PSxx-OMV0008CN

(19) 0 R ID ISE70G-02-L2 0x0014 (20) 0 R Pressure sensor 8 0x0015 (21) 0 R No.

Power Valve: Economy Valve Series VEX5

Basic type Select type Model VEX5504 06 10 VEX57-10 12 VEX59-14 20 P1 P1 VEX VEX Description Bracket (With bolt and washer) G46-10-01 VEX7-32A VEX5-32A VEX9-32A Air operated External pilot solenoid valve 3(R) 3(R) Pressure gauge 1(P) 3(R) 3(R) 1(P) P2 P2 P3 P1 P1 3(R) 3(R) 3(R) 3(R) 1(P) 1(P) P2 P2 Note) With this valve, the port 3(R) is a supply port and port 1(P) is an exhaust port. 2441

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

Standard stroke (mm) Model 100 75 50 40 30 20 10 CXSM6-R CXSL6-R CXSM10-R CXSL10-R CXSM15-R CXSL15-R CXSM20-R CXSL20-R CXSM25-R CXSL25-R CXSM32-R CXSL32-R 0.105 0.105 0.18 0.18 0.3 0.32 0.465 0.485 0.72 0.73 1.33 1.35 0.12 0.12 0.2 0.2 0.33 0.35 0.5 0.52 0.76 0.77 1.43 1.45 0.135 0.135 0.225 0.225 0.355 0.375 0.54 0.56 0.8 0.81 1.53 1.55 0.15 0.15 0.25 0.25 0.38 0.4 0.58 0.60 0.84 0.85 1.62

Flow Control Equipment

Model Port size AK M3 X 0.5 0.3 0.3 ASV120F-M3 M5 X 0.8 1.3 1.3 ASV220F-M5 ASS R(PT)1/8 8 7 ASV310F-01 R(PT)1/4 8 7 ASV310F-02 R(PT)1/8 14 13.5 ASV410F-01 R(PT)1/4 14 13.5 ASV410F-02 R(PT)3/8 14 13.5 ASV410F-03 R(PT)1/4 27 23 ASV510F-02 R(PT)3/8 29 27 ASV510F-03 R(PT)1/2 29 27 ASV510F-04 Specifications Model ASV120F ASV220F ASV310F/410F ASV510F 1.5MPa Proof pressure 1MPa Max. operating

High Vacuum Angle Valve

1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Seal material Symbol Seal material Compound no.

Rotary One-touch Fittings Series KS/KX

Model r e b m u N A f o t r o P l e d o M g n i t r o P e z i s t r o P B e z i s t r o P A c i r t e M " 2 3 / 5 " 4 " 4 / 1 " 6 " 6 1 / 5 " 8 t r o P A t r o P B h c n I 1 1 M K h c u o t e n O g n i t t i f g n i t t i f h c u o t e n O 0 1 , 6 6 1 / 5 8 8 / 3 0 1 2 / 1 2 1 2 1 M K h c u o t e n O g n i t t i f d a e r h t T P N 0 1 , 6 4 / 1 T P N ) T P ( c R 4 / 1 d a e r h

MY1

Applicable cylinder Port variations MY1B10 MY1H10 L R L L R R R Note 1) Note 1) R R R L L R L L L L R Slide table operating direction Note 1) These ports are not applicable to MY1H10.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

Standard piping type Centralized piping type Operating direction Operating direction Side Front Side Front L R L R L L L R L R R R R R R R L L L L L R L L L Back New Back R R R Bottom Bottom Port variation Port variation R and L can be mounted in any desired position.

Soft Start-up Valve

This opens the flow passage to port 3 (R), exhausting the air pressure on the port 2 (A) side. The pilot air of the piston r is also exhausted from the pilot valve q, and the piston r is returned upward due to the spring, closing the flow passage from the needle t. r w Exhaust OFF t e 6 AV2000-A/3000-A/4000-A/5000-A Series Construction X X-X r e u q y t Component Parts No.

IDX-OM-W023

TB N L 3 2 1 PE 3 2 1 PE L N TB ILS ILS MC TDR TDR MC MC TDR TDR MC PTC MC OLR OLR MC PTC MC CM CM MC TDR MC MC TDR C11 PRS FM1 PRS FM1 P P C12 FM2 FM2 MOV MOV M For Option M M For Option M M For Option M M For Option M IDU11E-10-T IDU8E/11E-23-T GFCI R For Option R GFCI GFCI GFCI R For Option R R For Option R GFCI R For Option R R For Option R For Option R R For Option R TB N L 3 2

CRQ2

8 @0 @0 @2 q w r @5 y !5 !6 i q w r @5 y !5 !

MK

(mm) Operating direction Piston area (cm2) RHC 1.0 0.7 0.5 0.3 80 56 40 24 0.8 R 12 6 MTS 110 77 55 33 1.1 H 150 105 75 45 1.5 R 16 8 CC 200 140 100 60 2 H 200 139 100 60.8 2 R 20 12 298 208 149 90.2 3 H 370 258 185 112 3.7 R 25 12 490 341 245 149 4.9 H Order Made 600 418 300 182 6 R Made to Order 32 16 800 557 400 243 8 H 1050 731 525 319 10.5 R Refer to the p.5.4-1 regarding made to order

HRS100/150

Applicable model Minimum operating flow rate [L/min] (50/60 Hz) HRS-BP007 HRS100-28/42 HRS150-q To circulating fluid return port y To circulating fluid outlet r t w u r t r e r Parts List No.

Thermo-chiller

Applicable model HRS-BP008 HRS100HRS150q To circulating fluid outlet To circulating fluid return port r t w y r u r t r e Parts List No.

3

Without arm Q R M MK MK 20 MK2T 8 19 CK1 17 0.1 0.2 Q (mm) CLK2 Q (mm) Rod state Clamp stroke 10 mm Model Q 10 mm 20 mm Clamp stroke CLKG Rod state Bore size 50 mm 20 mm 30 mm 50 mm Retracted 146.5 175.5 166.5 205.5 186.5 235.5 226.5 295.5 R M Q 82 82 83 83 91.5 91.5 85 85 96.5 96.5 100 100 R 33.5 63 35.5 65 50 85 57.5 92.5 65.5 104.5 65 104 M Q 126.5 126.5 130 130 R 95.5 164.5 95 164 M MK63

CXS

CXSM6R CXSL6R CXSM10-R CXSL10R CXSM15-R CXSL15R CXSM20-R CXSL20R CXSM25-R CXSL25R CXSM32-R CXSL32R 3. The manual lever (1.6 x 35, tip part: M1.6 x 0.35 x 3) is included with the cylinder.

Free Mount Cylinder

R H Piston seal R H 46 48 Reduced stroke end impact and noise: New standards to meet consumer demand. Free mounting 3 types of mounting orientations can be accommodated depending on the installation conditions.

HRX-OM-T004

Refer to 4.3.2 Setting and checking,5.3.2 Setting and checking. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers.

HRX-OM-R028

Broken wire o r coming off 60 sec. 60 sec. AL19 Communication error is generated.

VCW

R C R C (44) G1/2 E A H 2-P Port size B (S) E G1/2 2-M Thread depth N D A H B 2-P Port size 2-M Thread depth N D L L K K N.O.