Rotary Actuator

Note) Flange type F is not available. Air cushion Number of auto switches Nil None C With air cushion Shaft type Nil 2 pcs. S 1 pc.

CLQ

, 50, 63, 80, 100 How to Order B 40 30 D F CLQ Without auto switch B 40 30 D F F9BW S CDLQ With auto switch Number of auto switches Thread type Built-in magnet Nil S n 2 pcs. 1 pc. n pcs.

CLQ

locking Double end taps 63 80 100 Features 2 Compact Cylinder with lock Double Acting: Single Rod Series CLQ 20, 25, 32, 40, 50, 63, 80, 100 How to Order B 40 30 D F CLQ Without Auto Switch B 40 30 D F A73 S CDLQ With Auto Switch Number of auto switches With auto switch (built-in magnet) Nil S n 2 pcs. 1 pc.

VQ7-6/7-8

Thread type Rc Nil Control equipment Symbol A Nil AP M MP F G C E NPTF T G F Air filter with auto-drain Air filter with manual drain Regulator Air release valve Pressure switch Blanking plate (Air release valve) Note) It is not applicable to O n e t o u c h fittings.

5 Port Solenoid Valve Series VQZ1000/2000/3000

Body Ported Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB, CA2 Pressure 0.5 MPa Load factor 50% Stroke 500 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation VQZ1121-C6 SJ SY 800 700 600 500 400 300

Digital Flow Switches

Connector pin numbers PF2W504T--1 PF2W520T--1 PF2W540T--1 PF2W504T--2 PF2W520T--2 PF2W540T--2 4 0.5 4 0.5 4 3 16 2 16 2 40 5 40 5 2 1 Pin no.

Digital Flow Switch (Manifold type)

14 40 2 to 16 (symbol 20) 33 14 33 14 40 5 to 40 (symbol 40) 33 14 33 14 45 -62No.PF-OMW0004-B Integrated display type (straight type): PF3WC (mm) Flow range (L/min) a 0.5 to 4 (symbol 04) 40 2 to 16 (symbol 20) 40 5 to 40 (symbol 40) 45 -63No.PF-OMW0004-B Remote sensor type (supply type): PF3WS (mm) A B Flow range a (L/min) Open Close Open Close 0.5 to 4 (symbol 04) 33 14 33 14 40 2 to

Lightweight and Compact

Applicable model HRS-WL003 HRS090-mm-20/40 Parts List q No.

SMC Pneumatic Clean Series

No 3000G 45-089 Stripper for round cable (2.0) can be used for a 2-wire type cable. 181 Applicable auto switch list Cylinder CDQSX CDBM2 CDM2X CDQ2X CDQS CDM2 CDG1 CDQ2 CDA2 CXSJ CDJ2 MGP MXQ Cylinder series MGF MXP MXS CDU REC CXS CYP CUJ 40/63/100 32 to 100 20 to 40 20 to 40 20 to 63 40 to 63 12 to 25 20 to 40 12 to 63 12 to 25 32 to 63 20 to 40 80/100 6 to 10 6 to 25 6 to 32 6 to 16 6

High Vacuum Angle Valve

Example) XLA-25H0-2M9NJLA-XAN1A 18 XLm Series Dimensions XLA/F (With D-M9mJm) C E E C E Fn D Heat-resistant auto switch H B A Heater G A [mm] Series Valve size A B C D E Fn G H 25 50 121 48 27 12 40 26 44 40 65 171 66 39 11 55 41 67 50 70 185 79 46 11 75 52 72 XLA XLF XLC/G25, 40 (With D-M9mJm) XLC/G50 (With D-M9mJm) C E C E E C E E C E Fn B A Fn D D Heat-resistant auto switch H J K H B A

SV

MEWNET-F System ADDRESS NO. STASTION NO. DIP SW. Name of terminal block, LED Note Cable wiring TERM. POWER RUN ERR R.SET HOLD TERM. POWER COMM.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

Ambient temperature of servo motor Check environment so that ambient temperature is 0 to 40 . is over 40 . 2. Servo motor is overloaded. 1. Reduce load. 2. Check operation pattern. 3. Use servo motor that provides larger output. 3. Thermal sensor in encoder is faulty.

HRX-OM-R016

25 32 40 1500 1500 1000 1000 500 500 0 0 0 10 20 30 40 50 0 10 20 30 40 50 Circulating fluid temperature Circulating fluid temperature 50Hz 60Hz The cooling capacity will be reduced by 300W when option: T and MT are selected.

Compact Cylinder with Air Cushion and Lock Series RLQ

Extension locking Retraction locking Retraction locking Variations Bore size (mm) Standard stroke (mm) Locking direction Mounting Series 20 25 30 40 50 75 100 LOCK 32 Extension lock Through hole LOCK 40 RLQ LOCK 50 Retraction lock Both ends tapped 63 Compact Cylinder with Air Cushion and Lock Series RLQ 32, 40, 50, 63 How to Order B 32 50 M F RLQ B 32 50 M F F9BW RDLQ With auto switch Number

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

10 L/min 0.5 to 10.5 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.1 to 6 L/min 0.3 to 6.3 L/min 5 V 20 mA 30% 70% PF2M710 92% 8% 0.3 to 25 L/min 1.3 to 26.3 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.3 to 15 L/min 0.8 to 15.8 L/min 5 V 20 mA 30% 70% PF2M725 92% 8% 0.5 to 50 L/min 2.5 to 52.5 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.5 to 30 L/min

MRQ

32 40 0.34 0.45 0.68 0.9 1.13 1.36 1.58 400 500 40 50 32 0.64 0.85 1.27 1.7 2.12 2.54 2.97 200 250 300 20 25 30 Graph of effective output CRB1 Operating pressure [MPa] Cylinder output F[N] Load weight [kg] 3 150 15 CRBU 2.5 100 10 Effective torque (N/m) MRQBS40 2 CRA1 40 40 50 4 5 1.5 32 CRQ 20 25 30 2 2.5 3 1 MRQBS32 MRQ 0.5 15 1.5 0 MSQ 0.4 0.5 0.6 0.7 10 1 0.1 0.2 0.3 0.4 0.5 0.6 0.7

VQ7-6/7-8

Thread type Rc Nil Control equipment Symbol A Nil AP M MP F G C E NPTF T G F Air filter with auto-drain Air filter with manual drain Regulator Air release valve Pressure switch Blanking plate (Air release valve) Note) It is not applicable to O n e t o u c h fittings.

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MGP

Values) Horizontal load Note: 1N = 0.2248 lbf 1in = 25.4mm Displacement MGPA32, 40 MGPA12 0.4 0.8 MGPA -400 32 40 32 40 MGPA12-250 MGPA12-250 MGPA -400 0.35 0.7 Plate displacement mm Plate displacement mm 0.3 0.6 MGPA -300 32 40 MGPA -300 32 40 0.25 0.5 MGPA12-150 MGPA12-150 MGPA12-100 MGPA -200 32 40 MGPA12-100 MGPA -200 32 40 0.2 0.4 MGPA12-75 MGPA12-75 MGPA -150 32 40 MGPA -100 32 40

Thermo-con/Rack Mount Type

A C B Applicable model Dimensions [mm] A B C HECR002-A5-E 14 230 35 HECR004-A5-E 45 HECR006-A5-E HECR008-A5-E 44 HECR010-A2-E HECR008-W5-E 46 HECR012-W2-E 310 13 400 15 Option symbol F With Flow Switch F HECR Applicable model HECR002-A5-F HECR004-A5-F HECR006-A5-F HECR008-A5-F HECR010-A2-F HECR008-W5-F HECR012-W2-F With flow switch This is an ON/OFF switch detecting low levels of the circulating