5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

(Tighening torque of 0.3 to 0.4 Nm) VZS A VFS Circuit with light VS AC circuit DC circuit VS7 1 2 1 2 NL: Neon light R: Resiser LED: Emitting diode R: resister NL R R LED Valve Mounting B Fitting and Silencer Part No. for P, R Ports When Using Valve as an Individual Unit After confirming the gasket is correctly placed under the valve, tighten the mounting screws with the appropriate torque

Modular/F.R.L. Units Series AC

Body center H R A L D F C E B Dimensions mm Interface With T Bracket 24 35 40 A B C D E F G H R L Applicable Models Y20T-T4 Y30T-T4 Y40T-T4 10 11 14 48 70 80 2.75 3.5 4.5 33 45 50 AC21*-X2217 AC31*-X2217 AC41*-X2217 15 16 22 5.5 7 9 30 41 50 3 4 4 5 7 7 Other Available Air Line Products with Epoxy Coating/Stainless Hardware Description Option Code Series (N)AV AMG AR20-60 AVL AW20-40 E*00

Industrial Filters

ORIENTATION 2 x R DRAIN A B C FQ1 OUT IN OUT R3/4 FN Rp1/4 203 203 R3/4 EB ES DRAIN R3/4 90 90 260 DRAIN FGES type (V-band type) (mm) FGEL type (V-band type) (mm) FGET type (Bolt tightening type) (mm) A A A B C B C B C Model FGESA FGESB FGESC Port size R Model FGELA FGELB FGELC Port size R Model FGETA FGETB FGETC Port size R 671 850 671 850 366 612 910 1, 2 1, 2 1, 2 554 554 931 1350 931

ISA2

Leakage voltage Take special precautions if a resistor is used in parallel with the switching element or a C-R element (for surge voltage protection) is used for protection of the switching element. The valve may fail to turn off due to leakage current flowing through the resistor or C-R element. PF2 IF Data Switching element OFF Caution R C Leakage voltage Power supply 1.

Compact Guide Cylinder

D-G

ASR

9 t t q @0 q @0 r r !4 i y !0 !1 !2 !4 i !5 !6 Component Parts Note Material No. q w e r t y u i o !0 !1 !2 !3 Description No. !4 !5 !6 !7 !8 !

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Solid State Switch D-M9B(V), D-M9N(V), D-M9P(V) Solid State Switch D-M9B(V), D-M9N(V), D-M9P(V) Electrical entry (Fetching direction) 2-color Indication Solid State Switch D-F9BW(V), D-F9NW(V), D-F9PW(V) 2-color Indication Solid State Switch D-F9BW(V), D-F9NW(V), D-F9PW(V) (mm) Type Model Features Grommet (In-line) D-A90 Stroke (mm) 20 41 29 47 35 Without indicator light Stroke (mm) 10

VZ5000

port 3: Common exhaust type for main and pilot valve 3 position closed center Thread type 3 Nil Rc F N G PE port 3(R) port NPT T NPTF 3 position exhaust center 4 Rated voltage 4(A), 2(B) port size 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz 1 2 3 Rc 1 8 01 C6 C8 One-touch fitting for 6 One-touch fitting for 8 3 position pressure center 4 Note) P , R1, R2 port

Digital Flow Switch ( compatible)

S16 1200 Y Setting range -200 to 4200 3 R/W 1420 0x058C P2H (n2H) (Upper limit of window comparator) Setting of OUT2 output set value (Upper limit of window comparator) S16 2400 Y Setting range -200 to 4200 4 R/W WH2 (Window comparator hysteresis) Setting of OUT2 hysteresis (Window comparator) S16 400 Y Setting range 0 to 2200 5 R/W 6 R/W dtH2 (Delay time at ON) S16 0 Y Setting of OUT2 delay

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

Bore size (mm) Auto switch model L d L d L d L d D-A9, D-A9V 0 (15) 0 28 28 (43) 18 18 (33) 0 0 (15) 12 D-M9, D-M9V D-M9W, D-M9WV 10 (17) 0 28 33 (45) 18 28 (35) 0 5 (17) D-A9, D-A9V 0 (15) 0 32 32 (47) 22 22 (37) 0 0 (15) 16 D-M9, D-M9V D-M9W, D-M9WV 10 (17) 0 32 37 (49) 22 32 (39) 0 5 (17) D-A9, D-A9V 0 (15) 0 38 38 (53) 26 26 (41) 0 0 (15) 20 D-M9, D-M9V D-M9W, D-M9WV 30 (37) 0 38 38 (

39

300.025 250.03 1500.05 300.05 250.03 1000.05 300.05 3 12.5 4.4 12.5 P Q R P Q 45 R38 M8 x 1.25 120.8 R38 1 1 12.5 R28 M8 x 1.25 8.5 1 12.5 R7 22 1 R28 8.5 22 20 R7 22 20 22 NAAMS code ACA031M ACA032M ACA033M ACA034M ACA035M ACA036M NAAMS code ACA043M ACA044M ACA045M ACA046M ACA047M ACA048M A B C D E F G H I J A B C D E F G H I J Part no.

ASR

9 t t q @0 q @0 r r !4 i y !0 !1 !2 !4 i !5 !6 Component Parts Note Material No. q w e r t y u i o !0 !1 !2 !3 Description No. !4 !5 !6 !7 !8 !

VCL

LVC DIN terminal: D Conduit terminal: T Cable 6 to 12 LVA F S Q 27.5 34 F (Q) LVH LVD LVQ LQ R C U 25 LVN C (44) R E R TI/ TIL G1/2 E PA G1/2 A H D (S) B B A H D 2-P Port size 2-P Port size PAX 2-M Thread depth N 2-M Thread depth N PB L L K K N.C.

CY1F

(mm) Bore size D-A9, D-A9V D-F9, D-F9V D-F9W D-F9WV (mm) 10 15 25 5 10 Minimum stroke for auto switch mounting (2pcs.) (mm) D-A90V D-A96V D-A93V 22 Bore size D-F9V D-F9WV D-F9 D-F9W D-A90 D-A96 D-A93 (mm) 32 20 Mounting patternq, w 32 35 Mounting patterne 20 12 Auto Switch Mounting As shown below, there are 3 ways to mount the auto switch according to 3 types of electrical entries.

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

Assembly 1) Terminal block e connected with housing r should be reinstated.

CQS

75, 100, 125, 150 175, 200, 250, 300 25 Standard Non-rotating Rod Anti-lateral Load Reed switch D-A90/A90V D-A93/A93V D-A96/A96V Series CQSW 12 16 5, 10, 15, 20 25, 30 7-4-20 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 Series CQS 12, 16 20, 25 12 16 20 25 5, 10 7-4-12 Solid state switch D-M9N/M9NV D-M9P/M9PV D-M9B/M9BV D-F9NW/F9NWV D-F9PW/F9PWV D-F9BW/F9BWV D-F9BAL Series CQSK 12 16 5, 10,

CS1

D-A5/A6, D-A59W Tie rod mounting D-G3/K3 Band mounting Solid state swich D-F5/J5, D-F5NT, D-F5W/J59W, D-F5BA, D-F5F Tie rod mounting 1.10-1 Air Cylinder/Standard Series CS1 Lube, Non-lube: 125, 140, 160, 180, 200, 250, 300 Air-hydro: 125, 140, 160 How to Order CS1 L 300 160 JR Rod boot/Cushion Rod boot Mounting J K N R H Nylon tarpaulin Heat resistant tarpaulin No cushion With cushion on

Compact Electric Actuator Series LG1

C plane to A plane D plane to B plane 0.1 or less 0.1 or less Bottom mounting Top mounting Maximum work load (N) Repeatable positioning accuracy (mm) Horizontal Mounting position Stroke (mm) Motor output (W) Typical model Maximum speed (mm/s) Individual models Applicable controller model Feed screw 100 200 300 400 500 600 700 800 9001 0001 200 Ground ball screw lead 10mm Rolled ball screw

Stability of suction position,

ZP3EA-P2 [Weight: 7.6 g] 10.3 27.4 10.3 20.3 R R 20 20 2.9 4.9 2.9 4.9 R R R R R R 23.5 19.5 31.6 26.5 Applicable pad part no. ZP3E-32UM ZP3E-40UM ZP3E-32BM ZP3E-40BM Applicable pad part no. ZP3E-50UM ZP3E-50BM Part no. ZP3EA-P3 [Weight: 17.7 g] Part no. ZP3EA-P4 [Weight: 31.1 g] 16.3 34.5 16.3 43.6 R R 4.9 7.9 4.9 7.9 15 15 R R R R R R R 50.5 41 39.8 32 Applicable pad part no.

HRX-OM-X084

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-9 Connection of RS-232C 3.3 Installation HRR Series 3-18 HRX-OM-X084 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.