Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

Maximum manufacturable stroke (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit. For a stroke in the standard stroke range, suffix the part number with -XB10.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

In order to maintain the particulate generation grade, use operation of 500 thousand cycles or travel distance of about 400 km as a standard. (Graph (1) below) If operation is continued beyond the recommended values, lubrication failure of the linear guide and loss of particulate generation characteristics may occur. 1.

Fieldbus system EtherNet/IP compatible SI Unit

Set the Index, subindex and data to be changed by specifying the Unit No., Unit ID and IO-Link port in accordance with the Operation Manual of the IO-Link device. : This function may not be available due to the PLC type. : The settable data size in the configuration assembly is 400 bytes maximum.

PFxx-OMP0001CN

kpa 400 kpa [L/min] [L/min] PFMB7202(2000L/min) 200 kpa [kpa] 400 kpa [L/min] -65No.PF-OMP0001CN-F IN 3F.S.8 cm IN OUT [cm] -66No.PF-OMP0001CN-F PFMB7501/7102/7202 2x A B D E F H K L N PFMB7501/7102 70 30 43.7 37.2 15 14 26 18 13.6 PFMB7202 90 35 49.2 42.7 17.5 24 31 28 16.8 S T U V W PFMB7501/7102 24 22 32 40 50 PFMB7202 30 30 42 48 58 -67No.PF-OMP0001CN-F (ZS-33-D) (ZS-33-F) -68No.PF-OMP0001CN-F

Digital Flow Switch ( compatible)

Setting of OUT1 output set value (Lower limit of window comparator) S16 1200 Y Setting range -200 to 4200 3 R/W 1220 0x04C4 P1H(n1H) (Upper limit of window comparator) Setting of OUT1 output set value (Upper limit of window comparator) S16 2400 Y Setting range -200 to 4200 4 R/W WH1 (Window comparator hysteresis) Setting of OUT1 hysteresis (Window comparator) S16 400 Y Setting range 0 to

Digital Flow Switch ( compatible)

Setting of OUT1 output set value (Lower limit of window comparator) S16 1200 Y Setting range -200 to 4200 3 R/W 1220 0x04C4 P1H(n1H) (Upper limit of window comparator) Setting of OUT1 output set value (Upper limit of window comparator) S16 2400 Y Setting range -200 to 4200 4 R/W WH1 (Window comparator hysteresis) Setting of OUT1 hysteresis (Window comparator) S16 400 Y Setting range 0 to

PFxx-OMY0005

of OUT1 output set value (Lower limit of window comparator) 3 R/W S16 1200 Y P1H (n1H) (Upper limit of window comparator) 1220 0x04C4 Setting range 0x0028 to 0x1068 (40 to 4200) Setting of OUT1 output set value (Upper limit of window comparator) 4 R/W S16 2400 Y WH1 (Window comparator hysteresis) Setting range 0x0 to 0x0820 (0 to 2080) Setting of OUT1 hysteresis (Window comparator) U16 400

HRX-OM-S004

Max. 2s 2s 1s 1s Min. 0.5s 0.5s 0.2s 0.2s 0.1s 0.1s 0.05s 0.05s 0.02s 0.02s 0.01s 0.01s 6000 100 125 200 300 400 500 700 1000 1500 2000 30004000 10 100 125 200 300 400 500 600700 1000 1500 2000 3000 4000 600 5000 7000 Current (% for breaker capacity) Current (% for breaker capacity) For HRS100-A/W-20-B For HRS150-A/W-20-B HRS100-A/W-40, HRS150-A/W-40 4h 2h 1h 30min 20min 14min 10min 6min

High Vacuum L Type Valve

H5 Initial power / Power consumption (W) 100 VAC 200/40 400/70 400/80 600/130 800/180 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

XL-OMY0001

/70 400/80 / AC200V 800/40 1600/80 1600/80 XLA-63-2 XLA-80-2 AC90240V XL1A25-60S-2 XL1A25-60S-3 1 1 H4 AC100V 400/100 600/150 / AC200V 1600/100 2400/150 XL1A25-60S-3 XL1A25-60S-2 1 2 H5 AC100V 600/130 800/180 / AC200V 2400/130 3200/180 1[W] 216 PTC 200V PTC 200 150 100V PTC 0 5 10 15 20 25 30 ( 30 10 XL-OMY0001 5 5-1 1 , SUS304 8 4 SUS304 10 , SUS316L

High Vacuum L Type Valve

H5 Initial power / Power 100 VAC 200/40 400/70 400/80 600/130 800/180 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 consumption (W) Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

K35-OMW0031

The available bore sizes are 125, 160, 200, 250, 320 and 400. 2-3. No signal operation With No signal operation (Menu Tree No.1-3-5-3-3), the piston rod operation can be set when the input signal of 3.5mA or less is input. The available operation is Retracted end. Calibration position and Stay. 2-4.

CEx-OMQ0010

1150 900 80 1100 900 100 1100 850 10 2-2-2 CEU2 NPN P PNP C E U 1 C E U 5 AC80120V AC100240V DC24V DC24V NPN RS-232C P PNP RS-232C+BCD NPN P PNP C E 1 R *1) (CE1-ROOC) 05 5m 10 10m 15 15m 20 20m *1)() C ()(CE2)(CE2**-*Z ) CE1-ROOC CE1-RO5 CE1-R10 CE1-R15 CE1-R20 CE1-R*C 11 3 100 200 200 NO 100 80 YES 100 100 80 kgf kgf 63 NO 63 50 50 40 40 YES 100 100 300 300 200 400

Electric Slide Table / High Precision Type 《 Battery-less absolute 》

200 100 400 200 400 200 Actuator specifications Pushing speed[mm/s] 20 to 30 10 to 30 5 to 30 20 to 30 10 to 30 20 to 30 10 to 30 Max. acceleration/deceleration[mm/s2] 5000 Positioning repeatability [mm] 0.01 Lost motion[mm] *4 0.1 or less Screw lead[mm] 10 5 2.5 12 6 16 8 Impact/Vibration resistance[m/s2] *5 50/20 Actuation type Ball screw (In-line) Ball screw + Belt (parallel) Guide type

LA-OMP0023

LAT3LAT3MLAT3F600 350 700 Load weight1000g Load weight1000g Load weight1000g 300 600 Positioning time [ms] Positioning time [ms] Positioning time [ms] [ms] 500 [ms] [ms] 700g 700g 700g 250 500 400 500g 500g 500g 200 400 300 150 300 200 100 200 300g 300g 300g 100 100g 100g 50 100 100g 0g 0g 0g 0 0 0 0 10 20 30 40 50 0 5 10 15 20 25 30 0 10 20 30 40 50 Total travel distance [mm] Total travel

HRX-OM-I051

4000 Current (% to the capacity of the main breaker of this product) Figure 3-6 Breaker operating characteristics curve HRZ Series 3.3 Procedure for Installation 3-9 HRX-OM-I051 Chapter 3 Transporting and Installation HRZ008-L HRZ008-L1 4h 2h 1h 30min 20min 14min 10min 6min 4min MAX 2min 1min Operating time 30s 20s 10s 5s 2s MIN 1s 0.5s 0.2s 0.1s 0.05s 0.02s 0.01s 100 135 200 300 400 500

ncq8mp

SeriesNCQ8 Air Cylinder: Standard Type Double Acting, Single Rod Maintenance Parts 056 to 400 Construction Double Acting, Single Rod 10 11 9 Seal Kit Parts List No. 9 10 11 Description Piston Seal Rod Seal Tube Gasket Material NBR NBR NBR *BLUE links will lead to purchase pages. Repair Parts: Standard Seal Kit for Double Acting, Single Rod Remarks Bore size Kit no.

MHZ

0.5 MPa 0.5 MPa Gripping force (N) 0.5 MPa 0.5 MPa 200 0.4 MPa 0.4 MPa 0.4 MPa 0.4 MPa 15 150 0.3 MPa 0.3 MPa 0.3 MPa 0.3 MPa 10 100 0.2 MPa 0.2 MPa 0.2 MPa 0.2 MPa 5 50 L 0 10 20 30 40 50 60 0 20 40 60 80 100 Gripping point L (mm) Gripping point L (mm) MHZ2-16D/MHZL2-16D MHZ2-40D 500 70 Pressure 0.7 MPa Pressure 0.7 MPa Pressure 0.7 MPa Pressure 0.7 MPa 60 0.6 MPa 0.5MPa 0.6 MPa 0.5MPa 400

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40

Standard stroke Maximum manufacturable stroke (mm) Standard stroke (mm) Bore size (mm) Suffix for stroke adjusting unit 25 32 40 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 2000 2000 2000 Nil S 2 pcs. 1 pc.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Standard stroke Maximum manufacturable stroke (mm) Standard stroke (mm) Bore size (mm) Suffix for stroke adjusting unit 25 32 40 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 2000 2000 2000 Nil S 2 pcs. 1 pc.