VS 8-2/VS 8-4

(According to ISO1179-1), NPTF 1/8" Pilot exhaust port M4 x 7 earth thread 56.6 30 11.5 8 I E 95 65.4 41.2 3/5 3/5 2 2 2 2 14 12 39 4 4 4 4 30 21 1 1 181.5 24.5 13 17 2n x Rc, G (According to ISO1179-1), NPTF 3/8" 4(A), 2(B) port 2 x Rc, G (According to ISO1179-1), NPTF 1/2" 1(P) port 64.5 27 (n-1) x 27 33.5 Communication connector U side D side n Station number 4 2 1 3 L2 L1 5.5 47n + 37

7

Conduit VXR C E U 280 VXH 23 T VXF G1/2 VX3 A VXA OUT IN OUT IN M B J I F 2 x P Port size (D) L K Flat terminal 11 U E C T A B OUT IN OUT IN M 2 x P Port size J I F L K (D) (mm) Electrical entry Port size P A B C E F I J K L Model Flat terminal Conduit terminal Conduit D M T T U U V T U 55 (61) 99.5 68.5 55 (61) 47.5 61 (67) 23 3/8, 1/2 96.5 (102.5) 25.5 30 4 B VXD2 70 20 11.5 14 50 33 37

VZM500

Twist selector (2 position) 34 Key selector (2 position) 36 Push-pull 37 Construction Non-actuated Actuated Force Component Parts No.

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

AT6C-04 AFF4B-04 IDF6DAM250-04 AMD350-04 7.5 1.0 HAA15-10 HAW22-14 AT11C-06 AFF8B-04 IDF8DAM350-04 AMD350-04 11 1.5 HAA15-10 HAW22-14 AT11C-06 AFF8B-06 IDF11CAM350-06 AMD450-06 15 2.0 HAA22-14 HAW22-14 AT22C-14 AFF11B-06 IDF15CAM450-06 AMD450-06 22 3.0 HAA37-14 HAW37-14 AT22C-14 AFF22B-10 IDF22C1-3 AM550-10 AMD550-10 27 3.5 HAA37-14 HAW37-14 AT37C-14 AFF22B-10 IDF22C1-3 AM550-10 AMD550-10 37

Compact Cylinder with Air Cushion

Add the stroke to calculate the length of intermediate strokes. 7 Compact Cylinder with Air Cushion Series RQ Mounting Bracket Dimensions Foot type Foot type/RQL, RDQL mm B + Stroke L Bore size (mm) Stroke range (mm) A B LS L L1 LD 20 to 100 32 37 6.6 61.2 21 17 38.5 20 to 100 40 44 6.6 68.2 28 17 38.5 Special cap bolt LH LY 30 to 100 50 49.5 9 75.7 26.5 18 43.5 mm LX X X LG Y Y Bore size

MK

48 14 14 17 17 20 24 30 35 7 7 8 9 4.5 5 7 7 6.5 6.5 7.5 7.5 14 14 19 19 16 16 20 20 3 3 3.5 3.5 M10 x 1.5 M10 x 1.5 M6 x 1.0 M6 x 1.0 17 17 22 28.5 101.5 76 70 81.5 85 37 29.5 34 35 7.5 8 10.5 10.5 0.15 0.15 Data 102.5 0.15 0.15 M12 x 1.75 M8 x 1.25 122 0.15 0.15 14 depth 10.5 M12 x 1.75 M10 x 1.5 125 0.15 0.15 Note 1) This cylinder rod is retracted.

RZQ

345.5 382.5 40 606 37 355 392 CE2 50 631 41 355.5 396.5 ML2B 63 631 44.5 357.5 402 C J G5-S qA port pressurization at initial (retracted) position.

RQ

Add the stroke to calculate the length of intermediate strokes. 7-7-10 10 Series RQ Compact Cylinder with Air Cushion Double Acting, Single Rod Mounting Bracket Dimensions Foot Style Foot style: RQL/RDQL B + Stroke L Bore size (mm) Stroke range (mm) A B LS L L1 LD 32 20 to 100 61.2 37 21 17 38.5 6.6 40 20 to 100 68.2 44 28 17 38.5 6.6 Special cap bolt LH LY 50 30 to 100 75.7 49.5 26.5 18

CXS

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0.057 CXSJ6 42 + Stroke 32 13.4 CX Basic type 6 Additional dimension for each bore size compared to the basic type 2 mm (20) 3 mm (25) 5 mm (32) CXS6 0.095 58.5 + Stroke 37 16 Series CXS 6, 10, 15, 20, 25, 32 D0.114 CXSJ10 56 + Stroke 42 CXS basic type

CXWM/CXWL

San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com for fixing adjusting bolt (M6) 2-Rc 1/8 Cylinder port 8H7 +0.015 0 2-M6 x 1.0 thread depth 7 2 x 2-MB x 1.25 thread depth 15 2 x 2-8H7 depth 12 +0.015 0 4-6.9 through 4-11 counterbore depth 7 (mm) ZZ Z G SS S Q P L F Model CXWM32-25 CXWM32-50 163 123 27.5 96 27 143 22 41 37

MGQ

50 63 80 100 40 42 52 62 80 90 100 110 140 170 18 22 26 32 38 38 44 44 56 62 36 38 46 56 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 M12 x 1.75 M14 x 2 C dimension for a bore size of 32 to 100 is identical to the A dimension. 8-20-4 5 Compact Guide Cylinder Series MGQ Operating Conditions Allowable Lateral Load (Ordinary load) F (N) Stroke (mm) 40 13 21 22 37

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

TF G 1/8 G 1/8 G 1/8 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 Nil M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 b C H B d M10 x 1.0 M20 x 1.5 M26 x 1.5 M32 x 2.0 H 4 8 8 10 B 14 26 32 41 C 16.2 30 37 47.3 Part no.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Height (H) (mm) Auto Switch Series 63 16 25 40 MY3A MY3B Can be mounted on both sides from the front direction. 84 27 37 54 MY1B (with air cushion) MY1B 116 37 54 84 Centralized Piping Integrated piping in the head cover is possible. (Refer to page 8-14-26.)

Multi-channel Digital Sensor Monitor ( compatible)

16 octets fixed character string 0x0015 (22) 0 R Hardware version HW-Vx.y x: Large revision number y: Small revision number 0x0016 (23) 0 R Software version FW-Vx.y x: Large revision number y: Small revision number 0x0017 (24) 0 R/W 2 Application specific tag ALL "*" Can be changed arbitrarily 0x0018 (36) 0 R Device status parameter Refer to "Device status parameter" on page 86. 0x0024 (37

PFxx-OMS0001CN

No.PF-OMS0001CN-A // PFMC7501 PFMC7102 PFMC7202 2 10 11 12 14 15 17 18 [] 22 OU1OUT2 {3 ] 23 [] 25 26 F0 27 F1 OUT1 29 F2 OUT2 37 F3 42 F10 43 F20 47 F22 48 F30 49 F31 50 F80 OFF 51 F81 52 F82 53 F90 54 F98 56 F99 57 58 62 63 65 66 66 69 71 -1No.PF-OMS0001CN-A (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO

Digital Flow Switch (Remote type monitor unit)

Input of set values P2dH P2AH n2AH P2AL n2AL Setting of P2L/n2L P2H/n2H Setting of tnL/tPL Setting of P_2/n_2 Setting of tn/tP n2dH P2dL n2dL tnH/tPH H_2 H_t H2 Ht (Page 37) (Page 39) (Page 37) (Page 39) (Page 38) 4. Completed [F 2] Setting of OUT2 is completed. -35No.PF-OMN0012-H 1.

LFE-OMZ0013

### SMC Corporation Contents Safety Instructions 2 Model Indication and How to Order 9 Summary of Product Parts 10 Definition and Terminology 11 Mounting and Installation 13 Installation 13 Wiring 14 Setting the Detected Flow Rate 17 Function Setting 19 Default Setting 19 F 0 Selection of sensor 21 F 1 Setting of OUT1 22 F 2 Setting of OUT2 30 F 3 Response Time 36 F10 Sub screen display 37

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

For 3 port (2 stations, one-piece type) 254 g For gate valve 300 g For 2 port 409 g End plate For 3 port 495 g For 2/3 port mixed mounting 452 g 24 g 6 25 g 8 VCKH 33 g 10 36 g 12 25 g 6 26 g 8 VCKK Fittings 32 g 10 37 g 12 29 g 6 30 g 8 VCKL 37 g 10 41 g 12 10 Valve for Water and Chemical Base Fluids VCC Series Dimensions Mounting hole dimensions (When valve is built in to the device.)

HRX-OM-M090

PV SV 37. Select the changing of electric resistivity/conductivity dropfrom the table below with [] key or [] key, and confirm by pressing SEL. Refer to the Operation Manual attached to these optional accessories for details.

HRX-OM-W058

Setting unit is 1 second. to Settings of this function and example of alarm generating timing for 5.15.3 "Setting of temperature alarm monitoring method and generation timing". 37. Press the [MENU] key once. Return to the main screen (screen displaying the circulating fluid temperature).