N NB P S XA XL Y WL WM ZZ M MA MB MC MM 40 50 63 Up to 1000 Up to 1000 Up to 1000 44 50 56 74 83 89 1/4 1/4 1/4 168 183 204 12 16 16 6 6 6 9.5 12.5 15 42 42 52 16 16 16 4 5 5 12 15 15 M6 x 1.0 M8 x 1.25 M8 x 1.25 10 14 14 208 228 254 39 42 52 8-25-17 17 Series MGZ With Mounting

Pilot Operated

(R) (mm) Grommet Conduit DIN terminal Conduit terminal Electrical entry (DC, AC) Port size P Model N A B C D E F H J K L M Q 19.5 19.5 22.5 N 64 70.5 84.5 Q 40 40 43 N 63.5 70 84 Q 58.5 58.5 61.5 R 46.5 46.5 49.5 N 64 70.5 84.5 Q 92 92 95 R 61 61 64 Normally open Rc Normally closed VXD2142 VXD2152 VXD2262 VXD2140 VXD2150 VXD2260 3/8, 1/2 3/4 1 30 30 35 19.5 19.5 22.5 34 43 47 29 37 43 14

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

2, 3/4-2 port 3, 5 port 30 (42) 30 (42) 1/8 14 port 3/8, 1/2, 3/4-2 port 3, 5 port 30 (42) 30 (42) 3/8, 1/2, 3/4 1 port 3/8, 1/2, 3/4 1 port Dimension inside is for rubber seal.

Round Type Hydraulic Cylinder

M10 x 1.25 M14 x 1.5 M16 x 1.5 12 M4 10 10 7 5.5 5.5 6.5 M4 set screw (1 pc.) 30 10 16 22 60 46 30 12 M4 10 10 7 5.5 5.5 6.5 36 12 16 30 80 56 40 12 M5 12 13 7 9 7 10 M5 set screw (1 pc.) 44 12 24 30 88 64 43 16 M5 12 13 9 9 10 10 Y-type double knuckle joint Bracket pin 20: Y-020B 25: Y-032B 32: Y-04D 40: Y-04B 2 x D drill through RR1 RR1 C1 Chamfer NDH10 NDH10 MM C E1 E1 C1 Chamfer NZ NZ

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

Table displacement due to yaw moment load Displacement at "A" when load is applied at "F" Table displacement due to roll moment load Displacement at "A" when load is applied at "F" A A F F A F L L L 6 6 6 L = 80mm L = 80mm L = 80mm MXP 6-5 MXPJ6-5 MXP 6-10 MXPJ6-10 MXP 6-5 MXPJ6-5 MXP 6-10 MXPJ6-10 MXP 6-5 MXPJ6-5 MXP 6-10 MXPJ6-10 0.05 0.05 0.06 0.04 Table displacement mm Table displacement

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

YES Hysteresis mode OFF n_1 n_2 Large pressure and vacuum pressure [n] H (Fix hysteresis) = 3 digits H H ON Window comparator mode NO OFF n_1 n_2 Large pressure and vacuum pressure 3 For General Fluids High Precision Digital Pressure Switch Series ZSE50F/ISE50 Example of Internal Circuit and Wiring ZSE F/ISE --22(L)-(M) 50 60 50 60 ZSE F/ISE --30(L)-(M) 50 60 50 60 With analog output

High Purity Chemical Valve

E F G H1 H2 J K L M N Model LVH20m LVH30m LVH40m 30 30 52 44 11 79 10 72.5 74 4 20 37 3.5 27 36 47 81.5 56 16.5 106 19 111 113 7.5 34 46 5.5 37.5 46 60 100 68 22.5 131 20.5 139 143 8 42 57 5.5 50 483 Series LVH Dimensions/Threaded Type N Body material: PPS Body material: Stainless steel N G A G A D L Non-locking type Locking type 60 K 4 x M Non-locking type Locking type (H1) (H2) C 60 A B

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

F ZZ + Stroke H B E G Mounting nut NN NA F N CY3B15 (mm) Model CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 B 35 36 46 60 70 NA 17 24 30 36 46 R 28 34 40 50 S 83 106 111 124 150 W 35 50 50 50 60 X 19 25 30 40 40 D 16.6 21.6 26.4 33.6 41.6 ZZ 103 132 137 156 182 E 3 2 2 2 3 N 11 18 18.5 20 26 F 10 13 13 16 16 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 G 5.5 7.5 7.5 8 11 NN M10 x 1 M20 x 1.5 M26 x

Series VQ Metal Seal/Rubber Seal Body Ported

Specifications Positive COM AXT661-14A-F Single (2 wire) VQ4 Negative COM AXT661-14AN-F Positive COM AXT661-13A-F VQZ Double (latching) (3 wire) Negative COM AXT661-13AN-F VQD Note) Lead wire length: 300mm Note) The parts numbers above are applicable to VQ0/1000 (2 to 16 stations) and 13 14 VQ2000 (2 to 10 stations). VQ2000 (11 to 16 stations) uses AXT661 A (N)F425. VZS VFS 3.

Mechanically Jointed Rodless Cylinders

MY316 300 400 500 500 400 300 950 N Collision deceleration (m/s2) Collision deceleration (m/s2) 200 200 240 N 100 100 30 40 50 50 40 30 20 20 10 10 1 2 3 4 5 10 20 30 10 5 4 3 2 1 0.2 0.4 0.3 m1max m3max m1max m2max m3max m2max Weight (kg) Weight (kg) MY320 MY340 500 400 300 300 400 500 370 N Collision deceleration (m/s2) Collision deceleration (m/s2) 200 200 1500 N 100 100 50 40 30 30 40

NCA1

(Tolerance 30%) OUT(+) Brown(Red) OUT() Blue(Black) 46 Medium Duty Air Cylinder Series NCA1 Specifications PLC: Programmable Logic Controller Grommet D-F59F Auto switch model number The output signal can be detected in an unsteady detecting area.

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

ZP 40HB ZP HB ZP HB 40 50 63 80 100 125 F F 4 x 9.5 F 4 x 8 4 x 6 3 x 6.5 4 x 5 G 3 x 4 Y 3.5 Y 6 E E E Y 8 10 6 34 40 18 C C C A B D A A B D B D Dimensions (mm) Dimensions (mm) Dimensions (mm) A B C D E F Y A B C D E F G Y A B C D E F Y Model Model Model ZP40HB ZP63HB ZP100HB 40 41 28 43 20.5 30 13 63 65 46 68 31.5 50 4.5 21.5 100 103 69 107 47.5 80 35.5 ZP125HB ZP50HB ZP80HB 50 52 36 54

MRQ

Operating pressure [MPa] Cylinder output F[N] Load weight [kg] 150 15 Allowable side load on the piston end Unit: N 100 10 Stroke of linear part Size 40 40 50 4 5 5 10 15 20 25 30 40 50 75 100 32 40 32 14 14 13 13 13 12 12 11 10 9 20 25 30 2 2.5 3 23 23 22 21 21 20 19 18 16 15 2) Using the cylinder body installed vertically: To operate the rotary cylinder with the cylinder body installed

Lubricator

AL-OMX0056-A PRODUCT NAME Lubricator MODEL / Series / Product Number AL20-(F,N)01(F,N)02(B)(-2,3,6,C,R,Z)-D AL30-(F,N)02(F,N)03(B)(-2,3,6,8,R,W,Z)-D AL40-(F,N)02(F,N)04(B)(-2,3,6,8,R,W,Z)-D AL40-(F,N)06(B)(-2,3,6,8,R,W,Z)-D AL50-(F,N)06(F,N)10(B)(-2,3,6,8,R,W,Z)-D AL60-(F,N)10(B)(-2,3,6,8,R,W,Z)-D Contents Page 1. Safety Instructions 2-6 2. Application 7 3. Standard Specifications 7 4.

Lightweight and Compact

min 30 s 20 s Max.

Round Type Low Pressure Hydraulic Cylinder Series CH
M

H G I J K L A B C D E F M R Size Tolerance +0.058 0 -0.1 -0.2 -0.1 -0.2 -0.1 -0.3 -0.1 -0.3 AD-FI-20 AD-FI-25 AD-FI-32 AD-FI-40 +0.027 0 +0.027 0 +0.027 0 +0.027 0 9 9 16 16 36 38 55 55 16 18 22 22 9 9 12 12 20 25 32 40 10 10 15.5 15.5 20 20 24 24 14 14 20 20 M8 x 1.25 M10 x 1.25 M14 x 1.5 M16 x 1.5 20 25 32 40 46 46 56 64 28 30 40 43 60 60 80 88 22 22 30 30 16 16 16 24 10 10 12 12 30 30

2-Color Display

10 14 14 10.85 10.85 10.85 C4L C6L N7L One-touch fitting 4 mm 5/32 inch elbow One-touch fitting 6 mm elbow One-touch fitting 1/4 inch elbow 20.7 22.85 23.45 15.6 16.1 16.1 9.3 11.6 12 10.85 10.85 10.85 6 Series ZSE30A(F)/ISE30A 2-Color Display High-Precision Digital Pressure Switch With bracket Z/ISE30A(F) Option 2 A1 30 42.5 Bracket A (Option unit part no.: ZS-38-A1) 25 20 20 45 30 2 30