Low Profile Guide Type

Standard Stroke Maximum manufacturable stroke (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit.

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

ZS-27-01 847 Series PSE300 Specifications Model PSE3 PSE533 PSE543 PSE563 PSE531 PSE541 PSE561 PSE532 PSE530 PSE560 PSE564 PSE550 Applicable pressure sensor Set (differential) pressure range Setting/Display resolution Pressure range Note 1) 0.2 to 2 kPa 0.01 kPa 50 to 500 kPa 1 kPa 0.1 to 1 MPa 0.001 MPa 10 to 100 kPa 0.1 kPa For low pressure 0 to 100 kPa 10 to 0 kPa 10 to 101 kPa 0.1 kPa

Process Pump

SUP = 0.2 MPa 0.2 0.2 0.1 0.1 0 0 5 0 10 15 20 25 10 0 20 30 40 50 Discharge rate (L/min) Discharge rate (L/min) PAF3413 Air Consumption (4 Hz) PAF5413 Air Consumption (3 Hz) 200 Air consumption (L/min [ANR]) Air consumption (L/min [ANR]) SUP = 0.5 MPa 300 SUP = 0.5 MPa 150 SUP = 0.4 MPa SUP = 0.4 MPa 200 SUP = 0.3 MPa SUP = 0.3 MPa 100 SUP = 0.2 MPa SUP = 0.2 MPa 100 50 0 5 0 0 10 0 10

Series LX Acceleration Time Guide

F A A Lr Lr = 200mm L X S 400 8 60 Table displacement (m) LXSH-150 Table displacement (m) Table displacement (m) 350 7 LXSH-150 LXSH-150 50 300 6 LXSH-125 LXSH-125 250 5 40 LXSH-125 LXSH-100 LXSH-100 200 4 30 LXSH-75 LXSH-100 LXSH-75 3 150 20 LXSH-50 LXSH-75 2 100 LXSH-50 LXSH-50 10 1 50 1 2 3 4 5 6 8 9 7 0 0 0 1 2 3 4 5 6 8 9 10 10 10 7 1 2 3 4 5 6 8 9 7 Weight (kg) Weight (kg) Weight (kg

VZS

79 With light/surge voltage suppressor Pg7 103 95.4 PE P EB EA n: Stations L Stations Formula 20n + 21 20n + 30 2 61 70 3 81 90 4 101 110 5 121 130 6 141 150 7 161 170 8 181 190 9 201 210 10 221 230 11 241 250 12 261 270 13 281 290 14 301 310 15 321 330 16 341 350 17 361 370 18 381 390 19 401 410 20 421 430 21 441 450 22 461 470 23 481 490 24 501 510 L1 L2 3-7-34 35 5 Port Pilot Operated

VDW

Types 10, 20 Types 10, 20 VVDW 0 2 C 1 01 2 VVDW 2 0 4A Series Series 1 2 10 20 1 2 10 20 Thread type VC Rc G NPT Nil F N Material VDW C S C37 SUS Type 30 VQ VVCW20-4A OUT port size Stations Symbol M5 01 Port size M5 1/8 (6A) For 2 stations For 3 stations 1 2 VX2 VX Type 10 is M5 only.

10

Symbol O.D. thread size Stroke 0805 1006 1410 8 mm 5 mm 2 pcs. 1 pc. 10 mm 6 mm 3 pcs. 1 pc. 14 mm 10 mm 1 pc.

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

20 25 50 100 150 200 300 500 600 1000 2000 3000 6000 12000 0.2 PFM 0.01 L/min 10 0.5 25 Air N2 Thermal type Argon (MEMS) CO2 0.1 L/min 1 50 2 100 PFMB 2 200 Thermal New New type Air N2 (MEMS) 1 L/min 5 500 Bypass flow type 10 1000 PF2A 0.1 L/min 1 10 0.5 L/min 5 50 1 L/min 10 100 2 L/min 20 200 Thermal Air N2 type (Thermistor) 5 L/min 50 500 5 L/min 150 3000 300 6000 10 L/min 12000 600 Features

VCL

(mm) 2 3 4 5 7 10 Class 4 v v v v v Symbol 2 3 4 5 7 10 VCW Refer to the below table for orifice and port size combinations.

Stainless Steel Cylinder Series CJ5-S/Series CG5-S

25 Tubing T, TU P. 26 Floating Joint/Stainless Steel Type JS P. 27 Features 2 Stainless Steel Cylinder Series CJ5-S 10, 16 How to Order Bore size Standard stroke (mm) 10 16 10 16 10mm 16mm 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Mounting B L F D Basic type Axial foot type Front flange type Double clevis type CJ5 L 16 S R 60 Without Auto Switch CDJ5 L

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v-r Stroke Variations Long strokes up to 400mm standardized. o Options Jrcompact guide cylinder Stroke (mm) 1 0 20 25 @Bore size @Port typ" 30 40 ' For bore sizes 12 & 16, only[,15x08 s availabe Beler 10 table al lefl lor delar s '100 (OCytinder stroke (mm) Fefer ro Stmke Variatons labe 125 150 175 rOAir cushion ffi Wif' air cLrshion aDolicabe lor [,] & L lype on y. 200 250 300 OLock position

Electric Slide Table / High Precision Type 《 AC servo motor 》

Product weight [kg] Model Stroke Additional weight Size Motor type 50 100 150 with lock 16 S2 1.96 2.35 0.20 25 S3 3.86 4.43 5.83 0.40 -5- LESYH*(D,R,L)*T6/T7 Motor type T6/T7 Model LESYH16*T6 LESYH25R/LT7 LESYH25DT7 Parallel In-line Stroke[mm] 50,100 50,100,150 50,100,150 Horizontal 8 12 12 Max. work load [kg] Vertical 6 12 10 20 10 20 Force [N](Set value: 12 to 24%) *1 65 to 131 127 to

MGC

46 95 70 75, 100 125, 150 200, 250 300 60 35 135 32 M8 140 75 9 9 108 92 150 134 13 15 94 32 50 105 80 MGQ 70 40 160 37 M8 165 85 12 9 125 110 176 160 16 18 107 38 60 125 95 45 194 42 M10 200 95 12 11 135 115 210 190 82.5 19 23 142 50 75 150 115 MGG Bore (mm) Z Y X W WH W V U T S R Q O P MGC 20 25 32 40 50 140 80 30 30 23 36 40 86 12 26 12 21 M6 X 1 M5 X 0.8 MGF 153 80 37 30 25 44 47 98

Floating Joint/Stainless Steel Type Series JS

125 14-150 18-150 1 Series JS Construction 10, 16 20 to 63 Parts list Parts list No.

Large Bore Compact Cylinder Series CQ2

Female threads Rod end threads JIS class 2 Thread tolerance +1.4 0mm (+0.06in) 0 Stroke length tolerance Basic type Mounting brackets Through hole/Double end tapped Mounting Symbol Standard Strokes Double acting: Single rod 1in = 25.4mm Standard strokes (mm) Bore size (mm) 10, 20, 30, 40, 50, 75, 100, 125, 150, 175, 200, 250, 300 180, 200 Manufacture of intermediate strokes Intermediate

ZPT/ZPX

N First mounting load 100, 150 15 N Second mounting load 13-11-89 8 Series ZPT 40 50 63 80 ZPT HBJ-B01-A18 (Male thread) ZPT HBJ-B01-A18 (Male thread) Rc 1/8 Hexagon width across flats 14 Rc 1/8 Hexagon width across flats 14 Hexagon width across flats 27 Hexagon width across flats 27 9 9 35 35 10 9 9 M18 x 1.5 M18 x 1.5 10 H H Width across flats 16 Width across flats 16 45 28 Width across

AC Servo Motor Driver (CC-Link Type)

5 16 8 4 Point table No.1 Initial value Recommended value Home position return acceleration time constant (msec) *5 0 600 300 150 600 300 150 1000 500 250 800 400 200 Different from the initial value. *5.

Rotary Cylinder Series MRQ

weight [kg] 2.5 Effective torque (Nm) MRQS40 15 150 2 10 100 1.5 40 4 5 40 50 32 1 MRQS32 2 2.5 3 20 25 30 0.5 0 1.5 15 0.1 0.2 0.3 0.4 0.5 0.6 0.7 Operating pressure (MPa) 1 0.4 0.5 0.6 0.7 10 6.

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

NBR (g) Model Mass Model Mass SP (g) ZPX40HBN-01-B 8 ZPX 80HBN-01-B10 150 275 Pad dia.

EtherNet/IP TM Compatible Fieldbus System

Item Decimal Common Format "Data-INT" "Data-SINT" Input 100 100 Output 150 150 Configuration 130 130 (5) Size: Perform setting as shown below.