MHZ

6 Lever Type C snap ring Heat treated Electroless nickel plated Stainless steel Brass r !7 Guide Exhaust plug Stainless steel Heat treated Polyvinyl formal t !8 Finger Exhaust filter Stainless steel Stainless steel spring wire y !

MHZ

6 Lever Type C snap ring Electroless nickel plated Stainless steel Heat treated Brass r !7 Guide Exhaust plug Stainless steel Heat treated Polyvinyl formal t !8 Finger Exhaust filter Stainless steel Stainless steel spring wire y !

VT307

Air flow direction: Port P Port A , Port R Block Component Parts Operation principle Spool valve w is pushed upward by the return spring e, port P is closed, and then port A and port R are opened. Air flow direction: Port P Block, A R VT DIN terminal and terminal (with light/surge voltage suppressor) are connected inside as in the figure below.

IDX-OM-U021

1.6MPa 1-2-4 P 1-2-5 R 30A (IDF100F, IDF125F, IDF150F) 30Ma 1-2-6 V ON 1.5 OFF 0.5 1-2-7 3 2 1 1-2 IDF100150F 1 2 IDX-OM-U021 1 1-3 A 3 300 A 1-3 IDF100150F 1 3 IDX-OM-U021 1 B V IDF100F V IDF125F V IDF150F B 1-3 IDF100150F 1 4 IDX-OM-U021 1 3.6 5.2 (IDF100F, 125F) R OFF 5.2 L1 L2 L3 M5 9.5mm 3.5mm 2 1,2 3,4 5,6 L1,L2,L3 PE: L1 L2 L3 PE 1 2 3 4 5 6 M4 9.5mm

Series VCL

V D Approx. 280 D F Approx. 300 F Q Q Class H coil Broken line section C C G 1/2 R R E E A H A H B B 2-P Port size 2-P Port size 2-M, thread depth N 2-M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6.8 to 10 F S Q 27.5 (Q) D F 25 C R C (44) R R E G 1/2 E G 1/2 A H D (S) B B A H 2-P Port size 2-P Port size 2-M, thread depth N 2-M L L K K N.C. dimensions (mm) Grommet:

Series VCS

F D Approx. 280 D Q F C G (PF) 1/2 C R R E E B A H 2-P Port size 2-P A B H 2-M Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G (PF) 1/2 E B A H D 2-P Port size (S) 2-M L K N.C.

MQQ

6 r t !3 w e q RE A B REC CX CY !5 !0 !1 !2 u y i o MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC MK(2) Material Note Component Parts RS Q G No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !

MQQ

6 r t !3 w q e RE A B REC CX CY !5 !0 !1 !2 u y i o MQQ M RHC MK(2) Material Note Component Parts RS Q G No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !

0.01

ID Construction IDG SFD101-02 SFD102-02 IDK w q r t e q r e w AMG AFF AM AMD AMH Component Parts Component Parts No. Description Note Material Aluminum alloy No.

MLU

5 to 300 5 to 300 5 to 300 Rc, NPT, 1/8 Rc, NPT, 1/8 M8 x 1.25 depth 13 M8 x 1.25 depth 11 Rc, NPT, 1/8 M10 x 1.5 depth 15 M10 x 1.5 depth 14.5 KA H2 K MM MM1 NA NB NC ND NE NG NH NH1 NI NJ NS NY P S ZZ ZZ1 NF Model 10 12 14 18 M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 M6 x 1 depth 12 49 57.5 60 72 5.5 5.5 6 7 14 14 15 18 MLUB25 MLUB32 MLUB40 MLUB50 14 15.5 16 21.5 7.5 depth 4.5 9 depth

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

P R DC 24V, 12V 24V, 12V Coil rated voltage AC 50/60 Hz (inrush) 110V 110V A DC 3.1W, 0.3W Note3) (Holding) 1.5W Power consumption AC 1.45VA P R Plug-in, L/M type connector (With indicator light and surge voltage suppressor) Electrical entry Latching type specification Note 1) Consult P/A for available combinations. Grommet type entry is N/A with any of these options.

RB/RBL/RBQ

Operating condition Impacting object weight Collision speed Dropping height Angle speed Distance between axis of cylinder and impact point Bore size Cylinder operation pressure Thrust Torque Operation cycle Ambient temperature Friction coefficient Symbol m h r d p F T n t Unit kg m/sec m rad/sec m mm MPa N Nm cycle/min C 2 gh m RHC R m 2 1 2 m 2 1 2 1 2 T S R 2 mgh F1S m Nm C m/s kg

Series 10-VQD1000 4 Port Direct Operated Poppet Solenoid Valve

R.

VCA

VCA20-12-1A 41 52 30 40 4.5 6 VCA30-12-1A 48 56 36 44 5.5 7 VCA40-12-1A 50 62 38 50 5.5 7 3 Direct Operated 2 Port for Air Series VCA Dimensions Grommet: G Conduit: C Approx. 300 Approx. 280 Q F D Q F D G1/2 C R C R L IN E E Manual override A B B A 2-P Port size 2-P Port size Manual override 2 L K 2-M Thread depth 6 2-M Thread depth 6 K DIN connector: D Conduit terminal: T F F (Q) Q S 34

SL5200

Vespel is a registered trademark of DuPont. 29 Single Stage Regulator for Ultra High Purity Intermediate flow Series SL5800 For UHP gas delivery Inlet pressure: Max. 300 psig (2.1 MPa) Flow capacity to 200 slpm Body material: 316L SS secondary remelt Springless design (No poppet spring in the wetted area) How to Order Port Number q w e r SL58 S M FV4 FV4 02 2PW Delivery pressure Bonnet option

Precision Regulator

350 Flow rate (L/min (ANR)) Supply pressure P1 (MPa) Relief flow rate (L/min (ANR)) IR1020-01 IR1020-01 IR1020-01 Back pressure: 1.0 MPa Supply pressure: 1.0 MPa 1.0 0.8 0.204 0.9 0.7 Set pressure (MPa) Set pressure (MPa) 0.8 0.202 0.6 0.7 Set point 0.5 0.6 0.200 0.5 0.4 0.4 0.3 0.198 0.3 0.2 0.2 0.1 0.196 0.1 0 100 200 300 400 500 0 0.2 0.1 0.3 0.4 0.6 0.5 0.8 0.7 0.9 300 0 100 200 1.0

Angle Seat Valve /

400 200 VXB215 B E(H) 100 300 400 500 600 200 VXB215 C F(H) 100 300 400 500 600 700 800 200 Flow rate Q [kg/h] How to read the graph The sonic range pressure to generate a flow rate of 300 kg/h is P1 0.3 MPa for the VXB215C F(H).

AMD

400 550 560 745 300 300 1320 1380 1480 1610 1585 1740 24 24 4B, 6B 870 M20 x l 500 AMD1000 Please refer to Made to Order Specifications of Series AMD on pages 14-20-55 to 14-20-57. 14-20-28

Clean Air Module

Connecting bracket A Connecting bracket B Pressure outlet port assembly Bushing projection Connecting bracket A r Mount the connecting bracket A, and tighten the hexagon socket head cap screw with the following torque.

CYP

L R S Piping port position Nil Operating direction Left Right L R S a b h g d c f e Note) Plugs are installed in ports other than those indicated for the model.