One-touch Fittings Series KQ2

12 16.1 7 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 2 1 4 3 8 1 2 11.11 14.29 17.46 12.7 14.29 17.46 26 28 30 28 30 1 4 13.2 10 20.5 4.6 17 5 16 23.5 15.2 12 6 18.5 NPT 31.5 6 31.5 32.5 34 17.9 17 17.46 25.5 3 8 21 7 36.5 36.5 9 17.46 1 2 21.7 17 28 22 38.5 40 9.6 22.23 Reference dimensions after NPT thread installation.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

(For connection fitting weight, refer to page 8-15-28.) For the (Fn) of data A, refer to the allowable driving force table. Determination of connection fitting weight (WB) WB > WBMAX Review of connection fitting WB WBmax (Refer to data A on page 8-15-28.)

4-channel Flow Monitor (Remote type monitor unit)

Power and output cable (ZS-26-A) Sensor connector ZS-28-C ZS-28-CA-42No.PF-OMH0003-F Revision history A: Full scale revision due to the change of the format and addition of items. B: Content is changed due to the change of the format. C: Contents revised in several places. D: Contents are added. E: Contents revised in several places. [July 2018] F: Contents revised in several places.

Vacuum Ejector Series ZM

Temperature characteristics Operating voltage 4.5 to 28 VDC 100 VAC/VDC Open collector 28 V, Max. 40 mA PNP open collector 80 mA NPN open collector 30 V, Max. 80 mA ON-OFF output 2 points 1 point 1 point Lights up when ON Lights up when ON Lights up when ON (Red) 1 point Setting points Operation indicator light Setting trimmer Current consumption Lights up when ON 18 rotations Lights ON (

ZQ-OM01301

Specifications 28 10. Pneumatic Circuit 31 11. Exhaust Characteristics, Flow Characteristics, 33 Vacuum Pump Flow Characteristics, and Vacuum Release Flow Rate Characteristics 12. Handling Precautions 37 13. Trouble shooting 38 1 - Doc. No.

IZx-OMV0005

Note (mm) Models A 01 02 01 02 IZN10E06 3.5 IZN10E07 7 28 Doc. no.IZ-OMV0005 16 17 One-touch fitting (Elbow)IZN10E(mm) Models B C D IZN10E-16 22 16 11.5 IZN10E-17 24.5 18.5 12 Female threads for pipingIZN10E-11 Width across flats: 12 29 Doc. no.IZ-OMV0005 L-bracketIZN10-B1 (Mounting angle adjustable range) 40o 2 x Hexagon socket head cap screw M3 x 6 (Accessory) Pivot mounting Inward mounting

90

NPN 1 output ISE30A-01-N-ML Digital pressure PNP 1 output ISE30A-01-P-ML NPN 1 output/ Voltage output ISE30A-01-C-ML switch Note 3) NPN 1 output/ Current output ISE30A-01-D-ML Note 1) This is an assembly of the bracket and resin panel nut. Note 2) l in part numbers for a round type pressure gauge indicates a type of connection thread.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

28 Series MGG Guide Cylinder With End Lock Construction 20 to 100/MGG Manual release (Lock type) !

9.8

Note 4) Not available for piping specifications of M5R, 01 and N01. Note 5) The DIN rail needs to be prepared by the customer.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40

Lead Wire Clamp/Lead Wire Cap (Option) CNS Series Lead wire clamp LC-01 Lead wire cap LP-01 ML1C CLS Lead Wire Clamp/Lead Wire Cap (Option) (mm) CLQ 25 32 40 Mounting position Series Series Lead wire clamp Lead wire cap A 124.8 148.8 173.8 LP-01 ML1C LC-01 ML1C MLGP B 113.2 137.2 162.2 25 32 40 Series Mounting position RLQ ML1C 177.5 A 128.5 152.5 B 123.5 147.5 172.5 MLU Operating Range Minimum

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Lead Wire Clamp/Lead Wire Cap (Option) CNS Series Lead wire clamp LC-01 Lead wire cap LP-01 ML1C CLS Lead Wire Clamp/Lead Wire Cap (Option) (mm) CLQ 25 32 40 Mounting position Series Series Lead wire clamp Lead wire cap A 124.8 148.8 173.8 LP-01 ML1C LC-01 ML1C MLGP B 113.2 137.2 162.2 25 32 40 Series Mounting position RLQ ML1C 177.5 A 128.5 152.5 B 123.5 147.5 172.5 MLU Operating Range Minimum

ML1

40 Mounting position Series Series Lead wire clamp Lead wire cap A 124.8 148.8 173.8 LP-01 ML1C ML1C LC-01 B 113.2 137.2 162.2 25 32 40 Mounting position Series ML1C 177.5 A 128.5 152.5 B 123.5 147.5 172.5 4.7-11

Pressure Relief 3 Port Valve With Locking Holes

VH*-OMQ0023-C PRODUCT NAME Pressure Relief 3 Port Valve With Locking Holes MODEL / Series / Product Number VHS20-(F,N)01~02A,B(-B,S)(-K,R,Z) VHS30-(F,N)02~03A,B(-B,S)(-K,R,Z) VHS40-(F,N)02~04A,B(-B,S)(-K,R,Z) VHS40-(F,N)06A,B(-B,S)(-K,R,Z) VHS50-(F,N)06~10A,B(-B,S)(-K,R,Z) VHS2510-(F,N)01~02A,B(-B,S)(-K,R,Z) VHS3510-(F,N)02~03A,B(-B,S)(-K,R,Z) VHS4510-(F,N)02~04A,B(-B,S)(-K,R,Z) VHS4510-(

VXZ

VXZ2230 VXZ2232 VXZ2240 VXZ2242 VXZ2350 VXZ2352 VXZ2360 VXZ2362 H Y F X E W D U V C S T B K R A J N Q N 79.5 87.5 101.5 106.5 L 108 117 130 135 1 4 3 8 , 28 35 43 45 26 30 38 43 14 17 22 22 7.5 8.5 9 9 24 33 42 47 1.6 2.3 2.6 2.6 22 28 36 42 5.5 6.5 6.5 6.5 40 52 65 70 6 7 7 7 11 14 18 21 93 102 115.5 120.5 25 25 28 28 89 97 112 117 67 75 87 92 50 63 80 90 23 23 25.5 25.5 35 35 40 40 25.5

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

(mm) Electrical entry P Port size B C D E F H K L M N A Model Grommet: G Conduit: C Conduit terminal: T Q R Q R Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 59 44 50 99 50 66 83 1/8 VCS21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 62 44 53 99 53 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 76 46 66.5 101 66.5 68 99 1/4, 3/8 VCS31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Fitting plug KQP-01 KQP-03 KQP-07 KQP-09 KQP-11 Dimensions L (mm) A Applicable fitting size d A L D Part number KQP-01 KQP-03 KQP-07 KQP-09 KQP-11 5 6 8.5 10 11.5 31.5 32 35 39 43 1/8 5/32 1/4 5/16 3/8 16 16 18 20.5 22 D Used to block unused cylinder port. L DIN rail AXT100-DR12.5 (Pitch) 5.25 7.5 Suffix number into from the dimension table below.

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

64 31 6.5 12.5 28 14 12.8 M4 4.5 1/8 VCL21 86 22 23 46 44 44 58 41.5 46.5 99 44 66 18 36 67 31 8.5 12.5 28 18 12.8 M4 6 1/4 99 24 25 56.5 46 54.5 60 52 48.5 101 54.5 68 22 40 81.5 36.5 11 15 32 20 19 M5 8 1/4, 3/8 VCL31 104 24 25 59 46 57 60 54.5 48.5 101 57 68 30 50 84 36.5 13.5 15 32 25 23 M5 8 1/2 107 26 26.5 64.5 48 62.5 62 60 50.5 103 62.5 70 22 45 89 41 11 17 36 22.5 23 M5 8 1/4, 3

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Lead Wire Clamp/Lead Wire Cap (Option) CNS Series Lead wire clamp LC-01 Lead wire cap LP-01 ML1C CLS Lead Wire Clamp/Lead Wire Cap (Option) (mm) CLQ 25 32 40 Mounting position Series Series Lead wire clamp Lead wire cap A 124.8 148.8 173.8 LP-01 ML1C LC-01 ML1C MLGP B 113.2 137.2 162.2 25 32 40 Series Mounting position RLQ ML1C 177.5 A 128.5 152.5 B 123.5 147.5 172.5 MLU Operating Range Minimum

100

Thread size Recommended tightening torque [Nm] 1/8 3 to 5 1/2 28 to 30 3/4 28 to 30 1 36 to 38 Vacuum port Vacuum pressure detection port Exhaust block surface to be held (Width across flats 40) Body surface to be held (Width across flats 40) Exhaust port Branch Port Warning 1.

Digital Pressure Switch

ZSE10F: 5.0 kPa -22No.PS-OMM0005-J [F 2] Setting of OUT2 Page 28 Same setting as [F 1] OUT1.