AC Servo Motor Driver (CC-Link Type ）

RX(n+2)2 to RX(n+2)9) 5 23 5.

Table of Contents

Refer to pages 13-2-4 to 13-2-5 for ejector system unit. Refer to pages 13-2-32 for ejector system manifold. Refer to pages 13-2-40 to 13-2-41 for external vacuum supply system unit. Single unit Single unit 13-2-68 to 13-2-72 Manifold Manifold Refer to page 13-2-54 for external vacuum supply system manifold.

Vacuum Module Series ZX

(VJA314) ZX1-VJA3 4 1 2 Z L 4 2 5 ZX1-VJ3 1 ZX1-VJ114K1, J1 AMV Manual override Type of actuation ZX1-VJ3 4 1 2 2 K3, J2 AEP N.C. (Normally closed) N.O.

Vacuum System Peripherals:

Port size P, A port R port Model Effective area (mm2) (Cv) Flow characteristics C (dm 3/(sbar)) to VEX3 20 1 3 1 8 1 2 160 to 670 160 to 670 160 to 670 2.4 to 9.8 Air operated 1 2 24 VEX3 00 5 7 9 3 4 to 2 VEX3 21 1 3 to 1 8 1 2 2.4 to 9.8 Body ported External pilot solenoid valve 24 1 2 to 2 3 4 VEX3 01 5 7 9 VEX3 22 1 3 to 1 8 1 2 2.4 to 9.8 Internal pilot solenoid valve 24 1 2 to 2 3

Compact Cylinder

A B C D A B C D B D (2) (2) (2) (2) (2) (2) (1) (2) (2) (2) (2) (2) (2) (2) (2) (2) (2) (2) (2) (2) (2) (2) (2) (2) (2) (2) (2) (2) (2) (2) 20 View from piston rod end 25 C 32 Mounting the D-P3DW on a 20 to 25 port surface interferes with the fitting, so it needs to be mounted on a place other than the port surface.

SMC Basic Pneumatics

J F 2 + 1 . 0 1 3 ) . A p k v = 27.94.4@2 + l-013) . Ap 222. l@2 + r-013) .

%silltr

J F 2 + 1 . 0 1 3 ) . A p k v = 27.94.4@2 + l-013) . Ap 222. l@2 + r-013) .

Compact Cylinder

D Bore size (mm) A Piping port (1) (2) (2) (2) (2) (2) (2) (2) (2) (2) (2) (2) (2) (2) (2) (2) (2) (2) 20 25 B D 32 View from piston rod end 40 (2) (2) (2) (2) (2) (2) C 50 63 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Operating Range

LFE-OMY0008

[F32] [diR] 48 No.LFE*-OMY0008 2 2 2 2. . . .

Power Clamp Cylinder

VD0.05 PA0.02 PC0.05 GC +0.1 K 0 PB0.02 GA GB VF LA0.1 VA0.02 C VE L 2 x 2 x P H7 depth D 2 x V H7 depth I 4 x NN depth S N 2 x NPT 1/4 G 2 x 2 x MM depth J Hexagon socket head plug 2 x NPT 1/4 G E B RB (mm) Bore size (mm) 50 63 80 C D E GA GB GC I J K L LA LB MM N NA NB NC NN P B 95 48 12 13.7 134.3 138.5 93 10 12 55 376.4 149.5 78.4 M10 x 1.5 19 13 36.5 10.3 M8 x 1.25 10 112 54 12 16.6

Air Pilot Operated

d1.)na" DIMENSIONS F'dcosrd36hut wth @otsEro DIRECTIO]IAL AIR YALYE DIMENSIONS/PARTS LIST NVSA 4924,4e)34 NVSA 4@44 *u"oalil NvsA 4424 #@ "^*o''"' 4 4 '',o IPFP \ + =e1 " \ --,-"*. iHr fl:Ts;s,sr,if,' DIMENSIONS B c, o 8 2 6 12r0) 477 1172) 2,13 2.$ ,@) (a3) i32l 1.06 t2 0.35 (e) 6.82 (2.1 7.32 t1a6) 252 (64) 2]41 G2) 3.31 (8,1) 154 1) 1.06 (2t' 0.39 i10) I r.65 t2u6l 9.84 (244J 243 {z21

Air Pilot Operated Series NVSA

d1.)na" DIMENSIONS F'dcosrd36hut wth @otsEro DIRECTIO]IAL AIR YALYE DIMENSIONS/PARTS LIST NVSA 4924,4e)34 NVSA 4@44 *u"oalil NvsA 4424 #@ "^*o''"' 4 4 '',o IPFP \ + =e1 " \ --,-"*. iHr fl:Ts;s,sr,if,' DIMENSIONS B c, o 8 2 6 12r0) 477 1172) 2,13 2.$ ,@) (a3) i32l 1.06 t2 0.35 (e) 6.82 (2.1 7.32 t1a6) 252 (64) 2]41 G2) 3.31 (8,1) 154 1) 1.06 (2t' 0.39 i10) I r.65 t2u6l 9.84 (244J 243 {z21

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

mounting thread 2-LA Mounting hole EA C D 2-P Attachment mounting thread 2-FD through Supply port (2 pcs.)

MLGC

2 No.

MLGC

2 No.

PF-OMN0011_C

-26-B) (ZS-26-01) ZS-26-01 1 (ZS-26-B) 190 2,1/41/2 72 2, , -15No.PF-OMN0011CN-C , 1 DC() 2 N.C.

LG1H

supply 24 VDC Note 2) .

Vacuum Ejector Series ZM

VJ10-36-1A-10 . 2 pcs.

Ejector Valve Unit Series ZYY/ZYX 1

Silencer (AN203-KM81 pc) 51 26 16 2.

Magnetically Coupled Rodless Cylinder (Slider Type: Slide Bearing)

CY*S-OM0078P PRODUCT NAME Magnetically Coupled Rodless Cylinder (Slider Type: Slide Bearing) MODEL / Series / Product Number Series CY1S-Z 2/28 Contents Safety Instructions P3P4 1. Mounting P5P7 1-1) Surface for mounting 1-2) Mounting the cylinder 1-3) Minimum necessary space for the installation of the cylinder 2. Operation P7P8 3.