L R S Piping port position Nil Operating direction Left Right L R S a b h g d c f e Note) Plugs are installed in ports other than those indicated for the model.
0x0013 (19) 0 R Product ID Example: ISE20C-L 0x0014 (20) 0 R Product text Pressure sensor Initial value is indicated as 8-digit. 16 octets fixed character string 0x0015 (21) 0 R Serial number Example: "x" (22) 0 R Hardware version HW-Vx.y x: Large revision number y: Small revision number 0x0016 (23) 0 R Software version FW-Vx.y x: Large revision number y: Small revision number 0x0017 (36
CH kPa 4 3 2 1 SW t e AV y D-IN RUN UP SET P-ON AU DOWN STOP READ r u AF i AR o Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com t y u i o IR !
0 q CONTROLLER PRESSURE OUT w Position Detection Switch Flow Sensor Pressure Control Pressure Sensor e w r RUN 4 3 2 1 CH kPa 4 3 2 1 SW t e y D-IN RUN UP SET P-ON DOWN STOP READ r u i o t y u i o !
, A80, D-A7lH, A80H D-A73C, A80C 54 12 Reed switch D-A79W D-J79, J79W 53 49 11 11 12 2 wire 3 wire 56 Solid state switch D-F7 4 wire 56 14 Write "L" at the end of the part number for 3 meters of lead wire.
r r r q w e OUT side passage IN side passage y u t OUT IN i o Basic type (Knob): IR30l0-A e e r q r w e OUT side passage IN side passage t u OUT IN o i Basic type (Knob): IR30l1 2-A e e r q r w e OUT side passage IN side passage t u OUT IN o i 800 Precision Regulator IR1000-A/2000-A/3000-A Series Dimensions Basic type (Knob): IR10l0-01l-A 10.5 42 ARJ 1.6 Bracket AR425 to 935 Mounting hole
Foundation bolt L1 (mm) Nominal thread size d M16 L1 R Applicable model d1 S L Part No. (Approx.) (Approx.) FGF-OP05 Hexagon nut d FGF1-20 16 40 71 31.5 400 R d1 FGF3-40 AI-3S M20 20 50 90 40 500 FGF5-60 S Note) 3 foundation bolts are required per filter unit. If ordering only foundation bolts, order 3 bolts using the above part number.
Proper Auto Switch Mounting Position (Detection at stroke end) C D Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A B Series MY2C Series MY2H Series MY2HT (mm) D-M9, D-M9V (mm) D-M9, D-M9V (mm) D-M9, D-M9V A A A B B B Bore size 16 25 40 Operating range Bore size
If the leakage volume is 5 /min (ANR), the vacuum pressure of the S type is 80 kPa r t y, and for the L type it is 47 kPa r' t' y'. Thus, if the leakage volume is 30 /min (ANR) the L type can attain a higher vacuum pressure, and if the leakage volume is 5 /min (ANR), the S type can attain a higher vacuum pressure.
J K Note 1) 4 x Sa Thread depth Sb 2 x L O H I N G A M Vacuum flow Dust bag When dust bag is mounted T F E D Suction air Discharge air Suction air U C C B Hose band V (mm) A 73 B 34 C 19 D 10 E 13.2 F 16.2 G 69.8 H 31 I J 35 K 27 L 4.5 M 35 N 18 O P 13 Q Rc1/8 R 28 Sa M3 x 0.5 Sb 5 T 300 U 150 V 190 Model ZH10--X185 ZH20--X185 4 1 M4 x 0.7 8 400 200 250 119.5 55 32 15 19.5 23.5 111 48 56
B 2 PE R 3 3 R 3 R 3 1 P 1 P P 1 P 1 X A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 4-One-touch fitting [1(P), 3(R) port] Applicable tube O.D.: 8 2-One-touch fitting (X, PE port) Applicable tube O.D.: 6 2n-One-touch fitting [4(A), 2(B) port] Applicable tube O.D.: 4, 6 (L4) Applicable connector: 20 pin MIL type with strain relief L3 U side D side Connector entry direction switch 6.6 (3.2) 101.2
Solid State Switch D-M9B(V), D-M9N(V), D-M9P(V) Solid State Switch D-M9B(V), D-M9N(V), D-M9P(V) Electrical entry (Fetching direction) 2-color Indication Solid State Switch D-F9BW(V), D-F9NW(V), D-F9PW(V) 2-color Indication Solid State Switch D-F9BW(V), D-F9NW(V), D-F9PW(V) (mm) Type Model Features Grommet (In-line) D-A90 Stroke (mm) 20 41 29 47 35 Without indicator light Stroke (mm) 10
Symbol AMD 4.6-7 Micro Mist Separator Series AMD AMD150 to AMD850 How to Order AMD 250 03 J B Body size Options J Drain guide 1/4B female thread R IN R OUT reversal 150 1 8 250 1 4 350 3 8 450 1 2 550 3 4 650 1 850 11 2 Accessories(Options) Symbol Description None Bracket T Element service indicator B N.C. auto drain C N.O. auto drain D Please refer to p.4.7-7 regarding How to Order of case
A /B 90 0.1mm/ 2-1. 2-2 F.G CE1-R** CE1 CEU5 OUT1OUT5 RS-232C OUT1OUT20(bank ) (31 ) 221 () B L F G D 0.5 L 3 Z 12 12mm 20 20mm 32 32mm 40 40mm 50 50mm 63 63mm 4063 N R H (mm) (mm) (mm) 25 50 75 100 125 150 175 200 250 300 400 500 12 20 32 40 50 63 222 A90 D-A90 M9N D-M9N M9NW D-M9NW A93 D-A93 M9P D-M9P M9PW D-M9PW A96 D-A96 M9B D-M9B M9BW D-M9BW A90V D-A90V M9NV D-M9NV
cylinder stroke Bore size Stroke 25 50 75 100 125 150 175 200 250 300 400 500 2-2-2 Applicable Auto-Switch Models Mark Auto-Switch Model Mark Auto-Switch Model Mark Auto-Switch Model A90 D-A90 M9N D-M9N M9NW D-M9NW A93 D-A93 M9P D-M9P M9PW D-M9PW A96 D-A96 M9B D-M9B M9BW D-M9BW A90V D-A90V M9NV D-M9NV M9NWV D-M9NWV 2-color Indication Solid State Auto-Switch A93V D-A93V M9PV D-M9PV M9PWV
(R) EEPROM = Memorize data although power is off. (R/W) RAM = Actual memory the SI unit is working with. (R/W). 1. Reset node, Reset com or Power cycle: EEPROM is copied into RAM 2. STORE: Copy RAM (with modified/non modified values) into EEPROM 3.
IZ*-OMP0064 E P r o d u c t Ionizer Model/Series IZS4 Series Contents Safety Instructions . 1. How to Order . 1-1. Ionizer . 1-2. Accessories . 1-3. Option . 2. Installation . 2-1. Installation of ionizer . 2-1-1. Selection of piping port size . 2-1-2. Distance for installation . 2-1-3. Mounting and installation of the bracket . 2-2. Installation of the external sensor. 2-3.
e XAH7 XC XL X Section XX detail Bore size (mm) a b c d e 40 6.5 4 11 5.5 10.5 WB Z WA Section XX 8.5 50 4.5 13.5 7.5 13.5 11 7 18.5 63 10 17.8 Bottom view L 4-OA through 4-OB counter bore depth OL Section XX WA Z Section XX IA 4-NN through IC 4-MM depth ML R X0.02 HA T-slot for hexagon bolt X0.02 DA DB mIB ID X U VB VA H T PW 2-Rc P (plug) Rc 1/8 unlocking port Unlocks when pressurized GC
Use after putting the unit label other than l/min, l. r Unit display/Orange e OUT1 CH r t y u Displays the selected channel. Channel display/Red t u UP button ( button) Use to change the mode or to increase the set value.
HS 9-13-16 16 Series MLU Plate Cylinder with Lock Proper Auto Switch Mounting Position Auto Switch Mounting Height (mm) Auto switch model (mm) D-A7H D-A80H D-F7 D-F7 V D-J79 D-F7W D-F7WV D-J79W D-F7BAL D-F7BAVL D-F79F D-A7H D-80H D-F7 D-J79 D-F7W D-79W D-F7NTL D-F79F D-F7BAL D-A73C D-A80C D-J79C D-A79W D-F7LF D-P5DWL D-F7V D-F7WV D-F7BAVL D-J79C D-A79W D-A7 D-A80 D-F7NTL D-A7 D-A80 D-A73C