High Vacuum L Type Valve

H5 Initial power / Power consumption (W) 100 VAC 200/40 400/70 400/80 600/130 800/180 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

XL-OMY0001

/40 800/50 XL1A25-60S-1 XL1A25-60S-2 XL1A25-60S-2 1 1 1 H5 AC100V 200/40 400/70 400/80 / AC200V 800/40 1600/80 1600/80 XLA-63-2 XLA-80-2 AC90240V XL1A25-60S-2 XL1A25-60S-3 1 1 H4 AC100V 400/100 600/150 / AC200V 1600/100 2400/150 XL1A25-60S-3 XL1A25-60S-2 1 2 H5 AC100V 600/130 800/180 / AC200V 2400/130 3200/180 1[W] 216 PTC 200V PTC 200 150 100V PTC 0 5 10

High Vacuum L Type Valve

H5 Initial power / 100 VAC 200/40 400/70 400/80 600/130 800/180 Power 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 consumption (W) Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

High Vacuum L Type Valve

H5 Initial power / Power 100 VAC 200/40 400/70 400/80 600/130 800/180 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 consumption (W) Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

Electric Actuator ／ Slider Type High performance Battery-less absolute encoder

(mm) 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 Weight(kg) 3.15 3.35 3.55 3.75 3.95 4.15 4.35 4.55 4.75 4.95 5.15 5.35 5.55 5.75 5.95 6.15 6.35 6.55 6.75 6.95 0.53 Additional weight for lock(kg) 4 Model LEFS40 Stroke(mm) 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 1100 1200 Weight(kg) 5.37 5.65 5.93 6.21 6.49 6.77 7.15 7.33

LEF-OM007xx

*Refer to the table of Applicable stroke 6mm 6mm 8mm 8mm 10mm 10mm B B Cable type *Applicable stroke Standard produced upon receipt of order Without cable Nil Without cable Nil 100 100 200 200 300 300 400 400 500 500 600 600 700 700 800 800 900 900 1000 1000 Robotic type cable R Robotic type cable R 11-LEFS25 11-LEFS25 Standard cable S Standard cable S 11-LEFS32 11-LEFS32 Motor cable

LEY-OM007

40 (2000[mm/s 2]) 6 17 30 18 50 50 30 60 60 [kg] 2) (3000[mm/s 2]) 2 4 8 8 16 30 11 22 43 [N] 3) 4) 5) 1438 2774 51141 63122 126238 232452 80189 156370 296707 [mm/s] 5) 15500 8250 4125 18500 9250 5125 24500 12250 6125 [mm/s 2] 3,000 [mm/s] 6) 50 35 30 [mm] 0.02 [mm] 10 5 2.5 12 6 3 16 8 4 [m/s 2] 7) 50/20 + LEY* _ / R / L (LEY*D) [] 540 [%] 90 RH ) 28 42 56.4 (DC24V) A/B 800

LEH_C

LEHZ10 LEHZ16 LEHZ20 LEHZ25 LEHZ32 LEHZ40 /(mm) 4 6 10 14 22 30 (mm) 251/73 249/77 246/53 243/48 242/39 254/43 614 1640 52130 84210 (N) 40100 1) 3) 26 38 1128 /(mm/s) 2)3) 580 /550 5100 /550 5120 /550 + () (mm) 4) 0.02 (mm)5) 0.05 /(mm) 6) 0.5 1.0 / (m/sec 2) 7) 150 / 30 (c.p.m) 60 () 540 (%RH) 90 () 165 220 430 585 1120 1760 (g) 135 190 365 520 20 28 42 (DC24V) () A/B (800

EXxx-OMK0006

Baud rate Table Baud rate SW1 SW2 SW3 SW4 1000 0 0 0 0 800 1 0 0 0 500 0 1 0 0 250 1 1 0 0 125 0 0 1 0 1 0 1 0 50 0 1 1 0 20 1 1 1 0 10 0 0 0 1 : CAN LED illuminates RED when an invalid combination is set with DIP switches SW1 to 4.

HRX-OM-R039

Fig. 8.4-2 Cooling capacity(HRSE018-A-10) 8.4.3 HRSE012-A-20/23-(T) 1600 1600 Ambient Ambient Temperature Temperature 1400 1400 25 35 40 25 35 40 1200 1200 Cooling capacity[W] Cooling capacity[W] 1000 1000 800 800 600 600 400 400 200 200 0 0 0 10 20 30 40 0 10 20 30 40 Circurating fluid temperature[] Circurating fluid temperature[] 60Hz 50Hz The cooling capacity will be reduced by 100W when

Electric Actuator / Guide rod Slider

) Rated voltage(VDC) 24 +/10% Power consumption (W) Note 5) 32 Standby power consumption when operating(W) Note 6) 16 Momentary max. power consumption (W) Note 7) 60 Type Note8) No excitation operating type specification Holding force(N) 19 Lock Power consumptionW Note 9) 5 Rated voltage(VDC) 24 +/10% Weight Stroke(mm) (100) (200) 300 400 500 600 (700) (800) (900) (1000) Weight(kg) LEL25M

E-MY2_E_D

Heavy load Standard load Medium load Light load 1 10 50 100 200 1 0.25 0.49 0.98 1.96 2 20 2 0.49 75 200 400 0.74 1.47 2.94 3 30 3 0.74 100 300 600 0.98 1.96 3.92 4 40 125 400 800 4 0.98 1.23 2.45 4.90 5 50 5 1.23 150 500 1000 1.47 2.94 5.88 6 75 200 600 1200 6 1.47 1.96 3.92 7.84 7 100 250 700 1400 7 1.72 2.45 4.90 9.80 8 300 300 800 1600 8 1.96 2.94 5.88 11.76 9 500 500 900 1800 9 2.21

Switches

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Switches Solid State Switches Applicable Actuators Series LXF, LXP, LXS D-F9 Series LJ1 (non-standard motor) D-Y7GL Cannot be mounted on Series LXF with ball screw specification. Auto Switch Specifications Auto switch part no.

AC

AU 0.2 0.1 AF 0.15 0 00 AR 0 200 400 600 800 1000 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Flow (l /min (ANR)) Supply pressure (MPa) IR AR2501 AR2501 Rc(PT)3/8 Rc(PT)3/8 0.25 VEX 0.6 Caution AW Initial set point 0.5 qRelease the lock to adjust the pressure. After the adjustment, engage the lock.

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

80 Double knuckle joint (with pin) Option 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Rod boot Intermediate strokes are available.

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Accessories Order Made Made to Order Double clevis Single clevis Rear flange Front flange Basic Center trunnion Foot Mounting Refer to p.5.4-1 for made to order products of series MBlQ.

MGC

200, 250, 300 MGCL Ball bushing baering 350, 400, 450, 500, 600, 700, 800, 900, 1000 *Short stroke or intermediate stroke(except above stroke): Manufactured upon receipt of order 3.20-2 Compact Guide Cylinder Series MGC Specifications MGCll20 MGCll25 MGCll32 MGCll40 MGCll50 Model CDGIBA20 CDGIBA25 CDGIBA32 CDGIBA40 CDGIBA50 Base cylinder 20 25 32 40 50 Bore size (mm) Action Double acting

ML1

, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 25 32 40 2000 2000 2000 *When the required stroke is longer than the standard stroke , refer to the specifications for Made to Order q (p.5.4-79) longer stroke styles.

VZA200/400

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VR Model VH Flow characteristics (2) 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) C [dm3/(sbar)] Cv Type of actuation Port size Pilot port size b Cv b C [dm3/(sbar)] Valve model Pilot VHS Body ported Body ported Base mounted Base mounted (With sub-plate) VZA212

NAMUR Interface 3 Port Solenoid Valve Series VFN200N 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2 VT VP 3 1 AC DC VG Rated voltage Allowable voltage range Coil insulation Inrush Holding Power consumption DC VP Double solenoid 2 Electrical entry S070 Apparent power AC (Power consumption) VQ Grommet, Grommet terminal, Conduit terminal, DIN terminal