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The result is approximately 50l/min. 100 50 1 0 2 3 4 5 6 7 Cycle (Hz) Viscosity characteristics (flow rate correction for viscous fluids) Caution 100 1. These flow rate characteristics are for fresh water (viscosity 1mPas, specific gravity 1.0). 2.

Note) For other voltages, please contact SMC. 3-12-1 A Series VFN2000N Dimensions (mm) VFN2120N--02 148 19 23 Applicable heavy-duty cord O.D.6 to 8 Pg9 37 24 66.5 57 32 40 14 Pilot EXH. 2-5.5 Mounting hole 3-1/4 3 4 5 1 Manual override (Non-locking) 23 23 VFN2220N--02 224.5 19 23 Applicable heavy-duty cord O.D.6 to 8 Pg9 24 66.5 57 32 40 14 Pilot EXH. 2-5.5 Mounting hole 189 3-1/4 3 4 5 1

EX180-SDN3/4/5/6 EX180-SDN3A/4A/5A/6A CLR 0 Clear all outputs. 6 Factory default setting is CLEAR. It is possible to set the output behaviour in the event of a communication error individually via the DeviceNetTM network. If the output behaviour is set via the DeviceNetTM Network then the setting of DIP switch 9 is invalid. 6 7 Figure 3 2.

6 (For mounting) Plug side 50 Panel mounting hole Component Parts t q No.

5 y q r !6 e !0 !3 w @1 @2 !5 t y q r e !0 !3w #0 @9 #3 @8 @7 o @0 !6 i !9 !8 u o @0 !7 i !9 !

-6 U4 For 4 soft tubing M-5AU-4 U6 For 6 soft tubing M-5AU-6 H Model A B C D 2 E F G H J K Vacuum inlet direction q Pad dia.

[mm] Model D Weight [g] X Y O N Thickness Nylon Urethane Q Q 2 x O 3.2 KQ2T23-00A1 7.1 6.7 9.5 14.9 18.5 13.3 5.4 6 3.2 7.1 3.4 2.9 2.5 2.3 4 KQ2T04-00A1 8.2 7.7 10 15.3 19.4 13.3 5.7 6 3.2 8.2 6.4 4.4 3 2.8 6 KQ2T06-00A1 10.4 9.7 12 16.3 21.5 13.3 6.8 6 3.2 10.4 13.4 10.6 4.5 3.8 2 x N M Q L1 L2 Q D D L1 M L1 M Release button dimensions X Y Different Diameter Tee: KQ2T D1 2 x Applicable

#7 #8 #9 $0 $1 $2 $3 $44 $5 $6 $7 $8 $9 %5 %6 q w e r t y u i o !

5 q u o Material Note Component Parts !4 r No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !

Standard 59 (mm) CQ2 NCQ2 NCQ2 CQ2 NCQ2 P CQ2 P Bore size (mm) Stroke range (mm) W Q N F E M I J G K2 C H K1 Th9 H B C D L Z A inch 12 5 to 30 15 3.5 15.5 25 32 1.5 5.4 5.2 5 #8-32UNC 37.2 30.2 10 M3 x 0.5 3.5 6 6 15 0 0.043 M5 x 0.8 M5 x 0.8 16 5 to 30 15 3.5 29 20 1.5 38 5.4 6 6 38 31 10 M4 x 0.7 #8-32UNC 3.5 8 8 20 0 0.052 M5 x 0.8 M5 x 0.8 20 5 to 50 17.5 25.5 5.5 36 2 47 7 8

Refer to Effective Gripping Force for the gripping force at each gripping position on pages 12-6-7 to 12-6-11. P. 12-6-17 12-6-5 5 Series MHK2 Construction Double acting Single acting @0 e !8 !7 w o Open condition Normally open !9 t y !5 !6 i u q r !1 !

Standard (mm) Bore size (mm) Stroke range (mm) A B C D E F G H I J K1 K2 L M N Q W Z Th9 P 12 16 20 25 0 0.043 37.2 30.2 6 6 25 10 1.5 M3 x 0.5 32 5.2 5 3.5 15.5 3.5 15 15 M5 x 0.8 5 to 30 0 0.052 38 31 20 8 8 29 10 1.5 M4 x 0.7 38 6 6 3.5 3.5 15 20 M5 x 0.8 5 to 30 0 0.043 25.5 17.5 43 34 7 10 36 9.5 2 M5 x 0.8 47 8 8 4.5 5.5 13 M5 x 0.8 5 to 50 0 28 19 47 37 12 12 40 11 2 M6 x

IN OUT t e q r IN OUT w r w AR30(K)-B/AR40(K)-B q t AR50(K)-B/AR60(K)-B e IN OUT q t r w e IN OUT r w Component Parts No.

P Q R 6 6 8 24.3 26.2 16.8 18.7 S 12.8 15.2 8 Applicable tubing O.D.

6 !7 @1 !0 !9 !6 !7 AQ i ASV ASQ530F-02 type ASQ630F-03 type ASQ530F-02 type ASQ630F-03 type y !5 !3 y u AK !5 !7 !7 ASS !4 !1 !2 !4 !1 !8 !8 ASR !6 !6 ASF t q t q @0 r @0 r @1 !0 !9 !6 !7 @1 !0 !9 !6 !7 Component Parts Note Material Note Description Description Material No. q w e r t y u i o !0 !1 !2 !3 No. !4 !5 !6 !7 !8 !

8 #8 #6 #5 #2 w !0 e i !3 @8 !9 @0 @1 @2 @3 @4 @5 t u !4 !5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

0 For output 0 V For output +24 V PNP output q w Functions 1 0 4 1 2 3 8 5 6 7 9 Description CN3 No.

7 @9 @6 !8 o e @2 @3 @1 !3 !4 @7 @8 !6 !5 q w !2 !1 !