Bag Filter

Foundation bolt L1 (mm) Nominal thread size d M16 L1 R Applicable model d1 S L Part No. (Approx.) (Approx.) FGF-OP05 Hexagon nut d FGF1-20 16 40 71 31.5 400 R d1 FGF3-40 AI-3S M20 20 50 90 40 500 FGF5-60 S Note) 3 foundation bolts are required per filter unit. If ordering only foundation bolts, order 3 bolts using the above part number.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

Proper Auto Switch Mounting Position (Detection at stroke end) C D Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A B Series MY2C Series MY2H Series MY2HT (mm) D-M9, D-M9V (mm) D-M9, D-M9V (mm) D-M9, D-M9V A A A B B B Bore size 16 25 40 Operating range Bore size

13

If the leakage volume is 5 /min (ANR), the vacuum pressure of the S type is 80 kPa r t y, and for the L type it is 47 kPa r' t' y'. Thus, if the leakage volume is 30 /min (ANR) the L type can attain a higher vacuum pressure, and if the leakage volume is 5 /min (ANR), the S type can attain a higher vacuum pressure.

Large blow and

J K Note 1) 4 x Sa Thread depth Sb 2 x L O H I N G A M Vacuum flow Dust bag When dust bag is mounted T F E D Suction air Discharge air Suction air U C C B Hose band V (mm) A 73 B 34 C 19 D 10 E 13.2 F 16.2 G 69.8 H 31 I J 35 K 27 L 4.5 M 35 N 18 O P 13 Q Rc1/8 R 28 Sa M3 x 0.5 Sb 5 T 300 U 150 V 190 Model ZH10--X185 ZH20--X185 4 1 M4 x 0.7 8 400 200 250 119.5 55 32 15 19.5 23.5 111 48 56

Rubber Seal, 5 Port Solenoid Valve, Series SZ3000

B 2 PE R 3 3 R 3 R 3 1 P 1 P P 1 P 1 X A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 4-One-touch fitting [1(P), 3(R) port] Applicable tube O.D.: 8 2-One-touch fitting (X, PE port) Applicable tube O.D.: 6 2n-One-touch fitting [4(A), 2(B) port] Applicable tube O.D.: 4, 6 (L4) Applicable connector: 20 pin MIL type with strain relief L3 U side D side Connector entry direction switch 6.6 (3.2) 101.2

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Solid State Switch D-M9B(V), D-M9N(V), D-M9P(V) Solid State Switch D-M9B(V), D-M9N(V), D-M9P(V) Electrical entry (Fetching direction) 2-color Indication Solid State Switch D-F9BW(V), D-F9NW(V), D-F9PW(V) 2-color Indication Solid State Switch D-F9BW(V), D-F9NW(V), D-F9PW(V) (mm) Type Model Features Grommet (In-line) D-A90 Stroke (mm) 20 41 29 47 35 Without indicator light Stroke (mm) 10

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

Symbol AMD 4.6-7 Micro Mist Separator Series AMD AMD150 to AMD850 How to Order AMD 250 03 J B Body size Options J Drain guide 1/4B female thread R IN R OUT reversal 150 1 8 250 1 4 350 3 8 450 1 2 550 3 4 650 1 850 11 2 Accessories(Options) Symbol Description None Bracket T Element service indicator B N.C. auto drain C N.O. auto drain D Please refer to p.4.7-7 regarding How to Order of case

CE

A /B 90 0.1mm/ 2-1. 2-2 F.G CE1-R** CE1 CEU5 OUT1OUT5 RS-232C OUT1OUT20(bank ) (31 ) 221 () B L F G D 0.5 L 3 Z 12 12mm 20 20mm 32 32mm 40 40mm 50 50mm 63 63mm 4063 N R H (mm) (mm) (mm) 25 50 75 100 125 150 175 200 250 300 400 500 12 20 32 40 50 63 222 A90 D-A90 M9N D-M9N M9NW D-M9NW A93 D-A93 M9P D-M9P M9PW D-M9PW A96 D-A96 M9B D-M9B M9BW D-M9BW A90V D-A90V M9NV D-M9NV

MONOSASHI-KUN

cylinder stroke Bore size Stroke 25 50 75 100 125 150 175 200 250 300 400 500 2-2-2 Applicable Auto-Switch Models Mark Auto-Switch Model Mark Auto-Switch Model Mark Auto-Switch Model A90 D-A90 M9N D-M9N M9NW D-M9NW A93 D-A93 M9P D-M9P M9PW D-M9PW A96 D-A96 M9B D-M9B M9BW D-M9BW A90V D-A90V M9NV D-M9NV M9NWV D-M9NWV 2-color Indication Solid State Auto-Switch A93V D-A93V M9PV D-M9PV M9PWV

EXxx-OMK0006

(R) EEPROM = Memorize data although power is off. (R/W) RAM = Actual memory the SI unit is working with. (R/W). 1. Reset node, Reset com or Power cycle: EEPROM is copied into RAM 2. STORE: Copy RAM (with modified/non modified values) into EEPROM 3.

IZx-OMP0064

IZ*-OMP0064 E P r o d u c t Ionizer Model/Series IZS4 Series Contents Safety Instructions . 1. How to Order . 1-1. Ionizer . 1-2. Accessories . 1-3. Option . 2. Installation . 2-1. Installation of ionizer . 2-1-1. Selection of piping port size . 2-1-2. Distance for installation . 2-1-3. Mounting and installation of the bracket . 2-2. Installation of the external sensor. 2-3.

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

e XAH7 XC XL X Section XX detail Bore size (mm) a b c d e 40 6.5 4 11 5.5 10.5 WB Z WA Section XX 8.5 50 4.5 13.5 7.5 13.5 11 7 18.5 63 10 17.8 Bottom view L 4-OA through 4-OB counter bore depth OL Section XX WA Z Section XX IA 4-NN through IC 4-MM depth ML R X0.02 HA T-slot for hexagon bolt X0.02 DA DB mIB ID X U VB VA H T PW 2-Rc P (plug) Rc 1/8 unlocking port Unlocks when pressurized GC

Digital Flow Switches

Use after putting the unit label other than l/min, l. r Unit display/Orange e OUT1 CH r t y u Displays the selected channel. Channel display/Red t u UP button ( button) Use to change the mode or to increase the set value.

MLU

HS 9-13-16 16 Series MLU Plate Cylinder with Lock Proper Auto Switch Mounting Position Auto Switch Mounting Height (mm) Auto switch model (mm) D-A7H D-A80H D-F7 D-F7 V D-J79 D-F7W D-F7WV D-J79W D-F7BAL D-F7BAVL D-F79F D-A7H D-80H D-F7 D-J79 D-F7W D-79W D-F7NTL D-F79F D-F7BAL D-A73C D-A80C D-J79C D-A79W D-F7LF D-P5DWL D-F7V D-F7WV D-F7BAVL D-J79C D-A79W D-A7 D-A80 D-F7NTL D-A7 D-A80 D-A73C

High Power Cylinder Series RHC

HS 8.5 8.5 SMC SMC 16 16 A 36.7 Auto switch A 38.2 B Auto switch Proper auto switch mounting position Auto switch mounting height (mm) (mm) D-B5 D-B6 D-H7 D-H7C D-G5NTL D-H7 W D-H7 F D-H7BAL D-C7 D-C8 D-C73C D-C80C D-B5/B6 D-B59W D-G5NTL Bore size (mm) D-C73C D-C80C D-B59W D-C7,D-C8 D-H7 D-H7C D-H7 W D-H7 F D-H7BAL Bore size (mm) A B A B A B A B A B A HS HS HS B 27 27.5 24.5 20 20 15 17.5

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

Differential pressure indication switch r O-ring Applicable Applicable q O-ring w O-ring e O-ring Port size order no. hydraulic hydraulic order no. order no. order no.

FQ1

JIS B2401-1A-P85 NBR I.D. 84.6 x 5.7 O-ring r JIS B2401-4D-P85 FPM JIS B2401-1A-P11 NBR u !

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

Nil Left R Right D Both left and right LEC LEC S *5 Select D for the vacuum port for suction of 50 L/min (ANR) or more. LEC SS-T R: Right !1 I/O cable length [m]*10 o Cable length [m]*6, *9 LEC Y Nil Without cable H Without cable (Connector only) 1 1.5 *9 The length of the encoder, motor and lock cables are the same.

HRX-OM-X084

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-9 Connection of RS-232C 3.3 Installation HRR Series 3-18 HRX-OM-X084 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

Micro-Mist Separator with Prefilter Series AMH

D-SMC, P-63 (M) 2nd printing September 1996. D-SMC, P-59(YG) March 1997. 29(YG) Printed in Japan.