VQZ1000/2000/3000

Insert D at the end of the manifold part number.

CL

MLU 40 50 63 80 100 125 140 160 Bore size (mm) Bore size (mm) Auto switch model CA-L06 CA-L05 CA-L10 CA-L04 CA-L08 Foot style Rod side 40 50 63 80 100 125 140 160 ML1C CS1-L12 CS1-L14 CS1-L16 D-A5/A6/A59W D-F5/J5/F5NTL D-F5W/J59W D-F5BAL/F59F D-A3/A44 D-G39/K39 D-B5/B6/B59W D-G5/K59/G5BAL D-G5W/K59W D-G59F/G5NTL D-A3C/A44C D-G39C/K39C D-Z7/Z80 D-Y59/Y69 D-Y7P/Y7PV D-Y7W D-Y7WV D-Y7BAL CA1

Basic Type/Direct Mount Type

Note 4) D-Z7 and D-Y types cannot be mounted. 25 to 63 (mm) Auto switch model D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W D-Y7BA A B C D D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W D-Y7BA D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W D-Y7BA D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W D-Y7BA D-A9 D-M9 D-M9W D-M9A D-A9 D-M9 D-M9W D-M9A D-M9 D-M9W D-M9A D-A9 D-M9 D-M9W D-M9A D-A9 Bore size (mm) 25 32 40 50 63 19 23 18 98 94 99 42 38 43 75 79 74 22.5 26.5

Miniature Guide Rod Cylinder Series MGJ

Auto switch internal circuit Weight Unit: (g) D-F8N D-F8N D-F8P D-F8B Auto switch part No.

Environment

LAT LEJS40 LEJS63 Applicable auto switches D-M9N(V)-900, D-M9P(V)-900, D-M9B(V)-900 D-M9NW(V)-900, D-M9PW(V)-900, D-M9BW(V)-900 LZ *4 Please consult with SMC for non-standard strokes as they are produced as special orders. LC3F2 * Specifications and dimensions for the 25A-series are the same as standard products.

CG5-S

47 75 R V Double clevis type (D)/CJ5DS CDH9 +0.030 0 Cdd9 0.030 0.060 NB GA Piping port 2-M5 x 0.8 Clevis pin ( ) GB MM CA CB D NA A CX + 0.2 + 0.1 U BA S + Stroke Z + Stroke ZZ + Stroke BB H R (mm) CD (Cd) A BA BB CA CB CX D GA GB H MM NA NB R S U Z ZZ Bore size (mm) 10 15 15 12 17 14 3.3 3.2 4 8 18 28 M4 x 0.7 12.5 22.5 5 46 8 82 87 16 15 18 18 20 20 5 6.5 5 8 23 28 M5 x 0.8 12.5 27.5 8

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

u q w e r t q w e r t i i o o !

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

6) 9.31 (236.s) u 1.56 (39.5)1.97 (50) 2.38 (60.5)2.& (?1) 3.2 {&.s) 3.65 (92) 4.U {102.5) 4.45 (fi3) 4.86 (123.s) 5.2A (134) 5.69 (144.5) 6.'to (155) (166.5) 6.93 (176)7.34 t186.5) 7.76 097) 8.17 \207.5, (218) 9.OO {228.5) (D y r c l | $*Or> Symbol 4 Port (Mahitold only 5 Port dI/Nlh J!'

Speed Controller for Low Speed Operation Series AS-M Standard Type (Metal Body)

w u w t e r !

ZQ

N L H L H S R U N L H L H S R U N L H L H S R U N L H L H k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS Misc. (72.4) Attached washer (63.6) (60.1) Attached washer SMC SMC SMC SMC 10.2 V V V V V 28.8 8.5 21 10 9 8.5 9 81 Vacuum port (V port) Note 4) 107 (M5 x 0.8) Dimensions Note 1) The above dimensions are for ZZQ1-BSB.

MB1

D D D B B B Specifications and dimensions other than the above are the same as the standard type.

100

ZL1 Series RoHS How to Order ZL 1 12A Without valve ZL 1 5 M Z D A M L 12A K1 With valve Max. suction flow rate: 100 L/min (ANR) q w t o u i e r y !0 !1 !

Vacuum gripper

TQ1230001-OM104-C Tool Center Point (TCP) for each suction cup Model ZXP7A11 (4) (5) (6) (7) (8) -X1 Unit[mm] Aplicable cup Tool Center Point(TCP) (4) Series (6) Form (7) Material (5) Diameter (8) Attachment X Y Z ZP 08 U 150.9 ZP 08 B 151.9 ZP 10 UT 150.9 ZP 13 UT 150.9 ZP 16 UT 150.9 ZP 10 U 152.9 ZP 13 U 152.9 ZP 16 U 153.4 ZP 20 U 154.9 ZP 25 U 154.9 ZP 32 U 155.4 ZP 10 C

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

side U side 1 3 4 5 Stations 2 VQZ212-5M-N7T 4 pcs.

Compact Vacuum Ejector Series ZQ

N L H L H S R U N L H L H S R U N L H L H S R U N L H L H k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS (72.4) Attached washer (63.6) (60.1) Attached washer SMC SMC SMC SMC 10.2 V V V V V 28.8 8.5 21 10 9 8.5 9 81 Vacuum port (V port) Note 4) 107 (M5 x 0.8) Note 1) The above dimensions are for ZZQ1-BSB.

240

3 e u !

High Purity Fluoropolymer

Printed in Japan. 1st printing June, 1999 D-SMC.L.A. P-100 (YG) 4th printing April, 2002 D-DN P-80 (DN)

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

Nil Without port (For manifold) (8A) 1 4 02 Electrical entry Light/Surge voltage suppressor CE-compliant CE-compliant G Grommet, 300 mm lead wire H Grommet, 600 mm lead wire Electrical entry D T C H G Only"D" Symbol Nil S Z C Conduit Note) Note) T Conduit terminal Note) D DIN terminal Symbol S: With surge voltage suppressor Note) Refer to the figure below.

XLAQ/XLDQ

Valve side exhaust Refer to page 478 for the maintenance parts. 470 XLAQ Series Aluminum One-touch Connection and Release High Vacuum Angle Valve Dimensions C D E E C G H I H V A C F U U M V E A V L Heater (Option) (Maintenance space) Auto switch (Option) B J XLA XL H XLQ XLQ G XM XY DXSA A XVD XGT CYV A (mm) Model A 120 133 178 190 B 38 48 66 79 C 1 1 2 2 D 12 11 11 E 30 40 55 75 F 17

Direct Solenoid

Fry] Dr EflStO S: D 6,41 ia3, (1221e4 i9 2.13 0021 5.16 (13r1 e4 (10) tfil 9,69 12161 2.43 tf4 3.t0 tE9 4.77 {rt2} (3t) 114 2.U t64 irnr.E in P!6inh.$3 NVS 4154 PABIA UsT c.nlr Ftu-ru.otro. !.r.or.r ar..r rtr-codrr. or .r.or ..d i.s (r.r.h.a {il.'!