3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VKF (A) 2 (A) 2 VQZ 1 (P) 3 (R) 1 (P) 3 (R) VZ VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts Description Material Note No.

SI Unit for Vacuum Manifold

Settable range : 11...989 (-1.1 kPa...-98.9 kPa) Combination conditions with other parameters : H1+1 P1 P2-H2 (600) ... ... ... ... ... 16 2 R/W 0x0258 Vacuum confirmation threshold (P1) of CH15 (600) 3.4.2. Hysteresis H1 (Index 65) Table 3-10.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VQZ (A) 2 (A) 2 VZ 3 (R) 1 (P) 3 (R) 1 (P) VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts No.

VQ7-6/7-8

VQ7-6-FG-DVQ7-6-FG-D-R FHG FJG FIG FHG FJG FIG VQ7-6-DVQ7-6-D-R VQ7-6-FPG-DValve replacement parts FHG FJG FIG FHG FJG FIG Description Material VQ7-6-FG-SVQ7-6-FG-DVQ7-6-FPG-DVQ7-6-FG-S-R VQ7-6-FG-D-R VQ7-6-D-R VQ7-6-DNo.

Fieldbus System

EtherNet/IPTM EtherNet/IPTM EX600 q EX600 w EX600 e EX600 r EX600 q EX600 w EX600 e EX600 r Linear type Device level ring (DLR) type One or more ring supervisors are required.

45

P, R port SX3000 (Metric size) With One-touch fitting for 8 (Inch size) With One-touch fittings for 5/16" P, R port SX5000 (Metric size) With One-touch fitting for 10 (Inch size) With One-touch fittings for 3/8" For D side r End block assembly L SX3000-53-1A SX5000-53-1A For U side (Metric size) SX5000-51-1A (Inch size) SX3000-51-15A SX5000-52-1A (Metric size) SX3000-51-1A (Inch size) SX3000

LEC-OM07605CN

PA10] ON DB RD ONRDON SA OFFSAOFFSAON ((X0.05)+20)r/min 20r/min VLC VLCONOFF ZSP ZSPON[Pr. PC07] 1) OFF 70 r/min 2) 3 20 r/min ON 50 r/min () [Pr. PC07] 0 r/min [Pr. PC07] ON -50 r/min 20 r/min OFF () -70 r/min 4 ZSP ON () OFF 50r/min(1)ZSPON 70r/min(2)ZSPOFF 50r/min(3)ZSPON-70r/min(4)ZSPOFF ZSPON 2Or/min 3 16 3.

7.5

0 o t r e w y (B) (A) 2 4 (B) (A) 2 4 4(A) 3 5 1 3 5 1 (EB) (P) (EA) (EB) (P) (EA) 2(B) i 5(EA)/3(EB) 1(P) 2 position double 2 position double 2 position double with back pressure check valve t r e w y q !1 u !

2/3 Port Valve

R P A Energized closed (N.O.) R P A Common (C.O.)

CEx-OML0058

T h e r e i s n o p a r t i c u l a r p r o b l e m i n u s i n g t h e s y s t e m . R e a d t h e i n s t r u c t i o n m a n u a l W i l l y o u d o a t h o r o u g h l y f o r t h i s i t e m a n d c o u n t e r p o s i t i o n i n g m o t i o n ?

Fieldbus System

Connector for unit (Plug) 5 t r t r EX600-AXA EX600-AYA EX600-AMB End Plate q t No.

7.4

Symbol Length Nil 150 mm 3 300 mm 6 600 mm 10 1000 mm Base Mounted Part no. Type S0700-S-M5 For internal pilot S0700-S-M5-R For external pilot Note) Standard wire length of valve with plug connector is 300 mm. When ordering a lead wire length of 600 mm or longer, list the part numbers for the valve without connector and the connector assembly.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Note ) 2 position double and 3 position cannot be mounted. 40.6 3(R2) 5(R1) P1 Po 1(P) Circuit diagram Plug-in type Plug lead type SUP blocking plate VVQ5000-16A-1 EXH blocking plate VVQ5000-16A-2 18.5 20.2 When 2 or more different pressures are supplied to one manifold, blocking plates are installed between stations under different pressures. 28.8 44.6 R P R R P R R P R SUP/EXH passages

MK

200 139 100 60.8 2 R 20 12 Clamp part 298 208 149 90.2 3 H CE1 Performance of non-rotating 0.7 to 1.4 370 258 185 112 3.7 R 25 12 Clamp (Retracted stroke end) 490 341 245 149 4.9 H CE2 600 418 300 182 6 R Made to Order Specifications (For details, refer to page 10-21-1.) 32 16 800 557 400 243 8 H ML2B 1050 731 525 319 10.5 R 40 16 Symbol Specifications 1250 870 625 380 H 12.5 C J G5-S -XB6

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

Assembly 1) Terminal box e connected with housing r should be reinstated.

VDW Series

Leakage voltage Particularly when using a resistor in parallel with a switching element and using a C-R element (surge voltage suppressor) to protect the switching element, take note that leakage current will flow through the resistor and C-R element, etc., creating a danger that the valve may not shut OFF.

VZ1000

Same as page 3-3-9 Manifold Specifications Type 25 Type 25F Stacking type, non plug-in type Stacking type, plug-in type Common SUP and EXH 2 to 20 stations 2 to 20 stations Valve C6 (One-touch fitting for 6) Model Manifold type P(SUP), R(EXH) Valve stations 4(A), 2(B) port location 1(P), 3/5(R) port Port size 4(A), 2(B) port M5 x 0.8 Valve effective (1) 1 2: 0.48, 4 3: 0.85 VZ1120 area

Card Motor

An Table 1 (Vertical) Mounting angle [] (Horizontal) From Table 1, A1 = 32.5 M = W/1000 9.8 (Ln + An)/1000 Pitch moment Table 3 Mmax = M/Mmax Mp = 200/1000 x 9.8 (10 + 32.5)/1000 = 0.044 From Table 3, Mpmax = 0.3 p = 0.044/0.3 = 0.15 p +y +r 1 Roll moment Mr = 200/1000 x 9.8 x 35/1000 = 0.069 From Table 3, Mrmax = 0.2 r = 0.069/0.2 = 0.35 n = 0.15 + 0.35 = 0.5 1, thus, the selected model

3 Way,3 Port Solenoid Valve NVZ Series

A A afll-'h s-zl;lh P R P R (external pilot type) A A , A;Tt-Zb gzt;]ri! , P R P R Model Specifications Air and inert 20-100 PSI (1.5"7kgf/cm,) VAC-1 10Torr 20-1OoPS|(15-7ksflcm'?) N,lax. 120'F (50'C) 20 ms or less (7OPS|) 600 cpm , Slotted Knob locking type Individual, Common Not (Use turbine oil # 1 (lSO VG32) if lubrication is Drovided.)

Possible to transfer a workpiece at low-speed.

The rotation angle can be adjusted between 90 and 190. n io r a at n t g o Rotation starting point e R End of rotation DL L R B B L e o g t B a n ti a o r n n o r a ti n a g t Rotation starting point End of rotation o A A e Operating size 20 30 40 Operating size 20 30 40 R A Lmax 15 18 24 27 31.5 Size 10 15 20 30 40 Rotation starting point End of rotation Lmax 24 27 31.5 Lmax 24 27 31.5 Size