Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

EA h EB W F Stroke adjustment unit S (Shock absorber stroke) T Shock absorber MY1W16/20 F MY1W50/63 EC EY (mm) h 3.6 3.6 3.5 4.5 4.5 5.5 5.5 EC EY F 4 4 6 6 6 6 6 E EA EB 30 32 38 50 57 66 77 T TT W Shock absorber model RB0806 RB0806 RB1007 RB1412 RB1412 RB2015 RB2015 FC 14 14 13 17 17 26 31 S 40.8 40.8 46.7 67.3 67.3 73.2 73.2 FB 54 67 78 FH 13 16 17.5 FW 66 80 91 Model MY1W16

CEx-OMI0064

UP/DOWN On OFF SET )On/OFF MODE , SEL. , SET RIGHT LEFT UP DOWN RIGHTLEFTUPDOWN 10N 19 - 7-3 7-3-1 -7,999,999+7,999,999, F, (+8,000,000 ,F,-8,000,000 ,-F ,,F) 6 (-999,999+999,999),6 7-3-2 , 0 , ,RS-232C BCD ,,, 7-3-3 ,14 No. 2 1 1 OFF OFF 2 OFF ON 3 ON OFF 4 ON ON 7-3-4 No.

Wedge Cam Operation Gripper Series MHK2

Note 2) Refer to P.22 and 23 for auto switch specifications.

ZR

Filter case Filter element (ZR1-FZ) Vacuum switch Gasket slot Filter gasket Filter block 13-3-18 18 Series ZR Large Size Vacuum Module: Ejector System Dimensions: ZR1-F Circuit diagram ZR1-FE Spacer A 24.5 2Slitted hole (Mounting hole)1 43 10 23 102 232 102 Indicator light (Red) ZX Vacuum pressure setting trimmer 8 28 Vacuum switch Thickness 1.2 ZR 671 571 31 Spacer A is used to leave space

DOC1003626

Field name Example RTU mode ASCII mode (HEX) character data binary data Header : None Device address 0x01 0,1 0x01 Function 0x04 0,4 0x04 Quantity of bytes to read 0x02 0,2 0x02 Information of 0009h(Data display 1) 0x00FA 0,0,F,A 0x00,0xFA Checksum ASCII:LRC RTU:CRC F,F 0x39,0x73 Trailer CR/LF None Total quantity of byte 15 7 * Response message at an ambient temperature of 25.0C 3.13 Register

0.5

Supply power again 1: NPN/PNP open collector output 23 Fan Type Ionizer IZF10/IZF10R Series Wiring/IZF10 IZF21/31 IZF10/IZF10R Technical Data Number stamped on connector Pin no. Signal name Description 1 +24 VDC Power supply connection to operate this product. 2 0 V 1 2 3 4 3 F . G.

4/5 Port Air Operated Valve Series SYJA3000 1

Note 3) 5 port base mounted without sub-plate: SYJA540 5-2-23 6 Series SYJA5000 Dimesions: Body Ported Dimensions: Base Mounted 2 position single: SYJA5140-01 2 position single: SYJA5120-M5(-F) 41.5 (For mounting) 2-4.3 M5 x 0.8 (Pilot port) 1 Manual override 15 5 11 A B A B 1 M5 x 0.8 (Pilot port) 10 24 A B 19 R P 2-2.6 2-3.5 4 37.5 (For mounting) (For manifold mounting) (Bracket) 47 42

Magnetically Coupled Rodless Cylinder

Dimensions L A LA Attached from top W C PA MM Note 1) M F HB HA Note 2) Attached from bottom: MD R Body B (mm) Note 1) Note 2) B C F HA HB L LA MM MD M PA R W A Model CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 16 35 6.5 5.5 16.5 23 57 25 M4 x 0.7 M3 4 25 6 36 18 36 6.5 5.5 17 23.5 66 30 M4 x 0.7 M3 4 27 6 37 20 46 8.0 5.5 21 28.5 70 30 M5 x 0.8 M4 5 36 7 47 22.5 60 9.5 6.0 27.5 36 80 35 M6 x 1.0

EXxx-OML0010CN

EX600(30) 26 -24No.EX-OML0010CN-C 2. a) (52) b) /(16) c) (8) d) () e) (51) f) (51) &(24) -25No.EX-OML0010CN-C 3. a) b) /(16) c) d) (52) e) f) h,m,s SI, g) (51) h) (51) -26No.EX-OML0010CN-C 3. Sys. Configuration() 3. Sys. Configuretion, (23 ) , . 1. (Tag Input) 28 2. (Re Register) 29 3. Hold/Clear Hold/ClearSI 30 (Hold/Clear) 4. (Clr Counter Value) ON/OFF 31 5.

MU

Single Clevis (Double clevis pivot bracket) Double Clevis (Single clevis pivot bracket) DDH10 8 10 10 14 14 DJ 7 10 10 14 16 DI 17 22 27 32 38 CDH10 8 10 10 14 14 DH 11 13 13 17 19 CJ 7 10 10 14 16 DF 4 7 10 12 14 CI 17 22 27 32 38 DE 3.5 3.5 3.5 5.5 6 CH 11 13 13 17 19 DB 23 27 31 37 48 CF 4 7 10 12 14 CE 3.5 3.5 3.5 5.5 6 DA 53 67 85 103 122 CB 23 27 31 37 48 CA 53 67 85 103 122 Part no

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

(Through-hole) CX V (Opposite side: Same) (L) (Z) TT QQ (G) D-X T Q 20U R UU (Piping port) (Opposite side: Same) Data N (I) (L) (Z) W C (mm) A B C D E F G H I J K L M N OO NN P Model 2-5.5 through 2-M4 x 0.7 thread depth 6 2-M5 x 0.8 thread depth 7.5 2-M5 x 0.8 thread depth 8 CXS20 64 25 62 23 50 28 6 12 12 30 10 M6 x 1.0 x 18.5l 53 11.5 2-M5 x 0.8 2-9.5 counterbore depth 5.3 2-6.9 through

MU

Single Clevis (Double clevis pivot bracket) Double Clevis (Single clevis pivot bracket) DDH10 8 10 10 14 14 DJ 7 10 10 14 16 DI 17 22 27 32 38 CDH10 8 10 10 14 14 DH 11 13 13 17 19 CJ 7 10 10 14 16 DF 4 7 10 12 14 CI 17 22 27 32 38 CH 11 13 13 17 19 DE 3.5 3.5 3.5 5.5 6 DB 23 27 31 37 48 CF 4 7 10 12 14 DA 53 67 85 103 122 CE 3.5 3.5 3.5 5.5 6 CB 23 27 31 37 48 CA 53 67 85 103 122 Part no

Mechanical Valves Series NVM, NVFM, NVZNI

Panel l\rounting 6 61 lbs (3kg) F O F 1.54 lbs (0 7 kg ) T T 60' 0 138 in (3 5 mm) 0.079 in, (2 mm) A B c D E F G 4.47 113.5 2.38 '1 .32 0.91 (23) 0.24 (6) 0.81 :20.5) 0.39 (10) Millimeters in Parentheses Millimeters in Parentheses NVM430-N01-30 NVM430-N01-32 F O,F, 5.73 lbs (2 6 ks) P T 0,216 in (5,5 mm) o.T 0 039 in (1 mm) T T 0 256 in. (6 5 mm) 5 7 3 l b s ( 2 6 k 9 ) 0 216 in (5 5mm)

IIIIIII

Panel l\rounting 6 61 lbs (3kg) F O F 1.54 lbs (0 7 kg ) T T 60' 0 138 in (3 5 mm) 0.079 in, (2 mm) A B c D E F G 4.47 113.5 2.38 '1 .32 0.91 (23) 0.24 (6) 0.81 :20.5) 0.39 (10) Millimeters in Parentheses Millimeters in Parentheses NVM430-N01-30 NVM430-N01-32 F O,F, 5.73 lbs (2 6 ks) P T 0,216 in (5,5 mm) o.T 0 039 in (1 mm) T T 0 256 in. (6 5 mm) 5 7 3 l b s ( 2 6 k 9 ) 0 216 in (5 5mm)

HRL

G1, Symbol N: NPT1) CH2: Rc1/2 (Symbol F: G1/2, Symbol N: NPT1/2) Tank drain port CH1: Rc3/4 (Symbol F: G3/4, Symbol N: NPT3/4) CH2: Rc1/2 (Symbol F: G1/2, Symbol N: NPT1/2) Fluid contact material (Metal/Resin) CH1: Stainless steel, Copper (Heat exchanger brazing), Brass, Bronze, Fluororesin, PP, PBT, POM, PU, PC, PVC, EPDM, NBR CH2: Stainless steel, Alumina ceramic, Carbon, Fluororesin,

Lubrication Equipment

(Example) 23-R 1000cm3 tank 12 14 20 1 1 2 2 1 4 1 1000cm3 tank with switch (Bottom limit ON) 80 90 1 2 2 1 VY 1000cm3 tank with switch (Bottom limit OFF) Metal bowl With drain cock Nylon bowl (Including sight glass) Metal bowl with level gauge JIS Symbol G Thread Rc(PT) NPT G(PF) N F AL Option Combinations Available Not available Accessary, options Options Symbol 1 1S-1 1S-2 2 3 6 8 R 1

VFS

01 02 2 position double: VFS2200-F-01 02 3 position closed center: VFS2300-F-01 02 3 position exhaust center: VFS2400-F-01 02 3 position pressure center: VFS2500-F-01 02 2-5 mounting hole Manual override 150.5 (3 position: 158) (Non-locking) 2-5 mounting hole Manual override (Non-locking) With light/surge voltage suppressor 163.5 (3 position: 171) With light/surge voltage suppressor 1 8 (

Vacuum Pad: Ball Joint Type

D Model ZPT10F-B5 F NL P F NL P F P 10 12 10 12.5 27 1.5 ZPT13F-B5 ZPT20F20 22 13 15 32 36 36 12.5 15.5 10.5 13 27.5 ZPT16F-B5 ZPT25F5 9 8 12 14 2 25 28 16 18 ZPT32F32 36.5 36.5 13 16 32 35 40 50 B8 01 ZPT F(Without buffer/Female thread) Hexagon width across flats P N NL Hexagon width across flats 19 F D C Y 2.5 A B Dimensions (mm) N: 1/8 (Rc, NPT, NPTF) N: M8 x 1.25 Model A B C D F NL P

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

-A8 (Without buffer/Male thread) ZPT F-B5-A10 (Without buffer/Male thread) M10 x 1 M5 x 0.8 Hexagon width across flats 14 Hexagon width across flats 12 M5 x 0.8 M8 x 1 5 3 20 D 3 5 Y Hexagon width across flats 16 ZX 15 D 3 3 F Hexagon width across flats 12 Hexagon width across flats 12 ZR Hexagon width across flats 10 Hexagon width across flats 2 F Hexagon width across flats 3 ZM 3 C C ZH

MLU

27 31 37 CA 53 67 85 103 DJ 7 10 10 14 DI 17 22 27 32 DH 11 13 13 17 DF 4 7 10 12 DE 3.5 3.5 3.5 5.5 DB 23 27 31 37 DA 53 67 85 103 Size 25 32 40 50 Size 25 32 40 50 Part no.