Vacuum Equipment

17 16 19 24 24 40 50 63 80 100 125 27 36 45 56 71 91 29 39 46 57 69 92 32 42 49 60 78 101 33 42 49 60 78 102 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 13-1-19

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/30 (8.3 2000Hz) Impact/Vibration m/s2 Grommet, L and M type plug connector Electrical Entry Check Valve 24, 12, 6, 5, 3 Coil rated voltage VDC Exhaust Silencer E -10 to +10% Allowable voltage Valve System A B 0.5 (with light: 0.55) Power consumption (W) Oxygen Output P Heat Exchanger Air Inlet Compressor Filter assembly Valve System circuit To sieve Tank 2 To sieve Tank 2 To sieve Tank 1

39

Bore size (mm) Tightening torque (Nm) Description 50 2.6 to 3.5 Switch kit 63 2.6 to 3.5 50 130 to 150 Stopper bolt kit 63 160 to 200 50 1.5 to 2.0 Top cover kit (Rubber cover) 63 1.5 to 2.0 50 1.5 to 2.0 Top cover kit (Metal cover) 63 1.5 to 2.0 Note) Please make sure that the switch cassette is tightly secured to the body when it has been replaced with a new one. 24 Safety Instructions

Series LC7R Dedicated Regenerative Absorption Unit

.: Max. 3.1mm (AWG18 to 24) [1m or less] Description Pin no.

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

Dimensions Formulae L1 = 11n + 15.5 L2 = 11n + 55 n: Stations (max. 16 stations) L n 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 191.5 231 262.5 273 16 L1 L2 (L3 ) (L4 ) 26.5 66 87.5 98 37.5 77 100 110.5 48.5 88 112.5 123 59.5 99 125 135.5 70.5 110 137.5 148 81.5 121 150 160.5 92.5 132 162.5 173 103.5 143 162.5 173 114.5 154 175 185.5 125.5 165 187.5 198 136.5 176 200 210.5 147.5 187 212.5 223 158.5

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

, 200, 250, 300, 350, 400, 450, 500 12-CY3B20 20 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 (Both sides) 1300 25 12-CY3B25 Non-lube 32 12-CY3B32 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 12-CY3B40 40 Note 1) Stroke exceeding the standard stroke but below the maximum possible stroke is available for special order upon request.

Floating Joint/Stainless Steel Type Series JS

5 8 8.5 17 29 8.5 0.5 2500 JS40-14-150 M14 x 1.5 60 18.5 31 5 11 11.6 22 38.4 11.6 0.75 6000 JS63-18-150 M18 x 1.5 74.5 23 41 7 14 14.3 27 49.2 14.3 1 11000 3

VXA31/32

E 59 66 F 33 34 G 24 25 H 30 40 J 36 46 K 6 9 M 45.5 50.5 N 69 76 VVXA31 VVXA32 17-3-108

ZP3

Form w 1 Material e r Vacuum inlet Connection 2 thread 5 N S U F GN GS ZP3 Y 04 06 08 B B5 B5 24 Dimensions Per Vacuum Inlet: One-touch Fitting Model Vacuum inlet A B C Fitting part min. hole size Fitting part no. Vacuum inlet direction q Pad dia.

AFF

Port size N.C. auto-drain N.O. auto-drain Drain guide B 01 B 06 B 1 8 3 4 1B Accessory 02 03 10 14 B 1 4 B 3 8 04 B 1 2 1 4 1 B 1 2 20 2B Option IN-OUT reversal direction -T Element service indicator AFF75A to AFF220A AFF 75A 20 D Accessory (Option) Basic size (Applicable compressor rating) D Auto-drain G Pressure gauge F Companion flange L Anchor bolt 75A 75 kW 125A 110 to 125 kW 150A 150

AMH

M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G S 6.0 , 2 1 H 463.5 I 180 J 30 K 15 L 24 N 120 O 184 P 220 Q 110 R 18 460.5 AMH850 1 2 13 42 348 220 57.5 220 10 Please refer to Made to Order Specifications of Series AMH on pages 14-20-55 to 14-20-57. 14-20-35

Guide Table Series MGF ø40, ø63, ø100 1

AC DC Auto switch model Lead wire length (m) Load voltage Indicator light Pre-wire connector Wiring (Output) Special function Type Electrical entry Applicable load 0.5 (Nil) 3 (L) 5 (Z) Perpendicular In-line 3-wire (NPN equivalent) IC circuit Z76 5 V Reed switch Solid state switch Yes Yes Grommet 100 V 24 V 12 V Z73 Y59A Y7P Y59B Y7NW Y7PW Y7BW Relay, PLC 3-wire (NPN) 2-wire Y69A Y7PV

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Auto switch model Electrical entry direction Lead wire length (mm) Load voltage Type Electrical entry Indicator light Wiring (Output) Special function Applicable load 5 (Z) AC DC 0.5 (Nil) 3 (L) Perpendicular In-line Z76 5 V IC circuit 3-wire Yes Reed switch Z73 12 V 100 V Grommet Relay, PLC 24 V 2-wire Z80 5 V, 12 V 100 V or less No IC circuit Y59A Y69A 3-wire (NPN) IC circuit 5 V, 12

Precision Regulator

Supply pressure: 0.3 to 1.0 MPa Set pressure: 0.2 MPa Flow rate: 0 L/min (ANR) Supply pressure: 0.5 MPa IR1000-01 IR1000-01 IR1000-01 Back pressure: 0.5 MPa 0.5 0.204 0.2 Set pressure P2 (MPa) Set pressure (MPa) Set pressure (MPa) Set pressure (MPa) 0.4 0.202 0.15 Set point 0.3 0.200 0.1 0.2 0.198 0.05 0.1 0.196 0 40 20 80 60 100 140 120 0 50 100 200 250 150 0 0.2 0.1 0.4 0.3 0.6 0.5 0.8

PSxx-OMG0001CN

No.PS-OMG0001CN-H // PSE300 2 8 9 10 10 12 14 16 19 21 23 24 31 31 33 -1No.PS-OMG0001CN-H *1) (ISO/IEC) (JIS) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218: Manipulating

HEC_W-E

Tightening torque: HEC006--22 to 24 Nm HEC012--28 to 30 Nm Drain -12 to 14 Nm 3) A plug is mounted on DRAIN for recirculating fluid. When the piping for drain is connected, remove this plug beforehand. Be sure to arrange the piping on the drain to exhaust the constant temperature recirculating fluid in the unit at the maintenance.

MHx-OMM0057

/ mm mm mm c.p.m. mm(L1-L2) (L1) (L2) g MHL2-10D 60 20 56 76 280 MHL2-10D1 40 78 118 345 10 40 MHL2-10D2 60 96 156 425 MHL2-16D 60 30 68 98 585 MHL2-16D1 60 110 170 795 16 40 MHL2-16D2 80 130 210 935 MHL2-20D 60 40 82 122 1,025 MHL2-20D1 80 142 222 1,495 20 40 MHL2-20D2 100 162 262 1,690 MHL2-25D 60 50 100 150 1,690 MHL2-25D1 100 182 282 2,560 25 40 MHL2-25D2 120 200 320 2,775 MHL2-32D

rep-modular-e

AR10 Spanner Nominal: 24 AR10 0.8 0.1 Nm Tightening torque 2) Settle the bracket (panel) with set nut. Rotate the set nut clockwise with a hook spanner (spanner for AR10) to settle the parts to the bracket (panel). For the tightening torque, refer to the Check item on the right.

Mist Separator Series AM Model Series AM can separate and Model AM850 AM250 AM350 AM450 AM550 AM650 AM150 remove oil mist in compressed air Rated flow 750 1500 2200 3500 6000 12000 300 (1) (l/min (ANR)) which is difficult to remove by Port size ordin

removal rate blowing compressor is 30mg/m3(ANR) (ANR) Accessories (Options) Applicable models AM150 AM250 AM350 AM450 AM550 AM650 AM850 Bracket assembly With cap bolt, BM51 BM52 BM53 BM54 BM55 BM56 BM57 spring washer Symbol AM Order Made P.4.6-6 How to Order AM 250 03 J B Options Body size Accessories (Options) Drain guide 1/4B female thread INOUT reversal Element service indicator None 150

AME

9 11 13 100 150 180 65 85 120 130 180 220 60 76 110 102 136 184 4.5 4.5 6 239 291 403 22 32 42 128 167 235 122 160 220 3 122 160 220 10 10 10 AME550 AME650 AME850 AME450SAME, #4 AME550SAME, #5 AME650SAME, #6 AME850SAME, #7 4.6-26