CE2

To use the system in a magnetic field that exceeds this value, use a magnetic material to shield the sensor unit. 63 50 50 40 40 YES 100 200 300 400 500 100 200 300 400 500 NO Does the mounted load exceed the load given in the diagram? Piston speed (mm/s) Horizontal mounting Piston speed (mm/s) Vertical mounting Selection O.K.

Table of Contents

500 Maximum speed (mm/s) 2.

MQQ

100 500 300 MQQT: Standard type MQQL: Lateral load resisting type Maximum speed V(mm/s) Note 1) When a load is attached to the rod end, adjust the speed so that the maximum speed is no more than that shown in the graph for the corresponding load weight.

Low Friction Cylinders Series MQ

16 15, 30, 45, 60, 75, 100 20 15, 30, 45, 60, 75, 100 25 15, 30, 45, 60, 75, 100 Strokes are available in 1mm increments by installing spacers in standard stroke cylinders.

IDU/IDF

Note 3) 200 to 240VAC is "S" specification standard. Note 4) Combinations of M and H, H and M, R and S, S and T, L and M are not available.

XL-OMY0002

S 6-2. XLD-63 XLD-80 XLD-25 XLD-40 XLD-50 XLD-100 XLD-160 0.08 Nm 0.3 Nm 6-3.S S S S 6-4.M M M S 6-5./ S M S M 12 XL-OMY0002 7.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

size (mm) S l R T V W H ZZ e f h Z 40 37 106 11 7.5 8 66 188 55 25 92 214 50 43 112 11 10 9 73 207 60 28 99 233 1/4 stroke 63 47 116 11 12 10 80 216 65 30 106 242 80 57 127 11 16 13 90 243 80 32 116 269 100 66 137 12 20 16 100 263 100 35 123 286 1/5 stroke 125 77 137 12 20 16 100 267 100 35 123 290 160 94 155 12 24 20 108 297 120 38 131 320 94 Series CHA Dimensions Rear flange type: CHAG

5 Port Solenoid Valve Series VQZ1000/2000/3000

C M S C C S M C S M NI NI IN IN OUT OUT B B 2 To CYL port To CYL port 4 P.960 P.961 P.962 P.974 Connector assembly SY3000-37-80AHousing (1 set: 8 pcs.)

Compact Manifold Regulator

S H H L L 11.5 8 3 5 L2 dimension DIN rail part no.

ITV

Output deviation factor (% F .S.) 0.6 0.5 0.4 Return 0.2 0 0 0.2 0.4 0.5 Out 0.6 0.8 0 25 50 75 1 1 2 3 4 1 5 100 Input signal (%F .S.)

Electric Actuator / Guide rod Slider

Move M Spee Position Accel Decel PushingF TriggerLV PushingS mm/s mm mm/s2 mm/s2 % % mm/s % mm mm mm 0 Absolute 100 100.00 3000 3000 0 0 0 100 80.00 90.00 1.00 Position[mm] c The INP output signal is turned on from 100[mm] -1[mm]=99[mm] 100 Speed[mm/s] b 0 ON (INPOutput condition) INP Output signal OFF In pos[mm] k 101 99 0 10 20 30 40 50 60 70 80 90 100 Stroke [mm] Position[mm] c The AREA

Air Slide Table Series MXS

Nil S n MXW Symmetric type MXJ Auto switch Nil Without auto switch (Built-in magnet) Bore size (Stroke (mm)) MXP 6 8 12 16 20 25 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50, 75, 100, 125, 150 For the applicable auto switch models, refer to the table below.

High Vacuum L Type Valve

H 4 S y m b o l Initial power / Power 100 VAC 200/40 200/50 400/100 200 VAC 800/40 800/50 800/100 consumption (W) Heater assembly number XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 XLA25-60S-3 No. of heater assemblies 1 pc. 1 pc. 1 pc. 1 pc.

0.55

Z R U Note) VF3000 VF5000 Rated voltage > > 3: Main/Pilot valve common DC AC (50/60 Hz) exhaust 5 6 1 2 3 4 7 24 VDC 12 VDC 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] 240 VAC 24 VAC Note) S type is not available with AC mode, since a rectifier prevents surge voltage generation.

Pilot Operated

This is the same concept representing the easy to run through as sonic conductance C (effective area). (3) Formula of flow rate When P2 + 0.1 0.5, choked flow P1 + 0.1 293 Q = 120 x S (P1 + 0.1) (3) 273 + t When P2 + 0.1 > 0.5, subsonic flow P1 + 0.1 293 Q = 240 x S (P2 + 0.1) (P1 P2) (4) 273 + t Conversion with sonic conductance C: S = 5.0 x C(5) Q :Air flow rate[dm3/min(ANR)], dm3 (

Digital Flow Switch (Integrated display type)

(0.01 s increment), 0.1 to 1.0 s (0.1 s increment), 1 to 10 s (1 s increment) Select from 20 s, 30 s, 40 s, 50 s, 60 s Hysteresis 8 Variable Protection Short circuit protection Output type Voltage output: 1 to 5 V (0 to 10 V can be selected, only when the power supply voltage is 24 VDC) 10, Analogue outpour 9 Current output 4 to 20 mA Impedance Voltage output Output impedance approx.1 k Current

Transfer

500 1000 1500 0.1 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) ML2B/M1 (Pitch moment) ML2B/M2 (Roll moment) ML2B/M3 (Yaw moment) 30 40 20 20 5 4 3 10 10 5 4 3 ML2B40 ML2B40 2 5 4 3 Moment (Nm) Moment (Nm) Moment (Nm) 2 ML2B32 ML2B32 1 ML2B40 ML2B40 ML2B40 ML2B40 2

LEH_C

1mm/s2 / 40~100%1% / 0% ()40~100%1% 1mm/s / 40~150%1% / 150% 0.01mm / /0.5 (+) +(0.01mm) (-) -(0.01mm) () JOG () ON/OFF No.

PFxx-OMA1007

(Refer to page 49) AMS/Operation/Standby/ Isolation AMS Common Force AMS mode System parameter Sets the data update time of the analog input unit connected to the Wireless Remote. 0.1 s/0.2 s/0.5 s/1 s/2 s/ 5 s/10 s/30 s/60 s 0.5 s Remote Analogue input refresh time Specifies the output action to be taken when the fieldbus communication or wireless communication is disconnected.

ISA2

With control unit Centralized wiring/Supply port left Individual wiring/Supply port right Centralized wiring air catch sensor ISA2-HE41P Terminal box Individual wiring air catch sensor 2 port solenoid valve 2 port solenoid valve ISA2-GE41 Regulator 3 0 3 0 3 0 3 0 3 0 3 0 Supply port Supply port P P P P P P T T T T T T U U U U U U E E E E E E L L L L L L S S S L L L S S S L L L 6 9 6 9 6