Compact Cylinder with Lock Series CLQ

40 M18 x 1.5 16 20 50, 63 I-G05 14 22 56 18 28 40 M18 x 1.5 16 20 14 80 Y-G08 71 23 38 50 M22 x 1.5 21 27 80 I-G08 18 28 71 21 38 50 M22 x 1.5 21 27 18 100 Y-G10 79 24 44 55 M26 x 1.5 24 31 100 I-G10 22 32 79 21 44 55 M26 x 1.5 24 31 22 Applicable bore size (mm) Applicable pin part no.

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

Bore size (mm) Auto switch model L d L d L d L d D-A9, D-A9V 0 (15) 0 28 28 (43) 18 18 (33) 0 0 (15) 12 D-M9, D-M9V D-M9W, D-M9WV 10 (17) 0 28 33 (45) 18 28 (35) 0 5 (17) D-A9, D-A9V 0 (15) 0 32 32 (47) 22 22 (37) 0 0 (15) 16 D-M9, D-M9V D-M9W, D-M9WV 10 (17) 0 32 37 (49) 22 32 (39) 0 5 (17) D-A9, D-A9V 0 (15) 0 38 38 (53) 26 26 (41) 0 0 (15) 20 D-M9, D-M9V D-M9W, D-M9WV 30 (37) 0 38 38 (

Clamp Cylinder Series CK1

D-P4DWSC D-P4DWSE D-P4DWL D-P4DWZ BA8-032 Dimensions 25 28 5 6 12 3 x Rc 1/8 3 x Rc 1/8 9.5 20 4 Speed controller valve Cushion valve 4 32 12 4 45 45 M10 x 1.25 Max. 26.5 12 40 26 41.5 Width across flats 36 12 R12 12 +0.5 +0.2 Shaft: 10 0.040 d90.076 28 26 Hole: 10 +0.022 H8 0 41.2 38 5 20 34 + Stroke 70 + Stroke 55 137 + Stroke Double knuckle joint Single knuckle joint 10 +0.022 H8 0 3

SQ1000/2000

Dimension L 21 273 22 285.5 23 298 24 310.5 25 323 26 335.5 27 348 28 360.5 29 373 30 385.5 No. Dimension L 31 398 32 410.5 33 423 34 435.5 35 448 36 460.5 37 473 38 485.5 39 498 40 510.5 50 Series SQ1000/2000 Manifold Options for SQ1000/SQ2000 Negative COM specifications The following valve part numbers are for negative COM specifications.

Rotary Table/

61 60 28 40 22 6 65 67 65 32 48 19.5 30 6 76 13.5 67 65 32 48 22 6 68 77 75 35 54 21.5 34 7 87 15.5 77 75 35 54 24 7 77 Dimensions other than above are identical to the high precision type.

5 Port Air Operated Valve

AXT620-32-1 (M4 x 48, With spring washer) For mounting valve M4: 1.4 Nm 1509 VFA3000/5000 Series Dimensions: VFA3000 Series/Base Mounted 2 position single VFA3140(-P) 02 03 2 position double VFA3240(-P) 02 03 28 33 28 33 1/4, 3/8 [4 (A), 2 (B) port] 1/4, 3/8 [4 (A), 2 (B) port] 13 13 22 22 1/8 (Pilot port: Upward) 81 1/8 (Pilot port: Upward) 46 20 36 36 20 46 4A 2B 4A 2B 26.4 26.4 35 42

Compact Cylinder with Air Cushion Series RQ

40 M18 x 1.5 16 20 20 28 40 M18 x 1.5 16 20 44 50.6 14 22 56 +0.5 +0.3 +0.070 0 80 I-G08 Y-G08 80 18 28 IY-G08 71 21 38 50 M22 x 1.5 21 27 23 38 50 M22 x 1.5 21 27 56 64 18 28 71 +0.5 +0.3 0.3 0.5 +0.084 0 +0.084 0 100 I-G10 Y-G10 100 22 32 IY-G10 79 21 44 55 M26 x 1.5 24 31 24 44 55 M26 x 1.5 24 31 64 72 22 32 79 Knuckle pin and retaining ring are included.

Rotary Actuator/Vane Style Series CRB1

Applicable shaft type: Y Applicable shaft types: S, Y CRA1 (mm) (mm) X Y Size Size CRQ2 50 50 24.5 to 39.5 24.5 to 39.5 28 to 45 28 to 45 63 63 MSQ X = X = X = Y = Y = Y = Y = Y = 30.5 to 53.5 30.5 to 53.5 80 80 MSZ 40 to 65 40 to 65 100 100 Symbol: A51 Symbol: A52 Shorten the long shaft. CRQ2X MSQX Shorten the long shaft.

3

22 32 40 50 4.5 5 1.5 78 54 30 60 45.6 40.6 15.2 27 18 39 30 18 13.6 2.7 depth 12 3/8, 1/2 34 30 42 48 58 4.5 5 1.5 98 71 38 68 53.6 48.6 19.2 32 28 49 35 28 16.8 2.7 depth 12 1/2, 3/4 44 36 48 58 70 5.5 7 2.0 124 92 46 77 62.6 57.6 23.0 41 42 63 48 28 18.0 3.5 depth 14 3/4, 1 104 74 31 52 39.5 1 1/4, 1 1/2 PF3W721/521 108 76 56 91 76.6 71.6 28.5 54 33 54 41.5 25 27.5 3.5 depth 14 G1 1/4

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

Always use the power supply designed exclusively for the electromagnetic brake. 3 28 3.

EXxx-OMZ0016

(mm SQ) ZS-28-C-1 24~26 0.14~0.2 1.0~1.2 Yellow ZS-28-C-2 1.2~1.6 Orange ZS-28-C-3 22~20 0.3~0.5 1.0~1.2 Green ZS-28-C-4 1.2~1.6 Blue ZS-28-C-5 1.6~2.0 Grey ZS-28-CA-1 0.6~0.9 Orange ZS-28-CA-2 0.9~1.0 Red 0.1~0.5 ZS-28-CA-3 1.0~1.15 Yellow ZS-28-CA-4 1.15~1.35 Blue ZS-28-CA-5 1.35~1.6 Green -98No.EX-OMZ0016-C (5) NFC reader/writer EXW1-NT1 This set includes an NFC reader/writer and a USB

Compact Cylinder with Lock Series CLQ

A A1 E1 L1 MM RR1 U1 ND NX NZ L 34 41 42 56 71 79 8.5 16 25 30 30 40 50 55 M8 x 1.25 10.3 11.5 34 41 42 56 71 79 8.5 10.5 14 18 21 21 16 20 22 28 38 44 25 30 30 40 50 55 M8 x 1.25 10.3 12.8 12 16 21 24 11.5 14 14 20 27 31 8 10 10 14 18 22 8 10 18 22 28 32 8 10 10 14 18 22 8 10 18 22 28 32 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 20 25 32, 40 50, 63 80 100 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10

Compact Type Dual-Rod Cylinder Series CXSJ

V) Power supply voltage 10 mA or less Current consumption 24 VDC (10 to 28 VDC) 28 VDC or less Load voltage 5 to 40 mA 40 mA or less 80 mA or less Load current 1.5 V or less (0.8 V or less at 10 mA load current) 4 V or less 0.8 V or less Internal voltage drop Leakage current 100 A or less at 24 VDC 0.8 mA or less Operating position Red LED lights up Optimum operating position Green LED

MXW Series Long Stroke Slide Table

28 28 28 B 107 127 152 177 202 4 MXW12 W 34 14 14 14 14 V 121 141 166 191 216 A 56.5 31.5 31.5 31.5 31.5 31.5 B 138.5 163.5 188.5 213.5 238.5 263.5 5.5 MXW16 W 42.5 17.5 17.5 17.5 17.5 17.5 V 152.5 177.5 202.5 227.5 252.5 277.5 A 65.5 40.5 40.5 40.5 40.5 40.5 40.5 B 171.5 196.5 221.5 246.5 271.5 296.5 321.5 7 MXW20 W 51.5 26.5 26.5 26.5 26.5 26.5 26.5 V 185.5 210.5 235.5

Step Motor Controller

INP Outputs when servo is on Not output when EMG stop is instructed Not output when alarm is generated SVRE ESTOP Note) ALARM Note) Note) Signal of negative-logic circuit (N.C.) 28 Series LECP6 Step Data Setting 1. Step data setting for positioning 2.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

The grommet type is only available for the JSX10. 57 15 IN 8 25 25 2 x G1/8 1(IN), 2(OUT) port 2 x M3 x 5 Glossary of Terms Specific Product Precautions 14 JSX Series Dimensions: JSX20, 20U Port Size 1/8 Body Material Stainless Steel G: Grommet JSX20 only GS: Grommet with PCB 18 28.5 300 36 300 38 18 36 63 63 39 33.3 IN IN 8 8 30 2 x Rc, NPT1/8 1(IN), 2(OUT) port 30 28 28 2 x Rc, NPT1/

Modular Design with Uniform Body Style

91.4 87.4 93.9 AC30B-V-D m28 32.5 m27.8 43 37.5 63 37.5 64 37.5 64 157.1 123.9 122.2 117.8 122.3 137.8 142.3 AC40B-V-D m28 41.5 m27.8 52 42.5 73 42.5 73 42.5 73 186.9 155.6 153.9 149.5 154 169.5 174 AC40B-06-V-D m28 41.5 m27.8 52 42.5 73 42.5 73 42.5 73 188.9 157.6 155.9 151.5 156 171.5 176 AC50B-V-D m28 51 m27.8 61.5 42.5 82.5 42.5 82.5 42.5 82.5 259.9 228.6 226.9 222.5 227 242.5 247 28

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

KJ10D KJ12D KJ16D KJ20D KJ27D M10 x 1.25 10 43 28 14 20 4 15 M12 x 1.25 12 50 32 16 22 4 17 M16 x 1.5 16 64 42 21 28 4 23 M20 x 1.5 20 77 50 25 33 4 27 M27 x 2 30 110 70 37 51 4 36 83 Series CP96/C96 Simple Specials These changes are dealt with Simple Specials System.

CHKD/CHKG

with SMC. 265 A CHKD Series Theoretical Output Unit: N Operating pressure (MPa) Bore size (mm) Rod size (mm) Operating direction Piston area (mm2) 10 3.5 7 314 3140 1099 2198 OUT 20 12 201 2010 704 1407 IN 490 4900 1715 3430 OUT 25 14 336 3360 1176 2352 IN 804 8040 2814 5628 OUT 32 18 549 5490 1922 3843 IN 1256 12560 4396 8792 OUT 40 22.4 862 8620 3017 6034 IN 1963 19630 6871 13741 OUT 50 28

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

30 20 28 23 28 G 9 12 13 15 20 27 N 4 4 4 4 6 6 HA 20 30 20 28 46 56 KA 82.5 132.5 GA 17 12 33 43 43 83 NA 2 2 2 2 4 4 13-/22-MXS8L-10 13-/22-MXS8L-20 13-/22-MXS8L-30 13-/22-MXS8L-40 13-/22-MXS8L-50 13-/22-MXS8L-75 785 MXS 1322Air Slide Table Dimensions: MXS12 1322Basic 2 x M4 x 0.7 thread depth 5 Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches