Table of Contents

Note 1) Note 2) 2-4-19 20 S VQ1000 Kit (Serial transmission unit) The serial transmission system reduces wiring work, while minimizing wiring and saving space.

VQ4000

Maximum stations are 18. 16 4 17 5 18 6 19 7 20 8 21 1.

Low Friction Cylinders Series MQ

TH TY TX TV TW 2 x TC ZZ + Stroke (mm) Bore size (mm) BB CD CX GB H NB R U Z ZZ S 6 12 3.3 3.3 17.5 27.5 22 8 106 117 70.5 5 10 12 3.3 3.3 19 28 24 8 101 112 65 5 16 18 5 6.6 24 30 30 10 114 128 74 8 T-bracket Related Dimensions Note) Applicable bore size (mm) Part no.

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

40 45 50 50 20 25 32 40 50 63 80 12.5 18 19.5 23.5 28 34.5 36 Up to 800 Up to 800 Up to 1000 Up to 1000 Up to 1000 Up to 1000 Up to 1000 MGT Stroke range Bore size (mm) MM XA Y ZZ MA MB MC NA NB P S M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M12 x 1.75 6 6 12 12 16 16 20 5 6.5 8.5 9.5 12.5 15 20 106 128 155 178 195 221 248 11 11 16 16 16 16 20 4 4 4 4 5 5 6 10 10 12 12 15 15 23 19

F

18.5 33.1 21 10 15 40.2 AS221F-U01-10 20.9 17 8.9 23.3 14.5 1/4 4 18.5 17.2 32.5 AS221F-U02-04 31.1 32 26.6 39.4 34.4 11 23.9 15.5 6 33.1 AS221F-U02-06 31.3 15.2 27.2 18.5 8 36.4 AS221F-U02-08 33.6 18.5 33.9 21 10 19 43.2 AS221F-U02-10 35.5 19 11 26.4 15.5 3/8 6 23 19.4 37.9 AS321F-U03-06 52.5 37.6 32.6 45 40 15.2 29.5 18.5 8 41 AS321F-U03-08 54.9 18.5 31.8 21 10 43.3 AS321F-U03-10 56.8

SMC CORPORATION OF JAPAN

Output On when all Inputs are On, Unused inputs considered On OR 19 Output On when at least one input On, Unused inputs considered Off XOR 13 Exclusive OR; Output On when only One of Two Inputs is On NAND 19 Not AND; Output On when all Inputs Off, Unused inputs considered Off NOR 19 Not OR; Output On when at least one Input is Off, Unused inputs considered On NOT 10 Inverts a signal; changes

ITV

Note) Breathing hole (M3 x 0.5) 3.7 3.7 13.7 1 SUPz VACz OUT port (4, 5/32") SUP, VAC port (4, 5/32") OUTx 3 EXHc ATMc 2 5 EXH, ATM port (4, 5/32") 38 2-M3 x 0.5 thread depth 3.5 Bracket mounting hole L-bracket (Option) Flat bracket (Option) 6-3.5 19 74 2-3.5 19 27 19 64 Minimium bending radius 80 28 Body +50 0 3000 15 35 (30.9) 4 8.7 9.9 Cable connector (4-wire) Straight type (Option) 7

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

VQZ115l-lMl VQ110l-lLl 2.10-19

REA/REB

MK(2) REAR20 30 REAR25 30 RS Q G REAR32 30 REAR40 35 RS H A RZQ MI W S CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-2-19 19 Series REAR Construction: 10, 15 @1 q i y u e t r o !0 @2 !4 !5 @5 @6 !2 !7 @7 !9 @3 !8 @0 !1 w N@4 !6 !3 REAR10 Component Parts No. Description No. Material Aluminum alloy Description Note Material Note Hard anodized Wear ring A Special resin Body q !

Stopper Cylinder

Gasket Carbon steel Pin B NBR 19 36 Piston seal Carbon steel Spacer NBR 20 37 Rolled steel Round head Phillips screw 38 Rolled steel Pin A 39 Replacement Parts/Seal Kit Steel wire Bracket spring 40 Contents Kit no.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

bolt MY1H LZ Stroke Bore size (Shock absorber stroke) T S E EA EB W h TT Stroke adjustment unit Shock absorber FC FA EY EC (mm) E EA EB EC EY h S T TT FA FC Shock absorber model Applicable cylinder W F MY1H25 18 9 40 7.5 53.5 16 21 3.5 46.7 7 53 RB1007 5 (Max.16.5) MY1H32 25 14 45.6 9.5 67.5 23 20 4.5 67.3 12 64 RB1412 8 (Max.20) MY1H40 31 19 55 11 82 24.5 26 4.5 67.3 12 9 (Max.25) 75

Thermo-chiller

Required facility water system Model Heat radiation Facility water specications HRS100-W-20 Approx. 19 Refer to "Facility water system" in the specications on page 8.

NCA1

P SN ZB C BA B AA ND A J G EE R 150 (1.5") 5/8 7/16-20 1/4-20 5/8 1 1 15/16 1.71 3 5/8 2 1/4 4 3/4 0.3 1 2 1/4-28 9/16 3/8 1 1/8 1 1/8 2.02 9/32 3/4 1.1 1.26 3/8 1.43 2.36 200 (2") 5/8 7/16-20 5/16-18 7/8 1 1 15/16 1.71 3 5/8 2 1/4 4 3/4 0.3 1 1/4 2 1/2 5/16-24 9/16 3/8 1 1/8 1 1/8 2.6 7/16 3/4 1.06 1.26 3/8 1.84 2.4 250 (2.5") 5/8 7/16-20 3/8-16 1 1/4 1 1 15/16 1.75 3 3/4 2 3/8 4 7/8 0 19

90

Release valve 20 19 4 Supply valve Supply valve 17 18 17 5 stations 5 Release valve 5 stations Release valve 18 Supply valve Supply valve 16 15 6 6 stations Release valve 6 stations Release valve 19 14 13 Supply valve 7 Supply valve 20 7 stations Release valve 7 stations Release valve 12 11 8 Supply valve Supply valve 21 8 stations Release valve 9 10 8 stations Release valve 9 22 Supply

VHK

VHK-B2A 49 17 1 30 25 21.5 31 VHK-03S-03S 3 8 3 8 3 8 19 VHK-04S-03S 22 46 93 48.7 44.3 48.7 97.4 21.5 4 14 15.1 17.5 3.2 90 19 22 101 79 81 22 VHK-B2A 49 17 1 30 25 21.5 31 VHK-04S-04S 1 2 1 2 3 port valve Reference dimensions after insertion of R thread. 5-8-4

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

8. 18 Cylinder tube gasket NBR 2 19 Bumper Urethane 2 20 Rod end nut Rolled steel 1 Trivalent zinc chromated 21 Magnet (1) * Seal kits consist of items !4 to !6, !8 and can be ordered by using the seal kit number corresponding to each bore size. * The seal kit includes a grease pack (10 g for 32 to 50, 20 g for 63 and 80, 30 g for 100).

Modular/F.R.L. Units Series AC

Octagon Port size T-interface C B Center of F.R.L. body D A C D E B A Model Port size Applicable model AC10, AC10B AC20, AC20B, AC20C AC25, AC25B, AC25C, AC30, AC30B, AC30C AC40, AC40B, AC40C Y110-M5 Y210-01 Y210-02 Y310-01 Y310-02 Y410-02 Y410-03 Y510-02 Y510-03 Y610-03 Y610-04 M5 x 0.8 12 14 8 19 11 1/8 32 28 19 42 15 1/4 1/8 39 30 19 53 15 1/4 1/4 44 36 24 62 19 Caution on Mounting 3/8

NCM

For this option use: NCM075-19-51046. (F dimension=0.51") D Rod clevis C B A E J K L G F H (inch) Part no.

High-Precision Digital Pressure Switch

(Refer to page 19.) * Not applicable to the rated pressure 0.1 to 2 MPa specifications (ISE20CH). * A restrictor (equivalent to -X510) is installed inside the fitting. (Piping specifications A2(L) and B2(L) are excluded.)

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

(-F) M8 connector (M0): SYJ52-W0-M5 (-F) Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 60.9 28.1 [35.1] 53.4 Max. 10 74.6 42.1 12.7 M8 x 1 32.6 15.1 39.2 [46.2] Approx. 300 (Lead wire length) Pg7 65.5 [67.7] 75.5 55.7 [57.9] 64.6 57.2 50.7 34.7 8 9 8 9 8 9 8 9 14.5 3 14.5 3 14.5 3 14.5 3 20 20 20 20 23 23 23 23 27 Refer to the page 68 for dimensions with connector cable. 19